CN104360698A - Temperature control system and control method thereof - Google Patents
Temperature control system and control method thereof Download PDFInfo
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- CN104360698A CN104360698A CN201410716335.3A CN201410716335A CN104360698A CN 104360698 A CN104360698 A CN 104360698A CN 201410716335 A CN201410716335 A CN 201410716335A CN 104360698 A CN104360698 A CN 104360698A
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- temperature
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Abstract
The invention discloses a temperature control system and a control method thereof; the temperature control system comprises a hot chuck, a first temperature sensor, a temperature comparison device and a temperature controller; the hot chuck is arranged on an external machine table; the first temperature sensor is used for obtaining real-time temperature of the hot chuck; the temperature comparison device is used for obtaining real-time temperature of the hot chuck and connected with the first temperature sensor; the temperature controller is arranged on the external machine table and connected with the output end of the first temperature sensor and the output end of the temperature comparison device respectively; the working state of the first temperature sensor can be monitored in real time; signals whether the first temperature sensor works normally or not are sent into the temperature controller; the first temperature sensor is capable of obtaining the working temperature of the hot chuck of the machine table in real time and sending temperature signals into the temperature controller, so that the temperature controller can obtain accurate and reliable temperature signals; the temperature control reliability of the machine table can be improved; the production efficiency is increased; and the production cost is reduced.
Description
Technical field
The present invention relates to photoresistance board domain of control temperature, be specifically related to a kind of temperature control system and control method thereof.
Background technology
KEM λ-3000 II photoresistance board in prior art, its temperature controls only to be carried out by a temperature controller to control, but once there are temperature controller abnormal conditions, such as, temperature sensor feedback temperature and actual temperature not square one, then cannot realize reporting to the police to board, make photoresistance board when actual temperature exceedes working temperature, photoresistance board still continuous firing, can cause photoresistance board to produce a large amount of scrap products.Add the scrappage of photoresistance board, improve production cost, reduce production efficiency.
Summary of the invention
The object of the present invention is to provide a kind of temperature control system and control method thereof, by arranging the first temperature sensor, the second temperature sensor and comparer, the thermal chuck real-time working temperature making temperature controller can either obtain the first temperature sensor to transmit, also can judge that the work of the first temperature sensor is whether normal by the second temperature sensor and comparer, ensure that temperature controller can thermal chuck real-time working temperature accurately.The temperature that the present invention can improve photoresistance board controls reliability, reduces the scrappage of photoresistance board, improves production efficiency, reduce production cost.
In order to achieve the above object, the present invention is achieved through the following technical solutions:
A kind of temperature control system, be characterized in, this system comprises:
Thermal chuck, is arranged on outside board;
First temperature sensor, obtains the real time temperature of described thermal chuck;
Temperature comparison means, obtains the real time temperature of described thermal chuck, and is connected with described first temperature sensor;
Temperature controller, is arranged on outside board; Described temperature controller is connected with described first temperature sensor output terminal, temperature comparison means output terminal respectively.
Preferably, described temperature comparison means comprises:
Second temperature sensor, obtains the real time temperature of described thermal chuck;
Comparer, be connected with described first temperature sensor output terminal, the second temperature sensor output terminal respectively, the output terminal of described comparer is connected with described temperature controller; The described first temperature sensor acquisition temperature signal of this comparer calculating and described second temperature sensor obtain the difference of temperature signal.
Have a photoresistance board for temp. control function, be characterized in, this photoresistance board is provided with temperature control system; Described temperature control system comprises:
Thermal chuck, is connected with described photoresistance board;
First temperature sensor, obtains the real time temperature of described thermal chuck;
Temperature comparison means, obtains the real time temperature of described thermal chuck, and is connected with described first temperature sensor;
Temperature controller, is connected with described first temperature sensor output terminal, comparator output terminal and described board respectively.
Preferably, described temperature comparison means comprises:
Second temperature sensor, obtains the real time temperature of described thermal chuck;
Comparer, be connected with described first temperature sensor output terminal, the second temperature sensor output terminal respectively, the output terminal of described comparer is connected with described temperature controller; The described first temperature sensor acquisition temperature signal of this comparer calculating and described second temperature sensor obtain the difference of temperature signal.
A kind of temperature-controlled process, be characterized in, this control method comprises following steps:
S1, the first temperature sensor obtains thermal chuck temperature information, and sends it to temperature controller, temperature comparison means;
S2, temperature comparison means obtains thermal chuck temperature information, and itself and described first temperature sensor are obtained thermal chuck temperature information compares, calculates, and result of calculation is sent to temperature controller;
S3, described temperature controller receives, process and judge the information of the temperature information that described first temperature sensor obtains and the transmission of described temperature comparison means.
Preferably, described step S2 comprises:
S2.1, described comparer arranges C.T. value according to the working condition of described thermal chuck;
S2.2, described comparer the described first temperature sensing actuator temperature received and the second temp. sensor thermometer are calculated both the absolute value of difference;
S2.3, described comparer judges that whether the absolute value of described difference is higher than C.T. value; When the absolute value of described difference is higher than C.T. value, by transmission first temperature sensor operation irregularity signal to described temperature controller; When the absolute value of difference is lower than C.T. value, by transmission first temperature sensor signal working properly to described temperature controller.
Preferably, described step S3 comprises:
S3.1, described temperature controller arranges board normal working temperature value according to the working condition of board;
S3.2, the consequential signal that this temperature controller receives the temperature signal of described first temperature sensor, described comparer sends;
S3.3, this temperature controller judges whether the temperature signal of reception first temperature sensor has exceeded board normal working temperature value; This temperature controller judges to receive consequential signal that described comparer sends whether as the first temperature sensor signal working properly.
Preferably, described step S3.3 comprises:
S3.3.1, when described temperature controller judges the temperature signal of described first temperature sensor whether higher than board normal working temperature value; When the temperature signal of described first temperature sensor is higher than board normal working temperature value, this temperature controller controls board and sends alerting signal and stop board work; When described temperature controller judges the temperature signal of described first temperature sensor lower than board normal working temperature value, perform step S3.3.2;
S3.3.2, described temperature controller judges whether the consequential signal receiving the transmission of described comparer is the first temperature sensor signal working properly;
When the consequential signal that described temperature controller receives the transmission of described comparer is the first temperature sensor operation irregularity signal, this temperature controller controls board and sends alerting signal and stop board work;
When to receive consequential signal that described comparer sends be the first temperature sensor signal working properly to described temperature controller, this temperature controller controls board and normally works.
The present invention compared with prior art has the following advantages:
The present invention is by adding temperature comparison means, the duty of the first temperature sensor can be monitored in real time, and its situation signal whether working properly is sent in temperature controller, simultaneously the first temperature sensor can the thermal chuck working temperature of Real-time Obtaining photoresistance board, and this temperature signal is sent in temperature controller, temperature controller can be obtained accurately, reliable temperature signal, thus control the duty of photoresistance board.The temperature that the present invention can improve photoresistance board controls reliability, reduces the scrappage of photoresistance board, improves production efficiency, reduce production cost.
Accompanying drawing explanation
Fig. 1 is the one-piece construction block diagram of a kind of temperature control system of the present invention.
Fig. 2 is the overall flow figure of a kind of temperature-controlled process of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by describing a preferably specific embodiment in detail, the present invention is further elaborated.
As shown in Figure 1, one of the present embodiment, a kind of temperature control system.This system comprises: thermal chuck 10, first temperature sensor 20, temperature comparison means 30 and temperature controller 40.
Wherein, thermal chuck 10 is arranged on outside board.First temperature sensor 20 is for obtaining the real time temperature of thermal chuck 10.Temperature comparison means 30 is connected with thermal chuck 10, first temperature sensor 20 respectively.Temperature comparison means 30 obtains the real time temperature of thermal chuck 10, and is connected with the first temperature sensor 20.Temperature controller 40 is arranged on outside board; Temperature controller 40 is connected with the first temperature sensor 20 output terminal, temperature comparison means 30 output terminal respectively.
As shown in Figure 1, temperature comparison means 30 comprises: the second temperature sensor 31, comparer 32.
Second temperature sensor 31 is for obtaining the real time temperature of thermal chuck 10.Comparer 32 is connected with the first temperature sensor 20 output terminal, the second temperature sensor 31 output terminal respectively; The output terminal of comparer 32 is connected with temperature controller 40.
One of the present embodiment, a kind of photoresistance board with temp. control function, is provided with photoresistance board, and this photoresistance board is provided with temperature control system; Temperature control system comprises: thermal chuck 10, first temperature sensor 20, temperature comparison means 30 and temperature controller 40
Wherein, thermal chuck 10 is connected with photoresistance board; First temperature sensor 20 obtains the real time temperature of thermal chuck 10.Temperature comparison means 30 obtains the real time temperature of thermal chuck 10, and is connected with the first temperature sensor 20.Temperature controller 40 is connected with the first temperature sensor 20 output terminal, comparer 40 output terminal and board respectively.
Wherein, temperature comparison means 30 comprises: the second temperature sensor 31 obtaining the real time temperature of thermal chuck 10.The comparer 32 be connected with the first temperature sensor 20 output terminal, the second temperature sensor 31 output terminal respectively, the output terminal of this comparer 32 is connected with temperature controller 40.
As shown in Figure 2, a kind of temperature-controlled process, this control method comprises following steps:
S1, the first temperature sensor 20 obtains thermal chuck 10 temperature information, and sends it to temperature controller 40, temperature comparison means 30.
First temperature sensor 20 obtains thermal chuck 10 temperature information, and temperature signal is converted to electric signal and is sent to temperature controller 40, comparer 32.
S2, temperature comparison means 30 obtains thermal chuck 10 temperature information, and itself and described first temperature sensor 20 are obtained thermal chuck 10 temperature information compares, calculates, and result of calculation is sent to temperature controller 40.This step comprises:
S2.1, comparer 32 arranges C.T. value according to the working condition of thermal chuck 10.
In the present embodiment, the operating temperature range due to outside board is 25 DEG C-300 DEG C, therefore the C.T. value in comparer 32 can be arranged on arbitrary value in 0 DEG C-100 DEG C.In the present embodiment, the C.T. value in comparer 32 is set to 5 DEG C.
Second temperature sensor 31 obtains thermal chuck 10 temperature information, and temperature signal is converted to electric signal and is sent to comparer 32.
S2.2, comparer 32 is by the absolute value of both described first temperature sensor 20 temperature that receives and the second temperature sensor 31 temperature computation difference;
S2.3, comparer 32 judges that whether the absolute value of described difference is higher than C.T. value; When the absolute value of described difference is higher than C.T. value, by transmission first temperature sensor 20 operation irregularity signal to temperature controller 40; When the absolute value of difference is lower than C.T. value, by transmission first temperature sensor 20 signal working properly to temperature controller 40.
S3, temperature controller 40 receives, process and judge first temperature sensor 20 obtain temperature information and temperature comparison means 30 send information.This step S3 comprises:
S3.1, temperature controller 40 arranges board normal working temperature value according to the working condition of board.
In the present embodiment, it is 25 DEG C-300 DEG C that temperature controller 40 arranges board normal working temperature scope.
S3.2, this temperature controller 40 receives the temperature signal of the first temperature sensor 20, the consequential signal of comparer 32 transmission.
S3.3, this temperature controller 40 judges whether the temperature signal of reception first temperature sensor 20 has exceeded board normal working temperature value; This temperature controller 40 judges to receive consequential signal that comparer 32 sends whether as the first temperature sensor 20 signal working properly.This step S3.3 comprises:
When temperature controller 40 judges the temperature signal of the first temperature sensor 20 higher than board normal working temperature value, this temperature controller 40 controls board and sends alerting signal and stop board work.
In the present embodiment, when thermal chuck 10 temperature that the first temperature sensor 20 obtains is higher than 300 DEG C, temperature controller 40 controls board and sends alerting signal and stop board work.
S3.3.1, when temperature controller 40 judges the temperature signal of the first temperature sensor 20 whether higher than board normal working temperature value; When the temperature signal of the first temperature sensor 20 is higher than board normal working temperature value, this temperature controller 40 controls board and sends alerting signal and stop board work; When temperature controller 40 judges the temperature signal of the first temperature sensor 20 lower than board normal working temperature value, perform step S3.3.2;
S3.3.2, temperature controller 40 judges whether the consequential signal receiving comparer 32 transmission is the first temperature sensor 20 signal working properly;
When the consequential signal that temperature controller 40 receives comparer 32 transmission is the first temperature sensor 20 operation irregularity signal, this temperature controller 40 controls board and sends alerting signal and stop board work;
When the consequential signal that temperature controller 40 receives comparer 32 transmission is the first temperature sensor 20 signal working properly, this temperature controller 40 controls board and normally works.
In the present embodiment, when thermal chuck 10 temperature of the first temperature sensor 20 acquisition is within 25 DEG C-300 DEG C, temperature controller 40 judges the consequential signal that comparer 32 sends.When the first temperature sensor 20 that comparer 32 obtains and the C.T. value of the second temperature sensor 31 are greater than 5 DEG C, comparer 32 sends " the first temperature sensor operation irregularity " signal is to temperature controller 40; Temperature controller 40 controls board and sends alerting signal and stop board work.
When the first temperature sensor 20 that comparer 32 obtains and the C.T. value of the second temperature sensor 31 are less than 5 DEG C, comparer 32 sends temperature signal that the first temperature sensor sends to temperature controller 40; Temperature controller 40 controls board controller platform and normally works.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (8)
1. a temperature control system, is characterized in that, this system comprises:
Thermal chuck (10), is arranged on outside board;
First temperature sensor (20), obtains the real time temperature of described thermal chuck (10);
Temperature comparison means (30), obtains the real time temperature of described thermal chuck (10), and is connected with described first temperature sensor (20);
Temperature controller (40), is arranged on outside board; Described temperature controller (40) is connected with described first temperature sensor (20) output terminal, temperature comparison means (30) output terminal respectively; This temperature controller (40) controls outside board duty.
2. temperature control system as claimed in claim 1, it is characterized in that, described temperature comparison means (30) comprises:
Second temperature sensor (31), obtains the real time temperature of described thermal chuck (10);
Comparer (32), be connected with described first temperature sensor (20) output terminal, the second temperature sensor (31) output terminal respectively, the output terminal of described comparer (32) is connected with described temperature controller (40); This comparer (32) calculates described first temperature sensor (20) and obtains the difference that temperature signal and described second temperature sensor (31) obtain temperature signal.
3. have a photoresistance board for temp. control function, it is characterized in that, this photoresistance board is provided with temperature control system; Described temperature control system comprises:
Thermal chuck (10), is connected with described photoresistance board;
First temperature sensor (20), obtains the real time temperature of described thermal chuck (10);
Second temperature sensor (30), obtains the real time temperature of described thermal chuck (10), and is connected with described first temperature sensor (20);
Temperature controller (40), is connected with described photoresistance board; Described temperature controller (40) is connected with described first temperature sensor (20) output terminal, temperature comparison means (30) output terminal respectively.
4. have the photoresistance board of temp. control function as claimed in claim 3, it is characterized in that, described temperature comparison means (30) comprises:
Second temperature sensor (31), obtains the real time temperature of described thermal chuck (10);
Comparer (32), be connected with described first temperature sensor (20) output terminal, the second temperature sensor (31) output terminal respectively, the output terminal of described comparer (32) is connected with described temperature controller (40); This comparer (32) calculates described first temperature sensor (20) and obtains the difference that temperature signal and described second temperature sensor (31) obtain temperature signal.
5. a temperature-controlled process, is characterized in that, this control method comprises following steps:
S1, the first temperature sensor (20) obtains thermal chuck (10) temperature information, and sends it to temperature controller (40), temperature comparison means (30);
S2, temperature comparison means (30) obtains thermal chuck (10) temperature information, and itself and described first temperature sensor (20) are obtained thermal chuck (10) temperature information compares, calculates, and result of calculation is sent to temperature controller (40);
S3, described temperature controller (40) receives, processes and judge the temperature information that described first temperature sensor (20) obtains and the information that described temperature comparison means (30) sends.
6. temperature-controlled process as claimed in claim 5, it is characterized in that, described step S2 comprises:
S2.1, described comparer (32) arranges C.T. value according to the working condition of described thermal chuck (10);
S2.2, described comparer (32) is by the absolute value of described first temperature sensor (20) temperature that receives and the second temperature sensor (31) both temperature computation difference;
S2.3, described comparer (32) judges that whether the absolute value of described difference is higher than C.T. value; When the absolute value of described difference is higher than C.T. value, by transmission first temperature sensor (20) operation irregularity signal to described temperature controller (40); When the absolute value of difference is lower than C.T. value, by transmission first temperature sensor (20) signal working properly to described temperature controller (40).
7. temperature-controlled process as claimed in claim 6, it is characterized in that, described step S3 comprises:
S3.1, described temperature controller (40) arranges board normal working temperature value according to the working condition of board;
S3.2, the consequential signal that this temperature controller (40) receives the temperature signal of described first temperature sensor (20), described comparer (32) sends;
S3.3, this temperature controller (40) judges whether the temperature signal of reception first temperature sensor (20) has exceeded board normal working temperature value; This temperature controller (40) judges to receive described comparer (32) consequential signal that sends whether as the first temperature sensor (20) signal working properly.
8. temperature-controlled process as claimed in claim 7, it is characterized in that, described step S3.3 comprises:
S3.3.1, when described temperature controller (40) judges the temperature signal of described first temperature sensor (20) whether higher than board normal working temperature value; When the temperature signal of described first temperature sensor (20) is higher than board normal working temperature value, this temperature controller (40) controls board and sends alerting signal and stop board work; When described temperature controller (40) judges the temperature signal of described first temperature sensor (20) lower than board normal working temperature value, perform step S3.3.2;
S3.3.2, described temperature controller (40) judges whether the consequential signal that the described comparer of reception (32) sends is the first temperature sensor (20) signal working properly;
When to receive consequential signal that described comparer (32) sends be the first temperature sensor (20) operation irregularity signal to described temperature controller (40), this temperature controller (40) controls board and sends alerting signal and stop board work;
When to receive consequential signal that described comparer (32) sends be the first temperature sensor (20) signal working properly to described temperature controller (40), this temperature controller (40) controls board and normally works.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410716335.3A CN104360698B (en) | 2014-12-02 | 2014-12-02 | There is the photoresistance board of temp. control function and temperature control system thereof and temperature-controlled process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410716335.3A CN104360698B (en) | 2014-12-02 | 2014-12-02 | There is the photoresistance board of temp. control function and temperature control system thereof and temperature-controlled process |
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| Publication Number | Publication Date |
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| CN104360698A true CN104360698A (en) | 2015-02-18 |
| CN104360698B CN104360698B (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410716335.3A Active CN104360698B (en) | 2014-12-02 | 2014-12-02 | There is the photoresistance board of temp. control function and temperature control system thereof and temperature-controlled process |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111319622A (en) * | 2020-02-18 | 2020-06-23 | 浙江义利汽车零部件有限公司 | Control method and system for preventing bearing bush failure of balance shaft |
| CN113358236A (en) * | 2021-06-07 | 2021-09-07 | 无锡宇邦半导体科技有限公司 | Method and device for improving temperature measurement precision |
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| CN1690904A (en) * | 2004-04-26 | 2005-11-02 | 英特尔公司 | Thermal control system for environmental test lab |
| US20070204672A1 (en) * | 2006-03-01 | 2007-09-06 | Feiming Huang | Multi-temperature programming for accelerometer |
| CN101137947A (en) * | 2005-03-04 | 2008-03-05 | 天普桑尼克公司 | Apparatus and method for controlling temperature in a chuck system |
| TW200827642A (en) * | 2006-09-19 | 2008-07-01 | Tokyo Electron Ltd | Method and device for controlling temperature of temperature-controlled object, and high and low temperature processing system |
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2014
- 2014-12-02 CN CN201410716335.3A patent/CN104360698B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5001423A (en) * | 1990-01-24 | 1991-03-19 | International Business Machines Corporation | Dry interface thermal chuck temperature control system for semiconductor wafer testing |
| CN1690904A (en) * | 2004-04-26 | 2005-11-02 | 英特尔公司 | Thermal control system for environmental test lab |
| CN101137947A (en) * | 2005-03-04 | 2008-03-05 | 天普桑尼克公司 | Apparatus and method for controlling temperature in a chuck system |
| US20070204672A1 (en) * | 2006-03-01 | 2007-09-06 | Feiming Huang | Multi-temperature programming for accelerometer |
| TW200827642A (en) * | 2006-09-19 | 2008-07-01 | Tokyo Electron Ltd | Method and device for controlling temperature of temperature-controlled object, and high and low temperature processing system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111319622A (en) * | 2020-02-18 | 2020-06-23 | 浙江义利汽车零部件有限公司 | Control method and system for preventing bearing bush failure of balance shaft |
| CN111319622B (en) * | 2020-02-18 | 2021-06-01 | 浙江义利汽车零部件有限公司 | Control method and system for preventing bearing bush failure of balance shaft |
| CN113358236A (en) * | 2021-06-07 | 2021-09-07 | 无锡宇邦半导体科技有限公司 | Method and device for improving temperature measurement precision |
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| CN104360698B (en) | 2016-08-17 |
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