CN104460334B - Emulation mode and analogue system - Google Patents
Emulation mode and analogue system Download PDFInfo
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- CN104460334B CN104460334B CN201310438680.0A CN201310438680A CN104460334B CN 104460334 B CN104460334 B CN 104460334B CN 201310438680 A CN201310438680 A CN 201310438680A CN 104460334 B CN104460334 B CN 104460334B
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Abstract
Present invention is disclosed a kind of emulation mode, for sending the goods rule of sending of goods system to emulate in real time, the emulation mode includes：Set it is to be emulated send goods rule send goods information；Batch to emulating website, set up one it is virtual be arranged in product table, and according to the virtual corresponding relation for being arranged in product table and batch and board, set up a virtual board batch corresponding relation；Send goods information and virtual board batch corresponding relation according to described, perform described in it is to be emulated send goods rule, and obtain one and virtually send goods result.Present invention further teaches a kind of analogue system of application the method.The emulation mode of the present invention can predict send in real time goods system send goods rule to be reached the standard grade after result quality, it is to avoid the race goods risk for sending goods regular.
Description
Technical field
The present invention relates to semiconductor factory automated technical field, more particularly to a kind of emulation mode and emulation system
System.
Background technology
Semiconductor manufacturing industry is a hi-tech industry, and an industry with high investment.Semiconductor fabrication factory in order to
Its operation target is realized, is increased productivity, the automaticity more and more higher of its production control activity.Wherein, in semiconductor system
During making, due to production technology and process and its complexity, it is various not that different platform or board group can process (process)
With the batch (lot) of attribute, for indivedual boards, a large amount of different attributes are often had, and the lot of different priorities is arrived simultaneously
Reach, at this moment artificial sends goods burden increasingly will weigh.Therefore, it is in the automated system of whole semiconductor fabrication factory, right
The Automated condtrol of goods is sent to be even more important.
State-of-the-art fab (Fab) all and must employ and send goods system (RTD) to be responsible for line in real time in the world
On send goods.RTD can be made for the lot on line by built-in algorithm and reasonably send goods result, and manufacturing sector (MA) is only
Need the lot orders (sending goods rule, also known as RTDRule) recommended according to RTD to run goods (also known as run goods).So, Fab
Interior overall run goods efficiency will be greatly improved, it may be said that production of the RTD systems to advanced fab is most important.RTD's
Core sends goods rule to be designed by the supervision (supervisor) of manufacturing sector, and this sends the quality of goods rule, directly influences
The final result of goods is sent in production on line.But often supervisor can not be considered every possible angle when goods rule is sent in design
All of situation, the RTD algorithms of proposition are directly reached the standard grade if running, and can bring unpredictable risk at any time.
Therefore, a kind of emulation mode and analogue system how to be provided, can predict RTD Rule reach the standard grade after result it is good
It is bad, it has also become those skilled in the art need the problem for solving.
The content of the invention
It is an object of the present invention to provide a kind of emulation mode and analogue system, can predict and send goods system in real time
The quality of result after sending goods rule to be reached the standard grade, it is to avoid send the race goods risk of goods rule.
To solve above-mentioned technical problem, the present invention provides a kind of emulation mode, advises for the goods of sending to sending goods system in real time
Then emulated, including：
Set it is to be emulated send goods rule send goods information；
Batch to emulating website, set up one it is virtual be arranged in product table, and virtual be arranged in product according to described
Table and batch and the corresponding relation of board, set up a virtual board batch corresponding relation；
Send goods information and virtual board batch corresponding relation according to described, perform described in it is to be emulated send goods rule, and
Goods result is sent virtually to one.
Further, in the emulation mode, goods information and virtual board batch corresponding relation are sent according to described, is performed
It is described it is to be emulated send goods rule, and obtain one the step of virtually send goods result and include：According to it is described it is virtual send goods result, to institute
The batch for stating emulation website is virtually preengage.
Further, in the emulation mode, goods information and virtual board batch corresponding relation are sent according to described, is performed
It is described it is to be emulated send goods rule, and obtain one the step of virtually send goods result and include：According to it is described it is virtual send goods result, update
It is described virtual to be arranged in product table.
Further, in the emulation mode, according to it is described it is virtual send goods result, update and described virtual be arranged in system
The step of product table, includes：
The batch of the emulation website will be entered after previous emulation website is virtually preengage, add described virtual being arranged in
Product table；
The batch of the emulation website of virtual reservation will be carried out, is removed and described virtual is arranged in product table.
Further, in the emulation mode, the emulation mode also includes：Virtual goods result is sent to be stored up by described
Deposit.
Further, in the emulation mode, the emulation mode also includes：According to it is described it is virtual send goods result, it is right
The to be emulated feasibility for sending goods rule is judged.
Further, in the emulation mode, when the sequence of simulation for sending goods information to include each board and emulation
The number of reservation batch.
Another side of the invention, the present invention also provide a kind of analogue system, including：
Artificial intelligence setup module, for set it is to be emulated send goods rule send goods information；
Corresponding relation generation module, the batch to emulating website, set up one it is virtual be arranged in product table, and according to described
The virtual corresponding relation for being arranged in product table and batch and board, sets up a virtual board batch corresponding relation；
Send goods rule simulation module, send goods information and virtual board batch corresponding relation according to described, perform described in wait to imitate
Goods rule is really sent, and obtains one and virtually send goods result.
Further, in the analogue system, it is described send goods rule simulation module according to it is described it is virtual send goods result, it is right
The batch of the emulation website is virtually preengage.
Further, in the analogue system, it is described send goods rule simulation module according to it is described it is virtual send goods result, more
It is new described virtual to be arranged in product table.
Further, it is in the analogue system, described to send goods rule simulation module virtually pre- in previous emulation website
The batch of the emulation website is about entered afterwards, is added and described virtual is arranged in product table；And will carry out described in virtual reservation
The batch of emulation website, removes and described virtual is arranged in product table.
Further, in the analogue system, the analogue system also includes a simulation result module, the emulation knot
Fruit module is for virtual sending goods result to be stored by described.
Further, in the analogue system, when the sequence of simulation for sending goods information to include each board and emulation
The number of reservation batch.
In the emulation mode and analogue system that the present invention is provided, the emulation mode is comprised the following steps：First, if
Surely it is to be emulated send goods rule send goods information；Then, to emulating the batch of website, set up one it is virtual be arranged in product table,
And according to the virtual corresponding relation for being arranged in product table and batch and board, set up a virtual board batch correspondence and close
System；Then, goods information and virtual board batch corresponding relation are sent according to described, perform described in it is to be emulated send goods rule, and
Goods result is sent virtually to one, compared with prior art, the emulation mode can be sent goods rule, emulation website according to emulate
Batch and batch and board corresponding relation, prediction send in real time goods system send goods rule to be reached the standard grade after result quality, from
And send in real time goods system send goods rule to be reached the standard grade before, verify its feasibility in advance, be subsequently to reach the standard grade to solve production scheduling and ask
Topic provides strong reference, it is to avoid send the race goods risk of goods rule.
Description of the drawings
Fig. 1 is the flow chart of emulation mode in one embodiment of the invention；
Fig. 2 is the schematic diagram of analogue system in one embodiment of the invention.
Specific embodiment
The emulation mode and analogue system of the present invention are described in more detail below in conjunction with schematic diagram, wherein table
Show the preferred embodiments of the present invention, it should be appreciated that those skilled in the art can change invention described herein, and still
Realize the advantageous effects of the present invention.Therefore, description below be appreciated that it is widely known for those skilled in the art, and
It is not intended as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.In the following description, it is not described in detail known function
And structure, because they can make the present invention chaotic due to unnecessary details.It will be understood that opening in any practical embodiments
In sending out, it is necessary to make a large amount of implementation details to realize the specific objective of developer, such as according to relevant system or relevant business
Limit, another embodiment is changed into by one embodiment.Additionally, it should think that this development is probably complicated and expends
Time, but it is only routine work to those skilled in the art.
Referring to the drawings the present invention more particularly described below by way of example in the following passage.Will according to following explanation and right
Ask book, advantages and features of the invention become apparent from.It should be noted that, accompanying drawing is in the form of simplifying very much and using non-
Accurately ratio, only aids in illustrating the purpose of the embodiment of the present invention to convenience, lucidly.
The present invention core concept be, there is provided a kind of emulation mode, comprise the following steps：：
Step S11, set it is to be emulated send goods rule send goods information；
Step S12, the batch to emulating website, set up one it is virtual be arranged in product table, and according to the virtual row
The corresponding relation of product table and batch and board is listed in, a virtual board batch corresponding relation is set up；
Step S13, sends goods information and virtual board batch corresponding relation according to described, performs the to be emulated goods of sending and advises
Then, and obtain one and virtually send goods result.
Further, with reference to above-mentioned emulation mode, present invention also offers a kind of analogue system, including：Artificial intelligence is arranged
Module, for set it is to be emulated send goods rule send goods information；Corresponding relation generation module, the batch to emulating website, builds
Vertical one it is virtual be arranged in product table, and according to the virtual corresponding relation for being arranged in product table and batch and board, build
A vertical virtual board batch corresponding relation；Goods rule simulation module is sent, sends goods information corresponding with virtual board batch according to described
Relation, perform described in it is to be emulated send goods rule, and obtain one and virtually send goods result.
Below in conjunction with core concept, emulation mode of the present invention and analogue system are described in detail.
The emulation mode and analogue system in the present embodiment is illustrated below in conjunction with Fig. 1 and Fig. 2.Wherein, Fig. 1 is this
The flow chart for inventing emulation mode in an embodiment, Fig. 2 are the schematic diagram of analogue system in one embodiment of the invention.
First, carry out step S11, set it is to be emulated send goods rule send goods information, as shown in Figure 1.
The analogue system of the present embodiment includes artificial intelligence setup module 101, as shown in Fig. 2 the artificial intelligence is arranged
Module 101 for set it is to be emulated send goods rule send goods information.Wherein, the emulation for sending goods information to include each board is suitable
Sequence and emulation when preengage batch number, but, it is described send goods information to be not limited to for each board sequence of simulation and imitate
True time preengages the number of batch, is specifically determined by the to be emulated goods rule of sending.It is in the present embodiment, described to send goods information such as table
Shown in 1.In table 1, emulation website is altogether with 5 boards：Board 1, board 2, board 3, board 4, board 5；If this 5
Board is idle, then the reservation (reserve) of lot is sequentially followed successively by：Board 1, board 2, board 3, board 4, board 5；Board
1st, it can be respectively with the lot quantity of reserve on board 2, board 3, board 4, board 5 every time：3、3、4、5、5.
Table 1
| Board is numbered | Sequence of simulation | The number of reservation batch |
| Board 1 | 1 | 3 |
| Board 2 | 2 | 3 |
| Board 3 | 3 | 4 |
| Board 4 | 4 | 5 |
| Board 5 | 5 | 5 |
Then, carry out step S12, the batch to emulating website, set up one it is virtual be arranged in product table, and according to described
The virtual corresponding relation for being arranged in product table and batch and board, sets up a virtual board batch corresponding relation.
The analogue system of the present embodiment includes corresponding relation generation module 102, for the batch to emulating website, sets up one
Virtual is arranged in product table, and according to the virtual corresponding relation for being arranged in product table and batch and board, sets up one
Virtual board batch corresponding relation.It is wherein, in the present embodiment, described that virtual to be arranged in product table as shown in table 2.From table 2
In as can be seen that emulation website is altogether with 6 boards：lot1、lot2、lot3、lot4、lot5、lot6；6 lot are most
After go out the board time (last trackout time) be respectively：T1、T2、T3、T4、T5、T6；In the present embodiment, the void
The lot attributes being arranged in product table intended include queuing time (queue time, i.e. Q-time) and priority
(priority), but lot attributes can also include other attributes, specifically goods rule is sent to determine by emulate.The batch with
The corresponding relation of board represents that different lot can the run on which board respectively.In the present embodiment, the virtual board
Batch corresponding relation is as shown in table 3.From table 3 it is observed that lot1, lot3, lot4, lot6 can be on boards 1 and board 2
Run, lot2, lot5 can only on board 1 run.
Table 2
Table 3
Then, carry out step S13, send goods information and virtual board batch corresponding relation according to described, perform described in wait to imitate
Goods rule is really sent, and obtains one and virtually send goods result.
The analogue system of the present embodiment includes sending goods rule simulation module 103, sends goods information and virtual board according to described
Batch corresponding relation, perform described in it is to be emulated send goods rule, and obtain one and virtually send goods result, i.e. lot's to send goods order row
Table.Preferably, it is described send goods rule simulation module 103 according to it is described it is virtual send goods result, to it is described emulation website batch according to
It is secondary virtually to be preengage, real described send goods regular to simulate.Send the goods rule simulation module 103 can be with root in addition, described
According to it is described it is virtual send goods result, update and described virtual be arranged in product table.Preferably, update described virtual being arranged in product
The step of table, includes following two steps：
Step 1：The batch of the emulation website will be entered after previous emulation website is virtually preengage, will be added described virtual
Product table is arranged in, for example, is being respectively necessary for shallow-trench isolation photoetching (STI photo) website and shallow-trench isolation dry etching (STI
Etch) website is emulated, as shallow-trench isolation dry etching (STI etch) website is stood positioned at shallow-trench isolation photoetching (STI photo)
After point, lot1 is after reserve on the board of shallow-trench isolation photoetching (STI photo) website, dry automatically into shallow-trench isolation
Carve the described virtual of (STI etch) website to be arranged in product table；
Step 2：The batch of the emulation website of virtual reservation will be carried out, is removed and described virtual is arranged in product table.
For example, lot1 is after reserve on the board of shallow-trench isolation photoetching (STI photo) website, in shallow-trench isolation photoetching (STI
Photo) website it is described virtual be arranged in product table in remove lot1.
In the present embodiment, the emulation mode also includes virtual sending goods result to be stored by described.It is corresponding, it is described
Analogue system also includes a simulation result module 104, as shown in Fig. 2 the simulation result module 104 is used for the virtual group
Goods result is stored.In the present embodiment, it is described virtual to send goods result as shown in table 4.As can be seen from Table 4, lot1 quilts
, on board 1, by reserve to board 2, by reserve to board 1, lot6 is by reserve for lot4 for lot3 for reserve
To on board 1, lot2 and lot5 is not also by reserve.
Table 4
| Lot is numbered | Board is numbered | Subscription state | Subscription time |
| lot1 | Board 1 | It is | T’1 |
| lot2 | Board 1 | It is no | - |
| lot3 | Board 1 | It is no | - |
| lot4 | Board 1 | It is | T’4 |
| lot5 | Board 1 | It is no | - |
| lot6 | Board 1 | It is | T’6 |
| lot1 | Board 2 | It is no | - |
| lot3 | Board 2 | It is | T’3 |
| lot4 | Board 2 | It is no | - |
| lot6 | Board 2 | It is no | - |
Preferably, can with according to it is described it is virtual send goods result, the to be emulated feasibility for sending goods rule is carried out
Judge.Wherein it is possible to make the difference with the board time is finally gone out according to subscription time, the stand-by period (wait time) of lot is obtained,
According to the length of the stand-by period, it can be determined that the to be emulated quality for sending goods rule.For example, shallow-trench isolation photoetching
(STI photo) website sends goods regular with three, respectively rule1, rule2, rule3, first needs to judge that three are sent goods to be advised
Then which more preferably, is then sent goods rule to emulate to three respectively, obtains corresponding three stand-by period, if rule2 is imitative
The stand-by period after very is most short, then the efficiency highest of rule2, and prioritizing selection rule2 reaches the standard grade.
In sum, the present invention provides a kind of emulation mode, comprises the following steps：First, set to be emulated goods of sending to advise
Then send goods information；Then, to emulating the batch of website, set up one it is virtual be arranged in product table, and according to described virtual
The corresponding relation of product table and batch and board is arranged in, a virtual board batch corresponding relation is set up；Then, according to the group
Goods information and virtual board batch corresponding relation, perform described in it is to be emulated send goods rule, and obtain one and virtually send goods result, with
Prior art is compared, and the emulation mode can be sent goods rule, the batch of emulation website and batch and machine according to emulate
The corresponding relation of platform, prediction send in real time goods system send goods rule to be reached the standard grade after result quality, so as to send goods system in real time
Before sending goods rule to be reached the standard grade, its feasibility is verified in advance, solve the problems, such as that subsequently to reach the standard grade production scheduling provides strong reference, it is to avoid
Send the race goods risk of goods rule.
Obviously, those skilled in the art can carry out the essence of various changes and modification without deviating from the present invention to the present invention
God and scope.So, if these modifications of the present invention and modification belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising these changes and modification.
Claims (13)
1. a kind of emulation mode, for sending the goods rule of sending of goods system to emulate in real time, the emulation mode includes：
Set it is to be emulated send goods rule send goods information；
Batch to emulating website, set up one it is virtual be arranged in product table, and according to it is described it is virtual be arranged in product table and
Batch and the corresponding relation of board, set up a virtual board batch corresponding relation；
Send goods information and virtual board batch corresponding relation according to described, perform described in it is to be emulated send goods rule, and obtain one
Goods result is sent virtually.
2. emulation mode as claimed in claim 1, it is characterised in that send goods information corresponding with virtual board batch according to described
Relation, perform described in it is to be emulated send goods rule, and obtain one the step of virtually send goods result and include：Virtual goods is sent according to described
As a result, the batch of the emulation website is virtually preengage.
3. emulation mode as claimed in claim 2, it is characterised in that send goods information corresponding with virtual board batch according to described
Relation, perform described in it is to be emulated send goods rule, and obtain one the step of virtually send goods result and include：Virtual goods is sent according to described
As a result, update and described virtual be arranged in product table.
4. emulation mode as claimed in claim 3, it is characterised in that according to it is described it is virtual send goods result, update described virtual
Include the step of being arranged in product table：
The batch of the emulation website will be entered after previous emulation website is virtually preengage, is added and described virtual is arranged in product
Table；
The batch of the emulation website of virtual reservation will be carried out, is removed and described virtual is arranged in product table.
5. the emulation mode as described in any one in claim 1-4, it is characterised in that the emulation mode also includes：Will
It is described virtual to send goods result to be stored.
6. emulation mode as claimed in claim 5, it is characterised in that the emulation mode also includes：According to the virtual group
Goods result, judges to the to be emulated feasibility for sending goods rule.
7. emulation mode as claimed in claim 1, it is characterised in that it is described send the sequence of simulation that goods information includes each board with
And during emulation, preengage the number of batch.
8. a kind of analogue system, including：
Artificial intelligence setup module, for set it is to be emulated send goods rule send goods information；
Corresponding relation generation module, the batch to emulating website, set up one it is virtual be arranged in product table, and according to described virtual
The corresponding relation for being arranged in product table and batch and board, set up a virtual board batch corresponding relation；
Goods rule simulation module is sent, goods information and virtual board batch corresponding relation is sent according to described, perform described to be emulated
Goods rule is sent, and obtains one and virtually send goods result.
9. analogue system as claimed in claim 8, it is characterised in that described to send goods rule simulation module according to the virtual group
Goods result, is virtually preengage to the batch of the emulation website.
10. analogue system as claimed in claim 9, it is characterised in that described to send goods rule simulation module according to described virtual
Send goods result, update and described virtual be arranged in product table.
11. analogue systems as claimed in claim 10, it is characterised in that described to send the goods rule simulation module be in previous emulation
Website enters the batch of the emulation website after virtually preengaging, add and described virtual be arranged in product table；And will carry out virtual
The batch of the emulation website of reservation, removes and described virtual is arranged in product table.
12. analogue systems as described in any one in claim 8-11, it is characterised in that the analogue system also includes one
Simulation result module, the simulation result module is for virtual sending goods result to be stored by described.
13. analogue systems as claimed in claim 8, it is characterised in that the sequence of simulation for sending goods information to include each board
And during emulation, preengage the number of batch.
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