CN103901359B - There is the test platform of dry environment - Google Patents
There is the test platform of dry environment Download PDFInfo
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- CN103901359B CN103901359B CN201210590876.7A CN201210590876A CN103901359B CN 103901359 B CN103901359 B CN 103901359B CN 201210590876 A CN201210590876 A CN 201210590876A CN 103901359 B CN103901359 B CN 103901359B
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- dry gas
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Abstract
A kind of test platform with dry environment, it comprises a load bearing seat, a deflector and a dry gas generation apparatus.Load bearing seat has a test zone, deflector arranges the periphery surrounding load bearing seat, and dry gas generation apparatus is linked to deflector, in order to produce a dry gas, dry gas utilizes the guiding of deflector to flow toward test zone, prevents condensation producing dry environment.
Description
Technical field
The present invention relates to a kind of test platform with dry environment, particularly relate to one and utilize deflector to guide dry gas to test zone, to produce the test platform of dry environment.
Background technology
While development in science and technology and epoch progress, people's environmental consciousness comes back and environmental protection ideas is along with progress, carbon reduction has become the target of subject under discussion and the effort paid attention to countries in the world, therefore lamp, daylight lamp, iodine-tungsten lamp and high-pressure mercury lamp are processed in vain with what use habitually in the past, gradually by light emitting diode (LightEmittingDiode;LED) lamp replaces, LED lamp for non-friable, power saving, environmental protection without hydrargyrum, light source tool directivity, volume is little, colour gamut is enriched, can be applicable to low temperature environment, cause light evil less and the advantage of long working life, therefore LED will widely, revolutionaryly replace the existing light sources such as traditional electric filament lamp, and then becomes the principal light source meeting energy-conserving and environment-protective theme.
Wherein, the test technology that existing LED chip manufacturing process technique includes the crystal silicon technique of heap of stone forming crystal silicon wafer (EpitaxialWafer) of heap of stone on the substrate of base material, uses wafer LED chip handled by packaging technology to the crystal grain technique producing several LED chip, the packaging technology of LED chip utilizing crystal grain technique to produce and test.Wherein, in the test technology of conventional LED chip, testing electrical property need to be carried out on test platform, and then learn optical characteristics and the current characteristics of the upper each LED chip of a wafer (disk), and in the process carrying out testing electrical property, owing to test environment typically requires as room temperature, need what is more to carry out at different temperature testing (high temperature etc. such as the low temperature of negative 40 DEG C or negative 50 DEG C or 135 DEG C).But, owing to the humidity of the test environment of existing test platform is higher, when it tests under low temperature environment, LED chip easily has the problem that condensation even freezes to occur, and then has influence on the result of testing electrical property, and therefore prior art still has the space of improvement.
Summary of the invention
The present invention is intended to solve the technical problem that and purpose:
Because in the prior art, when testing chip at low ambient temperatures due to existing test platform, it has the problem that easy condensation even freezes and the result having influence on testing electrical property, so this test platform must be placed in a dry room, and this room must be isolated from the outside really, to avoid above-mentioned condensation trouble to occur, when test process needs repairing or tests end, system all must be allowed to rise again to room temperature and just can carry out subsequent job, use its inconvenience.
Edge this, a kind of test platform with dry environment of offer is provided, it is to utilize deflector to guide dry gas to test zone, uses the dry test environment producing cladding test platform and determinand and then prevents condensation.
This invention address that the technological means of problem:
The present invention solves problem of the prior art, the necessary technology means adopted are to provide a kind of test platform with dry environment, and test platform comprises a load bearing seat, a deflector and a dry gas generation apparatus.Load bearing seat has a test zone, deflector arranges the periphery surrounding load bearing seat, dry gas generation apparatus system is linked to deflector, in order to produce a dry gas, dry gas system utilizes the guiding of deflector to flow toward test zone, produces dry environment and prevents condensation being coated with test zone and determinand.
Preferably, in above-mentioned test platform, deflector has a diversion division, and after dry gas flows to diversion division, the guiding utilizing diversion division is flowed toward test zone, and deflector also has multiple venthole, and dry gas is flowed to diversion division by those ventholes.Additionally, deflector also has an air inlet, in order to link dry gas generation apparatus, dry gas is entered deflector by air inlet and flows to those ventholes, it addition, diversion division has a channelization angle, use and increase the uniformity that dry gas flows toward test zone.
Preferably, in above-mentioned test platform, it is furnished with light emitting diode (LightEmittingDiode in order to test one;LED) wafer to be measured (disk) (wafer) of chip, and also comprise a housing and a dry gas line, housing is in order to hide the superjacent air space of test zone, and dry gas line and be linked to dry gas generation apparatus, dry gas line is arranged at enclosure interior, to prevent condensation in the superjacent air space of test zone generation dry environment.Additionally, dry gas generation apparatus is an air filter, and load bearing seat is a load bearing seat with temp. control function, test zone can be carried out temperature control.
Present invention effect against existing technologies:
Compared to prior art, utilize the test platform with dry environment provided by the present invention, the test environment producing to test zone to dry owing to utilizing deflector to be guided by dry gas, so that condensation or the phenomenon generation frozen can be prevented when testing LED chip, and then improve the reliability of testing electrical property.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Accompanying drawing explanation
Fig. 1 shows the schematic diagram of the test platform with dry environment of the present invention the first preferred embodiment；
Fig. 2 shows load bearing seat and the deflector perspective cross-sectional schematic diagram of the present invention the first preferred embodiment；
Fig. 3 shows load bearing seat and the deflector perspective cross-sectional schematic diagram of the test platform of the present invention the second preferred embodiment；And
Fig. 4 shows the cross-sectional schematic of the test platform with dry environment of third embodiment of the invention.
Wherein, accompanying drawing labelling
1,1a has the test platform of dry environment
11,11a load bearing seat
111,111a test zone
12,12a deflector
121,121a diversion division
1211 channelization angles
122,122a air inlet
123a venthole
13 dry gas generation apparatus
14 housings
15 dry gas lines
Detailed description of the invention
Owing to, in the test platform with dry environment provided by the present invention, its combination embodiment is too numerous to enumerate, therefore this is no longer going to repeat them, only enumerates three preferred embodiments and is illustrated.
Seeing also the schematic diagram that Fig. 1 and Fig. 2, Fig. 1 show the test platform with dry environment of the present invention the first preferred embodiment, Fig. 2 shows load bearing seat and the deflector perspective cross-sectional schematic diagram of the present invention the first preferred embodiment.As it can be seen, the test platform 1 with dry environment that the present invention the first preferred embodiment provides is furnished with light emitting diode (LightEmittingDiode in order to test one;LED) wafer to be measured (wafer) of chip, certainly can test other determinands in other embodiments and be not limited to above-mentioned, wherein, the test platform 1 with dry environment comprises load bearing seat 11, deflector 12 with temp. control function and a dry gas generation apparatus 13, load bearing seat 11 has a test zone 111, test zone 111 is in order to house above-mentioned determinand to carry out testing electrical property, and test zone 111 can be carried out temperature control by load bearing seat 11.
Deflector 12 arranges the periphery surrounding load bearing seat 11, it is around and adjacent to furthermore arrange in load bearing seat 11, and between deflector 12 and load bearing seat 11, there is gap, and deflector 12 can be made up of the metal material generally with rigidity, in addition, deflector 12 is provided with in a diversion division 121 and four air inlet 122(figure and only indicates one), diversion division 121 has channelization angle 1211, and channelization angle 1211 hides in above-mentioned gap, and the angle of channelization angle 1211 is such as 30 degree or 45 degree (angles down opened with the plane of diversion division 121 for horizontal plane), but it is not limited to above-mentioned.
Dry gas generation apparatus 13 is linked to deflector 12, pipeline (not shown) is specifically utilized to be linked to air inlet 122, and dry gas generation apparatus 13 can produce dry gas, and drying gas generation apparatus 13 is an air filter, but be not limited to above-mentioned, as long as the device spirit all without departing from the present invention of dry gas can be produced.
Wherein, user is when starting the test platform 1 with dry environment that the present invention the first preferred embodiment provides, dry gas generation apparatus 13 produces dry gas, and dry gas is via pipeline and above-mentioned gap, and flow via air inlet 122, after dry gas flows to diversion division 121, it is that the guiding utilizing deflector 12 is flowed toward test zone 111, so that test zone 111 forms dry environment and then prevents condensation, wherein, channelization angle 1211 can increase the uniformity that dry gas flows toward test zone 111.
Refer to Fig. 3, Fig. 3 and show the load bearing seat of test platform and the deflector perspective cross-sectional schematic diagram of the present invention the second preferred embodiment.As shown in Figure 3, second preferred embodiment and the first preferred embodiment the difference is that, deflector 12a only comprise in diversion division 121a, multiple air inlet 122a(figure only indicate one) and multiple venthole 123a(figure in only indicate one), and do not comprise the channelization angle 1211 such as the first preferred embodiment.Wherein, user is when starting the test platform 1a with dry environment that the present invention the second preferred embodiment provides, dry gas is to be entered deflector 12a by air inlet 122a and flow to those ventholes 123a, dry gas is flowed to diversion division 121a by those ventholes 123a again, the guiding of recycling diversion division 121a is flowed toward test zone 111a, other are all identical with the first preferred embodiment, are no longer repeated at this.
Refer to the cross-sectional schematic that Fig. 4, Fig. 4 show the test platform with dry environment of third embodiment of the invention.As shown in Figure 4, with the first preferred embodiment the difference is that, the test platform 1 with dry environment also comprises housing 14 and a dry gas line 15, housing 14 is in order to hide the superjacent air space of test zone 111, and dry gas line 15 is linked to dry gas generation apparatus 13, and it is arranged at the inside of housing 14, to produce dry environment in the superjacent air space of test zone 111 and to prevent condensation, all the other are all identical with the first preferred embodiment, are no longer repeated at this.
Comprehensive the above, utilize the test platform with dry environment provided by the present invention, the test environment producing to test zone to dry owing to utilizing deflector to be guided by dry gas, so that condensation or the phenomenon generation frozen can be prevented when testing LED chip, and then improve the reliability of testing electrical property.
Certainly; the present invention also can have other various embodiments; when without departing substantially from present invention spirit and essence thereof; those of ordinary skill in the art are when can make various corresponding change and deformation according to the present invention, but these change accordingly and deformation all should belong to the scope of the claims appended by the present invention.
Claims (8)
1. a test platform with dry environment, it is characterised in that this test platform comprises:
One load bearing seat, has a test zone；
One deflector, arranges the periphery surrounding this load bearing seat, and has a diversion division, and this diversion division is higher than this test zone；And
One dry gas generation apparatus, is linked to this deflector, in order to produce a dry gas, after this dry gas flows to this diversion division of this deflector, utilizes the guiding of this diversion division to flow toward this test zone, prevents condensation producing dry environment.
2. the test platform with dry environment according to claim 1, it is characterised in that this deflector also has multiple venthole, this dry gas is flowed to this diversion division by the plurality of venthole.
3. the test platform with dry environment according to claim 2, it is characterized in that, this deflector also has an air inlet, and in order to link this dry gas generation apparatus, this dry gas is entered this deflector by this air inlet and flows to the plurality of venthole.
4. the test platform with dry environment according to claim 1, it is characterised in that this diversion division has a channelization angle, uses and increases the uniformity that this dry gas flows toward this test zone.
5. the test platform with dry environment according to claim 1, it is characterised in that this test platform is in order to test a wafer to be measured being furnished with light-emitting diode chip for backlight unit.
6. the test platform with dry environment according to claim 1, it is characterised in that also comprise:
One housing, in order to hide the superjacent air space of this test zone；And
One dry gas line, is linked to this dry gas generation apparatus, and this dry gas line is arranged at this enclosure interior, to prevent condensation in the superjacent air space of this test zone generation dry environment.
7. the test platform with dry environment according to claim 1, it is characterised in that this dry gas generation apparatus is an air filter.
8. the test platform with dry environment according to claim 1, it is characterised in that this load bearing seat is a load bearing seat with temp. control function, and this test zone is carried out temperature control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210590876.7A CN103901359B (en) | 2012-12-31 | 2012-12-31 | There is the test platform of dry environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210590876.7A CN103901359B (en) | 2012-12-31 | 2012-12-31 | There is the test platform of dry environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103901359A CN103901359A (en) | 2014-07-02 |
| CN103901359B true CN103901359B (en) | 2016-06-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210590876.7A Active CN103901359B (en) | 2012-12-31 | 2012-12-31 | There is the test platform of dry environment |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI611193B (en) * | 2016-10-25 | 2018-01-11 | 致茂電子股份有限公司 | Anti-mist module for socket and electronic device testing apparatus provided with the same |
| CN110673011A (en) * | 2019-10-31 | 2020-01-10 | 苏州通富超威半导体有限公司 | Semiconductor testing device |
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| US6628503B2 (en) * | 2001-03-13 | 2003-09-30 | Nikon Corporation | Gas cooled electrostatic pin chuck for vacuum applications |
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| CN101650374A (en) * | 2008-08-12 | 2010-02-17 | 中茂电子(深圳)有限公司 | Semiconductor component test base provided with temperature-changing device and test machine platform |
| CN201897631U (en) * | 2010-10-19 | 2011-07-13 | 致茂电子(苏州)有限公司 | Semiconductor wafer testing device and detecting system with cooling devices |
| CN202630627U (en) * | 2012-05-14 | 2012-12-26 | 上海晟泰试验设备有限公司 | Drying device and high and low temperature test device adopting drying device |
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2012
- 2012-12-31 CN CN201210590876.7A patent/CN103901359B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
| US6628503B2 (en) * | 2001-03-13 | 2003-09-30 | Nikon Corporation | Gas cooled electrostatic pin chuck for vacuum applications |
| CN1433059A (en) * | 2002-01-07 | 2003-07-30 | 三星电子株式会社 | Semiconductor device test system |
| TWI239586B (en) * | 2004-11-23 | 2005-09-11 | Advanced Semiconductor Eng | A package testing socket |
| CN201007721Y (en) * | 2006-12-27 | 2008-01-16 | 中茂电子(深圳)有限公司 | Semiconductor component testing table with ventiduct cooling device |
| TWM328004U (en) * | 2007-09-14 | 2008-03-01 | Everlight Electronics Co Ltd | Measuring system for measuring characteristic temperature of light-emitting diode |
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| CN103901359A (en) | 2014-07-02 |
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