CN104460334A - Simulation method and system - Google Patents
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- CN104460334A CN104460334A CN201310438680.0A CN201310438680A CN104460334A CN 104460334 A CN104460334 A CN 104460334A CN 201310438680 A CN201310438680 A CN 201310438680A CN 104460334 A CN104460334 A CN 104460334A
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Abstract
The invention discloses a simulation method used for conducting simulation on an RTD rule of an RTD system. The simulation method comprises the steps that RTD information of the RTD rule to be simulated is set; a virtual arrangement work-in-process list is built for lots of simulation stations, and a virtual machine and lot corresponding relation is built according to a corresponding relation between the virtual arrangement work-in-process list and the lots and machines; the RTD rule to be simulated is executed according to the RTD information and the virtual machine and lot corresponding relation, and a virtual RTD result is obtained. The invention further discloses a simulation system which the simulation method is applied to. The simulation method can be used for predicting whether a result is good or bad after the RTD rule of the RTD system is on line, so that the running risk of the RTD rule is avoided.
Description
Technical field
The present invention relates to semiconductor factory automated technical field, particularly relate to a kind of emulation mode and analogue system.
Background technology
Semiconductor manufacturing industry is a hi-tech industry, is also an industry with high investment.Semiconductor fabrication factory is in order to realize its operation target, and increase productivity, the automaticity of its production control activity is more and more higher.Wherein, in semiconductor fabrication, due to production technology and process and complexity thereof, different platform or board group can process batch (lot) of (process) multiple different attribute, for indivedual board, often have a large amount of different attribute, and the lot of different priorities arrives simultaneously, artificial goods burden of sending at this moment will be more and more heavier.Therefore, in the automated system of whole semiconductor fabrication factory, be even more important to sending the Automated condtrol of goods.
In the world state-of-the-art wafer factory (Fab) all must and have employed and send in real time goods system (RTD) to come responsible line sends goods.RTD can be made for the lot on line by built-in algorithm and reasonably send goods result, manufacturing sector (MA) only needs the lot order (namely sending goods rule, also known as RTDRule) of recommending according to RTD to run goods (also known as run goods).Like this, run goods efficiency overall in Fab just can improve greatly, can say that the production of RTD system to the wafer factory of advanced person is most important.The core of RTD sends goods rule to be designed by the supervision of manufacturing sector (supervisor), and this sends the quality of goods rule, directly has influence on net result line produced and sends goods.But often supervisor is when goods rule is sent in design, can not consider every possible angle all situations, the RTD algorithm of proposition is directly reached the standard grade race, can bring unpredictable risk at any time.
Therefore, how to provide a kind of emulation mode and analogue system, can predict RTD Rule reach the standard grade after the quality of result, become the problem that those skilled in the art need to solve.
Summary of the invention
The object of the invention is to, a kind of emulation mode and analogue system are provided, the quality of send in real time result after the sending that goods is regular and reach the standard grade of goods system can be predicted, avoid the race goods risk of sending goods rule.
For solving the problems of the technologies described above, the invention provides a kind of emulation mode, for sending the goods rule of sending of goods system to emulate in real time, comprising:
Set to be emulated send goods rule send goods information;
To emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation;
Send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result.
Further, in described emulation mode, send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain a virtual step for goods result of sending and comprise: virtually send goods result according to described, batch virtual reservation is carried out to described emulation website.
Further, in described emulation mode, send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain a virtual step for goods result of sending and comprise: virtually send goods result according to described, upgrade and describedly virtual be arranged in goods table.
Further, in described emulation mode, virtually send goods result according to described, upgrade the described virtual step being arranged in goods table and comprise:
By enter after the virtual reservation of last emulation website described emulation website batch, add and describedly virtual be arranged in goods table;
By carry out the described emulation website of virtual reservation batch, remove and describedly virtual be arranged in goods table.
Further, in described emulation mode, described emulation mode also comprises: described virtual goods result of sending stored.
Further, in described emulation mode, described emulation mode also comprises: virtually send goods result according to described, judge described the to be emulated feasibility of goods rule of sending.
Further, in described emulation mode, described send goods information to comprise each board sequence of simulation and emulation time reservation batch number.
According to another side of the present invention, the present invention also provides a kind of analogue system, comprising:
Artificial intelligence arranges module, for set to be emulated send goods rule send goods information;
Corresponding relation generation module, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation;
Send goods rule simulation module, send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result.
Further, in described analogue system, described goods rule simulation module of sending virtually sends goods result according to described, batch carries out virtual reservation to described emulation website.
Further, in described analogue system, described goods rule simulation module of sending virtually sends goods result according to described, upgrades describedly virtual to be arranged in goods table.
Further, in described analogue system, described send goods rule simulation module by enter after the virtual reservation of last emulation website described emulation website batch, add and describedly virtual be arranged in goods table; And by carry out the described emulation website of virtual reservation batch, remove and describedly virtual be arranged in goods table.
Further, in described analogue system, described analogue system also comprises a simulation result module, and described simulation result module is used for described virtual goods result of sending to store.
Further, in described analogue system, described send goods information to comprise each board sequence of simulation and emulation time reservation batch number.
In emulation mode provided by the invention and analogue system, described emulation mode comprises the following steps: first, set to be emulated send goods rule send goods information, then, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation, then, goods information and virtual board batch corresponding relation is sent according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result, compared with prior art, described emulation mode can be sent goods rule according to emulate, emulation website batch and batch with the corresponding relation of board, the quality of result after sending that goods is regular and reaching the standard grade of goods system send in real time in prediction, thus send before goods rule reaches the standard grade what send in real time goods system, verify its feasibility in advance, for follow-up solution production scheduling problem of reaching the standard grade provides strong reference, avoid the race goods risk of sending goods rule.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of emulation mode in one embodiment of the invention;
Fig. 2 is the schematic diagram of analogue system in one embodiment of the invention.
Embodiment
Below in conjunction with schematic diagram, emulation mode of the present invention and analogue system are described in more detail, which show the preferred embodiments of the present invention, should be appreciated that those skilled in the art can revise the present invention described here, and still realize advantageous effects of the present invention.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the present invention chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, a large amount of implementation detail must be made to realize the specific objective of developer, such as, according to regarding system or the restriction about business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, more specifically the present invention is described by way of example with reference to accompanying drawing.According to the following describes and claims, advantages and features of the invention will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, the aid illustration embodiment of the present invention lucidly.
Core concept of the present invention is, provides a kind of emulation mode, comprises the following steps::
Step S11, set to be emulated send goods rule send goods information;
Step S12, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation;
Step S13, sends goods information and virtual board batch corresponding relation according to described, to be emulated described in execution sends goods rule, and obtains one and virtually send goods result.
Further, in conjunction with above-mentioned emulation mode, present invention also offers a kind of analogue system, comprising: artificial intelligence arranges module, for set to be emulated send goods rule send goods information; Corresponding relation generation module, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation; Send goods rule simulation module, send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result.
Below in conjunction with core concept, describe emulation mode of the present invention and analogue system in detail.
Emulation mode in the present embodiment and analogue system is illustrated below in conjunction with Fig. 1 and Fig. 2.Wherein, Fig. 1 is the process flow diagram of emulation mode in one embodiment of the invention, and Fig. 2 is the schematic diagram of analogue system in one embodiment of the invention.
First, carry out step S11, set to be emulated send goods rule send goods information, as shown in Figure 1.
The analogue system of the present embodiment comprises artificial intelligence and arranges module 101, as shown in Figure 2, described artificial intelligence arrange module 101 for set to be emulated send goods rule send goods information.Wherein, described send goods information to comprise each board sequence of simulation and emulation time reservation batch number, but described number of sending goods information to be not limited to as reservation when the sequence of simulation of each board and emulation batch, is specifically determined by described to be emulated goods rule of sending.In the present embodiment, described goods information of sending is as shown in table 1.In Table 1, emulate website and there are altogether 5 boards: board 1, board 2, board 3, board 4, board 5; If these 5 boards are all idle, then reservation (reserve) order of lot is followed successively by: board 1, board 2, board 3, board 4, board 5; Board 1, board 2, board 3, board 4, board 5 can the lot quantity of reserve be respectively at every turn: 3,3,4,5,5.
Table 1
| Board is numbered | Sequence of simulation | Reservation batch number |
| Board 1 | 1 | 3 |
| Board 2 | 2 | 3 |
| Board 3 | 3 | 4 |
| Board 4 | 4 | 5 |
| Board 5 | 5 | 5 |
Then, carry out step S12, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation.
The analogue system of the present embodiment comprises corresponding relation generation module 102, for to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation.It is wherein, in the present embodiment, described that virtual to be arranged in goods table as shown in table 2.As can be seen from Table 2, emulate website and there are altogether 6 boards: lot1, lot2, lot3, lot4, lot5, lot6; Finally go out the board time (the last trackout time) of these 6 lot is respectively: T1, T2, T3, T4, T5, T6; In the present embodiment, the described virtual lot attribute be arranged in goods table comprises queuing time (queue time, i.e. Q-time) and priority (priority), but lot attribute can also comprise other attributes, is specifically determined by be emulated goods rule of sending.From the corresponding relation of board, described batch represents that different lot can run on which board respectively.In the present embodiment, described virtual board batch corresponding relation is as shown in table 3.As can be seen from Table 3, lot1, lot3, lot4, lot6 can on board 1 and board 2 run, lot2, lot5 can only on board 1 run.
Table 2
Table 3
Then, carry out step S13, send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result.
The analogue system of the present embodiment comprises sends goods rule simulation module 103, sends goods information and virtual board batch corresponding relation according to described, to be emulated described in execution sends goods rule, and obtains one and virtually send goods result, namely lot send goods sequential list.Preferably, described goods rule simulation module 103 of sending virtually sends goods result according to described, batch carries out virtual reservation successively to described emulation website, describedly sends goods rule with that is virtually reality like reality.In addition, described goods rule simulation module 103 of sending virtually can also send goods result according to described, upgrades describedly virtual to be arranged in goods table.Preferably, upgrade the described virtual step being arranged in goods table and comprise following two steps:
Step 1: by enter after the virtual reservation of last emulation website described emulation website batch, add and describedly virtual be arranged in goods table, such as, needing respectively to emulate shallow-trench isolation photoetching (STI photo) website and dry (STI etch) website of carving of shallow-trench isolation, carve after (STI etch) website is positioned at shallow-trench isolation photoetching (STI photo) website because shallow-trench isolation is dry, lot1 is on the board of shallow-trench isolation photoetching (STI photo) website after reserve, automatically enter that shallow-trench isolation is dry carves the described virtual of (STI etch) website and be arranged in goods table,
Step 2: by carry out the described emulation website of virtual reservation batch, remove and describedly virtual be arranged in goods table.Such as, lot1 after reserve, removes lot1 in described virtual being arranged in goods table of shallow-trench isolation photoetching (STI photo) website on the board of shallow-trench isolation photoetching (STI photo) website.
In the present embodiment, described emulation mode also comprises and described virtual goods result of sending being stored.Corresponding, described analogue system also comprises a simulation result module 104, and as shown in Figure 2, described simulation result module 104 is for storing described virtual goods result of sending.In the present embodiment, described virtual goods result of sending is as shown in table 4.As can be seen from Table 4, lot1 is by reserve on board 1, and lot3 is by reserve on board 2, and lot4 is by reserve on board 1, and lot6 is by reserve on board 1, lot2 and lot5 be not also by reserve.
Table 4
| Lot numbers | Board is numbered | Subscription state | Subscription time |
| lot1 | Board 1 | Be | T’1 |
| lot2 | Board 1 | No | - |
| lot3 | Board 1 | No | - |
| lot4 | Board 1 | Be | T’4 |
| lot5 | Board 1 | No | - |
| lot6 | Board 1 | Be | T’6 |
| lot1 | Board 2 | No | - |
| lot3 | Board 2 | Be | T’3 |
| lot4 | Board 2 | No | - |
| lot6 | Board 2 | No | - |
Preferably, virtually can also send goods result according to described, described the to be emulated feasibility of goods rule of sending is judged.Wherein, can according to subscription time with finally to go out the board time and do difference, obtain the stand-by period (wait time) of lot, according to the length of described stand-by period, the quality of sending goods rule to be emulated described in can judging.Such as, shallow-trench isolation photoetching (STI photo) website has three sends goods rule, be respectively rule1, rule2, rule3, which is better first to need judgement three to send goods rule, then send goods rule to emulate to three respectively, obtain three corresponding stand-by period, if the described stand-by period after rule2 emulation is the shortest, then rule2's is most effective, and prioritizing selection rule2 reaches the standard grade.
In sum, the invention provides a kind of emulation mode, comprise the following steps: first, set to be emulated send goods rule send goods information, then, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation, then, goods information and virtual board batch corresponding relation is sent according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result, compared with prior art, described emulation mode can be sent goods rule according to emulate, emulation website batch and batch with the corresponding relation of board, the quality of result after sending that goods is regular and reaching the standard grade of goods system send in real time in prediction, thus send before goods rule reaches the standard grade what send in real time goods system, verify its feasibility in advance, for follow-up solution production scheduling problem of reaching the standard grade provides strong reference, avoid the race goods risk of sending goods rule.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (13)
1. an emulation mode, for sending the goods rule of sending of goods system to emulate in real time, described emulation mode comprises:
Set to be emulated send goods rule send goods information;
To emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation;
Send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result.
2. emulation mode as claimed in claim 1, it is characterized in that, goods information and virtual board batch corresponding relation is sent according to described, to be emulated described in execution send goods rule, and obtain a virtual step for goods result of sending and comprise: virtually send goods result according to described, batch virtual reservation is carried out to described emulation website.
3. emulation mode as claimed in claim 2, it is characterized in that, goods information and virtual board batch corresponding relation is sent according to described, to be emulated described in execution send goods rule, and obtain a virtual step for goods result of sending and comprise: virtually send goods result according to described, upgrade and describedly virtual be arranged in goods table.
4. emulation mode as claimed in claim 3, is characterized in that, virtually sends goods result, upgrade the described virtual step being arranged in goods table and comprise according to described:
By enter after the virtual reservation of last emulation website described emulation website batch, add and describedly virtual be arranged in goods table;
By carry out the described emulation website of virtual reservation batch, remove and describedly virtual be arranged in goods table.
5. as the emulation mode in claim 1-4 as described in any one, it is characterized in that, described emulation mode also comprises; Described virtual goods result of sending is stored.
6. emulation mode as claimed in claim 5, it is characterized in that, described emulation mode also comprises: virtually send goods result according to described, judge described the to be emulated feasibility of goods rule of sending.
7. emulation mode as claimed in claim 1, is characterized in that, described send goods information to comprise each board sequence of simulation and emulation time reservation batch number.
8. an analogue system, comprising:
Artificial intelligence arranges module, for set to be emulated send goods rule send goods information;
Corresponding relation generation module, to emulation website batch, set up one and virtual be arranged in goods table, and according to described virtual be arranged in goods table and batch with the corresponding relation of board, set up a virtual board batch corresponding relation;
Send goods rule simulation module, send goods information and virtual board batch corresponding relation according to described, to be emulated described in execution send goods rule, and obtain one and virtually send goods result.
9. analogue system as claimed in claim 8, is characterized in that, described goods rule simulation module of sending virtually sends goods result according to described, batch carries out virtual reservation to described emulation website.
10. analogue system as claimed in claim 9, is characterized in that, described goods rule simulation module of sending virtually sends goods result according to described, upgrades describedly virtual to be arranged in goods table.
11. emulation modes as claimed in claim 10, is characterized in that, described send goods rule simulation module by enter after the virtual reservation of last emulation website described emulation website batch, add and describedly virtual be arranged in goods table; And by carry out the described emulation website of virtual reservation batch, remove and describedly virtual be arranged in goods table.
12., as the analogue system in claim 8-11 as described in any one, is characterized in that, described analogue system also comprises a simulation result module, and described simulation result module is used for described virtual goods result of sending to store.
13. analogue systems as claimed in claim 8, is characterized in that, described send goods information to comprise each board sequence of simulation and emulation time reservation batch number.
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