CN1314830C - Flexible low radiation window film and real time control method for producing the same - Google Patents

Flexible low radiation window film and real time control method for producing the same Download PDF

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Publication number
CN1314830C
CN1314830C CNB2003101106077A CN200310110607A CN1314830C CN 1314830 C CN1314830 C CN 1314830C CN B2003101106077 A CNB2003101106077 A CN B2003101106077A CN 200310110607 A CN200310110607 A CN 200310110607A CN 1314830 C CN1314830 C CN 1314830C
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China
Prior art keywords
film
sio
ito
agau
layer
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Expired - Fee Related
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CNB2003101106077A
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Chinese (zh)
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CN1546722A (en
Inventor
彭传才
李京增
魏敏
胡云慧
余圣发
钟碧城
胡浩龙
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HUNAN SANCAI PHOTOELECTRIC INFORMATION MATERIAL CO Ltd
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HUNAN SANCAI PHOTOELECTRIC INFORMATION MATERIAL CO Ltd
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Priority to CNB2003101106077A priority Critical patent/CN1314830C/en
Publication of CN1546722A publication Critical patent/CN1546722A/en
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Abstract

The present invention relates to a flexible low-irradiation window film. The present invention is composed of a plurality of films which are plated on a transparent and flexible material. The film system structure of the films is Sio <x>-SSO <x>-Ag (Au-ITO or Sio <x>-SSO <x>-Ag (Au)-ITO-Ag (Au)-ITO, wherein the Ag (Au) film layer is silver alloy formed by mixing gold (Au) which is uniformly distributed in the (Ag), and the weight ratio of the (Au) is 15 to 20 percent. A real-time monitoring method of the window film is characterized in that one side of a material collecting roller of a multitarget magnetron sputtering coiling film plating machine is provided with a plurality of emitting-receiving probes of light-emitting diodes along the transverse direction of a basal film, and the transmitting direction of the probes is perpendicular to the running direction of the basal film. After the output signals of the light-receiving probes are amplified by an amplifier and are sent to an SCM to carry out comparing treatment after the output signals are converted into digital information by an analog-digital converter, the present invention is connected with a supervisory computer by an interface, the target power output is controlled by the supervisory computer, and therefore, the thickness of continuous multi-layer plated film is controlled in real time.

Description

Flexible low radiation fenestrated membrane and production real-time control method thereof
Technical field
The present invention relates to reduce the thin-film material film structure of thermal emissivity rate and produce method for real-time monitoring.
Background technology
Existing low-radiation film architecture is generally S-M-S or S-M-S-M-S (being medium-metal-medium or medium-metal-medium-metal-medium), and wherein metal generally adopts silver, copper, aluminium etc., and the main silver that adopts; Medium generally adopts the oxide compound of titanium, zirconium, zinc, indium, tin, tungsten etc. and the nitride of titanium, silicon etc., and the combination of these film based materials is to the poor effect of isolated UV-light.Simultaneously,, the control of process of producing product and the secondary processing of Product transport, storage and product are brought a lot of inconvenience because the erosion resistance of silver is relatively poor, also unfavorable to the work-ing life of product.In addition, lack effectively monitoring means in real time in the production of existing low-radiation film, cause production technique and unstable product quality, have much room for improvement.
Summary of the invention
The technical problem to be solved in the present invention is, deficiency at the prior art existence, propose the low radiation fenestrated membrane of a kind of flexibility and produce method for real-time monitoring, the low radiation fenestrated membrane of described flexibility ties up under the prerequisite that keeps low-E and high visible light transmissivity has good ultraviolet absorption function, and the product good weatherability; Described production monitoring method is meant that the multi-wavelength multiple spot of multilayer continuous coating monitors in real time, can control quality product in stable production process.
One of technical solution of the present invention is, the low radiation fenestrated membrane of described flexibility is made of the multilayer film that are coated on the transparent flexible base material, and the film structure of these multilayer film is: SiO x-SSO x-AgAu-ITO, or SiO x-SSO x-AgAu-ITO-AgAu-ITO; Wherein, the AgAu rete is that to mix weight ratio in silver be 15%-20% and the silver alloys formed of equally distributed gold.
Two of technical solution of the present invention is, described production method for real-time monitoring is, in multi-target magnetic control sputtering winding film coating machine material receiving roller one side along basement membrane laterally (being width) and that the emission light of a plurality of (for example four to six) luminous probes and these probes simultaneously is installed in this basement membrane is vertical with described basement membrane traffic direction (or moving plane), and in a plurality of light-receivings probes of corresponding installation of another side (identical wavelength is answered in pairs) of described basement membrane, the output signal of described light-receiving probe through amplifier amplify be converted to numerical information again by analog to digital converter and deliver to one-chip computer and compare processing after, connect with upper computer by interface (for example RS232C interface), control target power output output by it, thereby control the thickness of continuous multilayer plated film in real time.
Below the present invention made further specify.
Fig. 1 is the structural representation of a four layer series of expression the present invention, and this four layer series is SiO x-SSO x-AgAu-ITO, and Fig. 2 is the structural representation of one six tunic system of expression, this six tunics system increases the AgAu layer successively on the ITO of described four layer series rete and the ITO layer is formed, i.e. SiO x-SSO x-AgAu-ITO-AgAu-ITO.Wherein base material 1 can adopt polyester film (PET film), SiO xLayer 2 is the protoxide coating of silicon, and major ingredient is SiO, also contains a small amount of Si and SiO 2(for example Si and SiO 2Respectively contain weight ratio 1%-5%); SSO xLayer 3 is stainless steels of incomplete oxidation, and they are to become film formed incomplete oxidation thing under oxygen debt state; AgAu layer 4 is to have mixed golden silver alloy layers, and the gold doping amount generally is a weight ratio 15%-20%; ITO layer 5 is indium, tin-oxide coating.
In the film structure of the present invention, SiO xLayer and SSO xLayer all has very strong sorption to UV-light, makes the low radiation fenestrated membrane of flexibility of the present invention have the function of isolating UV-light, is used for the window glass better effects if of automobile, buildings.The gold doping ratio control is in certain limit in the material of described AgAu layer, thereby can not influence silver optical property and electric property, and the erosion resistance and the weather resistance of silver all had clear improvement, this secondary processing to quality control in the technological process, product all has great function.Production (being coated with) technology and equipment that film of the present invention is can adopt prior art.
Production method for real-time monitoring of the present invention is to judge by the infrared wavelength transmittance whether silver alloys is suitable, can reach low-E, adopt the comparison of several (for example three) visible wavelength transmitance simultaneously, whether smoothly see at the visible region transmittance curve, confirm further whether silver alloy layers thickness is suitable, it is not directly to control silver alloys thickness, but a kind of more direct real-time monitoring means of final performance perameter by the control product are more simple and efficient than the absolute film thickness monitoring method of routine; By several visible wavelengths (for example three s') transmittance and comparison thereof, realize the real-time monitoring of each thickness of dielectric layers equally, reach the optimum matching effect of multilayer film.
As known from the above, the present invention is flexible low radiation fenestrated membrane and produces method for real-time monitoring, the low radiation fenestrated membrane of described flexibility has good visible light transmissivity and heat insulation, isolation UV-light effect, it for ultrathin, can reel, the bending type product, can be cut into any use size, can be used as pad pasting, interlayer film and two hollow folder film (heat mirror), be widely used in automobile, train, airship, boats and ships, heat-insulating glass door and window, energy-conservation in addition, safety, environment protecting; Described method can make whole process of production be effectively controlled, and has guaranteed the stable control of production process and quality product.
Description of drawings
Fig. 1 is a four layer series structural representation of the present invention;
Fig. 2 is the present invention's six tunic architecture synoptic diagram;
Fig. 3 is the process skeleton diagram that the present invention produces method for real-time monitoring;
Fig. 4 is the embodiment diagram of method for real-time monitoring of the present invention on coating equipment.
In the accompanying drawings:
1-flexible parent metal (PET polyester film), 2-SiO xLayer,
3-SSO xLayer, 4-AgAu layer,
5-ITO layer, 8-pressure roller,
9-median septum, 10-twin target,
11-single target, 12-positive plate,
13-gas distribution pipe, 14-divider wall,
15-cooling tube, 16-cold roller,
17-pressure roller, 18-tensioning roller,
19-tension controller, 20-light-receiving probe,
21-receive (putting) material roller, 22-vacuum entity,
23-receive (putting) material roller, 24-luminous probe,
25-vision slit, 26-guide roller,
27-tensioning roller.
Embodiment
Embodiment 1: as shown in Figure 1, flexible parent metal 1 is the PET film, thick 75 μ m; SiO xLayer 2 thickness 25nm, SSO xLayer 3 thickness 5nm; AgAu layer 4 thickness 14nm, and Ag: Au=85: 15 (weight ratios).Product performance: visible light transmissivity 82%, radiant ratio 0.14, uv absorption rate 95%.
Embodiment 2: as shown in Figure 2, flexible parent metal 1 is the PET film, thick 23 μ m; SiO xLayer 2 thickness 25nm, SSO xLayer 3 thickness 2nm; AgAu layer 4 thickness are 9nm, and Ag: Au=85: 15 (weight ratios).ITO layer 5,7 thickness are 85nm.
Product performance: visible light transmissivity 78%, radiant ratio 0.11, uv absorption rate 90%.
Embodiment 3: referring to Fig. 3 and Fig. 4, the method for real-time monitoring process is shown in Fig. 3 block diagram, utilize the multi-target magnetic control sputtering winding film coating machine of prior art shown in Figure 4 to implement, when receipts (putting) material roller 23 turns clockwise among Fig. 4 is material receiving roller, receiving (putting) material roller 21 is material receiving roller when being rotated counterclockwise, so at these two rollers 21, a side of 23 is all along horizontal uniform four the photodiode transmitting probes (being luminous probe 24) of basement membrane 1 one side, and four light-receivings probe 20 is set in this basement membrane 1 another side correspondence, the emission light of probe 24 is vertical with basement membrane 1 traffic direction (plane), choose 470nm, 560nm, 660nm, the transmittance of four wavelength of 880nm is monitored in real time, wherein 880nm wavelength infrared transmittivity can judge whether silver alloys thickness is suitable, can confirm further from the described comparison of the visible light transmissivity of three wavelength in addition whether silver alloys thickness is suitable simultaneously; Similarly, by the transmitance of 470nm, 560nm, three visible wavelengths of 660nm and with the comparison of set(ting)value, realize the real-time monitoring of each dielectric thickness, reach the optimum matching effect of multilayer film.

Claims (3)

1. a flexibility is hanged down the radiation fenestrated membrane, and it is made of the multilayer film that are coated on the transparent flexible base material, it is characterized in that, the film structure of these multilayer film is SiO x-SSO x-AgAu-ITO, wherein, the AgAu rete is the silver alloys that 15%-20% and equally distributed gold are formed for mix weight ratio in silver, SSO XLayer is the stainless steel of incomplete oxidation, SiO XMain component be SiO, also contain a small amount of Si and SiO 2, Si and SiO 2Respectively contain weight ratio 1%-5%.
2. flexibility according to claim 1 is hanged down the radiation fenestrated membrane, it is characterized in that, increases AgAu layer and ITO layer on described ito thin film successively, constitutes SiO x-SSO x-AgAu-ITO-AgAu-ITO film structure.
3. a flexible as claimed in claim 1 or 2 low radiation fenestrated membrane is produced method for real-time monitoring, it is characterized in that, it is in multi-target magnetic control sputtering winding film coating machine material receiving roller one side along basement membrane laterally and that the emission light of a plurality of luminous probes and these probes simultaneously is installed in this basement membrane is vertical with described basement membrane traffic direction, and in a plurality of light-receivings probes of the corresponding installation of another side of described basement membrane, the output signal of described light-receiving probe through amplifier amplify be converted to numerical information again by analog to digital converter and deliver to one-chip computer and compare processing after, connect with upper computer by interface, by its control target power output output, the emission light of luminous probe is got 470nm, 560nm, 660nm, four wavelength of 880nm; Wherein 880nm wavelength infrared transmittivity is judged silver alloys thickness, more further determines silver alloys thickness from the visible light transmissivity of described three wavelength in addition simultaneously; Transmitance and set(ting)value by 470nm, 560nm, three visible wavelengths of 660nm compare, thereby control the thickness of continuous multilayer plated film in real time.
CNB2003101106077A 2003-12-04 2003-12-04 Flexible low radiation window film and real time control method for producing the same Expired - Fee Related CN1314830C (en)

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CN1314830C true CN1314830C (en) 2007-05-09

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101393289B (en) * 2007-09-18 2010-12-29 郭继光 Energy-conserving heat insulation film series design, film material selection and making method
CN101481790B (en) * 2009-01-20 2011-11-02 李丹之 ZAO semiconductor nano conductive film and preparation thereof
CN101914755B (en) * 2010-07-13 2012-07-18 淮安富扬电子材料有限公司 Manufacturing method and device of winding banded ITO conductive film
CN102304695A (en) * 2011-10-14 2012-01-04 南昌欧菲光科技有限公司 Method for on-line monitoring of residual gas on coiling coating machine
CN104152855A (en) * 2014-07-11 2014-11-19 苏州诺耀光电科技有限公司 Film thickness detecting mechanism
CN105670528B (en) * 2015-12-31 2018-10-16 合肥乐凯科技产业有限公司 A kind of building fenestrated membrane
CN108189653A (en) * 2017-11-24 2018-06-22 张家港康得新光电材料有限公司 Side block fenestrated membrane

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4828346A (en) * 1985-10-08 1989-05-09 The Boc Group, Inc. Transparent article having high visible transmittance
CN1368650A (en) * 2001-02-07 2002-09-11 三星Sdi株式会社 Functional film improved optical property and electrical property

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4828346A (en) * 1985-10-08 1989-05-09 The Boc Group, Inc. Transparent article having high visible transmittance
CN1368650A (en) * 2001-02-07 2002-09-11 三星Sdi株式会社 Functional film improved optical property and electrical property

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