CN104075966A - Laser particle analyzer for measuring particle size distribution in particle size range from submicron to nanometer - Google Patents
Laser particle analyzer for measuring particle size distribution in particle size range from submicron to nanometer Download PDFInfo
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- CN104075966A CN104075966A CN201410325383.XA CN201410325383A CN104075966A CN 104075966 A CN104075966 A CN 104075966A CN 201410325383 A CN201410325383 A CN 201410325383A CN 104075966 A CN104075966 A CN 104075966A
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Abstract
The invention discloses a laser particle analyzer for measuring particle size distribution in a particle size range from submicron to nanometer. The laser particle analyzer comprises a laser source device, a sample testing window 3, a scattering signal receiving device 4 and a signal processing system 5, wherein the signal processing system 5 is electrically connected with the scattering signal receiving device 4; the laser source device comprises a first laser 1 and a second laser 2; the scattering signal receiving device consists of 14 groups of photoelectric detectors which are arranged according to a certain rule and can be used for receiving scattering signals in a fixed angle from the center of the sample testing window. The system is capable of integrally receiving the scattering signals in an angle of 15-130 degrees from the center of the sample testing window and transmitting the scattering signals to a computer; the computer is capable of calculating a particle size distribution diagram of a sample measured in a measuring range of 0.05-1 micron according to an MIE scattering theory.
Description
Technical field
The present invention relates to the device of MIE scattering principle measurement particle size distribution, and specifically a kind of being specifically designed to measured the laser particle analyzer of sub-micron to nano particle size section particle size distribution.
Background technology
Based on the laser particle analyzer of MIE scattering principle, its primary structure is generally by LASER Light Source (being generally He-Ne gas laser), beam expanding lens, spatial filter, Fourier transform camera lens, sample test window, photoelectric array detector and fill-in light electric explorer composition, the light path of this structure in independent test front side in backscatter signal, there will be acquisition of signal blind area to cause the short grained scattered signal all the time cannot continuous coverage, thereby make to have precision and accuracy problem on the low side at sub-micron to the particle size distribution data in nano particle size section interval, in order to address this problem, ad hoc meter a kind of can continuous probe front side to and the sample test window of backscatter signal, this window has been realized can be continuously without detection blind area from the scattered signal of 15 ° to backward 130 ° of forward directions, solve the problem that sub-micron can be measured by pin-point accuracy to the particle size distribution data in nano particle size section interval.
Summary of the invention
The object of the invention is to for above weak point, a kind of laser particle analyzer that special sample test window is housed is provided, replace in the past form the laser particle analyzer of light-source system by semiconductor or gas laser, beam expanding lens, spatial filter, it overcome light path in the past in independent test front side in backscatter signal, there will be acquisition of signal blind area to cause the short grained scattered signal all the time cannot continuous coverage, thereby make to have precision and accuracy problem on the low side at sub-micron to the particle size distribution data in nano particle size section interval.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of laser particle analyzer of sub-micron to nano particle size section size-grade distribution of measuring, comprise laser light-source device, sample test window 3, scattered signal receiving trap 4 and the signal processing system 5 being electrically connected with it, the outgoing beam of described laser light-source device is parallel beam, it is characterized in that, described laser light-source device comprises the first laser instrument 1 and second laser 2; Described sample test window 3 comprises, one is positioned at the rectangular rib body cavity 20 in cross section of its central area, at least three transparent surfaces, and at least two are coated with black flour; Described transparent surface becomes a cross section to be the rib body of shape changeable with blacking face closure; The seamed edge of described cavity 20 is parallel with the seamed edge of sample test window 3; Described at least three transparent surfaces comprise the first transparent surface 11, the second transparent surface 12, the 3rd transparent surface 13, described at least two painting black bread are drawn together the first painting black flour 14, the second painting black flour 15, the outgoing beam of described the first laser instrument 1 and second laser 2 is respectively through the second transparent surface 12, the 3rd transparent surface 13 vertical incidence, and sees through respectively that the 3rd transparent surface 13 is rear to be received by described scattered signal receiving trap 4.
Above-mentioned laser particle analyzer, is characterized in that, the outgoing beam of described the first laser instrument 1 and second laser 2 intersects in cavity 20 centers of sample test window 3, and its crossing acute angle angle is 45 °.
Above-mentioned laser particle analyzer, it is characterized in that, angle α between described the first transparent surface 11 and the second transparent surface 12 is more than or equal to 119 ° and be less than or equal to 121 °, and the angle β between described the second transparent surface 12 and the 3rd transparent surface 13 is more than or equal to 74 ° and be less than or equal to 75 °.
Above-mentioned laser particle analyzer, it is characterized in that, angle α between described the first transparent surface 11 and the second transparent surface 12 is more than or equal to 119 ° and be less than or equal to 121 °, and the angle β between described the second transparent surface 12 and the 3rd transparent surface 13 is more than or equal to 74 ° and be less than or equal to 75 °.
Above-mentioned laser particle analyzer, is characterized in that, described angle α is 120 °, and described angle β is 75 °.
Above-mentioned laser particle analyzer, is characterized in that, described angle α is 120 °, and described angle β is 75 °.
Above-mentioned laser particle analyzer, is characterized in that, described scattered signal receiving trap 4 comprises multiple photodetector unit 6.
Above-mentioned laser particle analyzer, is characterized in that, described photodetector unit 6 is 14, is wire and distributes; Described 14 photodetector unit 6 receive the scattered signal at sample test window 3 centers from the first laser instrument 1, and 5 photodetector unit 6 of its middle and lower part receive the scattered signal at sample test window 3 centers from second laser 2.
Above-mentioned laser particle analyzer, it is characterized in that, receive from the first laser instrument 1 when the scattered signal at sample test window 3 centers, the position that it is (15.43 °-16.96 °) (17.19 °-18.86 °) (19.18 °-21.00 °) (21.46 °-23.44 °) (24.08 °-26.27 °) (27.12 °-29.58 °) (30.64 °-33.45 °) (34.72 °-37.95 °) (39.48 °-43.21 °) (44.95 °-49.22 °) (51.28 °-56.10 °) (58.77 °-64.14 °) (67.88 °-73.74 °) (79.68 °-85.63 °) that described 14 photodetector unit 6 are placed in respectively with scattered signal angle from bottom to top, receive from second laser 2 when the scattered signal at sample test window 3 centers the position that described 5 photodetector unit 6 are placed in respectively and scattered signal angle is (89.95 °-94.22 °) (96.28 °-101.10 °) (103.77 °-109.14 °) (112.88 °-118.74 °) (124.68 °-130.63 °) from bottom to top.
Above-mentioned laser particle analyzer, is characterized in that, described scattered signal receiving trap 4 is array of parallel lines photodetector.
Laser particle analyzer provided by the invention, main light source adopts two semiconductor lasers that can export parallel beam, the photodetector combination that coordinates with special construction sample test window and arrange in a certain order, realize from 15 ° of objects of surveying to backward 130 ° of scattered signal non-blind areas of forward direction, in the angle design of sample test window transparent surface, solve the problem that signal disturbs, make the scattered signal that detector detects approach to the full extent theoretical scattared energy simultaneously.
Compared with prior art, the beneficial effect producing is laser particle analyzer provided by the invention:
The present invention has significantly solved scattered signal from the extremely backward problem that has detection blind area of forward direction, has effectively improved the precision that sub-micron is measured to nano particle size section particle size distribution.
The present invention has significantly reduced the interference problem of spurious signal in scattered signal detection process, has well ensured the consistance between test value and theoretical value.
Brief description of the drawings
Below in conjunction with accompanying drawing, the present invention is further described.
Fig. 1 is the schematic cross-section of the sample test window embodiment mono-of laser particle analyzer provided by the invention;
Fig. 2 is the schematic cross-section of the sample test window embodiment bis-of laser particle analyzer provided by the invention;
Fig. 3 is the schematic cross-section of the sample test window embodiment tri-of laser particle analyzer provided by the invention;
Fig. 4 is laser particle analyzer light path schematic diagram provided by the invention.
In figure: 1, the first laser instrument, 2, second laser, 3, sample test window, 4, scattered signal receiving trap, 5, signal processing system, 6, photodetector unit, 11, the first transparent surface, 12, the second transparent surface, 13 the 3rd transparent surfaces, 14, first are coated with black flour, 15, second be coated with black flour, 16, the first auxiliary surface 16,17, the second auxiliary surface 17,20, cavity.
Embodiment
Below in conjunction with accompanying drawing, a kind of sub-micron to laser particle analyzer of nano particle size section particle size distribution of measuring provided by the invention is described in detail.
Referring to Fig. 1-Fig. 4, a kind of being specifically designed to of the present invention measured the laser particle analyzer of sub-micron to nano particle size section particle size distribution, its structure comprises the first laser instrument 1, second laser 2, sample test window 3, scattered signal receiving trap 4, signal processing system 5, and said elements is arranged according to the position relationship of light beam working direction.As shown in Fig. 1-Fig. 3, centered by sample test window 3, region is provided with the prismatic glassware of a cavity 20, and the cross section of sample test window 3 is the inequilateral polygon that is at least 5 limits.In the embodiment of laser particle analyzer provided by the invention, the first laser instrument 1, second laser 2 adopt the semiconductor laser of Output of laser wavelength 650nm.
As shown in Figure 1, the cross section of sample test window 3 is pentagon, and wherein having three faces is that transparent surface, two faces are lighttight painting black flour; In described three transparent surfaces, the second transparent surface 12, the 3rd transparent surface 13 are the plane of incidence, and the first transparent surface 11 is scattering surface; Described two painting black flour are the first painting black flour 14, the second painting black flour 15, are coated with black flour for eliminating the interference of scattered light.The border of cavity 20 forms a rectangular parallelepiped rib body, and its cross section is rectangle, and at least one end opening at its upper and lower two ends, for holding medium to be measured and particulate samples; The seamed edge of cavity 20 is parallel with the seamed edge of sample test window 3.
As shown in Figure 2, the cross section of sample test window 3 is hexagon, compare with the sample test window 3 shown in Fig. 1, except increasing one first auxiliary surface 16 between the second transparent surface 12 and the 3rd transparent surface 13, other is all identical with the sample test window 3 shown in Fig. 1.Described the first auxiliary surface 16 can be transparent surface, can be also lighttight painting black flour.
As shown in Figure 3, the cross section of sample test window 3 is heptagon, compare with the sample test window 3 shown in Fig. 2, except being coated with between black flour 15 and increasing one second auxiliary surface 17 at the first painting black flour 14 and second, other is all identical with the sample test window 3 shown in Fig. 2.Described the second auxiliary surface 17 is lighttight painting black flour.
The height of above-mentioned sample test window 3 is not less than 25mm; The outstanding effect of this sample test window 3: eliminate the interference of parasitic light, improve measuring accuracy.As shown in Figure 4, described the first laser instrument 1, second laser 2 are as main light source, outgoing beam is parallel beam, the parallel beam that the first laser instrument 1, second laser 2 are exported intersects in sample test window 3 central areas, its acute angle angle is 45 °, the laser beam that the first laser instrument 1 is exported is from the second transparent surface 12 incidents of sample test window 3, opposite side to the first transparent surface 11 outgoing, the laser beam that second laser 2 is exported is from the 3rd transparent surface 13 incidents of sample test window 3, in the first transparent surface 11 outgoing of side direction.Angle between the first transparent surface 11 and the second transparent surface 12 is α, and 119 °≤α≤121 °, α is preferably 120 °; Angle between the second transparent surface 12 and the 3rd transparent surface 13 is β, and 74 °≤β≤76 °, β is preferably 75 °.Described scattered signal receiving trap 4, can be the combination of multiple discrete photodetector unit 6, can be also that multiple photodetector unit 6 are integrated in the array photodetectors forming on a silicon chip, such as parallel lines display photodetector.Scattered signal receiving trap 4 in the present embodiment is the array configuration of 14 discrete photodetector unit 6.
Referring to Fig. 4, the surveying work of laser particle analyzer provided by the invention is divided into 2 steps to carry out: the first step, in the time that the first laser instrument 1 irradiates, described 14 photodetector unit 6 receive the scattered signal at sample test window 3 centers from the first laser instrument 1, described 14 photodetector unit 6 scattered signal angle is from the bottom to top respectively (15.43 °-16.96 °) (17.19 °-18.86 °) (19.18 °-21.00 °) (21.46 °-23.44 °) (24.08 °-26.27 °) (27.12 °-29.58 °) (30.64 °-33.45 °) (34.72 °-37.95 °) (39.48 °-43.21 °) (44.95 °-49.22 °) (51.28 °-56.10 °) (58.77 °-64.14 °) (67.88 °-73.74 °) (79.68 °-85.63 °), obtain altogether 14 signals, second step, the first laser instrument 1 is closed, second laser 2 irradiates, 5 detector cells recyclings of the bottom in described 14 photodetector unit 6, receive from second laser 2 scattered signal at sample test window 3 centers, 5 detector cells of described bottom scattering angle is from the bottom to top respectively (89.95 °-94.22 °) (96.28 °-101.10 °) (103.77 °-109.14 °) (112.88 °-118.74 °) (124.68 °-130.63 °), obtains altogether 5 signals, 19 signals that aforementioned twice test obtains are altogether transferred to signal processing system 5, after A/D conversion, become digital signal in signal processing system 5, then be transported to computing machine, computing machine, by the complementary operation of software, can calculate the particle size distribution figure of range institute's test sample product within the scope of 0.05 μ m ~ 1 μ m according to MIE scattering theory.
Because the main light source of laser particle analyzer provided by the invention adopts two laser instruments that can export parallel beam, coordinate with the photodetector unit 6 of special construction sample test window 3 and arrangement in a certain order and combine, realize from 15 ° of objects of surveying to backward 130 ° of scattered signal non-blind areas of forward direction, while has solved the problem that signal disturbs in the angle design of the transparent surface of sample test window 3, makes the scattered signal that detector detects approach to the full extent theoretical scattared energy.
Compared with prior art, the beneficial effect producing is laser particle analyzer provided by the invention:
1, the present invention has significantly solved scattered signal from the extremely backward problem that has detection blind area of forward direction, has effectively improved the precision that sub-micron is measured to nano particle size section particle size distribution.
2, the present invention has significantly reduced the interference problem of spurious signal in scattered signal detection process, has well ensured the consistance between test value and theoretical value.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. measure the laser particle analyzer of sub-micron to nano particle size section size-grade distribution for one kind, comprise laser light-source device, sample test window (3), scattered signal receiving trap (4) and the signal processing system (5) being electrically connected with it, the outgoing beam of described laser light-source device is parallel beam, it is characterized in that, described laser light-source device comprises the first laser instrument (1) and second laser (2); Described sample test window (3) comprises, one is positioned at the rectangular rib body cavity (20) in cross section of its central area, at least three transparent surfaces, and at least two are coated with black flour; Described transparent surface becomes a cross section to be the rib body of shape changeable with blacking face closure; The seamed edge of described cavity (20) is parallel with the seamed edge of sample test window (3); Described at least three transparent surfaces comprise the first transparent surface (11), the second transparent surface (12), the 3rd transparent surface (13), described at least two painting black bread are drawn together the first painting black flour (14), second and are coated with black flour (15), the outgoing beam of described the first laser instrument (1) and second laser (2) is respectively through the second transparent surface (12), the 3rd transparent surface (13) vertical incidence, and received by described scattered signal receiving trap (4) after seeing through the 3rd transparent surface (13) respectively.
2. laser particle analyzer according to claim 1, is characterized in that, the outgoing beam of described the first laser instrument (1) and second laser (2) intersects in cavity (20) center of sample test window (3), and its crossing acute angle angle is 45 °.
3. laser particle analyzer according to claim 1, it is characterized in that, angle α between described the first transparent surface (11) and the second transparent surface (12) is more than or equal to 119 ° and be less than or equal to 121 °, and the angle β between described the second transparent surface (12) and the 3rd transparent surface (13) is more than or equal to 74 ° and be less than or equal to 75 °.
4. laser particle analyzer according to claim 2, it is characterized in that, angle α between described the first transparent surface (11) and the second transparent surface (12) is more than or equal to 119 ° and be less than or equal to 121 °, and the angle β between described the second transparent surface (12) and the 3rd transparent surface (13) is more than or equal to 74 ° and be less than or equal to 75 °.
5. laser particle analyzer according to claim 3, is characterized in that, described angle α is 120 °, and described angle β is 75 °.
6. laser particle analyzer according to claim 4, is characterized in that, described angle α is 120 °, and described angle β is 75 °.
7. according to the laser particle analyzer described in the arbitrary claim of claim 1-6, it is characterized in that, described scattered signal receiving trap (4) comprises multiple photodetector unit (6).
8. laser particle analyzer according to claim 7, is characterized in that, described photodetector unit (6) is 14, is wire and distributes; Described 14 photodetector unit (6) receive from the first laser instrument (1) scattered signal at sample test window (3) center, and 5 photodetector unit (6) of its middle and lower part receive from second laser (2) scattered signal at sample test window (3) center.
9. laser particle analyzer according to claim 8, it is characterized in that, receive from the first laser instrument (1) when the scattered signal at sample test window (3) center, the position that it is (15.43 °-16.96 °) (17.19 °-18.86 °) (19.18 °-21.00 °) (21.46 °-23.44 °) (24.08 °-26.27 °) (27.12 °-29.58 °) (30.64 °-33.45 °) (34.72 °-37.95 °) (39.48 °-43.21 °) (44.95 °-49.22 °) (51.28 °-56.10 °) (58.77 °-64.14 °) (67.88 °-73.74 °) (79.68 °-85.63 °) that described 14 photodetector unit (6) are placed in respectively with scattered signal angle from bottom to top, receive from second laser (2) when the scattered signal at sample test window (3) center the position that described 5 photodetector unit (6) are placed in respectively and scattered signal angle is (89.95 °-94.22 °) (96.28 °-101.10 °) (103.77 °-109.14 °) (112.88 °-118.74 °) (124.68 °-130.63 °) from bottom to top.
10. according to the laser particle analyzer described in the arbitrary claim of claim 1-6, it is characterized in that, described scattered signal receiving trap (4) is array of parallel lines photodetector.
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| CN116793907A (en) * | 2022-03-16 | 2023-09-22 | 上海勘测设计研究院有限公司 | Multidirectional diffraction scattering type particle size analyzer and particle detection method |
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