CN105353502A - Hybrid motor driven automatic control microscope object carrying platform - Google Patents

Hybrid motor driven automatic control microscope object carrying platform Download PDF

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Publication number
CN105353502A
CN105353502A CN201510922680.7A CN201510922680A CN105353502A CN 105353502 A CN105353502 A CN 105353502A CN 201510922680 A CN201510922680 A CN 201510922680A CN 105353502 A CN105353502 A CN 105353502A
Authority
CN
China
Prior art keywords
scrambler
intermediate plate
motor
permanent magnetic
linear synchronous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510922680.7A
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Chinese (zh)
Inventor
胡亦宁
张家政
黄种团
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HAIDEXING TECHNOLOGY (XIAMEN) Co Ltd
Original Assignee
HAIDEXING TECHNOLOGY (XIAMEN) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HAIDEXING TECHNOLOGY (XIAMEN) Co Ltd filed Critical HAIDEXING TECHNOLOGY (XIAMEN) Co Ltd
Priority to CN201510922680.7A priority Critical patent/CN105353502A/en
Publication of CN105353502A publication Critical patent/CN105353502A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/34Microscope slides, e.g. mounting specimens on microscope slides

Abstract

A hybrid motor driven automatic control microscope object carrying platform relates to an object carrying platform for placing an observed object. According to the scheme I, the hybrid motor driven automatic control microscope object carrying platform comprises an object carrying table, a piezoelectric motor, a permanent magnet synchronization linear motor, a feedback device and a control circuit; and, according to the scheme II, the hybrid motor driven automatic control microscope object carrying platform comprises object carrying table, a piezoelectric motor, a permanent magnet synchronization linear motor, a feedback device and a control circuit. Drive motors on the object carrying table are changed, stepping motors are replaced by the permanent magnet synchronization linear motor and the piezoelectric motor which are respectively drive the platform to perform X-axis and Y-axis motions, and, through cooperation of guide rails and position detection of encoders, high-precision control of the platform is achieved.

Description

The automatic control microscope slide platform that hybrid electric motor drives
Technical field
The present invention relates to a kind of for placing the article carrying platform being observed thing, especially relating to a kind of automatic control microscope slide platform adopting permanent magnetic linear synchronous motor and piezoelectric motor combination drive.
Background technology
Along with the raising of scientific and technological level, microscope is more and more automatic and intelligent, also progressively improves the automatic demand for control of objective table; Tradition adopts the microscope stage of servomotor or stepper motor can produce more serious hysterisis error because of the reason (needing screw mandrel, nut etc.) of structure and type of drive, reduces accuracy of observation, affects result of use.The error of backlash that the linear electric motors directly driven and piezoelectric motor effectively overcome, also has respective limitation when being used alone.Such as, linear electric motors stable movement, dynamic property is good, but during low current, the resistivity of disturbance is poor to external world.Although piezoelectric motor has good antijamming capability and the function that cuts off self-lock, dynamic property kinetic stability is not as linear electric motors.The advantages of linear electric motors and piezoelectric motor, by combined structure design, is got up, is made microscope stage can keep stability while high-velocity scanning by the present invention.
Summary of the invention
The object of this invention is to provide a kind of precision and be obviously better than traditional stepper motor, Direct driver stage movement, without the need to unnecessary physical construction, poor without backhaul.Meanwhile, the automatic control microscope slide platform of the permanent magnetic linear synchronous motor that significantly improves of speed stability and antijamming capability and piezoelectric motor combination drive.
For achieving the above object, the present invention adopts following two kinds of technical schemes.
First technical scheme is as follows:
The automatic control microscope slide platform that hybrid electric motor drives, comprises objective table, piezoelectric motor, permanent magnetic linear synchronous motor, feedback assembly and control circuit;
Described objective table is provided with top shoe, intermediate plate and base plate from top to bottom successively; Top shoe surface is as loading plane, and top shoe and intermediate plate connect and compose being slidably matched along Y direction by upper rail, and intermediate plate and base plate connect and compose being slidably matched along X-direction by lower guideway; The stator of permanent magnetic linear synchronous motor is fixed on intermediate plate, and the mover of permanent magnetic linear synchronous motor is connected with top shoe; The stator of piezoelectric motor is fixed on base plate, and the mover of piezoelectric motor is connected with intermediate plate; Feedback assembly is provided with the first scrambler and the second scrambler, first scrambler is fixed on intermediate plate, second scrambler is fixed on base plate, control circuit comprises microprocessor, the position detection signal of the first scrambler and the second scrambler is passed to microprocessor signals input end, and microprocessor control signals is passed to piezoelectric motor and permanent magnetic linear synchronous motor respectively.
Described microprocessor can adopt the embedded controllers such as digital signal processor (DSP) or single-chip microcomputer.
Second technical scheme is as follows:
The automatic control microscope slide platform that hybrid electric motor drives, comprises objective table, piezoelectric motor, permanent magnetic linear synchronous motor, feedback assembly and control circuit;
Described objective table is provided with top shoe, intermediate plate and base plate from top to bottom successively; Top shoe surface is as loading plane, and top shoe and intermediate plate connect and compose being slidably matched along Y direction by upper rail, and intermediate plate and base plate connect and compose being slidably matched along X-direction by lower guideway; The stator of piezoelectric motor is fixed on intermediate plate, and the mover of piezoelectric motor is connected with top shoe; The stator of permanent magnetic linear synchronous motor is fixed on base plate, and the mover of permanent magnetic linear synchronous motor is connected with intermediate plate; Feedback assembly is provided with the first scrambler and the second scrambler, first scrambler is fixed on intermediate plate, second scrambler is fixed on base plate, control circuit comprises microprocessor, the position detection signal of the first scrambler and the second scrambler is passed to microprocessor signals input end, and microprocessor control signals is passed to piezoelectric motor and permanent magnetic linear synchronous motor respectively.
Described microprocessor can adopt the embedded controllers such as digital signal processor (DSP) or single-chip microcomputer.
Compared with the prior art, beneficial effect of the present invention is as follows:
Piezoelectric motor and permanent-magnetism linear motor can both carry out rectilinear motion by Direct driver platform, do not need screw mandrel and nut, avoid the hysterisis error of machinery, save the maintenance work of mechanical part, ensure higher kinematic accuracy, reduce product working service cost simultaneously.Compared to linear electric motors, piezoelectric motor rapid self-locking also can remain on same position in the power-off state for a long time; Linear electric motors have more superior exercise performance, and platform speed stability is high, stable movement, and antijamming capability is strong.Feedback assembly comprises scrambler and photoelectric position limit device: scrambler detects the relative position of objective table, and because the precision of scrambler is higher, can improve position control accuracy, repetitive positioning accuracy is better than 1 μm, and best result not rate can reach 0.005 μm; Use photoelectric position limit device monitoring X-axis and Y-axis two ends, if objective table arrives two ends, then stop motion.For improving security of system further, also adding mechanical position limitation, software limit function, forming 3 layers of position limitation protection.
When the present invention is used for microscope stage system works, host computer sends movement instruction, delivers to control circuit.Control circuit, through computing, generates control signal.Control signal, through power amplification, drives the switching tube of main circuit, controls piezoelectric motor and linear electric motors further, and platform carries out X-axis and Y motion thereupon.In motion process, scrambler detects the position of objective table, and position signalling is fed back to control circuit, and control circuit, according to position feed back signal Correction and Control signal, forms closed-loop control, improves the control accuracy of system.
As can be seen here, the present invention is by changing drive motor on driving objective table, replace stepper motor with permanent magnetic linear synchronous motor and piezoelectric motor, drive platform to carry out X-axis and Y-axis motion respectively, the high precision coordinating guide rail and encoder position to detect implementation platform controls.
Obviously, tool of the present invention has the following advantages:
1. piezoelectric motor and permanent magnetic linear synchronous motor control accuracy are better than traditional stepper motor;
2. piezoelectric motor and linear motor direct drive stage movement, without the need to unnecessary physical construction, poor without backhaul;
3. piezoelectric motor has the function that cuts off self-lock, and remains on same position for a long time;
4. piezoelectric motor utilizes inverse piezoelectric effect to move, and the electromagnetic field in space can not cause interference to it, and motor itself also can not become electromagnetic disturbance source.
5. permanent magnetic linear synchronous motor has more superior exercise performance, and platform speed stability is high, stable movement;
6. permanent magnetic linear synchronous motor power density is large, can export more high thrust under same volume restriction;
7. the speed range of adjustment of permanent magnetic linear synchronous motor is wide, and objective table speed can reach 1um/s to 500mm/s.
8. rub between the motion structure of permanent magnetic linear synchronous motor little, system maintenance cost reduces, life.
9. the stability of piezoelectric axis can be ensured while the high-velocity scanning of straight-line electric arbor.
Accompanying drawing explanation
Fig. 1 is the decomposition texture schematic diagram of the embodiment of the present invention 1.
Fig. 2 is the assembly structure schematic diagram of the embodiment of the present invention 1.
Embodiment
Embodiment 1
See Fig. 1 and 2, the present invention includes objective table, piezoelectric motor 2, permanent magnetic linear synchronous motor 3, feedback assembly and control circuit;
Described objective table is provided with top shoe 11, intermediate plate 12 and base plate 13 from top to bottom successively; Top shoe 11 surface is as loading plane, and top shoe 11 and intermediate plate 12 connect and compose being slidably matched along Y direction by upper rail 14, and intermediate plate 12 and base plate 13 connect and compose being slidably matched along X-direction by lower guideway 15; The stator of permanent magnetic linear synchronous motor 3 is fixed on intermediate plate 12, and the mover of permanent magnetic linear synchronous motor 3 is connected with top shoe 11; The stator of piezoelectric motor 2 is fixed on base plate 13, and the mover of piezoelectric motor 2 is connected with intermediate plate 12 by fricting strip 6; Feedback assembly is provided with the first scrambler 41 and the second scrambler 42, first scrambler 41 is fixed on intermediate plate 12, second scrambler 42 is fixed on base plate 13, control circuit comprises microprocessor, the position detection signal of the first scrambler 41 and the second scrambler 42 is passed to microprocessor signals input end, and microprocessor control signals is passed to piezoelectric motor 2 and permanent magnetic linear synchronous motor 3 respectively.
Described microprocessor adopts digital signal processor (DSP) (also can adopt single-chip microcomputer etc.) embedded controller.
Embodiment 2
Similar to Example 1, difference is, is exchanged the installation site of piezoelectric motor and permanent magnetic linear synchronous motor.Namely piezoelectric motor is arranged on top, and permanent magnetic linear synchronous motor is arranged on bottom.

Claims (4)

1. the automatic control microscope slide platform of hybrid electric motor driving, is characterized in that, comprise objective table, piezoelectric motor, permanent magnetic linear synchronous motor, feedback assembly and control circuit;
Described objective table is provided with top shoe, intermediate plate and base plate from top to bottom successively; Top shoe surface is as loading plane, and top shoe and intermediate plate connect and compose being slidably matched along Y direction by upper rail, and intermediate plate and base plate connect and compose being slidably matched along X-direction by lower guideway; The stator of permanent magnetic linear synchronous motor is fixed on intermediate plate, and the mover of permanent magnetic linear synchronous motor is connected with top shoe; The stator of piezoelectric motor is fixed on base plate, and the mover of piezoelectric motor is connected with intermediate plate; Feedback assembly is provided with the first scrambler, the second scrambler, first scrambler is fixed on intermediate plate, second scrambler is fixed on base plate, control circuit comprises microprocessor, the position detection signal of the first scrambler and the second scrambler is passed to microprocessor signals input end, and microprocessor control signals is passed to piezoelectric motor and permanent magnetic linear synchronous motor respectively.
2. the automatic control microscope slide platform of hybrid electric motor driving as claimed in claim 1, is characterized in that, described microprocessor adopts digital signal processor (DSP) or single-chip microcomputer.
3. the automatic control microscope slide platform of hybrid electric motor driving, is characterized in that, comprise objective table, piezoelectric motor, permanent magnetic linear synchronous motor, feedback assembly and control circuit;
Described objective table is provided with top shoe, intermediate plate and base plate from top to bottom successively; Top shoe surface is as loading plane, and top shoe and intermediate plate connect and compose being slidably matched along Y direction by upper rail, and intermediate plate and base plate connect and compose being slidably matched along X-direction by lower guideway; The stator of piezoelectric motor is fixed on intermediate plate, and the mover of piezoelectric motor is connected with top shoe; The stator of permanent magnetic linear synchronous motor is fixed on base plate, and the mover of permanent magnetic linear synchronous motor is connected with intermediate plate; Feedback assembly is provided with the first scrambler and the second scrambler, first scrambler is fixed on intermediate plate, second scrambler is fixed on base plate, control circuit comprises microprocessor, the position detection signal of the first scrambler and the second scrambler is passed to microprocessor signals input end, and microprocessor control signals is passed to piezoelectric motor and permanent magnetic linear synchronous motor respectively.
4. the automatic control microscope slide platform of hybrid electric motor driving as claimed in claim 3, is characterized in that, described microprocessor adopts digital signal processor (DSP) or single-chip microcomputer.
CN201510922680.7A 2015-12-11 2015-12-11 Hybrid motor driven automatic control microscope object carrying platform Pending CN105353502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510922680.7A CN105353502A (en) 2015-12-11 2015-12-11 Hybrid motor driven automatic control microscope object carrying platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510922680.7A CN105353502A (en) 2015-12-11 2015-12-11 Hybrid motor driven automatic control microscope object carrying platform

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CN105353502A true CN105353502A (en) 2016-02-24

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110702709A (en) * 2019-11-08 2020-01-17 丹东奥龙射线仪器集团有限公司 X-ray CT apparatus
CN112987275A (en) * 2021-04-08 2021-06-18 简成科技(绍兴)有限公司 Annular elevating platform

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Publication number Priority date Publication date Assignee Title
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US6252705B1 (en) * 1999-05-25 2001-06-26 Schlumberger Technologies, Inc. Stage for charged particle microscopy system
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CN203069874U (en) * 2013-01-15 2013-07-17 中节能太阳能科技(镇江)有限公司 Microscope stage
CN203993367U (en) * 2014-06-24 2014-12-10 苏州大学 A kind of single-stage drives positioner

Patent Citations (8)

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Publication number Priority date Publication date Assignee Title
US6049421A (en) * 1995-07-19 2000-04-11 Morphometrix Technologies Inc. Automated scanning of microscope slides
US6252705B1 (en) * 1999-05-25 2001-06-26 Schlumberger Technologies, Inc. Stage for charged particle microscopy system
CN1391121A (en) * 2002-06-21 2003-01-15 中国科学院上海生命科学研究院 Movable objective table for electrobiologic microscope
CN1731081A (en) * 2005-08-26 2006-02-08 哈尔滨工业大学 Macro/micro driven large travel high-speed nano-precision plane positioning system
CN102640032A (en) * 2009-10-16 2012-08-15 索雷博股份有限公司 Motorized stage
CN102528472A (en) * 2012-03-05 2012-07-04 广东工业大学 Vertical axis macro and micro motion composite liner motion platform device
CN203069874U (en) * 2013-01-15 2013-07-17 中节能太阳能科技(镇江)有限公司 Microscope stage
CN203993367U (en) * 2014-06-24 2014-12-10 苏州大学 A kind of single-stage drives positioner

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110702709A (en) * 2019-11-08 2020-01-17 丹东奥龙射线仪器集团有限公司 X-ray CT apparatus
CN112987275A (en) * 2021-04-08 2021-06-18 简成科技(绍兴)有限公司 Annular elevating platform

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Application publication date: 20160224