CN104272062A

CN104272062A - MEMS multi-axis gyroscope z-axis electrode structure

Info

Publication number: CN104272062A
Application number: CN201380007615.0A
Authority: CN
Inventors: C·阿卡
Original assignee: Fairchild Semiconductor Corp
Current assignee: Shanghai Sirui Technology Co.,Ltd.
Priority date: 2012-02-01
Filing date: 2013-01-31
Publication date: 2015-01-07
Anticipated expiration: 2033-01-31
Also published as: CN104220840A; CN104272062B; WO2013116522A1; CN104220840B; WO2013116514A1

Abstract

Various examples include microelectromechanical die for sensing motion that includes symmetrical proof-mass electrodes interdigitated with asymmetrical stator electrodes. Some of these examples include electrodes that are curved around an axis orthogonal to the plane in which the electrodes are disposed. An example provides vertical flexures coupling an inner gimbal to a proof-mass in a manner permitting flexure around a horizontal axis.

Description

MEMS (micro electro mechanical system) (MEMS) multiaxis gyroscope Z axis electrode structure

Require right of priority

This application claims the U.S. Provisional Patent Application sequence number 61/593 that the name submitted on February 1st, 2012 is called " MEMS MULTI-AXIS GYROSCOPE WITH CENTRAL SUSPENSION AND GIMBAL STRUCTURE " (having the MEMS multiaxis gyroscope of centric sus-pension part and ring stand structure), the rights and interests of the right of priority of 691, this patented claim is incorporated herein by reference in full.

Background technology

Quadrature error is one of principal element of the performance of restriction micro mechanical sensor (such as gyroscope).Consider the relative size driving vibration and induced oscillation, even if small part actuation movement is coupled into inductive mode all may arrange Coriolis (Coriolis) response.

In fact, manufacturing defect can cause the deficient desirable physical dimension in the structure of such as gyroscope arrangement.Deficient ideal geometry may cause and be coupled into inductive mode with driving oscillating part.Even if there is several cross-couplings approach, such as elasticity, viscosity and electrostatic coupling approach, but in some cases, due to the anisoelastic in suspension elements, Elastic Coupling increasing degree exceeds required standard.

Have in the sensing system of operator scheme outside face in such as gyroscope system, the anisoelastic in face outside direction and face between direction is the main source of quadrature error.Deflection in deep reaction ion etching (" DRIE ") or inclination can cause the xsect bending support to depart from into parallelogram from rectangle, and then make suspention bend the principal elastic axis parallel deviate of support in device surface (direction), or depart from and be orthogonal to device surface (direction).In one example in which, the single shaft of such as gyroscope arrangement or multiaxis micro mechanical sensor structure can stand the high quadrature error that tilted to cause by DRIE at least in part.

In addition, existing resonator depends on simple linear flexure support to generate deflection structure, is shifted in resonance to allow device.When being etched in generation inclination in flexure support, can significant problem being caused, cause very large unexpected displacement, and usually making induction mechanism activate.

Accompanying drawing explanation

In the accompanying drawings (these accompanying drawings are not necessarily drawn to scale), identical numeral can describe the like in different views.The same numbers with different letter suffix can represent the different examples of like.By example, unrestriced mode briefly illustrates each embodiment discussed in the application to accompanying drawing.

Fig. 1 shows the sensor construction comprising overhung construction according to an example.

Fig. 2 A shows a part for the Suspension according to an example.

Fig. 2 B shows the Suspension be under case of bending of Fig. 8 A in one example in which, and under this case of bending, top section is bent upwards.

Fig. 2 C shows the Suspension be under case of bending of Fig. 8 A in one example in which, and under this case of bending, top section is bent downwardly.

Fig. 3 shows the twisting motion around Z axis of the overhung construction according to an example.

Fig. 4 shows the twisting motion around X-axis of the overhung construction according to an example.

Fig. 5 shows the twisting motion around Y-axis of the overhung construction according to an example.

Fig. 6 shows the 2 axle gyroscopes comprising low quadrature error Suspension according to an example.

Fig. 7 shows the 3 axle gyroscopes comprising low quadrature error Suspension according to an example.

Fig. 8 shows the quadrature error of exemplary Suspension.

Fig. 9 shows the drive pattern according to an example.

Figure 10 shows the flexure support having four bends according to an example.

Figure 11 shows the flexure support according to an example, and described flexure support comprises the flexure support of flexure and the flexure support of non-deflected.

Figure 12 shows the flexure support comprising the flexure support of flexure and the flexure support of non-deflected according to an example, the flexure support of this flexure is shorter than the flexure support of Figure 11, and the flexure support of this non-deflected is shorter than the flexure support of the non-deflected of Figure 11.

Figure 13 A shows the Suspension with wide arc gap according to an example.

Figure 13 B shows the stress relevant to the deflection degree bending support.

Figure 14 A shows the Suspension comprising zigzag portion according to an example.

Figure 14 B shows the cross section intercepted at the 14B place of Figure 14 A.

Figure 14 C shows the cross section intercepted at the 14C place of Figure 14 A.

Figure 14 D shows the cross section intercepted at the 14D place of Figure 14 A.

Figure 15 shows the Suspension of the Figure 14 around Z axis torsional deflection according to an example.

Figure 16 A shows the Suspension of the Figure 14 around Z axis torsional deflection according to an example.

Figure 16 B shows the Suspension of the Figure 14 around Y-axis flexure according to an example.

Figure 16 C shows the Suspension of the Figure 14 around X-axis flexure according to an example.

Figure 16 D shows the Suspension of the Figure 14 along Y-axis displacement flexure according to an example.

Figure 17 shows the method according to the low quadrature error Suspension of the making of an embodiment.

But Figure 18 shows the method for the z-axis electrode that to shake according to the making of an embodiment.

Embodiment

Unwanted side wall flexes can have a negative impact to the performance of the flexure support (" deflection division ") (such as bending support) of one or more parts of support MEMS (micro electro mechanical system) (" MEMS ") structure (such as tube core).In one example in which, if one or more sidewall has angular error, in face, actuation movement just can cause outside face and moves, such as when sloping shaft is along flexure support or crossbeam length.In one example in which, when the easy complications tilted during actuation movement or compliance bend support or crossbeam is positioned on opposite side, the face extrinsic deflection of generation can cause or add quadrature error.In one example in which, low orthogonal suspension system is intended to reduce or offset less desirable motion outward.

Fig. 1 shows the sensor construction comprising overhung construction according to an example.Various example discloses the low orthogonal suspension system for sensor.In one example in which, overhung construction can be used on has mass (proof-mass), in the torsion multiaxis micromechanical gyro instrument system of such as single mass 104.In one example in which, mass 104 is suspended in midair by single central anchor 106 at its center.In one example in which, anchor 106 is connected to mass 104 by one or more flexure support, is such as connected to the main frame 116 of mass.In one example in which, one or more deflection division allows mass torsionally to vibrate around three vertical axles.In one example in which, suspention flexure support or crossbeam provide in face and face extrinsic deflection, thus allow mass torsionally to vibrate around x-axis, y-axis and z-axis.

An example comprises fixed part 118, and wherein anchor 106 is coupled to fixed part 118.In one example in which, the first nonlinear suspension member 108 is coupled to anchor in the side of anchor 106.In one example in which, second nonlinear suspension member 120 is coupled to anchor in the same side of anchor, and described second nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane 122 (such as x-z face).Various example comprises plane formula mass 104, mass is suspended in midair by the first nonlinear suspension member 108 and the second nonlinear suspension member 120 at least in part, mass can be rotated around anchor 106 and (such as in an x-y plane) can slide in the plane being parallel to fixed part.

In one example in which, C shape flexure support 108 comprises and is coupled to anchor 106 and the interior section 110 extended towards anchor bisecting plane 122, has the core 114 of portions of proximal and distal part, wherein portions of proximal is coupled to interior section 110, and distal part extends away from anchor 106 along anchor bisecting plane 122 and is coupled to the exterior section 112 extended away from anchor bisecting plane 122.In one example in which, core 114 is perpendicular to interior section 110 and exterior section 112.In one example in which, core 114 is parallel to anchor bisecting plane 122.

In one example in which, anchor 106, first nonlinear suspension member 108, second nonlinear suspension member 120 and mass 104 are formed by monoliths.In one example in which, fixed part 118 comprises the fixing monoliths different from the monoliths of anchor 106, first nonlinear suspension member 108, second nonlinear suspension member 120 and mass 104.In one example in which, fixed part 118 comprises the fixing monoliths identical with the monoliths of anchor 106, first nonlinear suspension member 108, second nonlinear suspension member 120 and mass 104.

In one example in which, bending support is arranged on every side of central anchor, on the opposition side of such as described anchor.In one example in which, bent to move outside face that support causes by each C shape on side and to be offset by the flexure support of its symmetry.Therefore, in one example in which, reduce partly or offset the quadrature error caused on each flexure support.

In one example in which, centric sus-pension structure 102 is used in sensor, in such as 6DOF (" DOF ") sensor 100 (the one chip 6-DOF sensor be such as made up of symmetry flexure support).In one example in which, the flexure support of symmetry comprises " C shape flexure support " 108.In one example in which, each C shape flexure support comprises interior flexure support 110 and outer flexure support 112 and the high rigidity between two flexure supports and connects flexure support 114.In one example in which, interior flexure support 112 is at one end connected to anchor 106, and outer flexure support 112 is connected to mass 104 at the other end.In one example in which, suspension system 102 is formed by eight C shapes flexure supports 108 altogether.In one example in which, two symmetrical C shape flexure supporting portions are on every side of four sides of central anchor structure.

In one example in which, suspension system provides three kinds of gyroscope mode of operations: around the face intort of Z axis, for actuation movement; Reverse outside the face of X-axis, for the paratonic movement of Y-axis gyroscope; And reverse outside the face of Y-axis, for the paratonic movement of X-axis gyroscope.In one example in which, mode of oscillation can switch mutually each other.

Fig. 2 A shows a part for the Suspension according to an example.Fig. 2 B shows the Suspension be under case of bending of Fig. 2 A in one example in which, and under this case of bending, top section is bent upwards.Fig. 2 C shows the Suspension be under case of bending of Fig. 2 A in one example in which, and under this case of bending, top section is bent downwardly.Shown example shows at the deformable contour of suspension gear in all directions.In one example in which, in kind of the deformation of two shown in Fig. 2 B and Fig. 2 C, bend equivalent and occur on the contrary.In one example in which, in each direction, two flexure supports bend in the opposite manner.In one example in which, be out of shape outside the contrary face of being cancelled out each other by generation, make minimizing deformation the overall face from deflection division one end to the other end.

Fig. 3 shows the twisting motion around Z axis of the overhung construction according to an example.In one example in which, suspension system 300 is included in the symmetrical C shape flexure support 302,304 of on every side of central anchor structure 306 two.In one example in which, C shape flexure support 302, one or two in 304 is by being arranged on two flexure supports 310, and the high rigidity between 312 connects flexure support 308 and formed.In one example in which, in face intort motion (being such as parallel to the motion of the plane of figure) period, move outside the face that the deflection of the flexure support bent in support by each C shape on side causes and to be offset by the flexure support 310 ', 312 ' of symmetry.Therefore, reduce partly or offset the quadrature error caused on each flexure support.

Shown in example show twisting motion around Z axis (that is, extend into the page and extend the axle of the page).In one example in which, between face intort moving period, bend support 310 in each C shape flexure support and in-plane bending occurs outer flexure support 312.In one example in which, high rigidity connection support 308 does not experience significant bending.For mass being rotated counterclockwise around Z axis, the top section of mass is moved to the left, as shown in the figure.In one example in which, high rigidity connection support is all moved to the left.Therefore, interior deflection division and the outer deflection division of the C shape flexure support on right side are bent downwardly, and interior deflection division and the outer deflection division of the C shape flexure support are simultaneously bent upwards.Therefore, in one example in which, described motion causes the deflection division deflection in opposite direction of symmetrical C shape flexure support.Due to the deflection division deflection in opposite direction in the C shape flexure support of symmetry, move outside the face that the deflection of the flexure support bent in support by each C shape on side causes and to be offset by the flexure support of its symmetry.Therefore, the quadrature error caused on each flexure support is offset partly.

Fig. 4 shows the twisting motion around X-axis of the overhung construction according to an example.In one example in which, overhung construction can be used on has mass, in the torsion multiaxis micromechanical gyro instrument system of such as single mass 404.In one example in which, mass 404 is suspended in midair by single central anchor 406 at its center.In one example in which, anchor 406 is connected to mass 404 by one or more flexure support 402.In one example in which, during twisting motion outside the face of X-axis, mainly the C shape Suspension of Y-axis side is to 412,412 ' deflections.In one example in which, the interior flexure support 410,410 ' in these C shape Suspensions torsionally bends around X-axis, plays the effect of torsion hinge.

In one example in which, tube core is slice-shaped (wafer shaped), and the first nonlinear suspension member 408 and the second nonlinear suspension member 412 have the xsect of general rectangular separately, and the height of described xsect is less than width.

Fig. 5 shows the twisting motion around Y-axis of the overhung construction according to an example.In one example in which, overhung construction can be used on has mass, in the torsion multiaxis micromechanical gyro instrument system of such as single mass 404.In one example in which, mass 404 is suspended in midair by single central anchor 406 at its center.In one example in which, anchor 406 is connected to mass 404 by one or more flexure support 402.In one example in which, during twisting motion outside the face of Y-axis, mainly the C shape Suspension of X-axis side is to 412,412 ' deflections.These C shapes flexure support 414, the interior flexure support in 414 ' torsionally bends around Y-axis, plays the effect of torsion hinge.

Fig. 6 shows the 2 axle gyroscopes comprising low quadrature error Suspension according to an example.In one example in which, structure 602 can be used for various torsion multiaxis micromechanical gyro instrument system, and described torsion multiaxis micromechanical gyro instrument system has single mass 604, and described single mass 604 is suspended in midair by single central anchor 606 at its center.Described anchor is connected to mass 604 by deflection division 608, and allows described mass torsionally to vibrate around all three axles.Shown example detects around X-axis and Y-axis motion separately, and proves three kinds of gyroscope mode of operations: around the face intort of Z axis, for actuation movement; Reverse outside the face of X-axis, for the paratonic movement of Y-axis gyroscope; And reverse outside the face of Y-axis, for the paratonic movement of X-axis gyroscope.In one example in which, one or more comb electrodes 616 are coupled to the fixed part of described device, and are inductively couple to the motion of the comb electrode 618 of mass 604.In one example in which, comb electrode 618 comb along the angle between bisection X-axis and X-axis axle and arrange.

Fig. 7 shows the 3 axle gyroscopes comprising low quadrature error Suspension according to an example.In one example in which, structure 702 can be used for various torsion multiaxis micromechanical gyro instrument system, and described torsion multiaxis micromechanical gyro instrument system has single mass 704, and described single mass 704 is suspended in midair by single central anchor 706 at its center.Described anchor is connected to mass 704 by deflection division 708, and allows described mass torsionally to vibrate around all three axles.In one example in which, device plays three axles (" X/Y/Z ") gyrostatic function.In one example in which, suspension system 702 provides the gyroscope mode of operation similar to the device shown in Fig. 6.In one example in which, the device shown in Fig. 7 comprises the additional deflection division 720 being provided for Z axis inductive mode.In one example in which, one or more comb electrodes 716 are coupled to the fixed part of described device, and are inductively couple to the motion of the comb electrode 718 of mass 704.In one example in which, comb electrode 718 comb along the angle between bisection X-axis and X-axis axle and arrange.

Fig. 8 shows the quadrature error of exemplary Suspension.In one example in which, the angle bending support has appreciable impact to orthogonal.In one example in which, for each design, can the quadrature error that produces to optimize the inclination of deflection division that bends support by resonator of selected angle.In one example in which, for the concrete enforcement of desired suspension system, best angle is 15 degree.In one example in which, best angle depends on planform, and based on corresponding device structure and select.In one example in which, for desired structure, two flexure supports are set to identical angular displacement, but two flexure supports can easily be set to different angles.

Fig. 9 shows the drive pattern according to an example.Inventor recognizes, in the suspension arrangement comprising anchor 906, the effect of inclination causes quadrature error, and they by same deflection division 902 or deflection division on 904 on produce contrary inclination and above-mentioned impact minimized.Correspondingly, there is the flexure support of two flexures separated by framework, each flexure support is out of shape in the opposite direction in driving mode of operation.Rightabout distortion causes the inclination producing rightabout distortion outward, and when being finally connected to moving-member, described rightabout distortion outward cancels each other.This can be used for replacing the existing mechanism only comprising a flexure support, and the inclination of one of described existing mechanism flexure support only produces distortion in one direction, thus causes outside a large amount of face without any counteracting and move.

But in some instances, interior flexure support 910,910 ' and outer flexure support 912,912 ' rotate, thus between drive pattern period of energization, a flexure support is bent upwards in distortion and a flexure support is bent downwardly.In one example in which, drive pattern is the rotary mode around central anchor.In one example in which, for four Suspensions to every a pair in 404, drive pattern make one in one direction distortion and another be out of shape on other direction.

Figure 10 shows the flexure support having four bends according to an example.In one example in which, deflection division 1002 can comprise more than one bend.In one example in which, this can allow to produce and be moved by outside the face that more strictly controls.In one example in which, multiple zigzag portion 1004 is comprised.In one example in which, zigzag portion defines the serrate circuit (zigzag) extending to mass 1005 from anchor 1006.In one example in which, serrate circuit comprises the zigzag portion of the regular amplitude along the pattern (patter) extending to mass 1005 from anchor 1006.In a further embodiment, described amplitude is change.In one example in which, described zigzag portion is C shape, has parallel to each other but is not parallel to overhead 1008 and the bottom member 1014 that high rigidity portion divides 1016.

Figure 11 shows the flexure support according to an example, and described flexure support comprises the flexure support of flexure and the flexure support of non-deflected.In one example in which, the flexure support 1112 also by extending or shorten flexure support 1110, the 1114 or non-deflected bent determines the parameter of deflection division 1102.In example in fig. 12, shorten the outside flexure support 1110 of flexure and the flexure support 1112 of non-deflected.

Figure 12 shows the flexure support comprising the flexure support of flexure and the flexure support of non-deflected according to an example, the flexure support of this flexure is shorter than the flexure support of Figure 11, and the flexure support of this non-deflected is shorter than the flexure support of the non-deflected of Figure 11.Compared with the parts of Figure 11, shorten the outside flexure support 1210 of flexure and the flexure support 1212 of non-deflected.

Figure 13 A shows the Suspension with wide arc gap according to an example.Figure 13 B shows the stress relevant to the deflection degree bending support.In instances, between flexure support 1304 and mass 1306, space 1302 is provided with.

Figure 14 A-D exemplifies the tube core 1400 comprising various feature according to an example.These features can be used alone or in combination.A feature is zigzag portion 1402.Zigzag portion 1402 extends between nonlinear suspension member (e.g., C shape flexure support 1406) and mass 1408.Add zigzag portion 1402 and can reduce quadrature error further, this is at least bend owing to which reducing outside face, and described outer flexure is etched by DRIE at least partly and cause.Stride across plane (such as plane 1422) another support on one side just as by bending, offset the bending of a support.Offset out-of-plane bending by bending second flexure support 1407, described second flexure support 1407 can be arranged on the another side of plane 1423.

This type of counteracting is shown in Figure 15.In fig .15, the first support 1502 is bending away from mass 1508, and the support being arranged on horizontal reference plane 1510 another side bends towards mass.Also bending away from mass 1508 in the mode identical substantially with 1506 at the support 1506 of the another side of horizontal reference plane 1510 at the another side of vertical reference plane 1512, this balance just by recovering to bend support Suspension offsets quadrature error.

Get back to Figure 14 A and the description to zigzag portion 1402, nonlinear suspension member 1406 (e.g., C shape flexure support) comprises first or interior section 1410, second or core 1420, and the 3rd or exterior section 1412.In one example in which, exterior section 1412 has the portions of proximal being coupled to core 1420.In one example in which, the distal part of exterior section 1412 extends away from anchor bisecting plane 1422.In one example in which, the Part IV 1402 (e.g., the part in zigzag portion) of exterior section 1412 and the first nonlinear suspension member 1406 is coupled.In one example in which, Part IV 1402 is coupled to the distal part of exterior section 1412 in the proximal portion of Part IV 1402.In one example in which, Part IV 1402 extends to its distal part from its portions of proximal towards anchor 1404.In one example in which, the distal part of Part IV 1402 is coupled to the Part V 1424 of the first nonlinear suspension member 1406.In one example in which, Part V 1424 extends towards anchor bisecting plane 1422.In one example in which, interior section 1410 and exterior section 1412 are linear and parallel.Generally speaking, relative to the Suspension without zigzag portion 1402, zigzag portion 1402 example provides other flexure, and the counteracting to this flexure.

Second feature is asymmetric stator finger electrode, as illustrated especially in Figure 14 C-D.In Figure 14 C and 14D, partly illustrative electrode structure is configured in the MEMS multiaxis gyroscope for having inverting linear Z axis rotary inductive pattern.In some instances, two masses 1454 and 1456 can move in the opposite direction.The example of this type games illustrates in Figure 16 D.In one example in which, stator 1430,1431 by anchor 1428,1429 anchoring of corresponding side.In each example, the electrode on central anchor 1404 opposition side should to the concurrent outside motion of mass or inside motion sensitive, to realize the differential pickup to this motion.Therefore, should not use about the axisymmetric stator electrode of Y-Z, because this design can not be responded to differential motion, and because differential motion induction rely on device both sides between electric capacity difference is provided, and if stator electrode is symmetrical, then the both sides at Y-Z axle change by electric capacity similarly.

Shown Z axis rotary inductive electrode structure is responded to differential motion.This structure provides anti-phase telekinetic Differential Detection, and wherein mass finger piece is symmetrical about Y-Z plane 1422, and stator electrode is not in relation to Y-Z plane symmetry.But symmetrical electrode configuration be shake required.Disclosed electrode provides the mass electrode in Y-Z plane opposite symmetry.Relative to asymmetrical design, symmetrical mass electrode achieves the inhibition of vibration of improvement.

The cut-open view of Figure 14 C-D shows according to the staggered engagement details on the opposition side of the tube core of an example.Although electrode is pixelation in appearance, level and smooth continuous print electrode can be conceived, as represented those electrodes of the feature of DRIE.In Figure 14 C, left stator 1430 have mass 1446 finger piece 1452 outside (as, central anchor 1404 further away from each other) stator finger piece 1450, and the right stator 1430 ' shown in Figure 14 D has at the inner stator finger piece 1452 ' of mass 1446 ' finger piece 1452 '.It should be noted that small capacitances gap is positioned at the left side of stator finger piece, and mass finger piece is full symmetric in two kinds of electrodes of Figure 14 C and 14D.When the mass 1454 of Figure 14 C is to when moving to left, the electric capacity of the electrode in this figure increases.When the mass 1456 of Figure 14 D moves right, the electric capacity of the electrode in this figure reduces.Therefore, the differential capacitance that can be detected is created.

In one example in which, the paratonic movement of Z axis gyroscope is responded to via the induction of difference mass, and simultaneous movements (that is, mass motion in the same direction) is rejected.In each example, actuation movement (in Figure 14 B 1448) reverses (see Figure 15 and Figure 16 A) around Z axis.The paratonic movement of Z axis gyroscope is based on the mass 1454 and 1456 vibrated in the opposite direction.Figure 16 D shows this type games.Z axis paratonic movement is linear in-plane moving (e.g., in X-Y plane) and anti-phase motion (e.g., mass 1454 and 1456 vibrates in the opposite direction).

3rd feature comprises vertical deflection portion 1426, shown in Figure 14 A and 14B.In one example in which, vertical deflection portion 1426 allows mass framework more than other parts (the such as ring stand 1458) deflection of tube core, and can be used for regulating Y-axis induced vibration frequency.Shown ring stand structure provides the deflection division 1426 only deflected for gyrostatic Y-axis inductive mode, and in this Y-axis inductive mode, mass 1408 rotates around X-axis, as shown in fig. 16 c.Therefore, it allows designer to regulate Y-axis induced vibration frequency independent of driving frequency and X-axis induction frequencies.This makes centric sus-pension part to improve, to be down to minimum by the quadrature error in X-axis and Y-axis simultaneously.

Such as, fixed part or substrate can be coupled to anchor 1404.Fixed part comprises such as base plate for packaging.First nonlinear suspension member 1406 can be coupled to anchor 1404 in the side of anchor 1404.Second nonlinear suspension member 1407 is coupled to anchor 1404 in the same side of anchor 1404.Second nonlinear suspension member can have the shape and the position that become mirror with the first nonlinear suspension member about anchor 1404 bisecting plane, but theme of the present invention is not limited to this.One or both in first nonlinear suspension member and the second nonlinear suspension member can form a part for the interior ring stand 1458 of micro electronmechanical tube core 1400.

The mass 1408 of plane formula can be coupled to interior ring stand 1458.Mass suspends in midair by the first suspension member 1460 be arranged on the first side of anchor 1404.Mass suspends in midair by the second suspension member 1462 be arranged on the second side of anchor 1404.First suspension member 1460 relatively can be coupled with the first side of anchor.

Tube core 1400 can limit the first gap 1464.Gap 1464 can extend along the first side 1466 of anchor 1404.Second gap 1468 can extend along the second side 1470 of anchor 1404.Second gap 1468 can be relative with the first side 1466.Each in first gap 1464 and the second gap 1468 can extend between interior ring stand 1458 and mass 1408.

First gap 1464 can extend to the second suspension member 1462 from the first suspension member 1460.Second gap 1468 can extend to the second suspension member 1462 from the first suspension member 1460.One or more in first gap and the second gap can be C shape.One C shape can limit the first opening 1472, and this first opening 1472 opens wide towards the second opening 1474 of the 2nd C shape in the second gap 1468.

One C shape can comprise first end section 1482 and second end section 1484, and wherein core 1486 extends between first end section and second end section.First end section and second end section can perpendicular to core.First sloping portion 1488 can extend between first end section 1482 and core, and the second sloping portion 1490 can extend between second end section 1484 and core.First gap can be the image shape in the second gap, and the first gap can become mirror image along anchor bisecting plane.

First gap can limit the first vertical deflection portion 1476 and the second vertical deflection portion 1478.Second gap can limit the 3rd vertical deflection portion 1426 and the 4th vertical deflection portion 1480.Each in first, second, third and fourth vertical deflection portion can be elongated, and length: width is long.Each corresponding length is extensible away from corresponding suspension member.Each corresponding length is extensible away from anchor bisecting plane 1422.

In one example in which, solid mass framed structure (all structures as shown in Figure 7) relies on centric sus-pension system to arrange driving frequency and X/Y induction frequencies.Therefore, the whole three kinds of frequencies on two axles and quadrature error can be improved simultaneously.

Ring stand structure shown in Figure 14 A-D provides extra degree of freedom to regulate Y-axis inductive mode.In one example in which, centre deflection portion 1426 extends away from interior ring stand 1458 along Y-axis.These deflection divisions can vertically bend.Figure 16 C shows the flexure that mass is rotated around X-axis of deflection division.In one example in which, interior ring stand 1458 can be connected to mass 1408 framework by one or more deflection division 1426.In one example in which, these deflection divisions 1426 only deflect for gyrostatic Y-axis inductive mode.Outside the face set up, deflection division allows to regulate Y-axis induced vibration frequency independent of driving frequency and X-axis induction frequencies.

In each example, actuation movement (in Figure 14 B 1448) is reversed around Z axis (such as around central anchor 1404).Figure 15 shows the Suspension of the Figure 14 around Z axis torsional deflection according to an example, and Figure 16 A also shows the Suspension of the Figure 14 around Z axis torsional deflection according to an example.Figure 16 B shows the Suspension of the Figure 14 around Y-axis flexure according to an example.In these examples, deflection division 1426 represents limited flexure.But Figure 16 C shows bending with the Suspension of the Figure 14 making deflection division 1426 bend around X-axis according to an example.In one example in which, Y-axis paratonic movement reverses outside the face of X-axis.

The other feature of Figure 14 A-D comprises bending finger electrode.These electrodes may be insensitive to rotating drive movements.Each example can comprise the electrode around the bending shaft orthogonal with the plane that electrode is arranged wherein.Bending finger electrode (e.g., finger piece 1450 and 1452) may be not too responsive to rotating drive movements (such as the motion shown in Figure 16 A).In one example in which, although mass electrode just rotates relative to stator electrode, the clearance distance between described electrode keeps similar or identical.In some instances, this can maintain similar electric capacity.But in some instances, the area of an electrode surface to other electrodes changes, and this can provide differential capacitance, thus allow the induction around Z axis or rotation.Therefore, when if tube core rotates around the axle orthogonal with the plane that electrode exposes wherein, bending electrode maintenance and the clearance distance between mass electrode and stator electrode, (just) can optionally not change electric capacity or change electric capacity lower, maybe can sense that required electric capacity changes to detect rotation.

Micro electronmechanical tube core 1400 can be coupled to form the integrated circuit encapsulated with the substrate such as encapsulated.Mass 1408 can be coupled to substrate at anchor 1404 place.Mass can comprise can relative to the Part I 1454 of anchor 1404 movement.Part I can comprise the first mass electrode 1452.The Part II 1456 relative with Part I 1454 relative to anchor 1404 of mass 1408 can move relative to anchor 1404 and Part I 1454.Part II 1456 can comprise the second mass electrode 1452 '.Mass 1408 (such as on the first side of plane 1423) can limit the first opening 1492 on the first side of anchor 1404.The Part I 1454 of mass can be coupling in through substrate in opening 1492 movably.

First mass electrode 1452 can be extend in more than first mass electrode in opening 1492.Described multiple mass electrode can be spaced apart from each other.Mass 1408 (such as on the first side of plane 1423) can limit the second opening 1494 on the second side of anchor.Part II 1456 can be coupling in inside the second opening 1494.Second mass electrode 1452 ' can be extend in more than second the mass electrode be spaced apart from each other in opening 1494.

First stator 1430 can be coupled to substrate, such as via anchor 1428, and can comprise the first stator electrode 1450.First stator electrode 1450 can extend on the first mass electrode 1452 side of mass to form the first electrode pair.Second stator 1431 can be coupled to substrate and can comprise second stator electrode 1451 relative with the first stator electrode 1450.Second stator electrode 1451 can extend on the second mass electrode 1452 ' side of the Part II 1456 of mass 1408 to form the second electrode pair.First electrode pair can form the first capacitor.Second electrode pair can form the second capacitor.

First mass electrode of mass can be relative with the second mass electrode of mass at the another side of anchor, and wherein the first stator electrode can be relative with the second anchor electrodes and be coupled to substrate at the another side of anchor.

First stator electrode 1450 can be one in more than first stator electrode, and described more than first stator electrode and the respective electrode in described more than first mass electrode be staggered to be engaged and paired to form the first electrode pair.Second stator can be one in more than second stator electrode, and described more than second stator electrode and the respective electrode in described more than second stator electrode be staggered to be engaged and paired to form the second electrode pair.

In the first vibration mode of tube core 1400, the Part I 1454 of mass may be about to the Part II 1456 moving away from mass.Distance between the electrode that first stator electrode 1450 and the second stator electrode 1451 can be arranged such that the first electrode pair can and the electrode of the second electrode pair between distance be inversely proportional to.The Part I 1454 of mass can be symmetrical at the Part II 1456 of the another side of anchor 1404 and mass.First stator 1430 can be asymmetric relative to the second stator 1431 at the another side of anchor 1404.

But Figure 18 shows the method for the z-axis electrode that to shake according to the making of an embodiment.At 1802 places, example comprises formation mass.This example can comprise the anchor formed for mass being coupled to substrate.The first side that this example can be included in anchor forms Part I, and this Part I can move relative to anchor and comprise the first mass electrode.Second side relative with the first side that this example can be included in anchor forms Part II, and this Part II comprises the second mass electrode.At 1804 places, this example can comprise the first stator formed for being coupled to substrate, comprises the first mass electrode side formed at mass and extends with the first stator electrode forming the first electrode pair.At 1806 places, this example can comprise the second stator formed for being coupled to substrate, comprises the second mass electrode side formed at mass and extends with the second stator electrode forming the second electrode pair.According to example, at 1808 places, mass, the first stator and the second stator are formed to make in the first vibration mode of mass, and the distance between the first right electrode and the distance between the electrode of the second electrode pair are inversely proportional to.

In the first vibration mode, described more than first stator electrode can be configured to move away from described more than first stator electrode and move away from anchor, and described more than second stator electrode can be configured to towards described more than second stator electrode and move towards anchor.

Mass can be configured to relative to substrate vibration to make the distance between described more than first stator electrode and described more than first stator electrode change, and the distance between described more than second stator electrode and described more than second stator electrode is changed.

When in described more than second stator electrode near anchor one (as, 1451) can with described more than second stator electrode near anchor one (as, 1452 ') when larger distance, in described more than first stator electrode near anchor one (as, 1452) one (e.g., 1450) and near anchor in described more than first stator electrode are spaced apart.

Each in first mass electrode 1452 and the first stator electrode 1450 can be elongated.Distance D14 between first mass electrode and the first stator electrode can be substantial constant along the length L14 of each.Each in second mass electrode 1452 ' and the second stator electrode 1451 can be elongated.Distance between second mass electrode and the second stator electrode is substantial constant along the length of each.

One or more in first mass electrode, the second mass electrode, the first stator electrode and the second stator electrode can be bending.Each in described electrode can around a bending shaft, and mass can be configured to rotate around this axle in the second vibration mode.This axle can be the intersection between plane 1422 and plane 1423.By mass being shaped to shape from wafer removing materials (such as by cutting material, such as by etching).Describedly shapingly comprise deep reaction ion etching.

Tube core 1400 can be used for responding to motion.The vibration of the Part I of mass and the Part II of mass can be excited, and makes Part I mobile also synchronously spaced apart together with the second stator towards corresponding first stator with Part II.By measuring the difference of the corresponding capacitance value of the first stator and the second stator, respond to along moving of a direction tube core, this direction extends between the Part I and the Part II of mass of mass.First mass electrode 1452 can move towards the first stator electrode 1450 of the first stator 1430, and Part II 1456 can comprise the second mass electrode 1452 ' of the second stator electrode 1451 moving away from the second stator.Carry out responding to comprising to motion and the first electric capacity of the first electrode pair comprising the first mass electrode and the first stator electrode and the difference comprised between the second mass electrode and the second electrode pair of the second stator electrode are responded to.Mass can be rotated in the plane (e.g., the plane parallel with 1423 with plane 1422) of mass, and do not change the corresponding capacitance value of the first stator and the second stator record difference.Rotation can the distance between the electrode not changing the first electrode pair and the distance between the electrode not changing the second electrode pair occur.

Figure 17 shows the method according to the low quadrature error Suspension of the making of an embodiment.At 1702 places, described method comprises etachable material to limit anchor.At 1704 places, described method comprises the described material of etching is coupled to anchor the first nonlinear suspension member with the side being limited to described anchor.At 1706 places, described method comprises the described material of etching to limit the second nonlinear suspension member, described second nonlinear suspension member is coupled to anchor in the identical side of described anchor, and described second nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane.At 1708 places, described method comprises the described material of etching to limit the mass of plane formula, described mass is suspended in midair by described first nonlinear suspension member and described second nonlinear suspension member at least in part, makes described mass to rotate around described anchor and can slide in the plane being parallel to substrate.

Optional method may be there is, be included in wherein etching and comprise the method for deep reaction ion etching.In some optional methods, the first nonlinear suspension member and the second nonlinear suspension member are first group of parts, comprise the described material of etching to limit and described first group of contrary second group of nonlinear suspension member.Some optional methods comprise: etching is used for the 3rd group of nonlinear suspension member anchor being coupled to mass, and etching is used for the 4th group of nonlinear suspension member anchor being coupled to mass, wherein said 3rd group has to described first group of key element similar with second group with the 4th group and is halved by the second anchor bisecting plane perpendicular to the first anchor bisecting plane.

Supplemental instruction

The theme of this document can use some examples to describe.Example 1 comprises a kind of for the micro electronmechanical tube core responded to that moves, and comprising: fixed part; Be coupled to the anchor of described fixed part; The first nonlinear suspension member of described anchor is coupled in the side of described anchor; Be coupled to the second nonlinear suspension member of described anchor in the same side of described anchor, described second nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane; And the mass of plane formula, described mass is suspended in midair by described first nonlinear suspension member and described second nonlinear suspension member at least in part, makes described mass to rotate around described anchor and can slide in the plane being parallel to described fixed part.

Example 2 comprises the theme of example 1, and wherein the first nonlinear suspension member is C shape.

Example 3 comprises the theme of example 2, wherein said C shape comprises and is coupled to described anchor and the interior section extended towards described anchor bisecting plane, and there is the core of portions of proximal and distal part, wherein said portions of proximal is coupled to described interior section, described distal part extends away from described anchor along described anchor bisecting plane, and is coupled to the exterior section extended away from described anchor bisecting plane.

Example 4 comprises the theme of example 3, and the described exterior section of wherein said first nonlinear suspension member has the portions of proximal of the described core being coupled to described first nonlinear suspension member, and extends the distal part away from described anchor bisecting plane; The Part IV of described first nonlinear suspension member, the described distal part of described exterior section is coupled in its proximal portion, and the distal part of described Part IV is extended to towards described anchor, the distal part of described Part IV is coupled to the Part V extended towards described anchor bisecting plane of described first nonlinear suspension member.

Example 5 to comprise in example 3-4 any one theme, and wherein interior section and exterior section are linear and parallel.

Example 6 comprises the theme of example 5, and wherein core is perpendicular to interior section and exterior section.

Example 7 to comprise in example 3-6 any one theme, and wherein core is parallel to anchor bisecting plane.

Example 8 to comprise in example 1-7 any one theme, and Qi Zhongmao, the first nonlinear suspension member, the second nonlinear suspension member and mass are formed by monoliths.

Example 9 comprises the theme of example 8, and wherein fixed part comprises the fixing monoliths different from the monoliths of anchor, the first nonlinear suspension member, the second nonlinear suspension member and mass.

Example 10 to comprise in example 1-9 any one theme, and wherein fixed part comprises the fixing monoliths identical with the monoliths of anchor, the first nonlinear suspension member, the second nonlinear suspension member and mass.

Example 11 to comprise in example 1-10 any one theme, and wherein tube core is slice-shaped, and each in the first nonlinear suspension member and the second nonlinear suspension member all has the xsect of general rectangular, and the height of this xsect is less than width.

Example 12 comprises a kind of method, comprising: etachable material is to limit anchor; Etch described material is coupled to anchor the first nonlinear suspension member with the side being limited to described anchor; Etch described material is coupled to described anchor the second nonlinear suspension member with the same side being limited to described anchor, described second nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane; And etch described material to limit the mass of plane formula, described mass is suspended in midair by described first nonlinear suspension member and described second nonlinear suspension member at least in part, makes described mass to rotate around described anchor and can slide in the plane being parallel to substrate.

Example 13 comprises the theme of example 12, and wherein etching comprises deep reaction ion etching.

Example 14 to comprise in example 12-13 any one theme, and wherein the first nonlinear suspension member and the second nonlinear suspension member are first group of parts, comprises the described material of etching to limit and described first group of contrary second group of nonlinear suspension member.

Example 15 comprises the theme of example 14, comprise the three group nonlinear suspension member of etching for anchor being coupled to mass, and etching is used for the 4th group of nonlinear suspension member anchor being coupled to mass, wherein said 3rd group has to described first group of key element similar with second group with the 4th group and is halved by the second anchor bisecting plane perpendicular to the first anchor bisecting plane.

Example 16 can comprise any one of previous examples, and wherein micro electronmechanical tube core is responded to motion.This example can comprise substrate.This example can be included in the mass that anchor place is coupled to substrate.Mass can comprise can relative to the Part I of anchor movement, and this Part I comprises the first mass electrode.This example can comprise the Part II relative with Part I relative to anchor of mass, and described Part II can move relative to anchor and Part I, and Part II comprises the second mass electrode.This example can comprise and is coupled to substrate and the first stator comprising the first stator electrode, and described first stator electrode extends on the first mass electrode side of the Part I of mass to form the first electrode pair.This example can comprise and is coupled to substrate and the second stator comprising the second stator electrode, and described second stator electrode is relative with the first stator electrode and extend to form the second electrode pair on the second mass electrode side of the Part II of mass.According to these examples, in the first vibration mode, wherein the Part I of mass moves away from the Part II of mass, and mass, the first stator electrode and the second stator electrode are arranged such that the distance between distance between the electrode of the first electrode pair and the electrode of the second electrode pair is inversely proportional to.

Example 17 can comprise any one of previous examples, wherein the first mass electrode of mass is relative with the second mass electrode of mass at the another side of anchor, and wherein the first stator electrode is relative with the second anchor electrodes and be coupled to substrate at the another side of anchor.

Example 18 can comprise any one of previous examples, wherein mass Part I the another side of anchor and the Part II of mass symmetrical, and the first stator is asymmetric relative to the second stator at the another side of anchor.

Example 19 can comprise any one of previous examples, and wherein the first electrode pair comprises the first capacitor, and the second electrode pair comprises the second capacitor.

Example 20 can comprise any one of previous examples, and each wherein in the first mass electrode and the first stator electrode is elongated, and distance between the first mass electrode and the first stator electrode along each length substantial constant.

Example 21 can comprise any one of previous examples, and each wherein in the second mass electrode and the second stator electrode is elongated, and distance between the second mass electrode and the second stator electrode along each length substantial constant.

Example 22 can comprise any one of previous examples, wherein mass limits the first opening on the first side of anchor, the Part I of mass is coupled in the first opening movably, and more than first the mass electrode comprising the first mass electrode to extend in described opening and be spaced apart from each other.In this example, mass can limit the second opening on the second side of anchor, and in the second opening, more than second the mass electrode comprising the second mass electrode to extend in described opening and be spaced apart from each other in Part II coupling.

Example 23 can comprise any one of previous examples, wherein the first stator electrode is in more than first stator electrode, and described more than first stator electrode and the respective electrode in described more than first mass electrode be staggered to be engaged and paired to form the first electrode pair; And wherein the second stator electrode is in more than second stator electrode, described more than second stator electrode and the respective electrode in described more than second stator electrode be staggered to be engaged and paired to form the second electrode pair.

Example 24 can comprise any one of previous examples, wherein, in the first vibration mode, described more than first stator electrode is constructed to move away from described more than first stator electrode and away from anchor, and described more than second stator electrode is constructed to towards described more than second stator electrode and moves towards anchor.

Example 25 can comprise any one of previous examples, wherein mass is constructed to relative to substrate vibration to make the distance between described more than first stator electrode and described more than first stator electrode change and to make the distance between described more than second stator electrode and described more than second stator electrode change, in described more than second stator electrode closest in the one of anchor and described more than second stator electrode closest to the one of anchor at a distance of larger distance time, in described more than first stator electrode closest in the one of anchor and described more than first stator electrode closest to the one of anchor at a distance of certain distance.

Example 26 can comprise any one of previous examples, wherein the first mass electrode, the second mass electrode, the first stator electrode and the second stator electrode are bending, each wherein in electrode is around certain bending shaft, and mass is constructed to rotate around this axle in the second vibration mode.

Example 27 can comprise any one of previous examples and can comprise formation mass, comprises the anchor formed for mass being coupled to substrate.The first side that this example can be included in anchor forms Part I, and this Part I can move relative to anchor and comprise the first mass electrode.Second side relative with the first side that this example can be included in anchor forms Part II, and this Part II comprises the second mass electrode.This example can comprise the first stator formed for being coupled to substrate, comprises the first mass electrode side formed at mass and extends with the first stator electrode forming the first electrode pair.This example can comprise the second stator formed for being coupled to substrate, comprises the second mass electrode side formed at mass and extends with the second stator electrode forming the second electrode pair.According to this example, mass, the first stator and the second stator are formed to make in the first vibration mode of mass, and the distance between the first right electrode and the distance between the electrode of the second electrode pair are inversely proportional to.

Example 28 can comprise any one of previous examples, and wherein said formation comprises deep reaction ion etching.

Example 29 can comprise any one of previous examples, wherein form the first mass electrode, form the second mass electrode, form the first stator electrode and form the second stator electrode and comprise and to be formed each with certain curvature, wherein each is around certain bending shaft, and mass rotates around this axle in the second vibration mode.

Example 30 can comprise any one of previous examples, comprises and forms the first capacitor with the first electrode pair, and form the second capacitor with the second electrode pair.

Example 31 can comprise any one of previous examples, wherein form the first distance that the first mass electrode and the first stator electrode comprise the length substantial constant formed between which along the first electrode pair, and form the second distance that the second mass electrode and the second stator electrode comprise the length substantial constant formed between which along the second electrode pair.

Example 32 can comprise any one of previous examples, comprises a kind ofly using micro electronmechanical tube core to the method responded to of moving, and comprises.This example can comprise the vibration exciting the Part I of mass and the Part II of mass, makes Part I mobile also synchronously spaced apart together with the second stator towards corresponding first stator with Part II.This example can comprise the difference of the corresponding capacitance value by measuring the first stator and the second stator, responds to along moving of a direction tube core, and this direction extends between the Part I and the Part II of mass of mass.

Example 33 can comprise any one of previous examples, and wherein Part I comprises the first mass electrode of the first stator electrode movement towards the first stator, and Part II comprises the second mass electrode of the second stator electrode moving away from the second stator.

Example 34 can comprise any one of previous examples, wherein responds to comprise to motion and responds to the first electric capacity of the first electrode pair comprising the first mass electrode and the first stator electrode and the difference comprised between the second mass electrode and the second electrode pair of the second stator electrode.

Example 35 can comprise any one of previous examples, comprises and being turned by the plane internal rotation of mass at described mass, and do not change the corresponding capacitance value of the first stator and the second stator record difference.

Example 36 can comprise any one of previous examples, is turned by the plane internal rotation of mass at described mass when being included in the distance between the electrode not changing the first electrode pair and the distance between the electrode not changing the second electrode pair.

Example 37 can comprise any one of previous examples, comprises the micro electronmechanical tube core responded to that moves.This example can comprise fixed part.This example can comprise the anchor being coupled to fixed part.The first side that this example can be included in anchor is coupled to the first nonlinear suspension member of anchor.The first side that this example can be included in anchor is coupled to the second nonlinear suspension member of anchor, this second nonlinear suspension member has the shape and the position that become mirror with the first nonlinear suspension member about anchor bisecting plane.According to this example, the first nonlinear suspension member and the second nonlinear suspension member are parts for the interior ring stand of micro electronmechanical tube core.This example can comprise plane mass, described mass is suspended in midair by the first suspension member be arranged on the first side of anchor and the second suspension member be arranged on second side relative with the first side of anchor, tube core limits the first gap and the second gap of extending along second side relative with the first side of anchor that the first side along anchor extends, each in first gap and the second gap extends between interior ring stand and mass, wherein interior ring stand is suspended in midair by the first nonlinear suspension member and the second nonlinear suspension member at least in part and makes mass to rotate around anchor and can slide in the plane being parallel to fixed part.

Example 38 can comprise any one of previous examples, and wherein the first gap extends to the second suspension member from the first suspension member, and the second gap extends to the second suspension member from the first suspension member.

Example 39 can comprise any one of previous examples, and wherein the first gap and the second gap are C shape, and a C shape limits the first opening towards the second opening open of the 2nd C shape.

Example 40 can comprise any one of previous examples, and wherein the first gap limits the first vertical deflection portion and the second vertical deflection portion, and the second gap limits the 3rd vertical deflection portion and the 4th vertical deflection portion.

Example 41 can comprise any one of previous examples, and each wherein in first, second, third and fourth vertical deflection portion is elongated, and its length: width is long, and each corresponding length extends away from corresponding suspension member.

Example 42 can comprise any one of previous examples, and wherein each corresponding length extends away from anchor bisecting plane.

Example 43 can comprise any one of previous examples, and wherein a C shape comprises first end section and second end section, and core extends between described first end section and described second end section.

Example 44 can comprise any one of previous examples, and wherein first end section and second end section is perpendicular to core.

Example 45 can comprise any one of previous examples, and wherein the first sloping portion extends between first end section and core, and the second sloping portion extends between second end section and core.

Example 46 can comprise any one of previous examples, and wherein the first gap is the image shape in the second gap, and the first gap becomes mirror image along anchor bisecting plane.

Example 47 can comprise a kind of method, and comprise and form a kind of material to limit interior ring stand, this interior ring stand is coupled to be anchored on substrate with anchor.This example can comprise and forms described material the first side being limited to described anchor to be coupled to the first nonlinear suspension member of anchor.This example can comprise and forms described material the first side being limited to described anchor to be coupled to the second nonlinear suspension member of anchor, and described second nonlinear suspension member has the shape and the position that become mirror with described first nonlinear suspension member about anchor bisecting plane.This example can comprise the described material of formation to limit the mass of plane formula, described mass is suspended in midair by the first suspension member be arranged on the first side of anchor and the second suspension member be arranged on second side relative with the first side of anchor, first gap extends along the first side of anchor and the second gap extends along second side relative with the first side of anchor, and each in the first gap and the second gap extends between mass and interior ring stand.

Example 48 can comprise any one of previous examples, and wherein said formation comprises deep reaction ion etching.

Example 49 can comprise any one of previous examples, and wherein the first nonlinear suspension member and the second nonlinear suspension member are first group of parts, comprises the described material of etching to limit and described first group of contrary second group of nonlinear suspension member.

Example 50 can comprise the three group nonlinear suspension member of etching for anchor being coupled to mass, and etching is used for the 4th group of nonlinear suspension member anchor being coupled to mass, wherein said 3rd group has to described first group of key element similar with second group with the 4th group and is halved by the second anchor bisecting plane perpendicular to the first anchor bisecting plane.

Example 51 can comprise any one of previous examples, wherein etches the first gap and the second gap and comprises each is shaped to C shape, and a C shape in the first gap is opened wide towards the 2nd C shape in the second gap.

Example 52 can comprise a kind of method using micro electronmechanical tube core to respond to motion, comprises and being rotated relative to being coupled to ring stand in substrate via anchor by mass.This example can comprise makes the first nonlinear suspension member distortion, and described mass is coupled to the first side of anchor by this first nonlinear suspension member outside the face of mass plane, above mass.This example can comprise makes the second nonlinear suspension member distortion, this second nonlinear suspension member on the first relative side of the external described mass plane in the face of mass plane, described mass is coupled to the first side of anchor below mass.This example can comprise makes support mass and the first suspension member distortion be arranged on the first side of anchor, and the second suspension member be arranged on second side relative with the first side of anchor is out of shape, tube core limits the first gap and the second gap of extending along second side relative with the first side of anchor that the first side along anchor extends, and each in the first gap and the second gap extends between interior ring stand and mass.

Example 53 can comprise any one of aforementioned claim, wherein make support mass and be arranged on the first suspension member distortion on the first side of anchor, and the second suspension member be arranged on second side relative with the first side of anchor is out of shape, comprise the first vertical deflection portion and the second vertical deflection portion and respective the 3rd vertical deflection portion by the second gap restriction and the distortion of the 4th vertical deflection portion that make to limit by the first gap separately.

Example 54 can comprise any one of aforementioned claim, wherein during the first half of rotating circulating, make the first vertical deflection portion and the distortion of the second vertical deflection portion away from anchor, and the 3rd vertical deflection portion and the 4th vertical deflection portion are out of shape towards anchor, and during the second half of rotating circulating, first vertical deflection portion and the second vertical deflection portion are out of shape towards anchor, and make the 3rd vertical deflection portion and the distortion of the 4th vertical deflection portion away from anchor.

Example 55 can comprise any one of aforementioned claim, and wherein the distortion of deflection division comprises bending.

Example 56 can comprise any one of aforementioned claim, and wherein anchor is vertically halved by anchor bisecting plane, and passes through between the first nonlinear suspension member and the second nonlinear suspension member and between the first suspension member and the second suspension member.

Above-mentioned detail specifications have references to accompanying drawing, and accompanying drawing is also a part for described detail specifications.Accompanying drawing shows can apply specific embodiments of the invention in graphic mode.These embodiments are referred to as " example " in this article.All publications, patent and patent document are herein all as the reference content of this paper, although they distinguish in addition reference.If there is purposes difference herein and between reference paper, then the purposes with reference to file regards as supplementing of purposes herein, if there is implacable difference between the two, is then as the criterion with purposes herein.

In this article, normally used the same with patent document, term " " or " a certain " represent comprise one or more, but other situations or when using " at least one " or " one or more " should except.In this article, except as otherwise noted, otherwise use term "or" refer to without exclusiveness or, " A or B " being comprised: " A but be not B ", " B but be not A " and " A and B ".In the following claims, term " comprises " and " wherein " is equal to each term and " comprises " and the plain English of " wherein ".Equally, in this article, term " comprises " and " comprising " is open, namely, system, equipment, article or step comprise parts except those parts listed after term this in claim, within the scope being still considered as dropping on this claim.And in claim below, term " first ", " second " and " the 3rd " etc. are only used as label, not have quantitative requirement to object.The effect of above-mentioned explanation is to explain orally and unrestricted.In other instances, above-mentioned example (or one or more aspect) can be used be combineding with each other.Can, on the basis understanding above-mentioned instructions, utilize certain routine techniques of prior art to perform other embodiments.

There is provided specification digest according to patent regulation 37 C.F.R. § 1.72 (b) thus allow reader to determine essence disclosed in technology fast.The submission of specification digest is not intended to scope and implication for explaining or limit claim.Equally, in superincumbent embodiment, various feature can be classified into be rationalized the disclosure.This open feature not shoulding be understood to failed call is essential to any claim.On the contrary, the feature that theme of the present invention can be is less than all features of specific disclosed embodiment.Therefore, claim is below incorporated in embodiment accordingly, and each claim all as an independent embodiment, and can be susceptible to these embodiments and can be bonded to each other in various combination or arrangement.Should referring to appended claim, and all scopes of equivalent that these claims are enjoyed, determine the scope of the application.

Claims

1. the micro electronmechanical tube core for sensing motion, comprising:

Substrate;

Mass, described mass is coupled to described substrate at anchor place, and described mass comprises:

Part I, described Part I can move relative to described anchor, and described Part I comprises the first mass electrode; And

Part II, described Part II is relative with described Part I relative to described anchor, and described Part II can move relative to described anchor and described Part I, and described Part II comprises the second mass electrode;

First stator, described first rotor yoke is to described substrate and comprise the first stator electrode, and described first stator electrode extends on the described first mass electrode side of the described Part I of described mass to form the first electrode pair; And

Second stator, described second rotor yoke is to described substrate and comprise the second stator electrode, and described second stator electrode is relative with described first stator electrode and extend to form the second electrode pair on the described second mass electrode side of the described Part II of described mass;

Wherein in the first vibration mode, the described Part I of wherein said mass moves away from the described Part II of described mass, and described mass, described first stator electrode and described second stator electrode are arranged such that the distance between distance between the electrode of described first electrode pair and the electrode of described second electrode pair is inversely proportional to.

2. tube core according to claim 1, the described first mass electrode of wherein said mass is relative with the described second mass electrode of described mass at the another side of described anchor, and wherein said first stator electrode is relative with described second anchor electrodes and be coupled to described substrate at the another side of described anchor.

3. tube core according to claim 1, the another side of described Part I at described anchor of wherein said mass and the described Part II symmetry of described mass, and described first stator is asymmetric relative to described second stator at the another side of described anchor.

4. tube core according to claim 1, wherein said first electrode pair comprises the first capacitor, and described second electrode pair comprises the second capacitor.

5. tube core according to claim 1, each in wherein said first mass electrode and described first stator electrode is elongated, distance between described first mass electrode and described first stator electrode is along the length substantial constant of each, each in wherein said second mass electrode and described second stator electrode is elongated, the distance between described second mass electrode and described second stator electrode along each length substantial constant.

6. tube core according to claim 1, wherein said mass limits:

The first opening on the first side of described anchor, the described Part I of described mass is coupling in described first opening movably, and more than first the mass electrode comprising described first mass electrode to extend in described opening and be spaced apart from each other; And

The second opening on described second side of described anchor, described Part II is coupling in described second opening, and more than second the mass electrode comprising described second mass electrode to extend in described opening and be spaced apart from each other.

7. tube core according to claim 6, wherein said first stator electrode is one in more than first stator electrode, and described more than first stator electrode and the respective electrode in described more than first mass electrode be staggered to be engaged and paired to form described first electrode pair; And wherein said second stator electrode is one in more than second stator electrode, described more than second stator electrode and the respective electrode in described more than second stator electrode be staggered to be engaged and paired to form described second electrode pair.

8. tube core according to claim 7, wherein, in described first vibration mode, described more than first stator electrode is constructed to move away from described more than first stator electrode and away from described anchor, and described more than second stator electrode is constructed to towards described more than second stator electrode and moves towards described anchor.

9. tube core according to claim 8, wherein said mass is constructed to relative to described substrate vibration to make the distance between described more than first stator electrode and described more than first stator electrode change and to make the distance between described more than second stator electrode and described more than second stator electrode change, in described more than second stator electrode closest in one and described more than second stator electrode of described anchor closest to the one of described anchor apart larger distance time, closest to one certain distance apart of described anchor closest in the one of described anchor and described more than first stator electrode in described more than first stator electrode.

10. the tube core according to any one of claim 1-9, wherein said first mass electrode, described second mass electrode, described first stator electrode and described second stator electrode are bending, each in wherein said electrode is around certain bending shaft, and described mass is constructed to rotate around described axle in the second vibration mode.

11. 1 kinds of methods, comprising:

Form mass, comprising:

Form the anchor being used for described mass being coupled to substrate;

First side of described anchor forms Part I, and described Part I can move relative to described anchor and comprise the first mass electrode; And

Second side relative with described first side of described anchor forms Part II, and described Part II comprises the second mass electrode;

Forming the first stator for being coupled to described substrate, comprising the described first mass electrode side formed at described mass and extending with the first stator electrode forming the first electrode pair;

Forming the second stator for being coupled to described substrate, comprising the described second mass electrode side formed at described mass and extending with the second stator electrode forming the second electrode pair,

Wherein said mass, described first stator and described second stator are formed to make in the first vibration mode of described mass, and the distance between described first right electrode and the distance between the electrode of described second electrode pair are inversely proportional to.

12. methods according to claim 11, are wherein formed and comprise deep reaction ion etching.

13. methods according to claim 11, wherein form described first mass electrode, form described second mass electrode, form described first stator electrode and form described second stator electrode and comprise and to be formed each with certain curvature, each is around certain bending shaft, and described mass rotates around described axle in the second vibration mode.

14. methods according to claim 11, comprise and form the first capacitor with described first electrode pair and form the second capacitor with described second electrode pair.

15. methods according to any one of claim 11-14, wherein form the first distance that described first mass electrode and described first stator electrode comprise the length substantial constant formed between which along described first electrode pair, and form the second distance that described second mass electrode and described second stator electrode comprise the length substantial constant formed between which along described second electrode pair.