CN103860143A - MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes - Google Patents
MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes Download PDFInfo
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Abstract
The invention discloses an MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes. The MEMS optical scanning probe comprises a case and a main body base assembled in the case, wherein a lens assembly is arranged in a groove formed in the upper side of the main body base, a first MEMS micro lens is arranged in a groove of the slope surface of the main body base, a second MEMS micro lens is arranged in a groove formed in the lower side of the main body base, light beams are emitted onto the first MEMS micro lens through a lens assembly via optical fibers and are then reflected onto the second MEMS micro lens through the first MEMS micro lens, an external circuit controls the on-off state of the voltage on the second MEMS micro lens, further, the second MEMS micro lens is controlled to be in the in-space tilting or in-space flat expanding state for realizing the free switching among the forward scanning, the lateral scanning and the lateral forward scanning of the probe. The MEMS optical scanning probe has the advantages that the probe only adopts one lens assembly, so the double MEMS micro lenses can realize the switching of various work modes, and the use is more flexible.
Description
Technical field
The present invention relates to a kind of MEMS optical scanning probe of changeable mode of operation.
Background technology
By micro electro mechanical system (MEMS) technology (microelectromechanical systems, be called for short MEMS) scanning micro-mirror and optical coherent chromatographic imaging (Optical Coherence Tomography, OCT) technology combines, and carrying out endoscopic imaging system exploitation is the main exploration project of patent application unit.(denomination of invention is one of the present patent application people's patent: a kind of double working modes MEMS optic probe; The patent No. is: 201220535288.9).And patent (denomination of invention is: a kind of MEMS optic probe, the patent No. is: 201220497934.7).Above-mentioned patent has only been broken pattern that can one direction work, can realize the side direction scanning to tissue sample sidewall, can realize again to human viscera organ with compared with the scan forward of sequestered tissue.Have certain advantage, but it also has certain limitation, has increased accordingly probe size size, OCT technology is applied to the key problem of endoscope in the microminiaturization of spying upon in the inner head.Above-mentioned patent all has its advantage, but also all there is certain limitation, the present invention is reducing cost, is reducing sonde configuration complexity and dwindle head it off under the prerequisite of probe diameter, realizes scan forward and side direction scanning or the switchable MEMS optic probe of side scan forward.
Summary of the invention
The defect that the present invention seeks to exist for prior art provides a kind of MEMS optical scanning probe of changeable mode of operation.
The present invention for achieving the above object, adopts following technical scheme: a kind of MEMS optical scanning probe of changeable mode of operation, comprises shell and assembling main base therein; In the groove of described main base upside, be provided with lens subassembly, in the groove on its inclined-plane, be provided with a MEMS micro mirror; In the groove of described main base downside, be provided with the 2nd MEMS micro mirror; Light beam is injected on a MEMS micro mirror after via the prism deflection on lens subassembly by optical fiber, then reflexes on the 2nd MEMS micro mirror by a MEMS micro mirror; External circuit is by controlling the voltage break-make on described the 2nd MEMS micro mirror, and then controls described the 2nd MEMS micro mirror flattened state in warpage or space in space, switches arbitrarily between scan forward, side direction scanning and side scan forward to realize probe.
Preferably, light beam shines directly on a MEMS micro mirror after lens subassembly, reflex on the 2nd MEMS micro mirror by a MEMS micro mirror again, the voltage of external circuit control the 2nd MEMS micro mirror, and then control described the 2nd MEMS micro mirror flattened state in warpage or space in space, to realize any switching between the scanning of probe side direction, side scan forward and scan forward, thereby increase scanning probe scope.
Preferably, described shell front side face and front end face are equipped with the window of optical transparency in operating wavelength range.
Preferably, described window adopts plane and the curved surface window with rectification image deformation to seal; Or described window is the integral type window to operation wavelength optical transparency.
Preferably, described the 2nd MEMS micro mirror comprises frame, bimetallic actuating arm, micro mirror, bimetallic ligament and the pedestal with pad, and described frame four side inwalls are connected with micro mirror by described bimetallic actuating arm respectively.
Preferably, described bimetallic actuating arm and bimetallic ligament adopt electrothermal method work, realize the deflection of micro mirror by the voltage signal of applying preset frequency to described bimetallic actuating arm and bimetallic ligament; Described frame bottom is connected with pedestal by described bimetallic ligament; By controlling the minute surface of micro mirror and the angle of horizontal plane described in the degree of crook control of described bimetallic ligament.
Preferably, the silicon substrate that is coated with the minute surface of optical coating and is distributed in surrounding is set on described the 2nd MEMS micro mirror, connects with brace bridge joint between the two, in surrounding, frame is set, be provided with the pad connecting for conducting electricity in frame lower end; The profile of a described MEMS micro mirror and the 2nd MEMS micro mirror is circular or square or other polygon, and described MEMS is electric heating MEMS, piezoelectric mems, and described the 2nd MEMS micro mirror can be also the memory alloy material with identical function.
Preferably, described bimetallic actuating arm and described bimetallic ligament are the material formations that multilamellar has different heat expansion coefficient.
Preferably, the electric connection mode of described the 2nd MEMS micro mirror is directly to form on described main base, or forms electrical connection path after adopting PCB, ceramic circuit board to be placed in the relevant position on described main base.
Beneficial effect of the present invention: (1) the present invention probe only adopts the assembling of popping one's head in of a lens subassembly, use two MEMS micro mirrors just can realize the switching of two kinds of mode of operations, its scan forward and side direction/side scan forward is separate does not affect, control accurately simple, can be used for the scanning imagery of the tract of multiple organ in human body and make diagnosis in conjunction with OCT imaging system, use more flexibly, adaptability is stronger.Can be used for the diagnosis of scans of the histoorgans such as oral cavity, otorhinolaryngology, bronchus, joint, bladder, also can be used for peritoneoscope etc. and peep in operation in other; Also can be used for the industrial detection such as material tests, surface inspection field as industrial detection equipment simultaneously.
(2) use MEMS micro mirror, probe size is enough little, can be used for medical endoscope and industrial endoscope.
(3) adopt the 2nd MEMS micro mirror, by controlling, bimetallic is tough brings the angle of inclination of adjusting whole MEMS micro mirror and horizontal plane cleverly, is transformed into side direction scanning or side scan forward thereby realize scan forward, has realized flexible scanning, can not expand probe diameter yet, simple in structure.
(4) with double working modes scanheads external diameter contrast before, the present invention's probe adopts symmetrical structure completely, has reduced probe overall dimensions in realizing bilateral scanning function.
(5) the present invention pops one's head in and adopts the design of full symmetric formula, and simple in structure, compact, main base is easy to production and processing, and integral production cost is lower.
Accompanying drawing explanation
Cutaway view structural representation when Fig. 1 side direction/side of the present invention scan forward;
Cutaway view structural representation when Fig. 2 scan forward of the present invention;
In figure, 412-scan forward light beam, 413-the 2nd MEMS micro mirror, 414-rear end electrical interface;
Fig. 3 overall structure schematic perspective view of the present invention;
In figure, 51-lens subassembly, 52-the one MEMS micro mirror, 53-the 2nd MEMS micro mirror, 54-main base, 55-rear end electrical interface;
Probe index path when Fig. 4 a scan forward of the present invention;
Probe index path when Fig. 4 b side direction/side of the present invention scan forward;
Cutaway view structural representation when Fig. 5 the second performance of the present invention scan forward;
Cutaway view structural representation when Fig. 6 the second performance side direction/side of the present invention scan forward;
610-back-end circuit in figure, 611-side/front scanning light beam;
The micro mirror head structural representation of the MEMS micro mirror of Fig. 7 band pedestal of the present invention;
The MEMS micro mirror overall structure schematic diagram of Fig. 8 band pedestal of the present invention;
In figure, 91-MEMS micro mirror, 92-bimetallic ligament, 93-pedestal, 94-pad.
The specific embodiment
Shown in Fig. 1 to Fig. 3, be the first embodiment that a kind of MEMS optical scanning of changeable mode of operation is popped one's head in, comprise shell 45 and assembling main base 47 therein; In the groove of described main base 47 upsides, be provided with lens subassembly 48, in the groove on its inclined-plane, be provided with a MEMS micro mirror 46; In the groove of described main base 47 downsides, be provided with the 2nd MEMS micro mirror 44; Light beam is injected on a MEMS micro mirror 46 via lens subassembly 48 by optical fiber 49, then reflexes on the 2nd MEMS micro mirror 44 by a MEMS micro mirror 46; External circuit is by controlling the voltage break-make on described the 2nd MEMS micro mirror 44, and then control described the 2nd MEMS micro mirror 44 flattened state in warpage or space in space, switch arbitrarily between scan forward, side direction scanning and side scan forward to realize probe.Wherein, described shell front side face and front end face are respectively equipped with the window 41,42 of optical transparency in operating wavelength range.Described window 41,42 adopts planes and has the curved surface window of correcting image deformation and seals.Or described window is also chosen as the integral type window to operation wavelength optical transparency.Described window can be also lens or battery of lens, can improve the resolution of system.
Probe index path when Fig. 4 a and Fig. 4 b are scan forward of the present invention, side scan forward or side direction scanning.Comprising: incident beam 81, a MEMS micro mirror 82 and the 2nd MEMS micro mirror 83.
Shown in Fig. 5, Fig. 6, be the second embodiment that a kind of MEMS optical scanning of changeable mode of operation is popped one's head in, comprise shell 65 and assembling main base 67 therein; In the groove of described main base 67 downsides, be provided with lens subassembly 68, in the groove on its inclined-plane, be provided with a MEMS micro mirror 66; In the groove of described main base 67 downsides the one MEMS micro mirror 66 upsides, be provided with the 2nd MEMS micro mirror 64; Light beam is injected on a MEMS micro mirror 66 via lens subassembly 68 by optical fiber 69, then reflexes on the 2nd MEMS micro mirror 64 by a MEMS micro mirror 66; External circuit is by controlling the voltage break-make on described the 2nd MEMS micro mirror 64, and then controls institute's the 2nd MEMS micro mirror 64 flattened state in warpage or space in space, switches arbitrarily between scan forward, side direction scanning and side scan forward to realize probe.Wherein, described shell front side face and front end face are respectively equipped with the window 61,62 of optical transparency in operating wavelength range.Described window 61,62 adopts planes and has the curved surface window of correcting image deformation and seals.Or described window is also chosen as the integral type window to operation wavelength optical transparency.Described window can be also lens or battery of lens, can improve the resolution of system.
Fig. 7, Fig. 8 are MEMS micro-mirror structure schematic diagram of the present invention; This MEMS micro mirror comprises frame 71, bimetallic actuating arm 72, micro mirror 73, bimetallic ligament 74 and the pedestal 76 with pad 75, described frame 71 4 side inwalls are connected with micro mirror 73 by described bimetallic actuating arm 72 respectively, described bimetallic actuating arm 72 adopts electrothermal method work with bimetallic ligament 74, realizes the deflection of micro mirror 73 by the voltage signal of applying preset frequency to described bimetallic actuating arm 72 and bimetallic ligament 74; Described frame 71 bottoms are connected with pedestal 76 by described bimetallic ligament 74; By controlling the minute surface of micro mirror 73 and the angle of horizontal plane described in the degree of crook control of described bimetallic ligament 74.The direction of photoscanning in probe can be strictly controlled in the improvement of said structure, realize any switching between scan forward and side direction/side scan forward probe, when MEMS is in off-position, its metal ligament is in flattened state, probe is scan forward state, when MEMS micro mirror applies the voltage of certain frequency, its metal ligament, in warpage state, is popped one's head in as side direction/side scan forward state.Described MEMS is not limited only to electrothermal method work, can be the work of piezoelectricity mode and other working methods.
In figure, the silicon substrate that is coated with the minute surface of optical coating and is distributed in surrounding is set on MEMS micro mirror, connects with brace bridge joint between the two, in surrounding, frame is set, be provided with the pad connecting for conducting electricity in frame lower end; The profile of described MEMS micro mirror is shape or square or its polygon.Described bimetallic actuating arm and described bimetallic ligament are the material formations that multilamellar has different heat expansion coefficient.The electric connection mode of described MEMS micro mirror is directly to form on described main base, or forms electrical connection path after adopting PCB, ceramic circuit board to be placed in the relevant position on described main base.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (9)
1. the MEMS optical scanning of changeable mode of operation probe, comprises shell and assembling main base therein; In the groove of described main base upside, be provided with lens subassembly, in the groove on its inclined-plane, be provided with a MEMS micro mirror; It is characterized in that, in the groove of described main base downside, be provided with the 2nd MEMS micro mirror; Light beam is injected on a MEMS micro mirror via lens subassembly by optical fiber, then reflexes on the 2nd MEMS micro mirror by a MEMS micro mirror; External circuit is by controlling the voltage break-make on described the 2nd MEMS micro mirror, and then control described the 2nd MEMS micro mirror and realize light path switching in the diverse location of light path, switch arbitrarily between scan forward, side scanning and side scan forward to realize probe, increased the scan area of probe.
2. the MEMS optical scanning of a kind of changeable mode of operation as claimed in claim 1 probe, is characterized in that, described shell front side face and front end face are equipped with the window of optical transparency in operating wavelength range.
3. a kind of double working modes MEMS optic probe as claimed in claim 2, is characterized in that, described window adopts plane and the curved surface window with rectification image deformation to seal; Or described window is the integral type window to operation wavelength optical transparency.
4. the MEMS optical scanning of a kind of changeable mode of operation as described in claims 1 to 3 any one probe, it is characterized in that, described the 2nd MEMS micro mirror comprises frame, bimetallic actuating arm, micro mirror, bimetallic ligament and the pedestal with pad, described frame four side inwalls are connected with micro mirror by described bimetallic actuating arm respectively, and described frame bottom is connected with pedestal by described bimetallic ligament; By controlling the minute surface of micro mirror and the angle of horizontal plane described in the degree of crook control of described bimetallic ligament, described first, second MEMS micro mirror comprises the MEMS micro mirror of electric heating MEMS micro mirror, piezoelectric mems micro mirror.
5. a kind of double working modes MEMS optic probe as claimed in claim 4, it is characterized in that, the silicon substrate that is coated with the minute surface of optical coating and is distributed in surrounding is set on described the 2nd MEMS micro mirror, connect with brace bridge joint between the two, in surrounding, frame is set, is provided with the pad connecting for conducting electricity in frame lower end; The profile of a described MEMS micro mirror and the 2nd MEMS micro mirror framework and micro mirror is circular or square or other polygon.
6. the MEMS optical scanning of a kind of changeable mode of operation as claimed in claim 5 probe, is characterized in that, described bimetallic actuating arm and described bimetallic ligament are the material formations that multilamellar has different heat expansion coefficient.
7. the MEMS optical scanning of a kind of changeable mode of operation as claimed in claim 6 probe, it is characterized in that, the electric connection mode of a described MEMS micro mirror is directly to form on described main base, or forms electrical connection path after adopting PCB, ceramic circuit board to be placed in the relevant position on described main base.
8. the MEMS optical scanning of a kind of changeable mode of operation as claimed in claim 7 probe, it is characterized in that, a described MEMS micro mirror adopts the bonding mode of stake and first section of realization conduction of circuit board to be connected, then is connected and realizes conducting with external circuit by tail end.
9. the MEMS optical scanning of a kind of changeable mode of operation as claimed in claim 8 probe, is characterized in that, described circuit board is flexibility or hard circuit board, or ceramic material.
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Cited By (5)
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| CN105411509A (en) * | 2014-09-02 | 2016-03-23 | 乐普（北京）医疗器械股份有限公司 | OCT (optical coherence tomography) endoscopic imaging probe, manufacturing method of endoscopic imaging probe and OCT imaging catheter |
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| CN105769249A (en) * | 2014-12-24 | 2016-07-20 | 苏州凯隆医疗科技有限公司 | Photoacoustic imaging endoscope |
| CN112998647A (en) * | 2019-12-20 | 2021-06-22 | 财团法人金属工业研究发展中心 | Electrowetting control optical scanning probe |
| CN113455992A (en) * | 2021-06-04 | 2021-10-01 | 哈尔滨医科大学 | Imaging catheter and imaging device |
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| CN113455992A (en) * | 2021-06-04 | 2021-10-01 | 哈尔滨医科大学 | Imaging catheter and imaging device |
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