CN1595063A - Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor - Google Patents
Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor Download PDFInfo
- Publication number
- CN1595063A CN1595063A CN 200410041106 CN200410041106A CN1595063A CN 1595063 A CN1595063 A CN 1595063A CN 200410041106 CN200410041106 CN 200410041106 CN 200410041106 A CN200410041106 A CN 200410041106A CN 1595063 A CN1595063 A CN 1595063A
- Authority
- CN
- China
- Prior art keywords
- amplifier
- phase
- capacitance electrode
- sensitive
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
It is a harmonic wave extraction method and its apparatus of capacitor micro gyro single-path sensitive signals. The basic wave signals are output to the micro gyro capacitor electrode after magnification and let its positive and negative direct current separately bias located and connected to the ground. The sensitive capacitor electrode is connected to the ground and separately extracts sensitive signals from the electrode and differential amplify the signals by the amplifier after the anti-phase amplifier. The output signals can be turned into micro gyro sensitive signals after phase-sensitive rectifier and low magnification. The basic wave signals from the said basic signal generator serves as the control signals of the phase reference end of the phase-sensitive rectifier after double frequency and phase deviation and its apparatus comprises the public capacitor electrode with micro gyro, drive capacitor electrode and sensitive capacitor electrode.
Description
Technical field
The present invention relates to sensing technology, relate in particular to a kind of single channel harmonic wave extracting method and extraction element of condenser type micro-gyroscope responsive signal.
Background technology
The resonance gyro that declines utilizes alternation electrostatic force between capacitor plate, makes oscillator produce mechanical vibration, the Corioli's force that utilizes rotational angular velocity to produce, make oscillator with the direction of driving direction quadrature on vibrate.This orthogonal vibration detects by other one group of sensing capacitance.Traditional signal condition method is to add direct current biasing on public electrode G, adds the sinusoidal drive voltage that differs 180 ° on C, the D electrode, detects capacitance variations on A, B.Because direct capacitance is very little, about about 2pf, the capacitance change that the Corioli's force effect causes is then littler, is approximately 1%.A, B need be connected with the charge amplifier that operational amplifier constituted by high input impedance.Drive signal is identical with the sensitive signal frequency.Because the coupling of the stray capacitance between the driving stage and the responsive utmost point is in same magnitude with respect to driving electric capacity or sensitization capacitance, so adopt this classic method to have serious signal coupled problem.Be coupled to big hundreds of times of the signal that the responsive drive signal that extremely goes up produces than Ke Shi power.Isolate driving and responsive two frequency orthogonal signal together with very difficult the stablizing accurately of phase sensitive detection method.Also have manyly to be added on the sensitization capacitance as carrier wave with high-frequency signal, attempt solves the practice of former homogenous frequency signal coupling problems, and effect is unsatisfactory, has also increased the complicacy of circuit in addition.
Summary of the invention
The invention provides and a kind ofly can reduce low interference capacitors that drive signal disturbs sensitive signal decline the single channel harmonic wave extracting method and the extraction element of gyro sensitive signal.
The present invention adopts following technical scheme:
Described method is:
The decline harmonic wave extracting method of gyro single channel sensitive signal of a kind of electric capacity that relates to sensing technology, it is characterized in that the fundamental signal that sends in fundamental signal source 2 is transported to little gyro public capacitance electrode G after amplifier 7 amplifies and with the driving capacitance electrode C of little gyro, D setovers respectively with positive and negative direct current and exchanges ground connection, the sensitization capacitance electrode A, B connects virtual earth, from the sensitization capacitance electrode A, extract sensitive signal on the B respectively and make it through inverting amplifier 3, after 4 amplifications, carry out differential amplification by differential amplifier 5, after the output signal after the differential amplification is amplified through phase depending on rectification and low pass, promptly get micro-gyroscope responsive signal, the above-mentioned fundamental signal that sends by fundamental signal source 2 after two frequencys multiplication and phase shift processing as the control signal of the phase reference end of phase depending on rectification.
Described device is:
A kind of extraction element that is used to implement said method, by having little gyro public capacitance electrode G, drive capacitance electrode C, D and sensitization capacitance electrode A, B forms, it is characterized in that driving capacitance electrode C, D connects positive and negative dc offset voltage respectively, in the sensitization capacitance electrode A, be connected with inverting amplifier 3 on the B respectively, 4 and respectively with inverting amplifier 3,4 input end connects, at inverting amplifier 3, be connected with differential amplifier 5 and inverting amplifier 3 on 4 output terminals, 4 output terminals are connected with two input ends of differential amplifier 5 respectively, on the output terminal of differential amplifier 5, be connected with phase-sensitive rectifier 9 and be connected with the input end of phase-sensitive rectifier 9, on little gyro public capacitance electrode G, be connected with amplifier 7 and be connected with the output terminal of amplifier 7, be connected with fundamental signal source 2 and be connected with the output terminal in fundamental signal source 2 on amplifier 7, the output terminal in fundamental signal source 2 is connected with the phase reference end of phase-sensitive rectifier 9 with phase shifter 14 backs through frequency multiplier 15 successively.
Compared with prior art, the present invention has following advantage:
The fundamental signal that the present invention sends the fundamental signal source is transported to little gyro public capacitance electrode after amplifier carries out level translation.The driving capacitance electrode of little gyro is setovered respectively with positive negative dc voltage, makes the mechanical vibration frequency identical with the fundamental signal source frequency.The sensitization capacitance electrode is in zero offset, makes to have only Corioli's force to produce mechanical vibration at sensitive direction in theory.Because the mechanical vibration of little gyro public capacitance electrode Corioli's force sensitive direction, changed the electric capacity of itself and sensitization capacitance electrode.Driving voltage produces second harmonic current with the mechanical vibration that drive capacitance electrode in sensitization capacitance.Utilization of the present invention utilizes differential method to produce from sensitization capacitance to extract with the driving direction quadrature the second harmonic current, i.e. the second harmonic electric signal that mechanical vibration amplitude on the Corioli's force sensitive direction is relevant with phase place (being sensitive signal).The present invention utilizes differential method that fundamental signal is disappeared mutually, and second harmonic signal is long mutually.When little gyro mechanical parameter (resonance rigidity, quality, damping also are resonance frequency and first phase) when being stable, the stable driving voltage of amplitude-frequency that is added on the public capacitance electrode can be kept stable mechanical vibration, realizes that promptly stable open loop drives.The present invention with circuit hardware or dsp software produce one with the phase locked second harmonic signal of driving voltage as phase reference signal, be added to the control signal of phase reference end of phase depending on rectification and the sensitive signal same-phase that Corioli's force is produced.Sensitive signal and reference signal are carried out phase demodulation and are obtained analog level signal or digital signal with velocity of rotation and directional correlation.
The present invention eliminated electric capacity basically and declined in the gyro drive signal to the interference and coupling of sensitive signal, solved the electric capacity amplification of faint sensitive signal that declines in the gyro and picked up problem, reduced the requirement to the micromachined precision.
1, the present invention is added in first-harmonic (driving) signal on the public pole, and other each utmost point A, B, C, D exchange ground connection or virtual earth, and the spuious coupling capacitance influence between A, B, C, the D will be zero in theory like this.Driving frequency is identical with the mechanical resonant frequency of driving direction.Here the special technology of the binomial of Cai Yonging:
A) driving stage C, D setover respectively with positive and negative direct current, exchange ground connection by big electric capacity simultaneously.C, D end AC signal can't be coupled to A, B end by short circuit.
B) responsive end does not add direct current biasing, and driving force is cancelled out each other, and can not produce the fundamental vibration that drive signal causes at sensitive direction.If remaining structural manufacturing process defective still exists, remaining out-of-balance force appears, so as long as the mechanical resonant frequency of sensitive direction is different from two frequencys multiplication of drive signal, the remaining mechanical vibration of two frequencys multiplication of the caused sensitive direction of drive signal will be very faint, and its amplitude causes the amplitude of vibration much smaller than Ke Shi power.If the incomplete quadrature of the power of driving direction and sensitive direction, (when rotating speed is zero) also can occur and the faint mechanical vibration of driving direction with frequency at sensitive direction when then static, claims first-harmonic remaining coupled vibrations.The remaining coupled vibrations of first-harmonic is proportional to the mechanical vibration amplitude of driving direction, and this phase place and driving direction are in the same way or oppositely.Remaining coupled vibrations of first-harmonic and Ke Shi power cause the mechanical vibration stack.If the mechanical vibration of driving direction are in linear zone, then this stack also is linear.
2, the responsive electrode capacitance of the mechanical vibration on the Corioli's force sensitive direction changes.This variation makes its electric current that passes through be modulated by two frequencys multiplication.Electric current in the electric capacity contains first-harmonic composition and two frequency multiplication harmonic componentss.Because the variation that the mechanical vibration of two sensitization capacitance A, B are introduced is differential, therefore in two sensitization capacitances first-harmonic composition of electric current each other in the same way, the second harmonic phase place is opposite each other.There are two kinds of compositions in second harmonic among sensitization capacitance A, the B: one, and the variation composition that Ke Shi power causes is called the rotation sensitive second harmonic; Its two, the fixed value that the remaining coupled vibrations of first-harmonic causes is called horizontal interference.Because the micromachined technological problems makes the mechanical vibration of driving direction be coupled to sensitive direction slightly, has produced horizontal interference second harmonic, the vibration phase that its phase place and Corioli's force are produced differs 90 °, i.e. quadrature.Experiment also shows the full scale value of horizontal interference second harmonic much smaller than the rotation sensitive second harmonic, and is fixed value.Here adopting following technology to eliminate first-harmonic disturbs:
C) utilize differential amplifier, make the first-harmonic composition offset (subtracting each other), second harmonic enhancement (addition).When the physical construction of little gyro because when also having imbalance, there are multiple composition in not strict symmetry of technological problems and differential amplifier in the signal after differential amplification:
U
d=rotation sensitive second harmonic+rotation sensitive direct current+laterally disturb second harmonic+remaining first-harmonic
Adjust the magnification ratio of differential amplifier two importations, can farthest eliminate remaining first-harmonic composition.
D) utilize bandpass filter, eliminate remaining first-harmonic composition, rotation sensitive direct current composition, and second harmonic amplified.
3, second harmonic is carried out phase depending on rectification, eliminate remaining frozen composition with the sensitive signal quadrature.Output voltage amplitude after the phase depending on rectification is proportional to angular velocity, symbol and angular velocity direction correspondence.
If 4 when laterally disturbing second harmonic big, when static state, when promptly rotational angular velocity is zero, detect the horizontal interference second harmonic current in the sensitization capacitance, also can extrapolate the state of actual mechanical vibration.If think rigidity, the quality, constant when damping is of mechanical vibration, can realize open loop stabilization control according to Static Detection so to mechanical vibration.
5, because linear analogue circuit (operational amplifier) consumption is few,, be easy to realize the sensor microminiaturization, intellectuality if combine with the dsp chip of miniaturization.For three shared DSP of gyro, this advantage is more outstanding.
Description of drawings
Fig. 1 is a structured flowchart of the present invention, and wherein, 8 is low-pass amplifier.
Fig. 2 is an embodiment of the invention circuit diagram, and wherein, 8 is low-pass amplifier.
Embodiment
1 one kinds of single channel harmonic wave extracting method that relate to the condenser type micro-gyroscope responsive signal of sensing technology of embodiment, the fundamental signal that send in fundamental signal source 2 is transported to little gyro public capacitance electrode G and with the driving capacitance electrode C of little gyro after amplifier 7 amplifies, D setovers respectively with positive and negative direct current and exchanges ground connection, the sensitization capacitance electrode A, B connects virtual earth, from the sensitization capacitance electrode A, extract sensitive signal on the B respectively and make it through inverting amplifier 3, after 4 amplifications, carry out differential amplification by differential amplifier 5, after the output signal after the differential amplification is through phase depending on rectification and low pass amplification, promptly get micro-gyroscope responsive signal, the above-mentioned fundamental signal that sends by fundamental signal source 2 after two frequencys multiplication and phase shift are handled as the control signal of the phase reference end of phase depending on rectification, in the present embodiment, the output signal of differential amplifier 5 is transported to digital signal processor DSP after being amplified by second harmonic bandpass amplifier 6 again; Fundamental signal source 2 is produced by digital signal processor DSP, phase depending on rectification and low pass are amplified the phase-sensitive rectifier and the low-pass amplifier that are made of digital signal processor DSP inside and are carried out, above-mentioned amplifier 3,4,5,6 and 7 can to adopt model be the operational amplifier of LF155, or other many amplifiers combined chips are realized, the signal s (t) that enters the phase-sensitive rectifier signal input part comprises useful sensitive signal s1 (t) (can use Asin (2 ω t) expression) and the horizontal undesired signal s2 (t) (can use Bcos (2 ω t) expression) that Corioli's force produces, that is: S (t)=s1 (t)+s2 (t), phase-sensitive rectifier is finished following calculation function:
Wherein T is complete cycle, with adding up and replace integral operation, contains the multiplication of finishing this function hardware unit that adds up with dsp chip inside and realizes in the digital signal processing.Sin in the integration type (2 ω t) is by calculating.S (t) is an actual sample value; Low-pass amplifier is finished the adjustment function of average calculating operation and enlargement factor.In DSP, realize by numerical operation.
Embodiment is used to obtain the harmonic wave extraction element of little gyro single channel sensitive signal for 2 one kinds, by having little gyro public capacitance electrode G, drive capacitance electrode C, D and sensitization capacitance electrode A, B forms, the sensitization capacitance electrode A, B exchanges virtual earth, drive capacitance electrode C, D exchanges ground connection through power supply Beside road electric capacity, drive capacitance electrode C, D connects positive and negative dc offset voltage respectively, in the sensitization capacitance electrode A, be connected with inverting amplifier 3 on the B respectively, 4 and respectively with inverting amplifier 3,4 input end connects, at inverting amplifier 3, be connected with differential amplifier 5 and inverting amplifier 3 on 4 output terminals, 4 output terminals are connected with two input ends of differential amplifier 5 respectively, on the output terminal of differential amplifier 5, be connected with second harmonic bandpass amplifier 6, be connected with phase-sensitive rectifier 9 on the output terminal of second harmonic bandpass amplifier 6 and be connected with the input end of phase-sensitive rectifier 9, on little gyro public capacitance electrode G, be connected with amplifier 7 and be connected with the output terminal of amplifier 7, on amplifier 7, be connected with fundamental signal source 2 and be connected with the output terminal in fundamental signal source 2, the output terminal in fundamental signal source 2 is connected with the phase reference end of phase-sensitive rectifier 9 with phase shifter 14 backs through frequency multiplier 15 successively, it is the operational amplifier of LF155 that above-mentioned inverting amplifier 3 or 4 can adopt model, inverting amplifier 3 or another input end grounding of 4, above-mentioned differential amplifier 5 can adopt model to be ... ..., amplifier 7 is operational amplifier and the resistance R of LF155 by model
73Form an input end grounding of operational amplifier, resistance R
73Cross-over connection is connected with the resistance R of mutual series connection on another input end of operational amplifier between another input end and output terminal of operational amplifier
71And capacitor C
71And resistance R
71The other end be the input end of amplifier 7, capacitor C
711The other end be connected with another input end of operational amplifier, in the mutual resistance R of series connection
71And capacitor C
71Tie point on be connected with resistance R
72And capacitor C
72, resistance R
72Other end ground connection, capacitor C
72The other end be connected with the output terminal of operational amplifier, fundamental signal source 2, phase-sensitive rectifier 9, frequency multiplier 15 and phase shifter 14 can adopt one of following two kinds of concrete schemes, concrete scheme one is: phase-sensitive rectifier 9 is produced by digital signal processor DSP, the output terminal of differential amplifier 5 is connected with the A/D input end of digital signal processor DSP, fundamental signal source 2, frequency multiplier 15 and phase shifter 14 are produced by digital signal processor DSP, fundamental signal is transported to the input end of amplifier 7 from the D/A output terminal of digital signal processor DSP, the output terminal of differential amplifier 5 is connected with the A/D input end of digital signal processor DSP through second harmonic bandpass amplifier 6, above-mentioned fundamental signal source 2 is to be realized by the sinusoidal signal sequence that digital signal processor DSP produces, frequency multiplier 15 and phase shifter 14 are two frequencys multiplication of being produced by digital signal processor DSP and realize that through the sinusoidal signal sequence of phase shift it is the operational amplifier of LF155 that second harmonic bandpass amplifier 6 can adopt model.
Claims (7)
1, a kind of single channel harmonic wave extracting method that relates to the condenser type micro-gyroscope responsive signal of sensing technology, it is characterized in that the fundamental signal that sends in fundamental signal source (2) is transported to little gyro public capacitance electrode (G) after amplifier (7) amplifies and the driving capacitance electrode (C and D) of little gyro setovered respectively with positive and negative direct current and exchange ground connection, sensitization capacitance electrode (A and B) connects virtual earth, from sensitization capacitance electrode (A and B), extract sensitive signal respectively and make it after inverting amplifier (3 and 4) amplifies, carry out differential amplification by differential amplifier (5), after the output signal after the differential amplification is amplified through phase depending on rectification and low pass, promptly get micro-gyroscope responsive signal, the above-mentioned fundamental signal that sends by fundamental signal source (2) after two frequencys multiplication and phase shift processing as the control signal of the phase reference end of phase depending on rectification.
2, the single channel harmonic wave extracting method of condenser type micro-gyroscope responsive signal according to claim 1, it is characterized in that fundamental signal source (2) is produced by digital signal processor (DSP), phase depending on rectification and low pass are amplified by inner phase-sensitive rectifier and the low-pass amplifier that constitutes of digital signal processor (DSP) and are undertaken.
3, the single channel harmonic wave extracting method of condenser type micro-gyroscope responsive signal according to claim 1, the output signal that it is characterized in that differential amplifier (5) are transported to digital signal processor (DSP) after being amplified by second harmonic bandpass amplifier (6) again.
4, a kind of extraction element that is used to implement the described method of claim 1, by having little gyro public capacitance electrode (G), driving capacitance electrode (C and D) and sensitization capacitance electrode (A and B) forms, it is characterized in that driving capacitance electrode (C and D) and be connected positive and negative dc offset voltage respectively, on sensitization capacitance electrode (A and B), be connected with inverting amplifier (3 and 4) respectively and be connected with the input end of inverting amplifier (3 and 4) respectively, on inverting amplifier (3 and 4) output terminal, be connected with differential amplifier (5) and inverting amplifier (3 and 4) output terminal is connected with two input ends of differential amplifier (5) respectively, on the output terminal of differential amplifier (5), be connected with phase-sensitive rectifier (9) and be connected with the input end of phase-sensitive rectifier (9), on little gyro public capacitance electrode (G), be connected with amplifier (7) and be connected with the output terminal of amplifier (7), be connected with fundamental signal source (2) and be connected with the output terminal of fundamental signal source (2) on amplifier (7), the output terminal of fundamental signal source (2) passes through frequency multiplier (15) successively and is connected with the phase reference end of phase-sensitive rectifier (9) with phase shifter (14) back.
5, extraction element according to claim 4, it is characterized in that phase-sensitive rectifier (9) is produced by digital signal processor (DSP), the output terminal of differential amplifier (5) is connected with the A/D input end of digital signal processor (DSP), fundamental signal source (2), frequency multiplier (15) and phase shifter (14) are produced by digital signal processor (DSP), and fundamental signal is transported to the input end of amplifier (7) from the D/A output terminal of digital signal processor (DSP).
6, extraction element according to claim 5 is characterized in that the output terminal of differential amplifier (5) is connected through the A/D input end of second harmonic bandpass amplifier (6) with digital signal processor (DSP).
7, extraction element according to claim 4 is characterized in that driving capacitance electrode (C and D) and exchanges ground connection through power supply Beside road electric capacity, and sensitization capacitance electrode (A and B) exchanges virtual earth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100411062A CN100368773C (en) | 2004-06-29 | 2004-06-29 | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100411062A CN100368773C (en) | 2004-06-29 | 2004-06-29 | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1595063A true CN1595063A (en) | 2005-03-16 |
| CN100368773C CN100368773C (en) | 2008-02-13 |
Family
ID=34664897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100411062A Expired - Fee Related CN100368773C (en) | 2004-06-29 | 2004-06-29 | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100368773C (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103363969A (en) * | 2012-04-05 | 2013-10-23 | 快捷半导体(苏州)有限公司 | MEMS device quadrature shift cancellation |
| US9156673B2 (en) | 2010-09-18 | 2015-10-13 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
| US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
| US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
| US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
| US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| CN112539744A (en) * | 2019-09-20 | 2021-03-23 | 中国科学院微电子研究所 | Sensitive signal reading circuit of silicon micro-gyroscope |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000088577A (en) * | 1998-09-08 | 2000-03-31 | Japan Aviation Electronics Industry Ltd | Detection circuit of capacity detection type oscillation gyro |
| JP4075152B2 (en) * | 1998-09-16 | 2008-04-16 | 松下電器産業株式会社 | Angular velocity sensor |
| JP2002098712A (en) * | 2000-09-21 | 2002-04-05 | Denso Corp | Capacitive type physical quantity detection device |
| JP2002162231A (en) * | 2001-09-28 | 2002-06-07 | Alps Electric Co Ltd | Vibration type gyroscope |
| CN2715110Y (en) * | 2004-06-29 | 2005-08-03 | 东南大学 | Single channel harmonic extractor for capacitor type micro-gyro sensitive signal |
-
2004
- 2004-06-29 CN CNB2004100411062A patent/CN100368773C/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9856132B2 (en) | 2010-09-18 | 2018-01-02 | Fairchild Semiconductor Corporation | Sealed packaging for microelectromechanical systems |
| US9156673B2 (en) | 2010-09-18 | 2015-10-13 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
| US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
| US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
| US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
| US9455354B2 (en) | 2010-09-18 | 2016-09-27 | Fairchild Semiconductor Corporation | Micromachined 3-axis accelerometer with a single proof-mass |
| US10050155B2 (en) | 2010-09-18 | 2018-08-14 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
| US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
| US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
| CN103363969A (en) * | 2012-04-05 | 2013-10-23 | 快捷半导体(苏州)有限公司 | MEMS device quadrature shift cancellation |
| US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
| US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
| US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
| US9802814B2 (en) | 2012-09-12 | 2017-10-31 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
| US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
| CN112539744A (en) * | 2019-09-20 | 2021-03-23 | 中国科学院微电子研究所 | Sensitive signal reading circuit of silicon micro-gyroscope |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100368773C (en) | 2008-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1595062A (en) | Method for extracting two-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor | |
| CN1595063A (en) | Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor | |
| US9915532B2 (en) | Method and apparatus for self-calibration of gyroscopes | |
| CN108253952B (en) | Zero-bias self-calibration MEMS gyroscope and zero-bias self-calibration method thereof | |
| EP0704674B1 (en) | Micromachined rate sensor comb drive device and method | |
| CN101589292B (en) | Arrangement for measuring a rate of rotation using a vibration sensor | |
| CN102353366B (en) | Closed loop detection apparatus for silicon micromachined/dynamically tuned hybrid gyroscope | |
| KR100985315B1 (en) | Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor | |
| US6674294B2 (en) | Drive feedthrough nulling system | |
| WO2004038330A2 (en) | Mems gyroscope with parametric gain | |
| US5747961A (en) | Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors | |
| CN202119447U (en) | Closed loop detection device for silicon micromachined and dynamically-turned mixed gyroscope | |
| US6467346B1 (en) | Coriolis sensor interface | |
| US6230562B1 (en) | Detection circuit for vibratory gyro and vibratory gyro device using the same | |
| JP4518461B2 (en) | Method for adjusting phase lock loop of electronic evaluation apparatus and electronic evaluation apparatus | |
| CN107830851A (en) | The digital driving control integrated circuit of angular-rate sensor | |
| CN2715110Y (en) | Single channel harmonic extractor for capacitor type micro-gyro sensitive signal | |
| CN113607151A (en) | Quartz gyro error suppression method based on time division driving and orthogonal electric cancellation | |
| CN109425366A (en) | A kind of analog signal processing circuit for active optics micro-displacement sensor | |
| CN2711694Y (en) | Double-way harmonic wave extractor for capacitance type micro gyro sensitive signal | |
| Li et al. | Velocity feedback control method of low-frequency electromagnetic vibration exciter based on Kalman filter estimation | |
| Wang et al. | Feedthrough cancellation for MEMS gyroscope using the calculation method via digital circuit | |
| CN116592918A (en) | Charge amplifier-based resonant gyroscope feed-through error compensation device and method | |
| JP3261650B2 (en) | Detection circuit for angular velocity sensor | |
| Wang et al. | Electrical-Feed-Through Elimination in Micro-Hemisphere Resonator Measurement Based on Mixed-Frequency-Excitation of Different Harmonic Signals |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080213 Termination date: 20100629 |