CN103674974A - Inspection apparatus - Google Patents
Inspection apparatus Download PDFInfo
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- CN103674974A CN103674974A CN201310203802.8A CN201310203802A CN103674974A CN 103674974 A CN103674974 A CN 103674974A CN 201310203802 A CN201310203802 A CN 201310203802A CN 103674974 A CN103674974 A CN 103674974A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
The invention relates to an inspection apparatus, wherein the defect detection is realized accurately even when the thickness of an anti-reflection film is uneven. The appearance inspection apparatus comprises a lighting part used for irradiating lights of different colors in regions of different wavelengths, a shooting part used for irradiating solar cell units by means of the above lights, and a control part used for acquiring images shot by the solar cell units, and checking the solar cell units according to the reflection strength or the thickness of the anti-reflection film.
Description
Technical field
The present invention relates to a kind of testing fixture, particularly relate to the testing fixture of a kind of solar battery cell (cell).
Background technology
In the past, the testing fixture of solar battery cell behaviour institute known (for example,, with reference to a patent documentation 1).
In above-mentioned patent documentation 1, disclose the appearance inspection device that has a kind of solar battery cell, comprise: lighting device, irradiate region of ultra-red wavelength illumination light and to the charge-coupled image sensor of near infrared region sensitivity (charge coupled device, CCD) camera (camera) (image pickup part).The infrared transmission of irradiating from lighting device is crossed solar battery cell, but while there is the situation of defect (crack (crack)) in the inside of solar battery cell, at defective part periphery, infrared light spreads because producing refraction or diffraction.Thus, the defect part of solar battery cell inside is as utilizing poor (light and shade) of the signal intensity in the photographed images of charge-coupled device camera and being detected.
In addition, the reflection of light that is incident to substrate (unit) for inhibition is sought high efficiency, and is formed with antireflection film on the surface of solar battery cell.The defect of this antireflection film (pin hole (pin hole) or adhere to foreign matter) also can have influence on the characteristic of solar battery cell, therefore not only detect above-mentioned inherent vice in the past, also by visual examination, detected the defect (surface inspection) of antireflection film.When carrying out the situation of visual examination of antireflection film, irradiate the illumination light of the wavelength of visible region, and take the reflected light at solar battery cell surface reflection.Solar battery cell is to vertical incidence reflection of light intensity, at film interference in theory, and the specific wavelength λ=4nd determining with respect to the refractive index n by antireflection film and thickness d and be 0.For system of crystallization solar cell, under the membrance casting condition of refractive index n=approximately 2.0～approximately 2.1, thickness d=about 80nm left and right, be formed with antireflection film, the reflection strength under the wavelength of the red area of 4nd=640nm～672nm reaches minimum.
When being formed with the system of crystallization solar battery cell of this antireflection film and carrying out the situation of visual examination (surface inspection), if the illumination light of using reflection strength to reach minimum red area is carried out the shooting of cell surface, illumination light reflects hardly, only, at defect (pin hole or adhere to foreign matter) part indirect illumination light, therefore defective part can be detected the bright spot in photographed images.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese patent laid-open 2007-78404 communique
Because the defect that above-mentioned existing testing fixture exists, the inventor is based on being engaged in this type of product design manufacture abundant practical experience and professional knowledge for many years, and the utilization of cooperation scientific principle, positive research and innovation in addition, to founding a kind of novel testing fixture, can improve general existing testing fixture, make it have more practicality.Through constantly research, design, and after repeatedly studying sample and improving, finally create the present invention who has practical value.
Summary of the invention
Yet, because the various factors in the manufacturing step of solar battery cell causes the thickness of antireflection film, produce inequality.The thickness of antireflection film (d) is when comparing vicissitudinous situation with the thickness in design, reflection strength reaches minimum specific wavelength (λ=4nd) and also changes, therefore for the illumination light wavelength that checks and reflection strength, reach minimum specific wavelength and produce deviation, thus the reflection strength increase of illumination light on solar battery cell.Therefore, if the solar battery cell to the thickness inequality of antireflection film carries out visual examination, not only photograph the reflected light of defective part, also photograph in the lump the reflected light from the position beyond defective part, its result,, there is thus the problem that is difficult to detect according to photographed images the defective part of antireflection film in the bright spot of defective part almost illegible in photographed images.
The present invention is for having addressed the above problem, one of object of the present invention is to provide a kind of testing fixture, even if also can carry out accurately defects detection when technical matters to be solved is its situation in the thickness inequality of antireflection film, thereby more be suitable for practicality.
For reaching above-mentioned purpose, the object of the invention to solve the technical problems realizes by the following technical solutions.A kind of testing fixture proposing according to the present invention is the testing fixture that is formed with the solar battery cell of antireflection film, comprising: Lighting Division, and being configured to can be to have the multiple illumination look irradiating illumination light of mutually different wavelength region may; Image pickup part, is used illumination light to take solar battery cell; And control part, for multiple illumination look each and obtain the photographed images of solar battery cell, and the thickness according to solar battery cell to the reflection strength of the illumination light of various illumination looks or antireflection film, and from the photographed images of various illumination looks, select the image for checking, and based on selected photographed images, solar battery cell is checked.
A kind of testing fixture of the present invention is provided with as mentioned above: Lighting Division, and being configured to can be to have the multiple illumination look irradiating illumination light of mutually different wavelength region may, and control part, for multiple illumination look each and obtain the photographed images of solar battery cell, and the thickness according to solar battery cell to the reflection strength of the illumination light of various illumination looks or antireflection film, and selection is used for the image checking from the photographed images of various illumination looks, and based on selected photographed images, solar battery cell is checked, even if thus when the situation of the thickness inequality of antireflection film, also can from the photographed images of using the illumination light of the multiple color that wavelength region may is different to take, select image, this image is the image that utilizes the illumination light shooting of the wavelength region may (illumination look) corresponding with the reflection strength of solar battery cell or the thickness of antireflection film.Thus, can choice for use can detect accurately the photographed images that the illumination light of the illumination look (wavelength) of defective part takes and carry out visual examination, even if therefore when the situation of the thickness inequality of antireflection film, also can carry out accurately defects detection.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
In above-mentioned a kind of testing fixture, preferably control part is configured to: from a plurality of photographed images of various illumination looks, the signal intensity of the photographed images of the various illumination looks based on reflection reflection strength is selected photographed images, or the thickness based on antireflection film is selected photographed images.If formed in this way, the inequality because of thickness causes that solar battery cell changes to the reflection strength of each wavelength, result, the signal intensity (light and shade) of the photographed images that the illumination light by each color is taken produces difference, and signal intensity that therefore can be based on photographed images and easily selecting can detect the photographed images of the illumination look of defective part accurately.In addition, the reflection strength of solar battery cell reaches minimum wavelength as mentioned above, by the thickness of antireflection film with the refractive index of regulation, determined, thickness that therefore can be based on antireflection film and easily selecting can detect the photographed images of the illumination look of defective part accurately.
During this situation, preferred multiple illumination look at least comprises redness and blueness.When being formed with the situation of antireflection film with the membrance casting condition (n=approximately 2.0) of about 80nm left and right as mentioned above, as the lower limit (permissible range) of the thickness scope that should consider, can be made as 60nm left and right.During this situation, thickness during for thicker 80nm the reflection strength of red light reach minimum, on the other hand, thickness is thin, while being 60nm left and right and uneven situation, the reflection strength of the blue light of λ=480nm～504nm diminishes.Therefore, according to the present invention, by at least comprising redness and blueness in illumination look, can be according to the scope of in fact issuable thickness inequality, and the photographed images of blue light during the thin situation of the photographed images of red light during at least from the thick situation of thickness and thickness, select to be suitable for the photographed images of the detection of defective part.
At above-mentioned multiple illumination look, at least comprise in the formation of redness and blueness, preferably control part is configured to: from a plurality of photographed images of various illumination looks, select the photographed images that signal intensity is lower, or the photographed images of the selection illumination look corresponding with the thickness of antireflection film.If formed in this way, the photographed images that signal intensity is lower is the photographed images that approaches the illumination look (wavelength) of the specific wavelength that reflection strength diminishes, and therefore by selecting this image, can easily select to be suitable for the photographed images of the detection of defective part.In addition,, if it is associated that the thickness of antireflection film and the illumination look of photographed images are set up, can pass through to select the image of the illumination look corresponding with thickness, and easily selection is suitable for the photographed images of the detection of defective part.
In above-mentioned a kind of testing fixture, preferably control part is configured to: use the decision threshold corresponding with the illumination look of selected photographed images, the antireflection film being formed on solar battery cell is carried out to defect inspection.If formed in this way, the power of signal intensity of the inequality of the signal intensity in photographed images or the bright spot that manifests as defective part, the grade of average signal strength (level) etc. according to illumination look, change, thus by using the decision threshold with illumination look corresponding, no matter when selecting the situation of photographed images of which kind of illumination look, all can carry out accurately defects detection.
In above-mentioned a kind of testing fixture, preferably control part is configured to: a plurality of positions of solar battery cell are obtained respectively to the station diagram picture of various illumination looks, and select the station diagram picture for checking and look like to check based on selected station diagram for each position of solar battery cell.
If formed in this way, even if during the situation of the thickness inequality of the antireflection film on each position of solar battery cell, also can for each position select to be suitable for defects detection illumination look photographed images and carry out defects detection, therefore can precision carry out higher defects detection.If especially the size of solar battery cell becomes large, the thickness of the antireflection film on each position is easy to inequality, thereby the present invention is suitable for the inspection of large-scale solar battery cell.
At above-mentioned control part, select in the formation of photographed images of photographed images that signal intensity is lower or the illumination look corresponding with the thickness of antireflection film, preferably control part is configured to: the mean value of the signal intensity of a plurality of photographed images or intermediate value are compared, and select the photographed images of mean value or the minimum illumination look of intermediate value.If formed in this way, need not calculate the thickness of antireflection film, only the mean value (or intermediate value) of the signal intensity of a plurality of photographed images by more different illumination looks is just can easily select to be suitable for the photographed images of defects detection.
At above-mentioned control part, select in the formation of photographed images of photographed images that signal intensity is lower or the illumination look corresponding with the thickness of antireflection film, preferably control part is configured to: by the reflection strength of illumination light wavelength and solar battery cell and the matching of theoretical curve (fitting), and obtain the thickness of the antireflection film with the signal intensity of the photographed images of various illumination looks corresponding, and the photographed images of the selection illumination look corresponding with the thickness scope of the regulation of the thickness that comprises obtained antireflection film.If formed in this way, can obtain accurately the thickness of antireflection film with the matching of the curve (measured value) of the signal intensity obtaining from each photographed images by the theoretical curve of calculating for each thickness.And, by presetting thickness scope and the illumination look that is suitable for the defects detection within the scope of this thickness, and can select to be suitable for according to obtained thickness the photographed images of defects detection.
At above-mentioned control part, select in the formation of photographed images of photographed images that signal intensity is lower or the illumination look corresponding with the thickness of antireflection film, preferably control part is configured to: use the reflection strength of various illumination looks and the thickness of antireflection film are set up to associated reference data (data), obtain the thickness of the antireflection film corresponding with the signal intensity of photographed images, and select the photographed images of the illumination look corresponding with the thickness scope of the regulation of the thickness that comprises obtained antireflection film.If formed in this way, by being pre-created, the reflection strength of various illumination looks is set up to associated reference data with the thickness of antireflection film, can be from easily obtain the thickness of antireflection film according to the measured value of the signal intensity of each photographed images acquisition.In addition,, by presetting thickness scope and the illumination look that is suitable for the defects detection within the scope of this thickness, can easily select to be suitable for from obtained thickness the photographed images of defects detection.
In above-mentioned a kind of testing fixture, preferred multiple illumination look comprises redness, blueness and green.As mentioned above, for the antireflection film of left and right, refractive index n=2.0, when thickness is 80nm, the reflection strength of red light reaches minimum, when thickness is 60nm left and right, the reflection strength of blue light diminishes, and when thickness is 70nm left and right, the reflection strength of green light diminishes.Therefore, according to the present invention, by illumination, comprise redness, blueness and green in look, can select to be suitable for according to the scope of in fact issuable thickness inequality the photographed images of the detection of defective part.In addition, can be by red, the blue and green trichromatic signal intensity thickness of specific antireflection film recently, therefore can easily select to be suitable for the photographed images of the detection of defective part.
In above-mentioned a kind of testing fixture, preferably solar battery cell comprises poly semiconductor, and antireflection film is silicon nitride (silicon nitride) film.In this polymorphic solar battery cell, reaching in the photographed images of the different illumination look of minimum wavelength (illumination look) and showing clearly crystal grain boundary from reflection strength, defective part is submerged in crystal boundary picture and cannot detects.In addition, this polymorphic solar battery cell is used silicon nitride film as antireflection film mostly.Testing fixture of the present invention can preferably be used to form the visual examination of the polymorphic solar battery cell of silicon nitride film.
The present invention compared with prior art has obvious advantage and beneficial effect.By technique scheme, the present invention at least has following advantages: according to the present invention, as mentioned above, even if also can carry out accurately defects detection when the situation of the thickness inequality of antireflection film.
Accompanying drawing explanation
Fig. 1 means the schematic diagram that the integral body of the appearance inspection device of the 1st embodiment of the present invention and the 2nd embodiment forms.
Fig. 2 schematically shows the 1st embodiment of the present invention and the image pickup part of appearance inspection device of the 2nd embodiment and the stereographic map of the formation of Lighting Division.
Fig. 3 (a), Fig. 3 (b), Fig. 3 (c) mean the figure of example of the photographed images of image pickup part.
Fig. 4 means to illustrate the figure of reflectivity (reflection strength)-wavelength curve of the 2nd system of selection of photographed images.
Fig. 5 means to illustrate the figure of reflectivity (reflection strength)-thickness curve of the 3rd system of selection of photographed images.
Fig. 6 (a), Fig. 6 (b) are the figure that illustrates that the defect inspection of the appearance inspection device of the 1st embodiment of the present invention and the 2nd embodiment is processed.
Fig. 7 is the process flow diagram that the control of the control part when inspection of appearance inspection device of the 1st embodiment of the present invention is described is processed.
Fig. 8 means the figure for the example of the station diagram picture of the check processing of the appearance inspection device of the 2nd embodiment of the present invention.
Fig. 9 is the process flow diagram that the control of the control part when inspection of appearance inspection device of the 2nd embodiment of the present invention is described is processed.
[main element symbol description]
1: solar battery cell
2: semiconductor substrate (poly semiconductor)
3: antireflection film
10: Lighting Division
11: light source
11a: red light source
11b: green light source
11c: blue-light source
12: maintaining part
13: peristome
20: image pickup part
21: lens
30,230: control part
31: storage part
40: framework
60,60a, 60b, 60c: photographed images
70: defective part
80: station diagram picture
100,200: appearance inspection device (testing fixture)
110: transporter
D: thickness
Th: decision threshold
Cf: reflectivity-wavelength curve
Ac: curve of approximation
Ia: the mean value of signal intensity (or intermediate value)
Xa: the position of the peak value of the signal intensity larger than decision threshold
X1, X2, X3, X4, Y1, Y2, Y3, Y4: position
S1～S11, S21～S34: step
Embodiment
For further setting forth the present invention, reach technological means and the effect that predetermined goal of the invention is taked, below in conjunction with accompanying drawing and preferred embodiment, its embodiment of testing fixture, structure, feature and effect thereof to proposing according to the present invention, be described in detail as follows.
(the 1st embodiment)
First, with reference to Fig. 1, the integral body of the appearance inspection device 100 of the 1st embodiment of the present invention is formed and described.In the 1st embodiment, the example of the appearance inspection device 100 that the defect (surface imperfection of solar battery cell) that applies the present invention to being formed on the lip-deep antireflection film of solar battery cell checks is described.
The appearance inspection device 100 of the 1st embodiment is in the production stage of solar battery cell 1, to be arranged on production line and the testing fixture that (in line) checks on line.Solar battery cell 1 comprises: semiconductor substrate 2 (hereinafter referred to as substrate 2); And antireflection film 3, be formed on the surface (sensitive surface) of substrate 2.In addition, in Fig. 1, for the purpose of facilitating, the thickness amplification of solar battery cell 1 is schematically shown to each layer (substrate 2 and antireflection film 3).Antireflection film 3 is not for absorbing in fact dielectric (insulator) film of the light of visible region, use the material that has required refractive index and can form with required thickness.In the 1st embodiment, substrate 2 is for example polysilicon semiconductor substrate, and antireflection film 3 is SiN film (refractive index n=approximately 2.0～2.1).In addition, on the surface of solar battery cell 1, be formed with the surface electrode (not shown) of predetermined pattern (pattern).The defect inspection that utilizes 100 pairs of antireflection films of appearance inspection device to carry out, also can the arbitrary step before and after the formation step of surface electrode implement.
As shown in Figure 2, Lighting Division 10 arranges to be positioned at the mode of the top that is configured in the locational solar battery cell 1 of inspection.Lighting Division 10 comprises: a plurality of light sources 11 (11a～11c); And the maintaining part 12 of arcuation (dome), in inwall bottom, be circle-shaped (ring-type) and keep a plurality of light sources 11.
Each light source 11 for example comprises light emitting diode (light emitting diode, LED), and irradiation direction is (the inwall direction of maintaining part 12) towards top.The light emitting diode of 3 kinds of illumination looks that these a plurality of light sources 11 comprise redness (red, R) light source 11a, green (green, G) light source 11b and blueness (blue, B) light source 11c, is arranged side by side in the mode along the circumferential direction repeating in this order.Each look that throws light on is respectively for example that centre wavelength is about 627nm (redness), about 530nm (green) and about 470nm (blueness).As shown in Figure 1, each light source 11 is controlled luminous by control part 30 according to various illumination looks.Thus, Lighting Division 10 is configured to the illumination light that can irradiate the multiple illumination look (R, G and B) with mutually different wavelength region may.
As shown in Figure 2, the inwall in arcuation maintaining part 12 is provided with diffusion reflector (not shown).Light from the light source 11 irradiating towards inwall carries out scattered reflection at the inwall of maintaining part 12, and as the illumination light of homogeneous, exposes to the whole surface of the solar battery cell 1 that is configured in lower position.In addition, part on the top of maintaining part 12, is formed with for the peristome 13 to image pickup part 20 leaded lights.
As shown in Figures 1 and 2, image pickup part 20 is configured in the top position of Lighting Division 10, receives and takes solar battery cell 1 by the reflected light of the peristome 13 of maintaining part 12 and the solar battery cell 1 of lens (lens) 21.Image pickup part 20 for example consists of the charge-coupled device camera of monochromatic (monochrome) 5,000,000 pixels (approximately 2000 * 2500 pixel).In addition, Yi Bian the integral body of solar battery cell 1 is for example with being that the square shape of about 156mm and the lens 21 of focal length=about 25mm are taken.
The integral body of the appearance inspection device 100 that 30 pairs of control parts comprise Lighting Division 10 and image pickup part 20 is controlled processing.In control part 30, be provided with storage part 31, the photographed images 60 (with reference to Fig. 3 (a), Fig. 3 (b), Fig. 3 (c)) of this storage part 31 storage image pickup parts 20 or for the various data (decision threshold Th described later or decision condition etc.) of the inspection of solar battery cell 1.In addition, control part 30 is configured to and can communicates with the transporter (conveyor) 110 being assembled in the production line of solar battery cell 1, the solar battery cell 1 based on from transporter 110 be positioned in regulation the locational situation of inspection communication and implement check processing.In the 1st embodiment, control part 30 all obtains the photographed images 60 (with reference to Fig. 3 (a), Fig. 3 (b), Fig. 3 (c)) of solar battery cell 1 for each of 3 kinds (R, G, B) illumination look, and according to the thickness d of the reflection strength of the illumination light of 1 pair of each color of solar battery cell or antireflection film 3, and from the photographed images 60 of various illumination looks, select the image for checking.Then, control part 30 is configured to based on selected photographed images 60 solar battery cell 1 is carried out to surface imperfection inspection.The surface imperfection inspection of solar battery cell 1, be particularly the inspection of defective part 70 of the antireflection film 3 of the cell surface shown in Fig. 1, the defective part 70 of antireflection film 3 is such as for being formed on the pin hole on antireflection film 3 or being attached to foreign matter on antireflection film 3 etc.
Secondly, with reference to Fig. 3 (a), Fig. 3 (b), Fig. 3 (c)～Fig. 6 (a), Fig. 6 (b), the details of the check processing of solar battery cell 1 are described.
Be formed with in the solar battery cell 1 of antireflection film 3, theoretical according to film interference, the reflection of light intensity of the specific wavelength λ=4nd corresponding with the refractive index n of antireflection film 3 and thickness d significantly reduces (reflection strength becomes 0 in theory).In the 1st embodiment, the thickness d (in design) of antireflection film 3 is set as about 80nm.During this situation, for being formed with the solar battery cell 1 of antireflection film 3 (n=2.0～2.1) of the about 80nm of d=, the reflection strength of the red light of the wavelength domain of specific wavelength λ (=4nd)=640nm～672nm reduces, its result, appears as in appearance with blue tone.
If use the illumination light of red (about 627nm) to take this solar battery cell 1, can obtain the photographed images 60 (60a) shown in Fig. 3 (a).That is,, because the reflection strength of red light is minimum, so the signal intensity of the roughly integral body of solar battery cell 1 is low, its image becomes dark image.Now, when there is pin hole or adhering to the situation of defect of foreign matter etc. on antireflection film 3, reflection strength in defective part 70 (illustrating with white point in Fig. 3 (a), Fig. 3 (b), Fig. 3 (c)) does not reduce, and defective part 70 is to manifest as the high region of signal intensity (bright spot) in photographed images 60a thus.When using the photographed images 60a shown in Fig. 3 (a) to carry out the situation of defect inspection, the difference of the signal intensity of the part beyond the bright spot of defective part 70 and defective part 70 is very large, therefore can carry out accurately defect inspection.
Yet if produce inequality because the various factors on the production stage of solar battery cell 1 causes the thickness d of the antireflection film 3 of unit, the specific wavelength λ that reflection strength reduces also changes corresponding to thickness d.For example, when the situation of thickness d=60nm, the reflection strength of the blue light of the wavelength domain of specific wavelength λ=480nm～504nm reduces.During this situation, if using the illumination light of identical redness (about 627nm) takes, therefore the reflection strength of red light does not reduce, and as Fig. 3 (c) as shown in, acquisition wherein shows the bright photographed images 60 (60c) as the crystal grain boundary of the substrate 2 of the substrate of antireflection film 3 clearly.In this photographed images 60c, the bright spot of defective part 70 is almost illegible in crystal boundary picture, and the poor performance of signal intensity is indefinite, thereby is difficult to defect recognition portion 70.In addition, when the green wavelength domain extremely approaching at the wavelength with red becomes the situation of specific wavelength λ (4nd=530nm left and right), use the photographed images of red light to become the photographed images 60 (60b) of signal intensity of the intermediate degree of the photographed images 60a shown in Fig. 3 (b) and photographed images 60c.As above-mentioned, because causing specific wavelength λ, the inequality of thickness d changes, therefore, for the photographed images 60 that is single red light, cannot carry out accurately defect inspection.
Thus, in the 1st embodiment, control part 30 all obtains the photographed images 60 of solar battery cell 1 for each of multiple (R, G, B) illumination look, and according to the thickness d of the reflection strength of the illumination light of 1 pair of each color of solar battery cell or antireflection film 3, and from the photographed images 60 of various illumination looks, select the image for checking.The system of selection of photographed images 60 adopts suitable system of selection from the 1st following system of selection～3rd system of selection.
The 1st system of selection is following method, and the signal intensity of the photographed images 60 of the various illumination looks based on reflection reflection strength is selected photographed images 60.Control part 30, from 3 (R, G, B) photographed images 60 of various illumination looks, is selected the lower photographed images 60 of signal intensity.More specifically, mean value or the intermediate value of the signal intensity of 30 pairs of 3 photographed images 60 of control part compare, and select the photographed images 60 of mean value or the minimum illumination look of intermediate value.Thus, as mentioned above in the example of the situation of specific wavelength λ=640nm～672nm (thickness d=80nm), the photographed images of red light becomes the photographed images 60a of Fig. 3 (a), the photographed images of green light becomes the photographed images 60b of Fig. 3 (b), and the photographed images of blue light becomes as the photographed images 60c as Fig. 3 (c).The minimum image of the mean value of signal intensity (intermediate value) becomes the photographed images 60 of red light, and therefore selection is suitable for the photographed images 60 (60a) of the red light of defect inspection.In addition, the situation of specific wavelength λ=480nm～504nm (thickness d=60nm) if, the photographed images of blue light is to take as the photographed images 60a of Fig. 3 (a), therefore selects the image of blue light as the minimum image of mean value (intermediate value) of signal intensity.
The 2nd system of selection and the 3rd system of selection are following method, and the thickness d based on antireflection film 3 selects photographed images 60.As mentioned above, if make refractive index n, be fixing, make specific wavelength λ that the reflection strength of solar battery cell 1 reduces depend on the thickness d of antireflection film 3.Therefore,, if can obtain thickness d, can determine specific wavelength λ.And, if choice for use approaches the photographed images 60 of illumination light of the wavelength (illumination look) of specific wavelength λ most from 3 photographed images 60, can select the photographed images 60a that is suitable for defect inspection.
In the 2nd system of selection, control part 30 is by illumination light wavelength and the reflection strength of solar battery cell 1 and the matching of theoretical curve, and the thickness d of acquisition antireflection film 3.Reflection strength is the formula of the Fresnel (Fresnel) based on considering interference condition, and by reflectivity=f (λ, θ, n, k, d, n
si, k
si) and so on the function of various parameters show.Herein, λ, θ, n, k, d, n
siand k
sibe respectively illumination light wavelength, incident angle, the refractive index of antireflection film, refractive index and the extinction coefficient of the extinction coefficient of antireflection film (extinction coefficient), thickness, silicon substrate.According to the physical property of antireflection film 3 and substrate 2, N, k, n
si, k
sibe respectively known, as long as set thickness d and incidence angle θ, can obtain and take the reflectivity (reflection strength) that wavelength is parameter.If carry out this for various thickness d, set, can obtain reflectivity (the reflection strength)-wavelength curve Cf (d=d1, d2, d3...) under each thickness d shown in Fig. 4.
In the 3rd system of selection, control part 30 is used sets up with the thickness d of antireflection film 3 the thickness d that associated reference data (typical curve (standard curve)) obtains antireflection film 3 by the reflection strength of various illumination looks.In the theory identical with the 2nd system of selection calculated, by to make wavelength X be fixing and make thickness d take parameter, can calculate reflectivity (the reflection strength)-thickness curve C s (R, G, B) under the wavelength X (627nm (redness), 530nm (green) and 470nm (blueness)) of the various illumination looks shown in Fig. 5.If by the applicable value of making the corresponding reflectivity of each reflectivity-thickness curve C s of the signal intensity of the photographed images of 3 kinds of colors 60, can obtain thickness d.Or, in Fig. 5 in the scope of about 60nm～about 100nm blue reflectivity-thickness curve C s (B) shape that is in line, therefore also can obtain corresponding thickness d according to the signal intensity of the photographed images 60 of blue light.After obtaining thickness d, with above-mentioned the 2nd system of selection similarly, the thickness scope of control part 30 based on being pre-set in storage part 31 selected photographed images 60 with the corresponding relation of illumination look.
By using the either method in above the 1st system of selection～3rd system of selection, the image that control part 30 is selected for checking.Thus, even if when the situation of thickness d inequality, by selecting the photographed images 60 corresponding with the thickness d of antireflection film 3 on this solar battery cell 1, can be as used as Fig. 3 (a) the photographed images 60a large with the difference in signal strength of the bright spot of defective part 70 to implement inspection.
Secondly, with reference to Fig. 6 (a), Fig. 6 (b) to using an example of the defect inspection of selected photographed images 60 (60a) to describe.
In photographed images 60a shown in Fig. 6 (a), establishing is laterally X-axis, and to establish be longitudinally Y-axis, the signal intensity profile of the X-direction on Y coordinate Ya is shown in to the solid line of Fig. 6 (b).In addition, in Fig. 6 (a), figure is shown with the sectional view of the Ya coordinate of solar battery cell 1 in the lump, and illustrates the pin hole of antireflection film 3 as the example of defective part 70.As shown in Fig. 6 (b), when there is the situation of defective part 70, on its X coordinate Xa, be formed with the large peak value (peak) of signal intensity.On the other hand, in the region beyond defective part 70, although signal intensity has slight variations, become on the whole roughly fixing low signal intensity.Therefore, the decision threshold Th of the slight variations amount of signal intensity is considered in setting, control part 30 is judged to be defective part 70 by position (Xa), mean value (or intermediate value) Ia of the signal intensity that this position (Xa) is whole with respect to photographed images 60 (60a) and have the peak value of the signal intensity larger than decision threshold Th.
By spreading all over Y coordinate integral body, carry out the detection of this defective part 70, and the integral body of solar battery cell 1 is carried out to surface imperfection inspection.In defect inspection, not only obtain the number of the defective part 70 in photographed images 60 (60a), also according to the set of the large pixel region of signal intensity ratio decision threshold Th, obtain size (area) of each defective part 70 etc.
In addition, in the 1st embodiment, decision threshold Th sets separately according to the illumination look of selected photographed images 60.That is, the difference according to illumination look, also exists signal intensity to be easy to the situation (with reference to the dotted line of Fig. 6 (b)) uprising and deviation ratio is larger.Therefore, consider signal intensity or the inclined to one side extent of various illumination looks, set the suitable decision threshold Th corresponding with the look that throws light on.In addition, also can change for various illumination looks the algorithm (algorithm) self that defect inspection is processed.
Secondly, with reference to Fig. 1, Fig. 6 (a), Fig. 6 (b) and Fig. 7, the control of the control part 30 during to the inspection of the appearance inspection device 100 of the 1st embodiment is processed and is described.
First, in step (step) S1, by transporter 110 (with reference to Fig. 1), from the step upstream of production line, move into as the solar battery cell 1 that checks object.When receiving solar battery cell 1 from transporter 110 and be configured in the communication of the locational situation of inspection of regulation, control part 30 starts check processings action.
In step S2, obtain the photographed images of the illumination light of using red (R).That is, control part 30 makes redness (R) the light source 11a in Lighting Division 10 open (on), and takes by 20 pairs of solar battery cells 1 of image pickup part.After carrying out shooting, redness (R) light source 11a is closed to (off).
Similarly, in step S3, obtain the photographed images of the illumination light of using green (G).Control part 30 is sequentially carried out closing of opening, taking of green (G) light source 11b and green (G) light source 11b.Then,, in step S4, obtain the photographed images of the illumination light of using blue (B).Control part 30 is sequentially carried out closing of opening, taking of blue (B) light source 11c and blue (B) light source 11c.By this step S2～step S4, obtain 3 photographed images 60 of the illumination light of using respectively 3 kinds of colors.In addition, the shooting of the photographed images 60 of each color order (order of step S2～S4) is any.
In step S5, the either method that control part 30 is used in above-mentioned the 1st system of selection～3rd system of selection is selected the photographed images 60 (60a) for checking from the photographed images 60 of red (R), green (G) and blue (B).
In step S6, the decision threshold Th that control part 30 is read from storage part 31 and selection is with selected illumination look corresponding (being decision threshold Th and inspection algorithm when checking the situation that algorithm also changes according to illumination look).
Then, in step S7, control part 30 spreads all over whole implementation Fig. 6 (a), the defect inspection shown in Fig. 6 (b) of photographed images 60 (60a) to be processed.Control part 30 obtains the number of detected defective part 70, the size (area) of each defective part 70 etc. thus.
Secondly, in step S8, judge whether check result meets to differentiate the decision condition of the regulation of certified products or unacceptable product.
In judgement, also can use one or more decision conditions.As decision condition, be for example set with as inferior, i.e. " whether the number that judges defective part 70 is more than the threshold value (N1) of setting; be judged to be when above defective for N1 ", " whether the total area that judges defective part 70 is more than the whole N2% of solar battery cell 1; for N2%, be judged to be when above defective ", " for each defective part 70, for example, at area P1 (1mm
2) above defective part 70 is for example, while be N3 (10) above situation, or area P2 (5mm for example
2) above large-scale defective part 70 is for example, while be N4 (1) above situation, is judged to be defective ".Control part 30 is used in combination to carry out whether qualified judgement by one or more of above decision condition.
Thereafter, enter step S11, whether the inspection of all unit of predetermined inspection of control part 30 judgements (predetermined production) finishes, when the unclosed situation of inspection of all unit, returns to step S1, carries out the inspection of next solar battery cell 1.When control part 30 is judged to be the situation that the inspection of all unit finished, finish to check.
In the 1st embodiment, as mentioned above by arranging: Lighting Division 10, being configured to can be to have illumination look (R, G, B) the irradiating illumination light of 3 kinds of colors of mutually different wavelength region may, and control part 30, for various illumination looks, obtain the photographed images 60 of solar battery cell 1, and according to the thickness d of the reflection strength of the illumination light of 1 pair of various illumination look of solar battery cell or antireflection film 3, and selection is used for the image checking from the photographed images 60 of various illumination looks, and based on selected photographed images 60 (60a), solar battery cell 1 is checked, even if thus when the situation of the thickness d of antireflection film 3 inequality, also the photographed images 60 that can take from the illumination light of 3 kinds of different colors of use wavelength region may, select the photographed images 60a of the illumination light of the wavelength region may (illumination look) corresponding with the reflection strength of solar battery cell 1 or the thickness d of antireflection film 3.Thus, can choice for use can detect accurately the photographed images 60a that the illumination light of the illumination look (approaching the illumination look of the wavelength of specific wavelength λ) of defective part 70 takes and carry out visual examination, even if therefore, when the situation of the thickness d of antireflection film 3 inequality, also can carry out accurately defects detection.
In the 1st embodiment, form as follows as mentioned above control part 30, from 3 photographed images 60 of various illumination looks, the signal intensity of the photographed images 60 based on reflection reflection strength is selected photographed images 60a, or the thickness d based on antireflection film 3 selects photographed images 60a.Thus, because the inequality of thickness d causes that solar battery cell 1 changes to the reflection strength of each wavelength, result, the signal intensity (light and shade) of the photographed images 60 that the illumination light by each color is taken produces difference, and signal intensity that thus can be based on photographed images 60 and easily selecting can detect the photographed images 60a of the illumination look of defective part 70 accurately.In addition, the reflection strength of solar battery cell 1 reaches minimum specific wavelength λ, by the thickness d of antireflection film 3 with the refractive index n of regulation, determined, thickness d that therefore can be based on antireflection film 3 and easily selecting can detect the photographed images 60a of the illumination look of defective part 70 accurately.
In the 1st embodiment, form as follows as mentioned above control part 30, that is, use the decision threshold Th corresponding with the illumination look of selected photographed images 60, the antireflection film 3 being formed on solar battery cell 1 is carried out to defect inspection.Thus, the power of signal intensity of the inequality of the signal intensity in photographed images 60 or the bright spot that manifests as defective part 70, the grade of average signal strength etc. according to illumination look, change, thus can be by using the decision threshold Th corresponding with the look that throws light on to carry out accurately defects detection.
In the 1st embodiment, form as follows control part 30, as as illustrated in above-mentioned the 1st system of selection of photographed images 60, the mean value of the signal intensity of a plurality of photographed images 60 or intermediate value are compared, and select the photographed images 60 of mean value or the minimum illumination look of intermediate value.If formed in this way, need not calculate the thickness d of antireflection film 3, only contrast the mean value (or intermediate value) of signal intensity of 3 photographed images 60 that light colour is different just compare the photographed images 60 that can easily select to be suitable for defects detection.
In the 1st embodiment, form as follows control part 30, as illustrated in above-mentioned the 2nd system of selection of photographed images 60 as, by the matching with reflectivity-wavelength curve Cf, obtain the thickness d of antireflection film 3, and select the photographed images 60 of the illumination look corresponding with the thickness scope of the regulation that comprises obtained thickness d.If formed in this way, can the matching with the curve (measured value) of the signal intensity obtaining from each photographed images 60 by reflectivity-wavelength curve Cf of calculating for each thickness, and obtain accurately the thickness d of antireflection film 3.
In the 1st embodiment, form as follows control part 30, as as illustrated in above-mentioned the 3rd system of selection of photographed images 60, use is set up associated reflectivity (reflection strength)-thickness curve C s by the reflection strength of various illumination looks with the thickness d of antireflection film 3, obtain the thickness d of antireflection film 3, and select the photographed images 60 of the illumination look corresponding with the thickness scope of the regulation that comprises obtained thickness d.If formed in this way, can be by being pre-created reflectivity (reflection strength)-thickness curve C s (R, G, B) of various illumination looks, and according to the measured value of the signal intensity obtaining from each photographed images 60, easily obtain the thickness d of antireflection film 3.
In the 1st embodiment, as mentioned above, multiple illumination look comprises redness (R), blue (B) and green (G).As mentioned above, for the antireflection film 3 of left and right, refractive index n=2.0, when thickness d=80nm, it is minimum that the reflection strength of red light (R) reaches, when d=60nm left and right, the reflection strength of blue light (B) diminishes, and when d=70nm front and back, the reflection strength of green light (G) diminishes.Therefore, by illumination look, comprise redness, blueness and green, can select to be suitable for according to the scope of in fact issuable thickness inequality the photographed images 60 of the detection of defective part 70.
In the 1st embodiment, as mentioned above, solar battery cell 1 comprises poly semiconductor, and antireflection film 3 is silicon nitride film (SiN).For this polymorphic solar battery cell 1, reaching in the photographed images 60 of the illumination look that minimum specific wavelength λ is different from reflection strength, as crystal grain boundary as Fig. 3 (c) displays clearly, defective part 70 is submerged in crystal boundary picture and cannot detects.In addition, to this polymorphic solar battery cell 1, mostly use silicon nitride film (SiN) as antireflection film 3, the appearance inspection device 100 of the 1st embodiment, can preferably be used to form silicon nitride film (SiN) as the visual examination of the polymorphic solar battery cell 1 of antireflection film 3.
(the 2nd embodiment)
Secondly, with reference to Fig. 1, Fig. 6 (a), Fig. 6 (b)～Fig. 9, the appearance inspection device 200 of the 2nd embodiment of the present invention is described.In the 2nd embodiment, the example forming is as follows described,, except the formation of above-mentioned the 1st embodiment, also each parts of images for photographed images carries out defect inspection.In addition, in the 2nd embodiment, device forms identical with the appearance inspection device 100 of above-mentioned the 1st embodiment, and therefore description thereof is omitted.In addition, appearance inspection device 200 is an example of " testing fixture " of the present invention.
As shown in Figure 8, the control part 230 (with reference to Fig. 1) of the appearance inspection device 200 (with reference to Fig. 1) of the 2nd embodiment, the station diagram that obtains respectively various illumination looks for a plurality of positions of solar battery cell 1 is as 80.And control part 230 is configured to each position for solar battery cell 1, selects station diagram for checking as 80 and check as 80 based on selected station diagram.
Particularly, control part 230 is divided into a plurality of station diagrams as 80 by obtained photographed images 60, and as 80, selects individually the image for checking for each station diagram.In the example of Fig. 8, be expressed as follows example, for photographed images 60 (illustration 60c), obtain the station diagram of 16 the ranks shapes of total that are divided into 4 parts of positions (X1～X4 and Y1～Y4) in all directions of X-axis and Y-axis as 80.Thus, the station diagram of 3 kinds of colors that all obtains R, G, B for each position is as 80.
Station diagram is identical with above-mentioned the 1st embodiment as 80 system of selection, and control part 230 adopts the either method in the 1st system of selection～3rd systems of selection, for each position, selects station diagram for checking as 80.Thus, even if for example large in the size of solar battery cell 1, and during the situation of the thickness d inequality of the antireflection film on each position 3, also can select suitable station diagram as 80 for each position.
Other formations of the appearance inspection device 200 of the 2nd embodiment are identical with above-mentioned the 1st embodiment.
Secondly, with reference to Fig. 7～Fig. 9, the control of the control part 230 during to the inspection of the appearance inspection device 200 of the 2nd embodiment is processed and is described.
Step S21～S24 is identical with step S1～S4 of Fig. 7.In step S25, control part 230 is divided into respectively a plurality of (being 16 positions in the example of Fig. 8) station diagram as 80 by the photographed images 60 of obtained 3 kinds of colors (R, G, B).
In step S26, control part 230 is selected the position checking.For example, in Fig. 8, from the position of X1Y1, along directions X (to X4Y1), check, and (Y coordinate) implements this processing etc. successively line by line, based on predefined order, select the position (for example X1Y1) checking.
In step S27, control part 230 as 80, selects station diagram for check as 80 by above-mentioned system of selection from the station diagram of red (R), green (G) and blue (B).In step S28, the decision threshold Th that control part 230 is read from storage part 31 and selection is with selected illumination look corresponding (and checking algorithm).
Then, in step S29, the defect inspection of 230 pairs of selected station diagrams of control part shown in 80 enforcement Fig. 6 (a), Fig. 6 (b) processed.Secondly, in step S30, whether judgement finishes to the defect inspection of all (16 positions) inspection areas, and when the unclosed situation of defect inspection of all sites, returns to step S25, is transferred to the inspection of next position (for example X2Y1).By to all sites repeating step S25～step S30, carry out the whole implementation defect inspection to solar battery cell 1 (photographed images 60).
When the defect inspection of all sites finishes, enter step S31, judge whether check result meets to differentiate the decision condition of the regulation of certified products or unacceptable product.As for determination processing, can make it with the result of the defect inspection for each position (station diagram is as 80) is gathered when photographed images 60 integral body are carried out to this processing identical.Step S31 is with the processing down to step S34, identical with step S8～step S11 of Fig. 7, and therefore description thereof is omitted.
In the 2nd embodiment, form as follows as mentioned above control part 230, the station diagram that a plurality of positions (X1Y1～X4Y4) of solar battery cell 1 is obtained respectively to various illumination looks is as 80, and selects station diagram for checking as 80 and check as 80 based on selected station diagram for each position of solar battery cell 1.Thus, even if during the situation of the thickness d inequality of the antireflection film 3 on each position of solar battery cell 1, also can select for each position to be suitable for the photographed images (station diagram is as 80) of the illumination look of defects detection and carry out defects detection, therefore can precision carry out higher defects detection.Especially, when the size of solar battery cell 1 becomes large, it is uneven that the thickness d of the antireflection film 3 on each position is easy to become, and therefore the appearance inspection device 200 of the 2nd embodiment is suitable for the inspection of large-sized solar battery unit 1.
Other effects of the 2nd embodiment are identical with above-mentioned the 1st embodiment.
In addition, when thinking that the embodiment this time disclosing is only the non-limiting person of illustration in all respects.Scope of the present invention is not the explanation by above-mentioned embodiment, and also comprises and the meaning of its scope equalization and all changes in scope.
For example, in above-mentioned the 1st embodiment and the 2nd embodiment, represented to apply the present invention to be arranged on the production line of solar battery cell and the example of the testing fixture checking on line, but the present invention is not limited thereto.Also can apply the present invention to be independent of production line and arrange and in order to carry out the testing fixture of the sampling check that large sun can battery unit.
In addition,, in above-mentioned the 1st embodiment and the 2nd embodiment, represented to be provided with the example of Lighting Division of the illumination light of 3 kinds of illumination looks that can irradiate red (R), green (G) and blue (B), but the present invention is not limited thereto.In the present invention, illumination chromatic number can not be also 3 kinds of colors.For example, also can be 2 kinds of red and blue colors.Uneven being limited in scope of the thickness of antireflection film determined, and therefore in fact as long as at least have 2 kinds of red and blue colors, just can carry out accurately defect inspection.In addition, illumination look also can be 4 kinds more than color.During this situation, be made as the illumination look of which kind of color (wavelength), will preferably consider with respect to design load and the inequality of issuable thickness, and in the uneven scope that can imagine, can carry out the illumination look of suitable defects detection.
In addition,, in above-mentioned the 1st embodiment and the 2nd embodiment, represented to be provided with at Lighting Division the example of light source 11 (11a～11c) of each color of red (R), green (G) and blue (B), but the present invention is not limited thereto.For example, also can be configured to comprising the light source of white light-emitting diode etc., use a plurality of chromatic filters (color filter) corresponding with the look that throws light on to make it to irradiate the illumination light of multiple color.In addition,, as light source, also can use light emitting diode other light sources in addition.
In addition, in above-mentioned the 1st embodiment and the 2nd embodiment, represented the light source of each color 11 (11a～11c) with the order of RGB, to be the example of circle-shaped arrangement in the maintaining part of Lighting Division, but for example also can make each light source is 3 circle light source rows of concentric circles, and the circle of the circle of redness (R) light source 11a, the circle of green (G) light source 11b and blueness (B) light source 11c is set individually.In addition, in above-mentioned the 1st embodiment and the 2nd embodiment, represent light source to be the example of circle-shaped and row arrangement, but also can be tetragonal limit shape, arranged light source.During this situation, the shape of the diffusion reflector of maintaining part forms rectangular pyramid (pyramid) shape, and is provided with in order to the peristome to image pickup part leaded light at the top corner part on the top of rectangular pyramid.
In addition,, in above-mentioned the 1st embodiment and the 2nd embodiment, represented to adopt either method in the 1st system of selection～3rd system of selection to select the example of the photographed images for checking, but the present invention is not limited thereto.In the present invention, also can be with selecting the photographed images for checking with the 1st system of selection～3rd system of selection diverse ways.For example, also the thickness that special-purpose film thickness gauge obtains antireflection film can be set separately, and the measurement result based on film thickness gauge is selected photographed images.
In addition, as above-mentioned the 1st embodiment and the 2nd embodiment as while using the situation of light source of red (R), green (G) and blue (B), these 3 kinds of colors form the three primary colors of so-called light, therefore can be according to the surperficial tone that recently obtains solar battery cell of the signal intensity of the photographed images of each color of RGB.As mentioned above, the tone of cell surface is as the reflection strength of color of specific wavelength λ that depends on the thickness of antireflection film, to reach minimum result to show, and the reflection strength of recently calculating of the signal intensity of photographed images that thus can be based on each color of RGB reaches minimum specific wavelength λ and the thickness of antireflection film.Also the value of specific wavelength λ or the thickness of antireflection film that can be based on obtaining according to the ratio of the signal intensity of 3 kinds of colors, select photographed images.
In addition,, in above-mentioned the 2nd embodiment, represented photographed images 60 to be divided into 16 station diagrams as 80 example, but the present invention is not limited thereto.In the present invention, the Segmentation Number that also can make station diagram picture is the Segmentation Number beyond 16.The number at position (station diagram picture), as long as for obtaining position (station diagram picture) number of required inspection precision according to the degree of the thickness inequality at the size of solar battery cell and each position.
In addition,, in above-mentioned the 2nd embodiment, represented photographed images cut apart and obtain the example of each station diagram picture, but the present invention is not limited thereto.In the present invention, also can utilize image pickup part to take each position of solar battery cell.That is, when the large situation of the size of solar battery cell, also can be by whole unit repeatedly being taken and is obtained station diagram picture according to each position.In addition, for example, also 1 solar battery cell can be divided into 4 parts and carry out 4 times and take, and then these photographed images is divided into 4 parts and obtain the station diagram picture etc. at 16 positions.
In addition, above-mentioned concrete numerical value (centre wavelength of the light source of the size of solar battery cell, thickness, each color etc.) is only an example, and the present invention is not limited thereto.The centre frequency of the size of solar battery cell, the thickness of antireflection film or light source also can be the value different from above-mentioned occurrence.
The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, yet not in order to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, foundation technical spirit of the present invention is to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (11)
1. a testing fixture, it is the testing fixture that is formed with the solar battery cell of antireflection film, it is characterized in that comprising:
Lighting Division, is configured to and can carrys out irradiating illumination light to have the multiple illumination look of mutually different wavelength region may;
Image pickup part, is used described illumination light to take described solar battery cell; And
Control part, for described multiple illumination look each and obtain the photographed images of described solar battery cell, and the thickness according to described solar battery cell to the reflection strength of the described illumination light of various described illumination looks or described antireflection film, and from the described photographed images of various described illumination looks, select the image for checking, and based on selected described photographed images, described solar battery cell is checked.
2. testing fixture according to claim 1, it is characterized in that described control part is configured to from a plurality of described photographed images of various described illumination looks, the signal intensity of the described photographed images of the various described illumination look based on the described reflection strength of reflection is selected described photographed images, or the thickness based on described antireflection film is selected described photographed images.
3. testing fixture according to claim 2, is characterized in that described multiple illumination look at least comprises redness and blueness.
4. testing fixture according to claim 3, it is characterized in that described control part is configured to selects the relatively low described photographed images of signal intensity from a plurality of described photographed images of various described illumination looks, or the described photographed images of the selection described illumination look corresponding with described antireflection film thickness.
5. according to the testing fixture described in arbitrary claim in claim 1 to 4, it is characterized in that described control part is configured to the use decision threshold corresponding with the described illumination look of selected described photographed images, carries out defect inspection to the described antireflection film being formed on described solar battery cell.
6. according to the testing fixture described in arbitrary claim in claim 1 to 4, it is characterized in that described control part is configured to the station diagram picture that a plurality of positions of described solar battery cell is obtained respectively to various described illumination looks, and for position described in each of described solar battery cell and select the described station diagram picture for checking and look like to check based on selected described station diagram.
7. testing fixture according to claim 4, is characterized in that described control part is configured to the mean value of the signal intensity of a plurality of described photographed images or intermediate value are compared, and selects the described photographed images of mean value or the minimum described illumination look of intermediate value.
8. testing fixture according to claim 4, it is characterized in that described control part is configured to by the reflection strength of described illumination light wavelength and described solar battery cell and the matching of theoretical curve, and obtain the thickness of the described antireflection film with the signal intensity of the described photographed images of various described illumination looks corresponding, and the described photographed images of the selection described illumination look corresponding with the thickness scope of the regulation of the thickness that comprises obtained described antireflection film.
9. testing fixture according to claim 4, it is characterized in that described control part is configured to use the described reflection strength of various described illumination looks is set up to associated reference data with the thickness of described antireflection film, obtain the thickness of the described antireflection film corresponding with the signal intensity of described photographed images, and select the described photographed images of the described illumination look corresponding with the thickness scope of the regulation of the thickness that comprises obtained described antireflection film.
10. according to the testing fixture described in arbitrary claim in claim 1 to 4, it is characterized in that described multiple illumination look comprises redness, blueness and green.
11. according to the testing fixture described in arbitrary claim in claim 1 to 4, it is characterized in that described solar battery cell comprises poly semiconductor, and described antireflection film is silicon nitride film.
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| JP2012196349A JP5862522B2 (en) | 2012-09-06 | 2012-09-06 | Inspection device |
| JP2012-196349 | 2012-09-06 |
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| CN107110782A (en) * | 2015-01-28 | 2017-08-29 | 东丽工程株式会社 | The defect detecting method and flaw detection apparatus of wide band gap semiconducter substrate |
| CN107110782B (en) * | 2015-01-28 | 2020-12-29 | 东丽工程株式会社 | Defect inspection method and defect inspection apparatus for wide band gap semiconductor substrate |
| TWI602312B (en) * | 2015-10-21 | 2017-10-11 | Mitsubishi Electric Corp | Solar cell manufacturing method |
| JPWO2017068671A1 (en) * | 2015-10-21 | 2018-01-11 | 三菱電機株式会社 | Manufacturing method of solar cell |
| US10586880B2 (en) | 2015-10-21 | 2020-03-10 | Mitsubishi Electric Corporation | Solar cell manufacturing method |
| CN110044294A (en) * | 2018-01-17 | 2019-07-23 | 欧姆龙株式会社 | Image testing device and lighting device |
| CN109406531A (en) * | 2018-10-23 | 2019-03-01 | 凌云光技术集团有限责任公司 | A kind of photovoltaic glass coating defects detection system |
| CN109632824A (en) * | 2019-01-11 | 2019-04-16 | 英特尔产品（成都）有限公司 | Object inspection systems for object abnormal examination |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI480562B (en) | 2015-04-11 |
| JP2014052261A (en) | 2014-03-20 |
| TW201411155A (en) | 2014-03-16 |
| JP5862522B2 (en) | 2016-02-16 |
| CN103674974B (en) | 2016-04-27 |
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