CN1258960A - 平衡滤波器结构 - Google Patents
平衡滤波器结构 Download PDFInfo
- Publication number
- CN1258960A CN1258960A CN99127514.4A CN99127514A CN1258960A CN 1258960 A CN1258960 A CN 1258960A CN 99127514 A CN99127514 A CN 99127514A CN 1258960 A CN1258960 A CN 1258960A
- Authority
- CN
- China
- Prior art keywords
- holding wire
- resonator
- acoustic wave
- bulk acoustic
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI982824A FI113211B (fi) | 1998-12-30 | 1998-12-30 | Balansoitu suodatinrakenne ja matkaviestinlaite |
FI982824 | 1998-12-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1258960A true CN1258960A (zh) | 2000-07-05 |
CN1160853C CN1160853C (zh) | 2004-08-04 |
Family
ID=8553216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB991275144A Expired - Lifetime CN1160853C (zh) | 1998-12-30 | 1999-12-30 | 平衡滤波器结构 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6278342B1 (zh) |
EP (2) | EP2299594A1 (zh) |
JP (2) | JP2000232334A (zh) |
CN (1) | CN1160853C (zh) |
FI (1) | FI113211B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100442660C (zh) * | 2002-05-20 | 2008-12-10 | Nxp股份有限公司 | 多节滤波器结构和包含多节滤波器结构的无线通信装置 |
CN108141192A (zh) * | 2015-10-21 | 2018-06-08 | 株式会社村田制作所 | 平衡滤波器 |
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US6713938B2 (en) * | 1999-01-14 | 2004-03-30 | The Regents Of The University Of Michigan | Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator |
US6424074B2 (en) * | 1999-01-14 | 2002-07-23 | The Regents Of The University Of Michigan | Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
FI107661B (fi) | 1999-11-29 | 2001-09-14 | Nokia Mobile Phones Ltd | Menetelmä balansoidun suotimen keskitaajuuden säätämiseksi ja joukko balansoituja suotimia |
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US7132309B2 (en) * | 2003-04-22 | 2006-11-07 | Chien-Min Sung | Semiconductor-on-diamond devices and methods of forming |
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US6674291B1 (en) * | 2000-10-30 | 2004-01-06 | Agere Systems Guardian Corp. | Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom |
US6515558B1 (en) * | 2000-11-06 | 2003-02-04 | Nokia Mobile Phones Ltd | Thin-film bulk acoustic resonator with enhanced power handling capacity |
FI113111B (fi) * | 2000-11-24 | 2004-02-27 | Nokia Corp | Pietsosähköisiä resonaattoreita käsittävä suodinrakenne ja järjestely |
DE10058339A1 (de) * | 2000-11-24 | 2002-06-06 | Infineon Technologies Ag | Bulk-Acoustic-Wave-Filter |
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US6496085B2 (en) * | 2001-01-02 | 2002-12-17 | Nokia Mobile Phones Ltd | Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror |
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DE10163462A1 (de) * | 2001-12-21 | 2003-07-03 | Epcos Ag | Symmetrisch arbeitendes Reaktanzfilter |
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US20040027030A1 (en) * | 2002-08-08 | 2004-02-12 | Li-Peng Wang | Manufacturing film bulk acoustic resonator filters |
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DE10319554B4 (de) | 2003-04-30 | 2018-05-09 | Snaptrack, Inc. | Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren |
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US7019605B2 (en) | 2003-10-30 | 2006-03-28 | Larson Iii John D | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
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US7242270B2 (en) * | 2003-10-30 | 2007-07-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Decoupled stacked bulk acoustic resonator-based band-pass filter |
US7358831B2 (en) * | 2003-10-30 | 2008-04-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with simplified packaging |
US7391285B2 (en) * | 2003-10-30 | 2008-06-24 | Avago Technologies Wireless Ip Pte Ltd | Film acoustically-coupled transformer |
US7615833B2 (en) | 2004-07-13 | 2009-11-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator package and method of fabricating same |
US7388454B2 (en) | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
US7187255B2 (en) * | 2004-10-26 | 2007-03-06 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Arrangement of lattice filter |
US8981876B2 (en) | 2004-11-15 | 2015-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters having frame elements |
US7202560B2 (en) | 2004-12-15 | 2007-04-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
US7427819B2 (en) | 2005-03-04 | 2008-09-23 | Avago Wireless Ip Pte Ltd | Film-bulk acoustic wave resonator with motion plate and method |
US7369013B2 (en) | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
US7436269B2 (en) | 2005-04-18 | 2008-10-14 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled resonators and method of making the same |
US7934884B2 (en) * | 2005-04-27 | 2011-05-03 | Lockhart Industries, Inc. | Ring binder cover |
JP4550658B2 (ja) * | 2005-04-28 | 2010-09-22 | 富士通メディアデバイス株式会社 | 圧電薄膜共振器およびフィルタ |
US20060273866A1 (en) * | 2005-06-07 | 2006-12-07 | Nokia Corporation | Film bulk acoustic wave resonator with differential topology |
US7443269B2 (en) | 2005-07-27 | 2008-10-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method and apparatus for selectively blocking radio frequency (RF) signals in a radio frequency (RF) switching circuit |
US7868522B2 (en) | 2005-09-09 | 2011-01-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Adjusted frequency temperature coefficient resonator |
US7391286B2 (en) | 2005-10-06 | 2008-06-24 | Avago Wireless Ip Pte Ltd | Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters |
US7425787B2 (en) | 2005-10-18 | 2008-09-16 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator |
US7423503B2 (en) | 2005-10-18 | 2008-09-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating film acoustically-coupled transformer |
US7525398B2 (en) | 2005-10-18 | 2009-04-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustically communicating data signals across an electrical isolation barrier |
US7675390B2 (en) | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
US7737807B2 (en) | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US7463499B2 (en) | 2005-10-31 | 2008-12-09 | Avago Technologies General Ip (Singapore) Pte Ltd. | AC-DC power converter |
JP2007129391A (ja) * | 2005-11-02 | 2007-05-24 | Matsushita Electric Ind Co Ltd | 音響共振器及びフィルタ |
US7561009B2 (en) | 2005-11-30 | 2009-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with temperature compensation |
US7612636B2 (en) | 2006-01-30 | 2009-11-03 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Impedance transforming bulk acoustic wave baluns |
JP4739068B2 (ja) * | 2006-03-08 | 2011-08-03 | 日本碍子株式会社 | 圧電薄膜デバイス |
US7746677B2 (en) | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
US7479685B2 (en) | 2006-03-10 | 2009-01-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Electronic device on substrate with cavity and mitigated parasitic leakage path |
US20070228876A1 (en) * | 2006-03-31 | 2007-10-04 | Chien-Min Sung | Diamond Frequency Control Devices and Associated Methods |
US7629865B2 (en) | 2006-05-31 | 2009-12-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters |
US7508286B2 (en) | 2006-09-28 | 2009-03-24 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | HBAR oscillator and method of manufacture |
US7846767B1 (en) | 2007-09-06 | 2010-12-07 | Chien-Min Sung | Semiconductor-on-diamond devices and associated methods |
US7791435B2 (en) | 2007-09-28 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Single stack coupled resonators having differential output |
JP5136134B2 (ja) * | 2008-03-18 | 2013-02-06 | ソニー株式会社 | バンドパスフィルタ装置、その製造方法、テレビジョンチューナおよびテレビジョン受信機 |
JP5172454B2 (ja) * | 2008-04-30 | 2013-03-27 | 太陽誘電株式会社 | フィルタ、デュプレクサおよび通信機器 |
US7732977B2 (en) | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
US8018304B2 (en) * | 2009-04-15 | 2011-09-13 | Nortel Networks Limited | Device and method for cascading filters of different materials |
US8248185B2 (en) | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
US8902023B2 (en) | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
US8193877B2 (en) | 2009-11-30 | 2012-06-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Duplexer with negative phase shifting circuit |
US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
US9048812B2 (en) | 2011-02-28 | 2015-06-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer |
US9154112B2 (en) | 2011-02-28 | 2015-10-06 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge |
US9203374B2 (en) | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
US9425764B2 (en) | 2012-10-25 | 2016-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having composite electrodes with integrated lateral features |
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US9444426B2 (en) | 2012-10-25 | 2016-09-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having integrated lateral feature and temperature compensation feature |
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US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
JP5613813B2 (ja) * | 2013-10-17 | 2014-10-29 | 太陽誘電株式会社 | 分波器 |
US10177736B2 (en) | 2015-05-29 | 2019-01-08 | Avago Technologies International Sales Pte. Limited | Bulk acoustic wave resonator comprising multiple acoustic reflectors |
JP2017060077A (ja) * | 2015-09-18 | 2017-03-23 | セイコーエプソン株式会社 | 振動子及びその製造方法 |
US10135415B2 (en) * | 2015-12-18 | 2018-11-20 | Texas Instruments Incorporated | Method to reduce frequency distribution of bulk acoustic wave resonators during manufacturing |
US11736088B2 (en) | 2016-11-15 | 2023-08-22 | Global Communication Semiconductors, Llc | Film bulk acoustic resonator with spurious resonance suppression |
US11764750B2 (en) | 2018-07-20 | 2023-09-19 | Global Communication Semiconductors, Llc | Support structure for bulk acoustic wave resonator |
US11817839B2 (en) * | 2019-03-28 | 2023-11-14 | Global Communication Semiconductors, Llc | Single-crystal bulk acoustic wave resonator and method of making thereof |
US20210111693A1 (en) | 2019-10-15 | 2021-04-15 | Global Communication Semiconductors, Llc | Composite Piezoelectric Film and Bulk Acoustic Resonator Incorporating Same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US1969571A (en) * | 1933-03-17 | 1934-08-07 | Bell Telephone Labor Inc | Transmission network |
US5231327A (en) * | 1990-12-14 | 1993-07-27 | Tfr Technologies, Inc. | Optimized piezoelectric resonator-based networks |
JPH09289434A (ja) * | 1996-04-22 | 1997-11-04 | Matsushita Electric Ind Co Ltd | 平衡型弾性表面波フィルタ |
US5617065A (en) * | 1995-06-29 | 1997-04-01 | Motorola, Inc. | Filter using enhanced quality factor resonator and method |
US5692279A (en) * | 1995-08-17 | 1997-12-02 | Motorola | Method of making a monolithic thin film resonator lattice filter |
US6051907A (en) * | 1996-10-10 | 2000-04-18 | Nokia Mobile Phones Limited | Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS) |
US5872493A (en) * | 1997-03-13 | 1999-02-16 | Nokia Mobile Phones, Ltd. | Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror |
US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
US5942958A (en) * | 1998-07-27 | 1999-08-24 | Tfr Technologies, Inc. | Symmetrical piezoelectric resonator filter |
-
1998
- 1998-12-30 FI FI982824A patent/FI113211B/fi not_active IP Right Cessation
-
1999
- 1999-12-21 EP EP10181555A patent/EP2299594A1/en not_active Withdrawn
- 1999-12-21 EP EP99310298A patent/EP1017170A3/en not_active Ceased
- 1999-12-28 JP JP11375291A patent/JP2000232334A/ja active Pending
- 1999-12-28 US US09/473,395 patent/US6278342B1/en not_active Expired - Lifetime
- 1999-12-30 CN CNB991275144A patent/CN1160853C/zh not_active Expired - Lifetime
-
2011
- 2011-01-13 JP JP2011004509A patent/JP2011072047A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100442660C (zh) * | 2002-05-20 | 2008-12-10 | Nxp股份有限公司 | 多节滤波器结构和包含多节滤波器结构的无线通信装置 |
CN108141192A (zh) * | 2015-10-21 | 2018-06-08 | 株式会社村田制作所 | 平衡滤波器 |
CN108141192B (zh) * | 2015-10-21 | 2021-06-18 | 株式会社村田制作所 | 平衡滤波器 |
Also Published As
Publication number | Publication date |
---|---|
US6278342B1 (en) | 2001-08-21 |
JP2011072047A (ja) | 2011-04-07 |
EP1017170A2 (en) | 2000-07-05 |
CN1160853C (zh) | 2004-08-04 |
FI113211B (fi) | 2004-03-15 |
JP2000232334A (ja) | 2000-08-22 |
EP1017170A3 (en) | 2003-01-02 |
FI982824A0 (fi) | 1998-12-30 |
FI982824A (fi) | 2000-07-01 |
EP2299594A1 (en) | 2011-03-23 |
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Effective date of registration: 20170105 Address after: Espoo, Finland Patentee after: NOKIA TECHNOLOGIES OY Address before: Espoo, Finland Patentee before: Nokia Corp. Effective date of registration: 20170105 Address after: Espoo, Finland Patentee after: Nokia Corp. Address before: Espoo, Finland Patentee before: Nokia Mobile Phones Ltd. |
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