CN103985429A - Small-scale atom chip two-cavity vacuum system - Google Patents

Small-scale atom chip two-cavity vacuum system Download PDF

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Publication number
CN103985429A
CN103985429A CN201410239828.2A CN201410239828A CN103985429A CN 103985429 A CN103985429 A CN 103985429A CN 201410239828 A CN201410239828 A CN 201410239828A CN 103985429 A CN103985429 A CN 103985429A
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flange
vacuum
face
square
glass
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程俊
张海潮
李晓林
张敬芳
王育竹
王金媛
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Publication of CN103985429A publication Critical patent/CN103985429A/en
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Abstract

The invention discloses a small-scale atom chip two-cavity vacuum system which is mainly applicable to laser cooling and cold atom transfer. A square six-way cavity is formed in the center of the vacuum system, and the centers of the six faces of the square six-way cavity are respectively provided with a through hole and a corresponding connecting flange. The flange on the upper end face of the square six-way cavity is connected with a flange of a high vacuum glass pool cavity, the flange on the lower end face of the square six-way cavity is connected with a flange of a low vacuum glass pool cavity, the flange on the left end face of the square six-way cavity is connected with a flange of an ionic pump with the pumping speed being 2 L/s, the flange on the right end face of the square six-way cavity is connected with a two-core wiring flange of a two-core wiring flange device, two stems of the two-core wiring flange are connected with the two lead ends of a first vacuum getter respectively through vacuum wiring terminals, the flange on the front end face of the square six-way cavity is connected with an adapter flange of a sheared second copper pipe, and the flange on the rear end face of the square six-way cavity is connected with an adapter flange of a sheared first copper pipe. The small-scale atom chip two-cavity vacuum system has the advantages of being small in size, low in power consumption, high in repetitive rate, good in stability and the like.

Description

Miniaturization Atom Chip double-cavity vacuum system
Technical field
The present invention relates to laser cooling and trapping atoms, particularly a kind of cooling miniaturization Atom Chip double-cavity vacuum system shifting with cold atom of laser that is mainly applicable to.
Background technology
Along with the development of laser cooling and trapping atoms technology, supercool atomic medium has obtained good application at aspects such as quantum frequency standards, atomic interferometer and quantum information processing gradually.But the experimental provision of traditional cold atom system often means huge vacuum plant, thereby the field coil electric current and the water-cooling system etc. that have caused tens amperes are too complicated and huge system, this has hindered the application in practice of cold atom system to a certain extent, and therefore developing miniaturization cold atom system becomes an important trend of Physics of Cold Atoms and technical development in the world.Atom Chip has as the miniaturization double-cavity vacuum system of chamber wall that volume is little, low in energy consumption, repetition rate is high and the advantage such as good stability.
Atom Chip is the core of miniaturization cold atom chip two-chamber system, utilize ripe microelectric technique, etching conductor structure on chip, after being electrified stream, can form firm and complicated potential well, thereby can imprison be manipulated accurately and be shifted the cold atom group in magnetic well, and can Highgrade integration.Therefore the structure of Atom Chip can be compact small and exquisite, electric current very little on chip just can produce very large magnetic field gradient and magnetic well frequency.This means that the atom of imprisoning in magnetic well has very high elastic collision rate and atomic density, be conducive to accelerate transpiration-cooled speed, reduce the transpiration-cooled time, this has just reduced tests the requirement for the magnetic well life-span, also just reduced the requirement of system to vacuum tightness, thereby can greatly reduce the size of vacuum system and field coil, greatly improve stability, reliability and the portability of cold atom device simultaneously.
Although single chamber system is simply small and exquisite, cannot solve the contradiction of magnetic well life-span and efficiency of loading, background vacuum is low, and the Magneto-Optical Trap loading time must be grown.
Summary of the invention
The object of the invention is the problem that volume is large, power consumption is high in order to improve traditional cold atom vacuum system, a kind of miniaturization Atom Chip double-cavity vacuum system that the cooling and cold atom of laser shifts that is mainly applicable to is provided, and this vacuum system has that volume is little, low in energy consumption, repetition rate is high and the advantage such as good stability.
Technical solution of the present invention is as follows:
A kind of cooling miniaturization Atom Chip double-cavity vacuum system shifting with cold atom of laser that is mainly applicable to, its feature is: the center of this vacuum system is square six cavities, the Liu Gemian center of these square six cavities respectively has a through hole and corresponding joint flange, the flange of upper surface is connected with the flange of high-vacuum glass cell cavity chamber, the flange of lower surface is connected with the flange of low vacuum aquarium chamber, the flange of left side is connected with the flange of the ionic pump that pumping speed is 2L/s, the flange of right side is connected with two core wiring flanges of two core wiring flange apparatus, two stem stems of this two cores wiring flange connect respectively two lead ends of the first getter with vaccum connecting terminal, the flange of front end face is connected with the second copper pipe adapter flange of cutting off, and the flange of rear end face is connected with the first copper pipe adapter flange of cutting off,
Described high-vacuum glass cell cavity chamber is one end welding the first glass metal adapter flange by square glass pipe, and the other end forms by the golden aspect of the gluing upper chip of epoxide resin vacuum;
The main body of described low vacuum aquarium chamber is six rectangular parallelepiped aquariums of a diplopore, six rectangular parallelepiped aquariums of this diplopore are opened the glass tube end face welding of end face and the second glass metal adapter flange of aperture, the small-caliber end phase welding of the end face of wide-bore and hot atom generator, the glass planar sheets vacuum epoxy resin glue bond of heavy caliber one end of this hot atom generator and four metal mandrils of a sealing by fusing, two relative metal mandrils connect two lead ends of atomic source with vaccum connecting terminal, another two metal mandrils are connected with two lead ends of the second getter with vaccum connecting terminal.
The diameter of the aperture of described low vacuum aquarium chamber is 650-850 micron.
The preparation method of described miniaturization double-cavity vacuum system, the method comprises the following steps:
1) be first assembled into forvacuum system, forvacuum system comprises square six cavities, high-vacuum glass cell cavity chamber, low vacuum aquarium chamber, two core wiring flange apparatus, peripheral set of pumps, 2L/s ionic pump and vacuum measuring device, the Liu Gemian center of described square six cavities respectively has a through hole and corresponding joint flange, the flange of upper surface is connected with the flange of described high-vacuum glass cell cavity chamber, the flange of lower surface is connected with the flange of described low vacuum aquarium chamber, the flange of left side is connected with the flange of the ionic pump that described pumping speed is 2L/s, the flange of right side is connected with two core wiring flanges of described two core wiring flange apparatus, two stem stems of this two cores wiring flange connect respectively two lead ends of getter with vaccum connecting terminal, the flange of front end face is connected with the second copper pipe adapter flange that described vacuum measuring device is connected, and the flange of rear end face is connected with the first copper pipe adapter flange that described peripheral set of pumps is connected,
Described high-vacuum glass cell cavity chamber is one end welding the first glass metal adapter flange by square glass pipe, and the other end forms by the golden aspect of the gluing upper chip of epoxide resin vacuum;
The main body of described low vacuum aquarium chamber is six rectangular parallelepiped aquariums of a diplopore, six rectangular parallelepiped aquariums of this diplopore are opened the glass tube end face welding of end face and the second glass metal adapter flange of aperture, the small-caliber end phase welding of the end face of wide-bore and hot atom generator, the glass planar sheets vacuum epoxy resin glue bond of heavy caliber one end of this hot atom generator and four metal mandrils of a sealing by fusing, two relative metal mandrils connect two lead ends of atomic source with vaccum connecting terminal, another two metal mandrils are connected with two lead ends of getter with vaccum connecting terminal.
2) utilize described peripheral set of pumps and vacuum measuring device monitoring that the vacuum tightness of system is extracted into lower than 1 × 10 -9torr;
3) copper pipe of the copper pipe of the first copper pipe adapter flange that employing cold seal hydraulic tongs is connected described square six cavities with described peripheral pumping unit and the second copper pipe adapter flange being connected with described vacuum measuring device is cut off respectively, obtains miniaturization Atom Chip double-cavity vacuum system of the present invention.
Technique effect of the present invention is as follows:
The present invention has abandoned the traditional approach that adopts wiring flange to connect atomic source, the technology of utilizing glass metal welding by the metal electrode sealing by fusing that connects atomic source in glass tube, thereby reduced volume; Adopt the design of difference aperture (size: 650-850 micron), than traditional difference pipe design, not only made two vacuum chambers maintain the vacuum pressure reduction of 1-2 the order of magnitude, and make whole vacuum system compacter, thereby realize miniaturization; High-vacuum chamber has adopted the design of vacuum epoxy resin glue bond chip at aquarium end face, make chip become a chamber wall of vacuum chamber, than the traditional design that chip is placed in to inside, vacuum glass pond, this design makes chamber interior structure simpler, the external lead-in wire of chip can be placed on outside vacuum, thereby the venting of having avoided lead-in wire to be placed in causing vacuum inside, the problem such as be in the light; Whole vacuum system has adopted the cold seal technology of cutting off sealing copper pipe vacuum, makes vacuum system miniaturization more, and the volume of whole miniaturized vacuum system is 0.005-0.01 cubic meter.
The present invention adopts two-chamber system, and a cavity does two-dimentional Magneto-Optical Trap, and another does Three-Dimensional Magnetic ligh trap, middle by two vacuum poor (1 × 10 that vacuum chamber has two orders of magnitude of a difference hole (size: 650-850 micron) maintenance -7torr and 1 × 10 -9torr).Be convenient to two-dimentional Magneto-Optical Trap and obtain enough large atom line (1 × 10 9-1 × 10 11), can improve the rate of loading, cold atom number and the cold atom of Three-Dimensional Magnetic ligh trap and prepare speed.The ultrahigh vacuum (1 × 10 of high-vacuum chamber simultaneously -9torr) enough complete evaporative cooling and follow-up test.Although use two vacuum chambers, vacuum system volume is still very little, and the stability of system also strengthens, and the repetition rate of experiment improves greatly.
Vacuum system of the present invention has that volume is little, low in energy consumption, repetition rate is high and the advantage such as good stability.
Brief description of the drawings
Fig. 1 is the system of taking out in advance of miniaturization Atom Chip double-cavity vacuum system of the present invention
Wherein: square six cavities of 1-, 21-chip, 22-square glass pipe, 23-the first glass metal adapter flange, 31-the second glass metal adapter flange, six square glass ponds of 32-diplopore, 33-hot atom generator tube, the 2L/s ionic pump of 4-CF16 joint, 51-wiring flange, 52-getter, 61-the first copper pipe adapter flange [CF16-copper pipe-CF35 adapter flange], 71-the second copper pipe adapter flange [CF16-copper pipe-CF35 adapter flange], 72-bipass, the ultrahigh vacuum ionization silicon of 73-CF35 interface, 81-CF35 three-way pipe, the 40L/s ionic pump of 82-CF35 joint, the 83-CF35 family of power and influence, 84-machinery molecular pump unit.
Fig. 2 is the miniaturized vacuum system of cutting off
Wherein: the copper pipe after 61a, 71a-cut off; All the other code names are as Fig. 1.
Fig. 3 is peripheral set of pumps
Fig. 4 is high-vacuum glass cell cavity chamber
Fig. 5 is glass metal adapter flange (23 and 31 in corresponding diagram 1)
Fig. 6 is square six cavities
Fig. 7 is low vacuum aquarium chamber
Fig. 8 is the square six surface glass ponds of low vacuum part
Wherein: a face of six square glass pond adhesion heat atom generator tubes of 321-, 322-diameter is the macropore of 10 millimeters, a face that connects glass metal flange in six square glass ponds of 323-, 324-diameter is the micropore of 650-850 micron.
Fig. 9 is the hot atom generator tube of low vacuum part
Wherein: 331-turns footpath glass tube, 332-getter, 333-atomic source, 334-melts the glass planar sheets of back cover root metal connection post.
Figure 10 is wiring flange apparatus
Embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention is further described, but should not limit variation range of the present invention with this.
Fig. 1 is the forvacuum system of miniaturization Atom Chip double-cavity vacuum system of the present invention, comprises square six cavities 1, high-vacuum glass cell cavity chamber, low vacuum aquarium chamber, two core wiring flange apparatus, peripheral set of pumps, 2L/s ionic pump and vacuum measuring device.The center of this vacuum system is a square six cavities 1, the Liu Gemian center of these square six cavities 1 respectively has a through hole and corresponding joint flange, the flange of upper surface is connected with the flange of high-vacuum glass cell cavity chamber, the flange of lower surface is connected with the flange of low vacuum aquarium chamber, the flange of the ionic pump 4 that the flange of left side is 2L/s with pumping speed is connected, the flange of right side is connected with two core wiring flanges 51 of two core wiring flange apparatus, two stem stems of this two cores wiring flange connect respectively two lead ends of the first getter 52 with vaccum connecting terminal, the flange of front end face is connected with the second copper pipe adapter flange 71 of cutting off, and the flange of rear end face is connected with the first copper pipe adapter flange 61 of cutting off,
Assembling high-vacuum glass pond chamber portion: square glass pipe 22 is of a size of: outer wall dimension: 23 millimeters × 23 millimeters × 80 millimeters, 1.5 millimeters of wall thickness, an end face of square glass pipe 22 is molten to the glass end face of the glass metal adapter flange 23 in Fig. 5 with oxyhydrogen flame, this glass end face is of a size of: outer ring diameter is 22 millimeters, interior ring diameter is 19 millimeters, another end face that with epoxide resin vacuum glue, the golden aspect of the chip of silicon base plated surface 4-10 micron chickens layer is adhered to again to square glass pipe 22, finally forms Fig. 4.The CF16 flange of this ultrahigh vacuum part is fixed on to the upside of square six cavities 1 with M4 hexagon socket head cap screw.
Assembling low vacuum aquarium chamber portion: as six square glass ponds 32 in Fig. 8, outer wall dimension: 23 millimeters × 23 millimeters × 60 millimeters, 1.5 millimeters of wall thickness, its bottom surface 323 is gluing with epoxide resin vacuum with the glass end face of glass metal flange 31, and ensure the aperture at 323 centers, bottom surface and the glass end face of glass metal flange 31 concentric.As Fig. 9, two pins of atomic source 333 are fixed on vaccum connecting terminal on two relative binding posts of the glass planar sheets 334 of melting back cover root metal connection post, two pins of getter 332 are fixed on vaccum connecting terminal on two remaining binding posts of the glass planar sheets 334 of melting back cover root metal connection post, and ensure that four vaccum connecting terminals do not hit mutually, by the conduction of two pairs of pins of multimeter test.Finally be adhesive on the glass planar of the glass planar sheets 334 of melting back cover root metal connection post with the heavy caliber one end epoxide resin vacuum that turns footpath glass tube 331, be assembled into as shown in Figure 9.Again this assembly (Fig. 9) is glued to the face 321 in six square glass ponds 32 of diplopore with epoxide resin vacuum, and ensures that the interior ring of small-bore end face that turns footpath glass tube 331 overlaps with hole 322.Assembly after gluing as shown in Figure 7.The CF16 flange of this low vacuum part is fixed on to the downside of square six cavities 1 with M4 hexagon socket head cap screw.
Assemble two core wiring flange apparatus: two pin vaccum connecting terminals of getter 52 are fixed on two pins of two core wiring flange inside.And wiring flange is fixed on to the left side of square six cavities with M4 hexagon socket head cap screw.
The 2L/s ionic pump of assembling CF16 interface: 2L/s ionic pump is loaded onto to magnet, then used M4 hexagon socket head cap screw to be fixed on the right side of square six cavities 1.
Assembling ultrahigh vacuum ionization silicon part: because the interface of ultrahigh vacuum ionization silicon 73 (be used for surveying vacuum tightness) is CF35, turn the switching of CF35 flange so need to use CF16, and in order to make system compacter, so after system has been taken out vacuum, need vacuum measuring device to separate with miniaturized vacuum system, therefore adopt CF16 flange-copper pipe-CF35 flange switching 71.Now ultrahigh vacuum is ionized to silicon 73 use M6 outer-hexagonal screws and be fixed on one end of CF35 bipass 72, then the other end of CF35 bipass 72 is fixed on to the front side of square six cavities 1.
Assemble peripheral pump group part: finally only have 2L/s ionic pump and maintain vacuum due to miniaturized vacuum system, take out in advance so need peripheral pump group to do one, it is 10 that whole system is extracted into vacuum tightness before miniaturized system reaches ultrahigh vacuum -9torr, and then by cold seal technology, peripheral pump group is cut off and separated with miniaturized vacuum system.Concrete assembling process: mechanical molecular pump unit 84 is installed to by screw on a flange of the family of power and influence 83 of CF35, again another flange of the family of power and influence 83 is fixed in a flange of three-way pipe 81, the vertical flange of three-way pipe 81 is connected with screw with the flange port of 40L/s ionic pump 82, is assembled into as Fig. 3.Three-way pipe 81 remaining CF35 flanges are connected with the CF35 flange of CF16-copper pipe-CF35 adapter flange 61, finally the CF16 flange of CF16-copper pipe-CF35 adapter flange 61 are fixed on to the rear side of square six cavities 1.
Vacuumize and cut off copper pipe and reach miniaturized system process: according to step above, whole forvacuum system building is got up, as Fig. 1, the family of power and influence 83 is opened, open mechanical molecular pump unit 84, treat that mechanical molecular pump unit 84 shows that vacuum tightness has reached the minimum of this pump, open 40L/s ionic pump 82, the registration for the treatment of 40L/s ionic pump 82 reaches stable, the metal part of whole system is baked to 150 degrees Celsius, aquarium part is baked to 100 degrees Celsius, the registration for the treatment of 40L/s ionic pump 82 no longer declines, getter 52 is energized to 6-8A by two pins that melt inside front cover core wiring flange 51, 30 minutes duration, getter 52 is activated, after the registration of 40L/s ionic pump 82 is stablized, two pins of the glass planar sheets 334 by getter 332 by melting back cover root metal connection post are energized to 6-8A, 30 minutes duration, getter 332 is activated, after 40L/s ionic pump 82 registrations are stable, by the high-voltage power supply of ultrahigh vacuum ionization silicon 73, ultrahigh vacuum being ionized to silicon 73 carries out degassed, after degassed, measure vacuum, treat mechanical molecular pump unit 84, after 40L/s ionic pump 82 registrations no longer change, turn off the family of power and influence 83, after the stable no longer decline of ionic pump registration, make whole system be down to room temperature, clamp CF16-copper pipe-CF35 adapter flange 61 by hydraulic pressure cold seal, 71 cut off respectively, final vacuum system is as Fig. 2.
Experiment shows, the present invention adopts two-chamber system, and a cavity does two-dimentional Magneto-Optical Trap, and another does Three-Dimensional Magnetic ligh trap, middle by two vacuum poor (1 × 10 that vacuum chamber has two orders of magnitude of a difference hole (size: 650-850 micron) maintenance -7torr and 1 × 10 -9torr).Be convenient to two-dimentional Magneto-Optical Trap and obtain enough large atom line (1 × 10 9-1 × 10 11), can improve the rate of loading, cold atom number and the cold atom of Three-Dimensional Magnetic ligh trap and prepare speed.The ultrahigh vacuum (1 × 10 of high-vacuum chamber simultaneously -9torr) enough complete evaporative cooling and follow-up test.Although use two vacuum chambers, vacuum system volume is still very little, and the stability of system also strengthens, and the repetition rate of experiment improves greatly.
Vacuum system of the present invention has that volume is little, low in energy consumption, repetition rate is high and the advantage such as good stability.

Claims (3)

1. a miniaturization Atom Chip double-cavity vacuum system, it is characterized in that: the center of this vacuum system is square six cavities (1), the Liu Gemian center of these square six cavities (1) respectively has a through hole and corresponding joint flange, the flange of upper surface is connected with the flange of high-vacuum glass cell cavity chamber, the flange of lower surface is connected with the flange of low vacuum aquarium chamber, the flange of the ionic pump (4) that the flange of left side is 2L/s with pumping speed is connected, the flange of right side is connected with two core wiring flanges (51) of two core wiring flange apparatus, two stem stems of this two cores wiring flange connect respectively two lead ends of the first getter (52) with vaccum connecting terminal, the flange of front end face is connected with the second copper pipe adapter flange (71) of cutting off, and the flange of rear end face is connected with the first copper pipe adapter flange (61) of cutting off,
Described high-vacuum glass cell cavity chamber is one end welding the first glass metal adapter flange (23) by square glass pipe (22), and the other end forms by the golden aspect of the gluing upper chip of epoxide resin vacuum (21);
The main body of described low vacuum aquarium chamber is six rectangular parallelepiped aquariums of a diplopore (32), six rectangular parallelepiped aquariums of this diplopore (32) are opened the glass tube end face welding of end face (323) Yu the second glass metal adapter flange (31) of aperture (324), the end face (321) of wide-bore (322) and the small-caliber end phase welding of hot atom generator (33), the glass planar sheets (334) of heavy caliber one end of this hot atom generator (33) and four metal mandrils of a sealing by fusing is used vacuum epoxy resin glue bond, two relative metal mandrils connect two lead ends of atomic source (333) with vaccum connecting terminal, another two metal mandrils are connected with two lead ends of the second getter (332) with vaccum connecting terminal.
2. chip according to claim 1, as the miniaturization double-cavity vacuum system of chamber wall, is characterized in that the diameter of the aperture (324) of described low vacuum aquarium chamber is 650-850 micron.
3. the preparation method of miniaturization double-cavity vacuum system claimed in claim 1, is characterized in that the method comprises the following steps:
1) be first assembled into forvacuum system, forvacuum system comprises square six cavities (1), high-vacuum glass cell cavity chamber (21, 22, 23), low vacuum aquarium chamber (31, 32, 33), two core wiring flange apparatus (51, 52), peripheral set of pumps (81, 82, 83, 84), 2L/s ionic pump (4) and vacuum measuring device (71, 72, 73), the Liu Gemian center of described square six cavities (1) respectively has a through hole and corresponding joint flange, the flange of upper surface is connected with the flange of described high-vacuum glass cell cavity chamber, the flange of lower surface is connected with the flange of described low vacuum aquarium chamber, the flange of the ionic pump (4) that the flange of left side is 2L/s with described pumping speed is connected, the flange of right side is connected with two core wiring flanges (51) of described two core wiring flange apparatus, and two stem stems of this two cores wiring flange connect respectively two lead ends of getter (52) with vaccum connecting terminal, the flange of front end face is connected with the second copper pipe adapter flange (71) that described vacuum measuring device (71,72,73) is connected, and the flange of rear end face is connected with the first copper pipe adapter flange (61) that described peripheral set of pumps (81,82,83,84) is connected,
Described high-vacuum glass cell cavity chamber is one end welding the first glass metal adapter flange (23) by square glass pipe (22), and the other end forms by the golden aspect of the gluing upper chip of epoxide resin vacuum (21);
The main body of described low vacuum aquarium chamber is six rectangular parallelepiped aquariums of a diplopore (32), six rectangular parallelepiped aquariums of this diplopore (32) are opened the glass tube end face welding of end face (323) Yu the second glass metal adapter flange (31) of aperture (324), the end face (321) of wide-bore (322) and the small-caliber end phase welding of hot atom generator (33), the glass planar sheets (334) of heavy caliber one end of this hot atom generator (33) and four metal mandrils of a sealing by fusing is used vacuum epoxy resin glue bond, two relative metal mandrils connect two lead ends of atomic source (333) with vaccum connecting terminal, another two metal mandrils are connected with two lead ends of getter (332) with vaccum connecting terminal.
2) utilize described peripheral set of pumps (81,82,83,84) and vacuum measuring device monitoring that the vacuum tightness of system is extracted into lower than 1 × 10 -9torr;
3) copper pipe of the copper pipe of the first copper pipe adapter flange that employing cold seal hydraulic tongs is connected described square six cavities (1) with described peripheral pumping unit and the second copper pipe adapter flange being connected with described vacuum measuring device is cut off respectively, obtains miniaturization Atom Chip double-cavity vacuum system of the present invention.
CN201410239828.2A 2014-05-30 2014-05-30 Small-scale atom chip two-cavity vacuum system Pending CN103985429A (en)

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Application publication date: 20140813