CN1330431C - Paste coating machine and coating method - Google Patents
Paste coating machine and coating method Download PDFInfo
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- CN1330431C CN1330431C CNB2004100833261A CN200410083326A CN1330431C CN 1330431 C CN1330431 C CN 1330431C CN B2004100833261 A CNB2004100833261 A CN B2004100833261A CN 200410083326 A CN200410083326 A CN 200410083326A CN 1330431 C CN1330431 C CN 1330431C
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- paste
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
Abstract
To provide a paste applicator which controls a vibration generated on a table or the like, and can form a paste pattern of the desired shape at a high speed and with a high degree of precision without broadening the occupied area of the device even if a substrate becomes of large size. In order to solve the problems, the applicator consists of two pressure regulators and a high-speed switching valve such that a speed control switching a relative speed variation of the substrate and a nozzle to two steps is carried out in applying to a corner portion, and at the same time, in order to keep an application amount constant, a pneumatic circuit controlling the application amount can be also high-speed switched to two steps.
Description
Technical field
The present invention relates to be used on real estate assigned position, with the paste coating machine and the coating process of the figure coating paste of regulation.
Background technology
Past, as being coated with paste (binding agent), making it the paste coating machine under the situation with another substrate sticking constituting on the substrate of liquid crystal panel, as the spy open the 2003-266005 communique disclosed, when the corner part of the tetragonal figure of coating, utilize the distance meter of the relative distance of measuring substrate and nozzle to come the instrumentation vibration, the happening part of instrumentation vibration in advance and the pattern of this vibration, when reality coating paste, by on the position that this vibration takes place, producing the vibration pattern of antiphase, suppress the generation of vibration.
But, maximize owing to substrate size surpasses 1m * 1m, under the situation that the workbench of mounting substrate moves along XY θ direction, the weight that is used for the XY θ workbench that moves to this XY θ direction increases.Therefore, when high-speed coating paste figure,, be difficult to the paste figure is coated with into desirable shape equably because the vibration of XYZ direction takes place on the each several part of device in the action of workbench.In addition, replacing XY θ workbench, making under the situation that nozzle side moves, be necessary to move the door type structural portion that nozzle is set, when substrate size maximized, the weight of door type structural portion also can increase, whole device vibrates when mobile, same problem in the time of can taking place with travelling table.
Summary of the invention
Therefore, even the purpose of this invention is to provide a kind of when substrate maximizes, the occupied area of device is increased, and can be suppressed at the vibration of last generations such as workbench, high accuracy forms the paste coating machine of desirable paste figure at high speed.
In order to achieve the above object, coating machine of the present invention comprises: the paste storage cylinder that stores paste, nozzle with the ejection of the paste in the paste storage cylinder, workbench with the jet subtend of nozzle ground mounting substrate, the drive division that is used to make the relative position relation of nozzle and workbench to change, in described coating machine, be arranged on and form under the situation of tetragonal paste figure to real estate from jet, be provided with speed control mechanism and two pressure regulating devices, described speed control mechanism is when corner part begins, make the relative velocity of nozzle and workbench divide two phase change, described two pressure regulating devices are used for pressing corresponding to the injection that the variation of speed is switched paste by two-stage.
Under the situation of describing tetragonal paste figure, when the relative velocity of nozzle and substrate corner part jumpy is coated with, by relative velocity branch two-stage is changed, change simultaneously with this, the injection that divides two-stage to switch paste is pressed, the rapid variation of inhibition speed can suppress to be accompanied by the generation of the vibration that this rapid variation causes.And, change by make the coating weight of paste with the variation that is accompanied by speed, also have the coating of carrying out suitable amount, can describe high-precision paste figure, prevent the effect that the productive temp time reduces.
Description of drawings
Fig. 1 is the perspective view of an embodiment of paste coating machine of the present invention.
Fig. 2 is the enlarged drawing of coating head.
Fig. 3 is the key diagram of the instrumentation situation of distance between the spray nozzle front end portion of dispense tip and substrate.
Fig. 4 is the block diagram of system of the master control part of presentation graphs 1.
Fig. 5 is the block diagram of system of the sub-control portion of presentation graphs 1.
Fig. 6 is the flow chart of molar behavior in the device of Fig. 1.
Fig. 7 is the structure chart of an embodiment of pneumatic circuit portion.
Fig. 8 is the action time figure when adopting the pneumatic circuit of Fig. 7.
Fig. 9 is the diagram of the state of describing of explanation paste figure.
The diagram of the coating pressure when Figure 10 is explanation coating corner part and the relation of relative moving speed.
Figure 11 is the diagram that is used to illustrate other structure of pneumatic circuit portion.
Figure 12 is the time diagram when adopting the pneumatic circuit of Figure 11.
The specific embodiment
Below, with reference to the description of drawings embodiments of the invention.
Fig. 1 is the perspective view of expression according to an embodiment of paste coating machine of the present invention.Fig. 2 is the enlarged drawing of dispense tip 80a.
On support 1, be provided with to subtend a plurality of coating pastes beam 2a, 2b with dispense tip 80a～80f, wherein, one of described beam can change the interval between the support of Y direction.In addition, described beam 2a, 2b are equipped with dispense tip X-axis travel mechanism (band of holding concurrently carries out the interval adjustment of X-direction).That is, specifically,, on beam 2a, 2b,, linear motor 8a～8f is set on each dispense tip for each that makes each dispense tip respectively can move though do not illustrate among the figure.Dispense tip 80a as shown in Figure 2, is provided with Z axle travelling table frame support bracket 81a～81f on linear motor 8a～8f.On frame support bracket 81a～81f, Z axle travelling table 9a～9f and Z axle servo motor 10a～10f are set.And then, on the supporting member 91a～91f that is located on Z axle travelling table 9a～9f, mounting distance meter 16a～16f, replaceable thereon paste storage cylinder (syringe) 13a～13f and the nozzle supporting station 14a～14f of installing (disassembled and assembled freely).In addition, with the paste storage cylinder image recognition camera 15a～15f that is furnished with the light source that can throw light on is installed side by side.Be separately positioned on distance meter, paste storage cylinder, image recognition camera on Z axle travelling table 9a～9f, can move the interval between adjustment and the substrate 7 along Z-direction (up and down) by Z axle servo motor 10a～10f.
In the present embodiment, in the bottom, two ends of beam 2b, setting makes beam 2b adjust with linear motor 4a, 4b along the interval (Y direction) that Y direction moves usefulness, and described linear motor 4a, 4b move on linear guides 3 a, 3b. Linear guides 3a, 3b are fixed on the support 1.In addition, in the present embodiment, beam 2a, distolateral in the Y direction of support 1 is fixed on supporting station 3c, the 3d.Like this, beam 2a can be fixed, still, also configurable linear motor and linear guides also can move beam 2a along Y direction, and beam 2a and beam 2b move in the mode of coordinating the interval between them.
And then, on the top of support 1, be provided with and make workbench along movable workbench mechanism 6 that Y direction moves.In this movable workbench mechanism 6, the substrate holding mechanism 5 as workbench of mounting substrate 7 is installed.
In the above-described embodiments, for fear of miscellaneous, the numbering of each parts of a plurality of dispense tips that are provided with for subtend in explanation is added subscript a～f on the numbering of each several part.
In the bottom of support 1, master control part 17a is set, the 17b of sub-control portion, as the hard disk 17c of external memory, diskette 1 7d connects with signal cable 17e respectively.In addition, monitor 17f and the keyboard 17g that is connected with master control part 17a with signal cable is set separately.
In addition, though do not illustrate among Fig. 1, as shown in Figure 4,, on negative pressure source 22v and positive pressure source 23p, be connected with the same number of negative pressure adjuster 22a～22f with dispense tip, malleation adjuster 23a～23f, valve gear 24a～24f as pneumatic circuit.
Fig. 3 is the perspective view of the part of paste storage barrel 13a in the enlarged drawing 1 and distance meter 16a.
In the bottom of paste storage cylinder 13a, nozzle supporter 14a is set, from this, nozzle 13na to be set side-prominently to distance 16a.Distance meter 16a utilizes non-contacting triangulation, the surface of instrumentation from the leading section of nozzle to substrate 7 (above) distance.That is, in the basket of distance meter 16a light-emitting component and light receiving element are set, the laser L that emits from this light-emitting component is by the instrumentation point reflection of substrate 7, and this reverberation is received by light receiving element.
In addition, position under the instrumentation point S of the laser on the substrate 7 and the nozzle 13na, on substrate 7, depart from a small distance, but because departing from substrate 7 surfaces concavo-convex of this slight distance do not have difference, so, the instrumentation result of distance meter 16a and surface from the leading section of nozzle 13na to substrate 7 (above) distance, have difference hardly.
Thereby, control according to this instrumentation result apart from meter 16a, can with concavo-convex (fluctuatings) on the surface of substrate 7 as one man will be from the leading section of nozzle 13na to substrate 7 the surface (above) distance (at interval) maintenance constant.
Like this, keep constant, and make from the paste amount of unit interval of nozzle 13 ejections and remain constant amount by the distance that makes surface from the leading section of nozzle 13na to substrate 7, the paste figure of on substrate 7, describing, its width is the same with thickness.
Below, the control method in the present embodiment is described.
In Fig. 4, represent the block diagram of the control system of master control part shown in Figure 1 etc.
In master control part 17a, microcomputer 17aa is connected on motor controller 17ab, external interface 17ad, the pattern recognition device 17ae etc. via data communication bus 17ac.In addition, on motor controller 17ab, be connected with respectively: each dispense tip drives with X-axis linear motor driver 17af, adjust Y-axis linear motor driver 17ag, the 17ah at the interval (being located at the interval of the dispense tip on each beam 2a, the 2b) between two beam 2a, the 2b, workbench Y-axis motor driver 17ai.
Use on the driver 17af at each X-axis linear motor, be connected with the linear motor 8a～8f that makes each dispense tip move usefulness to X-direction.On Y-axis linear motor driver 17ag, 17ah, be connected with Y-axis linear motor 4a, 4b.And then, workbench with the Y-axis linear motor with driver on, be connected with servo motor 6m.
On pattern recognition device 17ae, be connected with image recognition camera 15a～15f, handle the picture signal that transmits by camera, carry out the identification of reference mark position etc. and handle.And then, externally on the interface 17ad, be connected with the 17b of sub-control portion and adjuster 22a～22f, 23a～23f, valve gear 24a～24f.
In addition, in microcomputer 17aa, though do not illustrate among the figure, but comprise: main operational part, reach and store the ROM that describes with handling procedure that is coated with that describes later, store the result of main operational part or from the RAM of the data of external interface 17ad and motor controller 17ab, carry out input and output portion with the exchanges data of external interface 17ad or motor controller 17ab.
In addition, in each motor 8a～8f, 4b, 6m, the linear movement pick-up of built-in detection position and detect the encoder of rotation amount, its testing result feeds back to each driver 17f～17j, carries out Position Control.
The block diagram of Fig. 5 vice control part.
In the drawings, microcomputer 17ba is connected with motor controller 17bb or external interface 17bd via communication cable 17bc.In addition, on motor controller 17bb, be connected with Z axle motor driver 17be.On Z axle motor driver 17be, be connected with the Z axle motor 10a～10f that is located on each dispense tip respectively.In addition, on each Z axle motor, the encoder that the instrumentation rotation amount is used is set.Externally on the interface 17bd, be connected with the distance meter 16a～16f that is located on each dispense tip, and the external interface 17ad of master control part 17a.
In addition, in microcomputer, though do not illustrate among the figure, but comprise: main operational part, and the height control of the storage nozzle 13na of coating when describing that carry out describing later is with the ROM of handling procedure, store the result of main operational part or from the RAM of the data of external interface 17bd and motor controller 17bb input, and, with the input and output portion of external interface 17bd or motor controller 17bb swap data.From the testing result that is provided in the encoder on Z axle motor 10a～10f, be fed back to Z axle driver 17be, carry out Position Control.
Under the jointly controlling of master control part 17a and the 17b of sub-control portion, each motor 8a～8f, 4a, 6m, 10a～10f move rotation according to the data the RAM that imports, is stored in microcomputer 17aa from keyboard 17g.Whereby, the substrate 7 that remains on the substrate holding mechanism 5 is moved any distance along Y direction, and the Z axle travelling table 9a～9f via spray nozzle part is moved up and down moves any distance with the nozzle 13na～13nf that is bearing on beam 2a, the 2b along X-direction.Along in the moving process of X-axis and Y-axis, continue to apply the air pressure of setting this in paste storage cylinder 13a～13f, the jet ejection paste from nozzle 13na～13nf leading section forms required paste figure on substrate 7.
In the process that X-axis moves horizontally, the interval between distance meter 16a～16f instrumentation nozzle 13na～13nf and the substrate 7 keeps constant mode at interval always to make this at nozzle 13na～13nf, moves up and down control X-axis travelling table 9a～9f.
Secondly, in Fig. 6, the action flow chart of the device of expression present embodiment.In addition, in the present embodiment, as shown in Figure 1, utilize whole six dispense tips, on substrate, once can describe six paste figures at most.But, self-evident, by only using any one dispense tip, promptly can on a substrate, describe a paste figure.
In Fig. 6, when connecting power supply (step 100), at first, carry out the initial setting (step 200) of coating machine, in this initial setting operation, when each that drives Fig. 1 moves with motor and Z axle travelling table 9, substrate holding mechanism 5 is moved along Y direction, respectively with each spots localization on the reference position of regulation.That is, when setting the interval of two beams (Y direction at interval) interval of regulation for, with (X-direction at interval) interval that is positioned to stipulate at interval of the nozzle on the beam.In addition, (that is, the paste starting point) mode is set the origin position of stipulating so that the paste jet is in the position that begins to be coated with paste.And then, carry out the setting of paste graph data and substrate position data, paste coating end position data etc.
The input of this data is undertaken by keyboard 17g, and as previously described, the data that are transfused to are stored in the RAM that is built in the microcomputer 17aa.
When this initial process (step 200) finishes, then substrate 7 is loaded on the substrate holding mechanism 5 (step 300).The maintenance of substrate can be adopted by answering negative pressure to attract the method for adsorbing from a plurality of attraction confessions of being located on the substrate holding mechanism face, and, the method for utilizing the absorption of Electrostatic Absorption mechanism to keep, and the method that keeps of clamping substrate etc. mechanically.
Then, the pre-determined bit of carrying out substrate is handled (step 400).In this is handled, the camera that utilization is set from image recognition camera 15a～15f is photographed to the witness marker of being located on the substrate 7 that is loaded on the substrate holding mechanism 5, obtain the position of centre of gravity of location by the image processing, detect the gradient of substrate 7 in the θ direction with sign.Then,, drive servo motor 30ma～30mf, dispense tip is moved to Y direction, revise the gradient of this θ direction according to the gradient that detects.By the way, the pre-determined bit of finishing substrate is handled (step 400).
That secondly, carries out the paste image describes to handle (step 500).
In this is handled, the jet of nozzle 13na～13nf is moved to the coating starting position of substrate 7, carry out comparison, the adjustment of nozzle location.Secondly, make servo motor 10a～10f and Z axle travelling table 9a～9f action, the height setting of each nozzle 13na～13nf is become paste coating height.
According to the initial movable range data of nozzle, nozzle 13na～13nf is descended be equivalent to the amount of initial movable distance.In ensuing action, utilize distance meter 16a～16f to measure the apparent height of substrate 7, confirm whether the front end of nozzle 13na～13nf is configured to describe the height of paste figure.Do not reaching under the situation of describing height, make nozzle 13na～13nf move small distance, carry out the down maneuver of the slight distance of the surperficial instrumentation of aforesaid substrate 7 and nozzle 13na～13nf repeatedly, the front end of nozzle 13na～13nf is set for the height of describing of paste figure.
When above-mentioned processing finishes, follow correction according to the gradient of paste graph data among the RAM that is stored in microcomputer 17aa and θ direction, drive linear motor 6m, 8a～8f.Whereby, under the state of the paste jet of nozzle 13na～13nf and substrate subtend, according to the paste graph data, by one side respectively along XY direction moving nozzle 17na～17nf and substrate 7, one applies the air pressure of setting in the paste storage cylinder, from paste jet ejection paste.Whereby, the paste figure of beginning on substrate 7 described.
Then, meanwhile, as explained above, input utilizes the measured data at the interval on the distance meter 16a～paste ejiction opening of each nozzle 13na～13nf that 16f measures and the surface of substrate 7 in the microcomputer 17ba of the 17b of sub-control portion.Microcomputer 17ba obtains the fluctuating on substrate 7 surfaces according to the data of input, according to the fluctuating of being obtained, drives servo motor 10a～10f, carries out control, will be constant from the height maintenance of the nozzle spray-orifice on substrate 7 surfaces.Whereby, can describe the paste figure of required coating weight.
Below, utilize Fig. 7～Figure 10, be described in detail in the paste coating process of corner part.
At first, on Fig. 9, an example of the graphics shape that expression is described.Under the situation with the dimetric paste figure shown in the high-speed coating depiction, (C part) located at the turning, and the relative moving speed of nozzle and substrate alters a great deal.Therefore, work top in device or spray nozzle part etc. are located, and the vibration of XYZ direction takes place.Under the bigger situation of the amplitude of this vibration, be difficult to depict the paste figure as desirable shape.Therefore, below, the paste figure that is used to obtain desirable shape, the paste coating process that suppresses the generation of vibration are described.Here, as starting point, describe the paste figure with dual circular portion.In addition, as shown in the figure, corner part is circular arc.
During the coating of corner part C in the paste figure is described, with respect to line part relative moving speed (relative moving speed of paste jet and substrate), one side is slowed down the relative velocity of the beginning portion of corner part, one side correspondingly will be coated with the pressure decompression therewith, revise because the increase of the coating weight that deceleration causes.Then, after passing through corner part with the speed of setting, one side is quickened simultaneously to increase and is coated with pressure, revises coating weight.End portion at the turning is controlled to the coating speed and the pressure of straight line coating with it.Utilize the displacement of linear movement pick-up instrumentation coating and the displacement of substrate holding mechanism, carry out the judgement that the turning begins portion and end portion.
Expression is used to realize the pneumatic circuit of above-mentioned control among Fig. 7.
In addition, initial in the structure of present embodiment, one side makes dispense tip move along the speed of X-direction with regulation, and one side utilizes the nozzle ejection paste to describe.When nozzle arrives the starting point of corner part, the translational speed of X-direction is decelerated to the first order.Meanwhile, decompression is pressed in the injection of paste.When the deceleration of the first order of X-direction finishes, carry out the second level slow down (stopping) in X-direction.Meanwhile, keep substrate holding mechanism 5 beginnings of substrate to quicken to the first order of Y direction.Paste emitted dose during this period is the emitted dose of pressure (pressure 2 of Fig. 8) when spraying that continues to set with when the first order of X-direction is slowed down.The acceleration mode, X-direction that becomes the first order when the acceleration of Y direction slows down when finishing (leaving the state of corner part), for the translational speed of the Y direction that makes substrate holding mechanism becomes normal speed (speed of line part), carries out the second level and quickens.At this moment, spray pressure and turn back to normal pressure (pressure 1 of Fig. 8).Like this,, switch the injection pressure of paste simultaneously with two-stage, can suppress the vibration of the variation generation of the speed that is accompanied by, and the emitted dose of paste can be kept constant by switch the relative moving speed of nozzle and substrate with two-stage.In addition, be that example is illustrated with first corner part above, but, except that the driving that makes XY reverses, make it to carry out identical action basically for second corner part.
Except that first pressure regulator 23a～23f, second pressure regulator 50a～50f of the pressure of setting corner part is set, and then, before high-speed coating control valve 24a～24f, be provided for switching the malleation high speed transfer valve 51a～51f of the pressure of first and second pressure regulator.
Below, utilize the action time figure of Fig. 8, their action is described.
Here Shuo Ming action is to describe the action of front when dimetric paste figure illustrated in fig. 9.Beginning is with the mode of first pressure regulator (pressure 1) output of the coating pressure of setting line pattern, setting pressure transfer valve 51a～51f.At this set condition, the coating of the paste figure that the beginning front illustrated.Describe tetragonal figure in order to be coated with counterclockwise, at first, beginning nozzle and substrate move to the relative position of X-direction.Then,, carry out moving of generating writing pattern, arrive the corner part C of beginning according to the data of setting.
Beginning portion at this turning, the double reduction that moves through of X-direction stops, and moving with two stages of Y direction quickened.At the deceleration of phase I, the relative velocity of corner part when quickening, be device take place vibration little, can be coated with the speed of describing desirable paste figure.As parallel processing, implement the switching of coating pressure.That is, carry out being coated with pressure to the switching controls that is coated with pressure as second of corner part coating pressure from first of line pattern.Whereby, will spray the pressure decompression of the paste in the paste storage cylinder (syringe), set the expulsion pressure of corner part for.Then, when corner part finished, the mobile of X-direction stopped, and the translational speed of Y direction is quickened, and reached the coating speed of line pattern.In addition, carry out the switching of pressure simultaneously, set the first coating pressure for as line part coating pressure.
Nozzle height hg when control begins to be coated with keeps its state constant.
By carrying out above-mentioned control, consistent with the variation of the axial aggregate velocity of XY as shown in figure 10, by adjusting coating pressure, the coating weight of the corner part of deceleration is increased, can adjust in the scope of allowed band δ.
Above-mentioned pneumatic circuit is provided with the pressure regulator of two kinds of malleation adjustment usefulness, between these two pressure regulator 23a～23f, 50a～50f and high-speed coating control valve 24a～24f, pressure transfer valve 51a～51f is set.Also can change this structure, as shown in figure 11, make the structure that is provided with high-speed coating control valve and the incorporate coating control valve of pressure transfer valve 60a～60f.By making this structure, can save the space.In addition, under the bigger situation of volume, as shown in figure 11, because decompression needs spended time, so the pipe arrangement that also air bleeding valve 70a～70f at a high speed can be arranged on syringe top is midway.Time diagram when Figure 12 represents to adopt the pneumatic circuit of structure of Figure 11.
In the present embodiment, be,, open air bleeding valve 70a～70f, can reduce pressure apace when when first pressure regulator switches to second pressure regulator with the difference of the time diagram of Fig. 8.
Carry out the description of paste figure in a manner described, but the terminal of the generating writing pattern whether the paste jet by judging nozzle 13na～13nf is determined by the aforesaid paste figure on the substrate, words if not terminal, returning the mensuration of the surface undulation of substrate once more handles, below, above-mentioned repeatedly coating action continues to handle, and reaches the terminal of the figure of describing up to the formation of paste figure.
When reaching the terminal of generating writing pattern, drive servo motor 10, nozzle 13na～13nf is risen, that finishes this paste figure describes operation (step 500).
Secondly, enter substrate and take out of treatment step (step 600), remove the maintenance of substrate, the substrate of having described paste is discharged to outside the device.When above-mentioned operation finishes, then judge whether the substrate (step 700) that also useful identical figure is described, if there is not substrate, then make device stop (step 800).If substrate is arranged, return substrate and load processing (step 300), repeat identical operation.
As mentioned above, in the present embodiment, during the coating of the corner part of the vibration that generation is big on carrying out device, in the relative moving speed that slows down substrate and nozzle, by switching coating pressure at high speed, can vibrate by restraining device, describe the suitable paste figure of coating weight.
In addition, in the above-described embodiments, keep the substrate holding mechanism of substrate only to move along Y direction, along X-direction, on real estate, be coated with paste by mobile dispense tip, still, do not use a plurality of head, in disposing respectively on each beam under the situation of a dispense tip, because on identical crossbeam, there is not dispense tip, so, also can be along XY direction moving substrate maintaining body side.But,, under situation about being coated with in large area on the substrate, be necessary and can go up the width of moving substrate or the distance at double of length in all directions (width of substrate or length direction) along XY direction moving substrate maintaining body.
Claims (8)
1. a paste coating machine comprises: store the paste storage cylinder of paste, with the nozzle of the ejection of the paste in the paste storage cylinder, workbench with the jet subtend of nozzle ground mounting substrate, the drive division that is used to make the relative position relation of nozzle and workbench to change is characterized in that
By jet under the situation that forms tetragonal paste figure on the real estate, be provided with speed control mechanism and two pressure regulating devices, described speed control mechanism is when corner part begins, make the relative velocity of nozzle and workbench divide two phase change, described two pressure regulating devices are used for the variation corresponding to speed, and the injection of switching paste by two-stage is pressed.
2. paste coating machine as claimed in claim 1, it is characterized in that, aforementioned paste storage cylinder and nozzle, be arranged on the trough girder that can move along X-direction, the maintenance workbench of mounting aforesaid base plate, the drive division that can move along Y direction is equipped with, aforementioned speed control mechanism only drives nozzle or workbench side at line part with the speed of stipulating, begin portion at the turning, make the relative velocity of nozzle and workbench decelerate to predefined speed, simultaneously, the control of also reducing pressure of aforementioned pressure regulating device will be sprayed and be pressed the predefined pressure that reduces pressure.
3. paste coating machine as claimed in claim 2 is characterized in that, at corner part, control by aforementioned speed control mechanism, nozzle and workbench are moved with the relative velocity slower than line part, and simultaneously, aforementioned pressure regulating device is pressed the injection of nozzle and is remained on low pressure and spray.
4. paste coating machine as claimed in claim 3 is characterized in that, in turning export department, aforementioned speed control mechanism quickens control, make the relative velocity of nozzle and workbench become the speed of line part, aforementioned pressure regulating device is controlled, and the injection that makes it to become line part is pressed.
5. a paste coating machine is equipped with: a plurality of dispense tips that are used for coating paste on substrate; Be provided with aforementioned a plurality of dispense tip and be furnished with two beams that make the driving mechanism that aforementioned dispense tip moves along X-direction respectively; Workbench, this workbench are furnished with and are used to adjust the interval of aforementioned two beams, make one of aforementioned beam along the driving mechanism that Y direction moves at least, separate the compartment of terrain and the setting of aforementioned dispense tip subtend of regulation, keep substrate, be furnished with and be used for the driving mechanism that moves along Y direction, it is characterized in that
This coating machine comprises control part, described control part carries out following control: describing the straight line of X-direction, and the corner part starting point described of the straight line that switches to Y direction, carry out the speed that aforementioned dispense tip moves along X-direction is decelerated to the first order deceleration processing of fixing speed, simultaneously, carry out the first order that aforementioned workbench accelerates to fixing speed being quickened to handle along the Y direction, end point at corner part, aforementioned dispense tip is slowed down along the mobile second level that stops of X-direction to be handled, simultaneously, carry out the speed that aforementioned workbench moves along Y direction is accelerated to the second level acceleration processing of translational velocity.
6. coating machine as claimed in claim 5, it is characterized in that, the branch two-stage is set controls the pressure regulating device that the injection of aforementioned dispense tip is pressed, aforementioned pressure regulating device, when aforementioned control part carries out first order acceleration and deceleration processing, carry out pressing the first order reduced pressure treatment that reduces pressure with spraying, carry out second level acceleration and deceleration processing with aforementioned control part and match, aforementioned pressure regulating device makes the second level pressure regulation processing of spraying the pressure of pressing when turning back to the straight line coating.
7. paste coating process, a plurality of nozzles are set separating on two beams of predetermined distance respectively, one side each nozzle ejection paste from aforementioned each beam, one side separates predetermined distance ground along X-direction and moves with identical speed, and by substrate is moved along Y direction, on substrate, describe a plurality of tetragonal paste figures simultaneously, it is characterized in that
During from the starting point of corner part to terminal part, make the relative velocity of aforementioned nozzle and aforesaid base plate divide two phase change, simultaneously, the injection that divides two-stage to switch paste is pressed.
8. paste coating process as claimed in claim 7, it is characterized in that, starting point at aforementioned corner part, the relative velocity of nozzle and substrate is slowed down, meanwhile, make the injection of paste press decompression, before arriving the turning terminal part, the relative velocity of nozzle and substrate is quickened, meanwhile, make the injection of paste press supercharging.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP030044/2004 | 2004-02-06 | ||
| JP2004030044A JP2005218971A (en) | 2004-02-06 | 2004-02-06 | Paste applicator and application method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1651153A CN1651153A (en) | 2005-08-10 |
| CN1330431C true CN1330431C (en) | 2007-08-08 |
Family
ID=34879193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100833261A Expired - Fee Related CN1330431C (en) | 2004-02-06 | 2004-09-29 | Paste coating machine and coating method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005218971A (en) |
| KR (1) | KR100665752B1 (en) |
| CN (1) | CN1330431C (en) |
| TW (1) | TWI284566B (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5142477B2 (en) * | 2006-03-30 | 2013-02-13 | 芝浦メカトロニクス株式会社 | Paste coating apparatus and paste coating method |
| KR100786542B1 (en) * | 2006-08-14 | 2007-12-21 | (주)에스티아이 | Apparatus for dispensing sealant of liquid crystal display device and method for dispensing sealant using the same |
| KR100807086B1 (en) * | 2006-08-16 | 2008-03-03 | (주)에스티아이 | Apparatus for patterning spacer of liquid crystal display device and method for patterning spacer using the same |
| JP2008238144A (en) * | 2007-03-29 | 2008-10-09 | Toray Eng Co Ltd | Apparatus and method for applying coating liquid |
| JP5037277B2 (en) * | 2007-09-18 | 2012-09-26 | パナソニック株式会社 | Viscous fluid application device |
| JP2009098272A (en) * | 2007-10-15 | 2009-05-07 | Shibaura Mechatronics Corp | Paste applicator |
| KR100960969B1 (en) * | 2007-12-20 | 2010-06-03 | 주식회사 탑 엔지니어링 | Method of dispensing paste in paste dispenser |
| JP5286775B2 (en) * | 2007-12-21 | 2013-09-11 | 株式会社日立プラントテクノロジー | Paste applicator |
| KR100860880B1 (en) * | 2008-01-28 | 2008-09-29 | 주식회사 탑 엔지니어링 | Method of dispensing paste in paste dispenser and pneumatic apparatus used therefor |
| TWI381886B (en) * | 2009-01-21 | 2013-01-11 | All Ring Tech Co Ltd | Rectifying variations of glue amount in glue injection machine |
| KR101661289B1 (en) * | 2009-12-17 | 2016-09-30 | 에이피시스템 주식회사 | Apparatus for despensing paste and method for ooperating the same |
| KR101245760B1 (en) * | 2010-12-10 | 2013-03-25 | 삼성중공업 주식회사 | Glue coater for manufacturing blade of wind power generator |
| WO2014010861A1 (en) * | 2012-07-12 | 2014-01-16 | 주식회사 지엔테크 | Device for coating adhesive |
| KR20140022620A (en) * | 2012-08-14 | 2014-02-25 | 주식회사 지엔테크 | Adhesive coating apparatus |
| KR102015793B1 (en) | 2012-11-13 | 2019-08-29 | 엘지디스플레이 주식회사 | Display panel, bonding agent dispensing apparatus and bonding agent dispensing method |
| BR112016001416A2 (en) | 2013-07-23 | 2017-08-29 | Myriant Corp | ESCHERICHIA COLI BACTERIA AND SUCCINIC ACID PRODUCTION METHOD USING FACILITATED DIFFUSION FOR SUGAR IMPORT |
| EP3825013A1 (en) | 2013-12-06 | 2021-05-26 | Musashi Engineering, Inc. | Liquid material application device |
| US9707584B2 (en) | 2014-07-09 | 2017-07-18 | Nordson Corporation | Dual applicator fluid dispensing methods and systems |
| KR102256062B1 (en) * | 2019-08-07 | 2021-05-24 | 세메스 주식회사 | Inkjet apparatus for applying treatment liquid |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5415693A (en) * | 1992-10-01 | 1995-05-16 | Hitachi Techno Engineering Co., Ltd. | Paste applicator |
| JP2000271521A (en) * | 1999-03-24 | 2000-10-03 | Matsushita Electric Ind Co Ltd | Paste coating apparatus and paste coating method |
| JP2002079160A (en) * | 2000-09-04 | 2002-03-19 | Hitachi Industries Co Ltd | Paste coater |
| JP2002346452A (en) * | 2001-05-25 | 2002-12-03 | Hitachi Industries Co Ltd | Paste applicator |
| JP2003001170A (en) * | 2001-06-26 | 2003-01-07 | Hitachi Industries Co Ltd | Device for coating paste |
| JP2003053238A (en) * | 2001-08-21 | 2003-02-25 | Hitachi Industries Co Ltd | Paste coating machine and paste coating method |
| CN1426852A (en) * | 2001-12-19 | 2003-07-02 | 松下电器产业株式会社 | Graph forming method and apparatus for display panel |
| JP2003266005A (en) * | 2002-03-14 | 2003-09-24 | Hitachi Industries Co Ltd | Method and apparatus for applying paste |
-
2004
- 2004-02-06 JP JP2004030044A patent/JP2005218971A/en not_active Withdrawn
- 2004-09-01 TW TW093126365A patent/TWI284566B/en not_active IP Right Cessation
- 2004-09-24 KR KR1020040077149A patent/KR100665752B1/en active IP Right Grant
- 2004-09-29 CN CNB2004100833261A patent/CN1330431C/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5415693A (en) * | 1992-10-01 | 1995-05-16 | Hitachi Techno Engineering Co., Ltd. | Paste applicator |
| JP2000271521A (en) * | 1999-03-24 | 2000-10-03 | Matsushita Electric Ind Co Ltd | Paste coating apparatus and paste coating method |
| JP2002079160A (en) * | 2000-09-04 | 2002-03-19 | Hitachi Industries Co Ltd | Paste coater |
| JP2002346452A (en) * | 2001-05-25 | 2002-12-03 | Hitachi Industries Co Ltd | Paste applicator |
| JP2003001170A (en) * | 2001-06-26 | 2003-01-07 | Hitachi Industries Co Ltd | Device for coating paste |
| JP2003053238A (en) * | 2001-08-21 | 2003-02-25 | Hitachi Industries Co Ltd | Paste coating machine and paste coating method |
| CN1426852A (en) * | 2001-12-19 | 2003-07-02 | 松下电器产业株式会社 | Graph forming method and apparatus for display panel |
| JP2003266005A (en) * | 2002-03-14 | 2003-09-24 | Hitachi Industries Co Ltd | Method and apparatus for applying paste |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20050079617A (en) | 2005-08-10 |
| KR100665752B1 (en) | 2007-01-09 |
| TW200526324A (en) | 2005-08-16 |
| JP2005218971A (en) | 2005-08-18 |
| TWI284566B (en) | 2007-08-01 |
| CN1651153A (en) | 2005-08-10 |
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