CN103943925A - Full-carbon coaxial line and manufacturing method thereof - Google Patents
Full-carbon coaxial line and manufacturing method thereof Download PDFInfo
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Abstract
The invention discloses a full-carbon coaxial line and a manufacturing method of the full-carbon coaxial line, and belongs to the technical field of integrated circuits. Graphene serves as a monatomic layer thickness, is coiled into a cylinder and form an inner conductor of the coaxial line with a small radius (can be as small as the nm level), and the inner conductor of the coaxial line transfers currents. Meanwhile, a signal layer or multiple layers of graphene serve(s) as an outer conductor of the coaxial line to form a boundary of electromagnetic waves in a space, and graphite oxide serves as medium materials between the inner conductor and the outer conductor to limit and guide oriented transmission of electromagnetic wave energy. The coaxial line is quite small in size and applicable to radio-frequency and microwave integrated circuits.
Description
Technical field
The invention belongs to technical field of integrated circuits, be specifically related to a kind of full carbon coaxial line and preparation method thereof.
Background technology
In integrated circuit, be called interconnection for interconnective line between transistor, under direct current or low frequency situation, do not need to consider Distribution Effect and the field effect of interconnection line.Along with the continuous lifting of digital circuit clock speed, radio frequency and microwave circuit operating frequency, at this moment not only need to consider the Distribution Effect of interconnection line, and the energy of signal is except comprising the kinetic energy of wire internal electron motion, also comprise the energy of electromagnetic field in wire surrounding space, electromagnetic field in electric current on wire and surrounding space or medium restricts mutually, and near the elect magnetic field of electromagnetic energy wire propagated in a certain direction.If still carry out transmitting high-frequency signal with traditional interconnection line, can cause signal loss, distort excessive.Select more suitably interconnection structure---transmission line, can obtain the interconnection line that still effectively works in radio frequency, microwave frequency band.Compared to traditional point-to-point interconnection line, transmission line has advantages of that signal distortion is less, electromagnetic radiation still less and crosstalk still less, thereby be more suitable for the signal transmission under high frequency.Except the device for connecting integrated circuit, transmission line is also widely used in formation microwave circuit element, as impedance transformer, power splitter, filter, resonator, transformer, directional coupler etc.The kind of transmission line has a lot, for example: parallel double conducting wire, coaxial line, strip line, microstrip line, co-planar waveguide etc.Different working frequency range, can select dissimilar transmission line, and the basic demand of selection is: loss is little, efficiency is high; Sizes, power capacity are large; Working band is wide; Little and even, the simple in structure easy processing of size.
At present preparing transmission line with metal (copper, aluminium, tungsten, gold etc.) exists some and affects the problem of circuit performance and reliability: the extra deposit one deck of metallic conductor (as copper) needs diffusion impervious layer that (1) has, and the resistivity of barrier material is conventionally very high, this can cause that the all-in resistance of transmission line increases (causing the increase of circuit RC delay, conductor thermal losses), this layer of barrier layer also taken the width of transmission line conductors nearly 20% in addition, in the process of conductor leveling, also can cause the depression of conductive surface, this can further increase the all-in resistance of conductor; (2) along with the reducing of interconnect dimensions, in transmission line, the cross section of metallic conductor and the mean free path of electronics (～40nm) can be in the same orders of magnitude, and this,, by greatly increasing the scattering to electronics of conductive surface and crystal boundary, causes the increase of conductor resistance; (3) on metal wire, can cause for a long time the movement (electromigration effect) of metal ion by electric current, this finally can cause the fracture of wire or the short circuit with another wire, causes the inefficacy (electromigratory incidence depends on temperature, crystal structure and average current density) of circuit; (4) along with the rising of signal frequency, the skin effect of metallic conductor also can cause the increase of conductor resistance, the decay of signal.
Summary of the invention
The object of the invention is to propose full carbon coaxial line that a kind of size is very little and preparation method thereof.
Technical scheme of the present invention is as follows:
The present invention utilizes this design feature of the monatomic bed thickness of Graphene, Graphene volume is made to cylinder, form the inner wire of the coaxial line of radius very little (may diminish to nm rank), roll up to do the inner wire conduction current of coaxial line with Graphene, simultaneously, the outer conductor that makes coaxial line of single or multiple lift Graphene forms the border of electromagnetic wave in space, utilizes graphite oxide to do the dielectric material between inner wire and outer conductor, the directional transmissions of constraint, guide electromagnetic waves energy.
The present invention is complete, and carbon coaxial line can be applicable to radio frequency, microwave integrated circuit.
The preparation method of the full carbon coaxial line of the present invention, comprises the following steps:
(1) prepare single or multiple lift Graphene;
(2) single or multiple lift Graphene is curled into the inner wire of cylindrical formation coaxial line;
(3) at the surface deposition of coaxial inner conductor or parcel one deck graphite oxide as the dielectric material between inner wire and the outer conductor of coaxial line;
(4) wrap up again one or more layers Graphene on the surface of above-mentioned graphite oxide and form the outer conductor of coaxial line.
Technique effect of the present invention is as follows:
(1) because the thickness of single-layer graphene only has 0.34nm, prepare coaxial line even adopt bilayer, multi-layer graphene or graphite flake, the size of coaxial line still can very little (under same size situation, metal coaxial line has higher resistance, worse reliability and more difficult technical process), goes for radio frequency, microwave integrated circuit; (2) graphene-structured is stable, prepares coaxial line do not need diffusion impervious layer with Graphene, and manufacture craft is simpler; (3) high conductivity of Graphene makes the coaxial line based on Graphene under high frequency, have higher effectiveness; (4) maximum current density that the coaxial line based on Graphene can bear is up to 10
8a/cm
2, there is very good deelectric transferred ability; (5) Graphene has good heat conductivity, can alleviate local temperature in coaxial line signals transmission too high and the phenomenon that wire fusing or medium heat puncture occurs; (6) under high frequency, there is not obvious skin effect in Graphene, and the coaxial line resistance based on Graphene can remain unchanged in very wide frequency band, and the performance of circuit is also more stable.In a word, the coaxial line based on Graphene has better transmission performance and reliability.
Brief description of the drawings
Fig. 1 is the full carbon coaxial line structure of the present invention schematic diagram;
In figure:
1---inner wire 2---outer conductor
3---the dielectric material between inner wire and outer conductor
Embodiment
Below by example, the present invention will be further described.It should be noted that publicizing and implementing routine object is to help further to understand the present invention, but it will be appreciated by those skilled in the art that: not departing from the spirit and scope of the present invention and claims, various substitutions and modifications are all possible.Therefore, the present invention should not be limited to the disclosed content of embodiment, and the scope that the scope of protection of present invention defines with claims is as the criterion.
Can adopt individual layer, bilayer, multi-layer graphene.The concrete preparation process of the full carbon coaxial line based on Graphene is as follows:
(1) carbon-based material preparation: obtain required Graphene (individual layer, bilayer, multilayer or graphite flake) and can adopt accomplished in many ways, for example: can pass through the method generations such as mechanical stripping, chemical vapour deposition (CVD), silicon carbide epitaxial growth, solvent heat be synthetic.
(2) preparation of coaxial inner conductor: Graphene (individual layer, bilayer or multilayer) is curled into cylindrical, scope is 0.2nm～500nm, can adopt the method for machine crimp, also Graphene can be put into the solution such as deionized water, ethanol, acetone, isopropyl alcohol and allow it form Graphene volume from volume;
(3) preparation of graphite oxide: graphite oxide can obtain by the method that uses potassium chlorate and nitric acid oxidation graphite, also can obtain by the method that uses potassium permanganate and sulfuric acid oxidation graphite.
(4) at the surface deposition of coaxial inner conductor or parcel one deck graphite oxide as the medium between the inner and outer conductor of coaxial line, thickness range is 1nm～2000nm;
(5) wrap up one or more layers Graphene on the surface of above-mentioned graphite oxide again and form the outer conductor of coaxial line, thickness is 0.34nm～100nm.
Although the present invention discloses as above with preferred embodiment, but not in order to limit the present invention.Any those of ordinary skill in the art, do not departing from technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not depart from technical solution of the present invention,, all still belongs in the scope of technical solution of the present invention protection any simple modification made for any of the above embodiments, equivalent variations and modification according to technical spirit of the present invention.
Claims (8)
1. a full carbon coaxial line, it is characterized in that, be rolled into the inner wire of cylinder as coaxial line with single or multiple lift Graphene, wrap up individual layer or the multi-layer graphene outer conductor as coaxial line in the outside of described inner wire, and fill graphite oxide as dielectric material between described inner wire and outer conductor.
2. full carbon coaxial line as claimed in claim 1, is characterized in that, described inner wire section radius is 0.2nm～500nm.
3. full carbon coaxial line as claimed in claim 1, is characterized in that, described dielectric material thickness is 1nm～2000nm.
4. full carbon coaxial line as claimed in claim 1, is characterized in that, the thickness of described outer conductor is 0.34nm～100nm.
5. a preparation method for full carbon coaxial line claimed in claim 1, comprises the following steps:
(1) prepare single or multiple lift Graphene;
(2) single or multiple lift Graphene is curled into cylinder, forms the inner wire of coaxial line;
(3) at the surface deposition of described inner wire or parcel one deck graphite oxide as dielectric material;
(4) wrap up again one or more layers Graphene on the surface of described graphite oxide and form the outer conductor of coaxial line.
6. preparation method as claimed in claim 5, is characterized in that, in described step (1), generates individual layer, bilayer or multi-layer graphene by mechanical stripping, chemical vapour deposition (CVD), silicon carbide epitaxial growth or solvent process for thermosynthesizing.
7. preparation method as claimed in claim 5, is characterized in that, adopts the method for machine crimp or Graphene is put into deionized water, ethanol, acetone or aqueous isopropanol to allow it form the inner wire of coaxial line from volume in described step (2).
8. preparation method as claimed in claim 5, is characterized in that, in described step (3), graphite oxide obtains by the method that uses potassium chlorate and nitric acid oxidation graphite, or makes by the method that uses potassium permanganate and sulfuric acid oxidation graphite.
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| CN201410116434.8A CN103943925B (en) | 2014-03-26 | 2014-03-26 | A kind of full carbon coaxial line and preparation method thereof |
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