CN103839743A - Method of sampling a sample and displaying obtained information - Google Patents

Method of sampling a sample and displaying obtained information Download PDF

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Publication number
CN103839743A
CN103839743A CN201310610534.1A CN201310610534A CN103839743A CN 103839743 A CN103839743 A CN 103839743A CN 201310610534 A CN201310610534 A CN 201310610534A CN 103839743 A CN103839743 A CN 103839743A
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subframe
sample
scanning
pixel
scanning position
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CN201310610534.1A
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CN103839743B (en
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P.波托塞克
M.P.M.比尔霍夫
T.维斯塔维
L.德赖卡克
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FEI Co
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FEI Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

The invention relates to a method of sampling and displaying information comprising scanning a beam over the sample in a series of N overlapping sub-frames, each comprising Mn scan positions, thereby irradiating the sample at NMn scan positions, which form the field of view; detecting a signal, sampled for each scan position, emanating from the sample; and displaying the sub-frames having at least NMn pixels in such a way, that after the series of N scans each of the pixels displays information derived from the signal from one or more scan positions; in which after the scan of the first sub-frame each of the pixels displays information derived from the scan positions of the first sub-frame; and after the scan of the second sub-frame each of the pixels displays information derived during the scanning of the first, the second, or both sub-frames. Accordingly, the scanning method allows more uniform charge distribution above the sample, allowing less charging effect, for example, and meanwhile the method can provide good analyzable images even after scanning the first sub-frame.

Description

The method of the information that sample and demonstration obtain
Technical field
The present invention relates to a kind of sample and the method for the information that demonstration obtains on display, method comprises:
By series scanning beam above sample of N overlapping subframe, a subframe, each subframe comprises M nindividual scanning position, the scanning position of each subframe is not overlapping with the scanning position of other subframe, and described beam is at N × M thus nsample, described N × M are irradiated in individual scanning position place nindividual scanning position forms visual field;
Use detector, detect in response to the irradiation to sample and the signal that sends from described sample by described beam, for each scanning position described signal of sampling; And
There is at least N × M non the display of individual pixel, show by this way described subframe, make after the series of N scanning, each pixel shows the information from drawing from the signal of one or more scanning positions.
Background technology
Such method is known from interlacing scan, and interlacing scan is used in from USA, FEI Co. of Hillsboro, be equipped in the Nova NanoSEM scanning electron microscopy scanning with interlacing grating.
In scanning electron microscopy (SEM), there is the electron beam of the focusing of selectable energy between for example 200eV and 30keV in scanning above sample.In response to clashing into the electron beam of sample, radiation forms from sample, radiation comprise have the energy that is less than 50eV secondary electron (SE), there is backscattered electron (BSE), light and the X ray of the energy that exceedes 50eV.Can be by detector sample/detect one or more in the radiation of these types.
Scan pattern can be continuous sweep pattern, or interlaced scan mode.According to the brochure of Nova NanoSEM (referring to [1-], more specifically see the 7th page, " user interface "), the advantage of interlaced scan mode is: in the time more promptly scanning region-of-interest (although more frequent), interlacing scan allows electric charge to dissipate before rescaning region-of-interest (even slight different scanning position places), and therefore realizes optimum without electric charge imaging.
Be noted that better CHARGE DISTRIBUTION and dissipation also can scan more quickly by the less time of staying (beam is in the time of a position) of use, combination is by the integrated of for example image or on average realize.But this shortcoming is not to be the deterioration that whole detectors can both cause the quick sampling time (detector does not have enough bandwidth) or its signal to noise ratio is shown.And some physical phenomenons relevant with sample may be time-constrains, the observation such as to fluorescence: fluorescence has long die-away time and is therefore not suitable for detecting by quick sampling.
Such method is from the multiple sub-nyquist sampling coding of MUSE() be also known sampling/displaying scheme of simulation HDTV.
In MUSE, use sampling plan as shown in Figure 1, also referring to " Interlace and MPEG – Can motion compensation help ", J. O. Drewery. International Broadcasting Convention 1994 (IBC1994) [2-].The quantity that defines subframe is four, and each subframe comprises the respective pixel on scanning position and display (TV screen), and here they use respectively " 1 ", " 2 ", " 3 " and " 4 " to represent.First, scanning, transmission and demonstration the first subframe, be then the second subframe, etc.Therefore after to the transmission of 4 subframes, form complete image.The same with interlacing scan/transmission, this has reduced the flicker of image.Frame transmits with the frame rate (therefore subframe speed is 60Hz) of 15Hz conventionally.After showing the 4th subframe of First Series subframe, show the first subframe of the second image.This can realize as the information in the memory cell of the part of video memory by change, or it can for example be realized by electron beam being directed to phosphor screen (wherein controlled current flow is to the position of respective pixel).
Summary of the invention
The present invention supplies with a kind of improved scanning/formation method.
For that object, after to the scanning of the first subframe, each pixel shows the information drawing from the scanning position of the first subframe; And after to the scanning of the second subframe, each pixel is presented at the information that the scan period of the first subframe, the second subframe or two subframes is drawn.
, after the first subframe, use whole pixels to show image, and therefore there is correct overall contrast/luminance level.Therefore the information obtaining can be for using the first rapid image of whole pixels, and still identical information is also used in image subsequently, has higher subsequently resolution.
Note in the first image and in image subsequently, for example, can strengthening with interpolation technique the resolution of demonstration.
Further be noted that for one group of art methods, before the whole N of a scanning subframe, only the part of pixel illustrates information, and remaining pixel is black, is scanned the image before with wrong integral brightness level thereby be created in whole subimages.In other art methods, before the whole N of a scanning subframe, partial pixel illustrates out-of-date information, out-of-date information for example relates to when sample is in another position or the detector information of sampling in the time that other arranges, thereby produces the image that wrong contrast, brightness or positional information are shown at least in part.
Admittedly, for HDTV, this is not important problem, because there is complete image after 4 subframes, and each new subframe is when shown, and it replaces old subframe.This all occurs so fast to such an extent as to after the starting of 1/15 second (1/15 second is frame rate), all pixel is used always, and refreshes by new information after every frame.
For example, for SEM, be variable sweep time, conventionally illustrates that 25Hz arrives the once per second or frame rate of (for example once per minute) even still less.Use causes 1s -1sweep time of frame rate, usefully in the sub-fraction of this time, observe low-resolution image to for example can judge whether visual field (imaging region) comprises the feature of concern.Then subframe below, by resolution higher contribution, after this, can be improved by further subframe the signal to noise ratio of image.
In an embodiment, for whole subframes, the scanning position of each subframe and the quantity of pixel are identical.
Preferably, for whole subframes, the scanning position of each subframe and the quantity of pixel are identical, but this is dispensable.For example one or more subframes can lose a line and/or a column scan position.
N=(k in embodiments of the present invention x× k y), wherein k xand k ypositive integer, k xand k yin at least one be greater than 1, more particularly N=k 2, wherein k is greater than 1 integer.
By selecting N=(k x× k y), wherein k xand k ybe positive integer, the respective pixel of different subframes can be grouped into rectangle, and passes through N=k 2, the respective pixel of different subframes can be grouped into square.
In another embodiment of the present invention, beam is the beam from following group: infrared light, visible ray or X ray, or from the beam of the particle of following group: electronics, ion, charged cluster, charged molecule, atom or molecule.
Although use SEM to explain the present invention, the present invention can also use with use together with the equipment of another beam electron beam.
In another embodiment more of the present invention, at least one in the series of N subframe, for the drift of sample and/or vibration and proofread and correct the position of this subframe with respect to one or more other subframes.
By more different subframes, can carry out the skew between detected image by for example correlation technique.Then can be by the data that obtain or pass through meticulousr technology (as for example at unsettled European patent application EP 12188958 or " A Fast Super Resolution Algorithm for SEM Image " in the time showing the drift detecting of skew simply, L. Hengshu, describes in Proc. of SPIE Vol. 6623 66231Z [3-]) compensate the drift detecting.
In another embodiment more of the present invention, the displacement that is greater than predetermined value detected between the subframe of a upper acquisition and the subframe of at least one more early acquisition after, start the new sequence of subframe.
In this embodiment, once the displacement that is greater than predetermined value be detected between the subframe of a upper acquisition and the subframe of at least one more early acquisition, just start to show the new sequence of N subframe.Displacement may be owing to the change of sample position, and the platform being then mounted thereon when sample causes low-resolution image while moving, and in the time that this becomes static, causes high-definition picture (using whole subframes).
In another embodiment more of the present invention, user can start the beginning of the new sequence of subframe, or after the sample stage being mounted thereon at sample moves, start the new sequence of subframe, or the sample stage being mounted thereon at sample moves, visual field changes or detector arranges after changing and starts the new sequence of subframe.
Especially for the N of low refresh rate and high quantity, set up the time that new image spends long.It is attractive after the platform of asking by user or be mounted thereon at sample moves, automatically starting to set up new image (the new sequence of subframe).Start new image by " removing buffer ".
In another embodiment more of the present invention, after to the first subframe scanning, in pixel the information drawing from two or more scanning positions is shown at least partly.
In the time of scanning the first subframe, use the information of the first subframe to show the first image.But, by the interpolation between the information obtaining from two or more scanning positions, can show the image with improved virtual resolution.Even, in the time of the data of the more subframes of imaging, interpolation can be also attractive, and in the time of whole N subframes of sampling, can show the image with so-called super-resolution, supposes that display has more than N × M pixel.
In another embodiment more of the present invention, detector detects quantity and/or energy and/or the angular distribution of the x-ray photon, optical photon, secondary electron or the backscattered electron that send from sample.
The detector that detects the radiation of sending from sample can be X-ray detector (using EDX or WDX as detecting principle), photon detector (for example Si-PMT, PMT, photodiode, or CMOS or CCD detector), SE detector (for example Ai Huode-Sha Mulu (Everhart-Thornley) detector or semiconductor detector), BSE detector (for example semiconductor detector), pass through the detector (all if dim light spectrometer) of the electronics of sample for transmission, with many.
In a preferred embodiment of the invention, the sweep time of each subframe is identical with the sweep time of each other subframe.
Need not to be identical the sweep time of different subframes, but this is the easiest selection in most applications.
Brief description of the drawings
Now, use annexed drawings set forth the present invention, in the accompanying drawings identical reference number instruction characteristic of correspondence.For this object:
Fig. 1 schematically shows the scanning strategy using in MUSE;
Fig. 2 schematically shows SEM.
Embodiment
Fig. 1 schematically shows the scanning strategy using in MUSE.
In MUSE, frame is made up of 4 subframes.Each subframe is with respect to other subframe displacement.The first subframe is made up of the scanning position that is labeled as " 1 ", and on the correspondence position of display, shows these scanning positions.Similarly, the second subframe is made up of the scanning position that is labeled as " 2 ", and on the correspondence position of display, shows these scanning positions, etc.Similar crystallography, can define several " unit cells ", such as unit cell 10, unit cell 11 and unit cell 12.Each each scanning position comprising in N the subframe with least displacement in these structure cells.Especially rhombus unit cell 12 is suitable for filling the complete image of N subframe as structure cell, but its orientation makes it can not be applicable to the image of N*M scanning position, because such image often illustrates straight edge.
MUSE sweeping scheme shows many not scanning areas 15.As seen in unit cell, only scan the half of sample areas, cause owing sampling (the not Zone Full of sample).For avoiding owing sampling, can carry out scan image with slight overdimensioned spot 20.This has reduced owes sampling, and it may cause slight over-sampling still (to depend on the diameter of this spot and raster), and one of them sample also comprises the information of other scanning position.
Fig. 2 schematically shows and is equipped for the SEM that carries out the method according to this invention.
Fig. 2 shows the equipment 200 with scanning electron microscopy lens barrel 241 and power supply and control unit 245.By apply voltage between negative electrode 253 and anode 254, electron beam 232 is launched from negative electrode 253.Electron beam 232 is focused into thin speckle by means of collector lens 256 and object lens 258.Electron beam 232 is by means of deflecting coil 260 scanning two-dimensionally on sample.Deflector coil can be along x axle with along y axle deflection beam, and beam can be scanned with simple or complex patterns (such as raster scan, snake scan or Hilbert (Hilbert) scanning) along sample surface.Deflector can be magnetic or static.The operation of collector lens 256, object lens 258 and deflecting coil 260 is controlled by power supply and control unit 245.
The operation of the various piece of system controller 233 control appliances 200.With ionic pump 268 and mechanical pumping system 269 vacuum chamber 210 of finding time under the control of vacuum controller 234.
Electron beam 232 can focus on sample 202, on the removable X-Y platform 204 of sample 202 in vacuum chamber 210.In the time of electron bombardment sample 202 in electron beam, sample sends radiation.By preferably segmentation silicon drift detector of backscattered electron detector 242() detect the electronics of back scattering.
Data processor 220 can comprise computer processor, programmable gate array or other numeral or analog processing device; Operator Interface Unit's (such as keyboard or computer mouse); For storing the program storage 222 of data and executable instruction; For the interface arrangement of data input and output, be embodied in executable computer program code can executive software instruction; With the display 244 for show result by video circuit 292.
Data processor 220 can be the part of standard laboratory personal computer, and is conventionally coupled at least computer-readable medium of certain form.Computer-readable medium (comprising volatile and non-volatile media, removable and non-removable medium) can be any available medium that can be accessed by data processor 220.By example and infinite mode, computer-readable medium comprises computer-readable storage medium and communication media.Computer-readable storage medium comprises volatile and non-volatile, the removable and non-removable medium for any method of storage information (such as computer-readable instruction, data structure, program module or other data) or technology enforcement.For example, computer-readable storage medium comprises RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital universal disc (DVD) or other optical disc storage, magnetic holder, tape, disk storage or other magnetic memory device, maybe can be used for storing the information of hope and any other medium that can be accessed by processor 220.
Program storage 222 can also comprise such computer-readable storage medium of removable and/or non-removable, volatile and/or nonvolatile storage form, and can provide computer-readable instruction, data command, the storage of program module and other data.
By the instruction load program storage with suitable, equipment is equipped as execution the method according to this invention.
Although be noted that equipment discussed here is the equipment that is equipped with electron microscope lens barrel, can also use the equipment that is equipped with focused ion beam lens barrel, laser beam lens barrel, charged cluster lens barrel etc., and their combination.
Further note, can change the demand of long residence time: it may be the result (for example must record fluorescence or phosphorescence result in long die-away time in sampling time) of sampling or the result of detector (for example in the time that the sampling time is low or have limited bandwidth as the result of signal-to-noise ratio degradation).
Non-patent literature:
The brochure of the Nova NanoSEM of [1-] FEI Co.: http://www.fei.com/products/scanning-electron-microscopes/nova-nanosem/nanosembrochure.aspx
[-2-]?“Interlace?and?MPEG?–?Can?motion?compensation?help?”,?J.?O.?Drewery,?International?Broadcasting?Convention?1994?(IBC1994).?http://www.bbc.co.uk/rd/pubs/papers/pdffiles/jodibc94.pdf
[-3-]?“A?Fast?Super?Resolution?Algorithm?for?SEM?Image”,?L.?Hengshu,?Proc.?of?SPIE?Vol.?6623?66231Z。

Claims (10)

1. sample (202) and the method in the upper information that shows acquisition of display (244), described method comprises:
By series scanning beam (232) above sample of N overlapping subframe, a subframe, each subframe comprises M nindividual scanning position, the scanning position of each subframe is not overlapping with the scanning position of other subframe, and described beam is at N × M thus nsample, described N × M are irradiated in individual scanning position place nindividual scanning position forms visual field;
Use detector (242), detect in response to the irradiation to sample and the signal that sends from described sample by described beam, for each scanning position described signal of sampling; And
There is at least N × M non the display of individual pixel, show by this way described subframe, make after the series of N scanning, each pixel shows the information from drawing from the signal of one or more scanning positions;
Be characterised in that:
Wherein, after to the scanning of the first subframe, each pixel shows the information drawing from the scanning position of the first subframe; And
Wherein, after to the scanning of the second subframe, each pixel is presented at the information that the scan period of the first subframe, the second subframe or these two subframes is drawn.
2. according to the process of claim 1 wherein for whole subframes, the scanning position of each subframe and the quantity of pixel are identical.
3. according to any the method in claim above, wherein N=(k x× k y), wherein k xand k ypositive integer, k xand k yin at least one be greater than 1, more particularly N=k 2, wherein k is greater than 1 integer.
4. according to any the method in claim above, wherein beam (232) is the beam from following group: infrared light, visible ray or X ray, or from the beam of the particle of following group: electronics, ion, charged cluster, charged molecule, atom or molecule.
5. according to any the method in claim above, wherein at least one in the series of N subframe, proofread and correct the position of described subframe with respect to one or more other subframes for the drift of sample (202) and/or vibration and/or displacement.
6. according to any the method in claim above, after wherein the displacement that is greater than predetermined value being detected between the subframe of a upper acquisition and subframe that at least one more early obtains, start the new sequence of subframe.
7. according to any the method in claim above, wherein user can start the beginning of the new sequence of subframe, or the new sequence that starts subframe after sample stage (204) movement, visual field change or detector arrange change, described sample (202) is arranged in sample stage (204).
8. according to any the method in claim above, wherein after to the first subframe scanning, in pixel the information drawing from two or more scanning positions is shown at least partly.
9. according to any the method in claim above, wherein detector (242) detects quantity and/or energy and/or the angular distribution of the x-ray photon, optical photon, secondary electron or the backscattered electron that send from sample (202).
10. according to any the method in claim above, wherein the sweep time of each subframe is identical with the sweep time of each other subframe.
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