CN1610908A - Agent-based control architecture - Google Patents
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
A manufacturing system (100, 300) includes a process tool (115), a controller agent (350), and a first processing agent. The process tool (115) is configured to process a workpiece (130) in accordance with an operating recipe. The controller agent (350) is configured to determine a control action associated with the processing of the workpiece (130) in the process tool (115). The first processing agent (320, 340) is associated with at least one of the process tool (115) and the workpiece (130) and configured to interface with the controller agent (350), receive the control action, and configure the operating recipe based on the control action. A method for controlling a process tool (115) configured to process a workpiece (130) in accordance with an operating is instantiated. A controller agent (350) configured to determine a control action associated with the processing of the workpiece (130) in the process tool (115) is instantiated. The first processing agent (320, 340) is interfaced with the controller agent (350) to receive the control action. The first processing agent (320, 340) is interfaced with the process tool (115) to configure the operating recipe based on the control action.
Description
Technical field
The main relevant semiconductor device of the present invention is made the field, especially about a kind of automated manufacturing environment that utilizes independence, active and software agent (software agent) to handle the control technology method (recipe) of wafer.
Background technology
There is general driving force to improve quality, reliability and output capacity in the semi-conductor industry such as the integrated circuit (IC) apparatus of microprocessor, memory storage etc. always.The client has more strengthened this driving force for the computing machine of the higher quality that can work more reliably and the demand of electronic installation.These demands have made has had the improvement that continues such as the manufacturing of the semiconductor device of transistor etc. and the manufacturing that is provided with this transistorized integrated circuit (IC) apparatus.In addition, if the defective can reduce each ingredient of typical transistors and make the time, also can reduce each transistorized whole cost and be provided with the cost of this transistorized integrated circuit (IC) apparatus.
In general, utilize various process tools, and a collection of wafer is carried out one group of processing step comprising photolithography stepper, etch tool, deposition tool, abrasive tool, rapid thermal treatment instrument, ion implant tool etc.In several years, the technology that constitutes the basis of semiconductor process tool has obtained more attention, and has caused progressing greatly of this process tool in the past.Yet although existing these progress in this field, many these process tools that can buy on market at present still have some shortcoming.More specifically, the advanced processes data monitoring ability of the frequent shortage of this instrument such as the ability that historic supplemental characteristic is provided with user-friendly form etc. also lacks logout, present technological parameter and real-time graph demonstration and long-range (that is to say that this locality reaches all over the world) of inferior technological parameter monitor by the gross.These shortcomings may cause the control of non-the best to the key technological parameter such as output capacity, correctness, stability and repeatability, technological temperature and machine tool parameter etc.Because the otherness of otherness, the otherness between each batch and each Tool Room in batch may cause the deviation of product quality and usefulness, so appeared above-mentioned variability; Otherwise the desirable supervision and the diagnostic system that are used for this type of instrument will provide a kind of supervision this variational device, and a kind of optimization device of the control to key parameter is provided.
A kind of technology of improving the semiconductor process line operation comprises that use spreads all over the operation that full factory control systems is automatically controlled various process tools.These fabrication tools and the manufacturing framework or the network communication that constitute by some technical modules.Each fabrication tool is typically connected to equipment interface.This equipment interface is connected to the machine interface that is used for assisting the communication between this fabrication tool and this manufacturing framework.This machine interface may be advanced processes control (Advanced ProcessControl usually; Abbreviation APC) part in the system.This APC system activates control descriptive language program (control script) according to modeling, and this control descriptive language program can be to be used for the software program of the required data of automatic pick-up technology execution.Semiconductor device often is progressively to pass through a plurality of fabrication tools, so that carry out a plurality of technologies, and has produced the data relevant with the quality of treated semiconductor device.
During technology, possible generation can have influence on the variety of event of the performance of manufacturing device.That is to say that the variation in the processing step will cause the variation of device performance.All might have influence on the final performance of this device such as the factor of feature critical dimensions (critical dimensions is called for short CD), doping level (doping levels), contact resistance and particle contamination etc.Come various tool in the CONTROL PROCESS line according to each performance model, so that reduce the variation of technology.General in check instrument comprises photolithography stepper, abrasive tool, etch tool and deposition tool.Before will handling and (or) metric data after handling is fed to the process controller of these instruments.These process controllers calculate operative technique data parameters such as process time etc. according to this performance model and this metric, so that the result is as far as possible near desired value after attempting making the processing that is produced.When reduce changing by this way, can obtain higher output capacity, lower cost and higher effects such as device performance, all these effects all are equal to higher yield rate.
Such as the problem that occurs configuration control and efficient in the distributed arithmetic environment of the APC system that spreads all over full factory through regular meeting.Usually there are many software developers to write the CONTROL PROCESS code, so that these process controllers of construction.A certain specific developer may develop the controller of a certain type widely.Each developer has a distinctive program editor Format usually, and relies on some routines of himself writing usually.For example, each developer has one group of routine, as with database or this APC framework in other entity interface of linking up, and be used for carrying out various mathematical functions and basic utility function.
A problem that is associated with this configuration is to have only between each technology controlling and process descriptive language program consistance seldom.A large amount of custom scripts has also caused configuration control problem and efficiency.Each developer may be at one of different developer's made dissimilar process controller, and will consume the program code of before developing duplicating considerable time.It is work more consuming time that the program code of nonstandardized technique is debugged, and has further reduced efficient.
Target of the present invention is to overcome or alleviate at least the effect of above-mentioned one or more problems.
Summary of the invention
One aspect of the present invention is a kind of manufacturing system, and this manufacturing system comprises process tool, controller media, reaches the first processing media.This process tool is configured to handle workpiece according to the operative technique method.This controller media is configured to determine the control action that is associated with the processing of this workpiece in this process tool.This first technology media system is associated with in this process tool and this workpiece at least one, and this first processing media is configured to link to each other with this controller media, receives this control action, and disposes this operative technique method according to this control action.
Another aspect of the present invention is a kind of method of controlling the process tool that is configured to handle workpiece according to the operative technique method.What will be associated with in this process tool and this workpiece at least one first handles media hypostazation.Controller media hypostazation with the control action that is configured to determine be associated with the processing of this workpiece in this process tool.This first processing media links to each other with this controller media, so that receive this control action.This first processing media links to each other with this process tool, so that dispose this operative technique method according to this control action.
Description of drawings
With reference to explanation hereinafter, and cooperate each accompanying drawing, can understand the present invention, in these accompanying drawings, similar assembly represented in identical code name, and these accompanying drawings have:
Fig. 1 is conceptive illustrate according to the present invention and the part of the specific embodiment of first production procedure of construction and operation;
Fig. 2 is a concept nature part calcspar of each selected portion of the hardware of computer installation shown in Figure 1 and software architecture; And
Fig. 3 is at the conceptual illustration part calcspar that in second production procedure of construction and operation media is turned to specially scheduler program media, processing media and controller media according to the present invention.
Though the present invention is easy to make various modifications and alternative form, with way of example specific embodiments more of the present invention is shown during these are graphic, and describes these specific embodiments in this article in detail.Yet, we are when understanding, this paper is not to limit the present invention to these particular forms that disclosed to the purpose of the explanation of these specific embodiments, and on the contrary, the present invention will be contained all modifications, the equivalent in last spirit of the present invention that claims defined and the scope and substitute.
Embodiment
Hereinafter embodiments of the invention will be described.In order to take the clear of explanation into account, all features of actual embodiment will be described in this instructions.Yet, we are when understanding, when any this type of the actual embodiment of exploitation, must make many decisions relevant with embodiment, so that reach developer's specific objective, for example meet relevant with system and relevant with business restrictive condition, and these restrictive conditions will change along with different embodiment.In addition, we are when understanding, and this development may be complicated and consuming time, but concerning the those of ordinary skills that benefited from disclosure of the present invention, still will be a kind of work of routine.
At first see also Fig. 1, shown in the figure according to a specific embodiment of the present invention and the concept map of the part of the production procedure (100) of construction and operation.Part comprises two technology stations (105) shown in this production procedure (100), and each technology station (105) comprises the computer installation (110) with process tool (115) communication.These technology stations (105) are by communication link (120) communication mutually.In the embodiment shown, these computer installations (110) and these communication links (120) comprise the part than computation machine system such as network (125) etc.These process tools (115) shown in Figure 1 are being handled the wafer (135) of some batches (130) when making integrated circuit (IC) apparatus.Though for the present invention can be used to make semiconductor device, application of the present invention is not so limited with explanation of the present invention, this is because can apply the present invention to the technology of other type.Therefore, in previously described production procedure (100), the wafer (135) of these batches (130) can be called " workpiece " more generally.In all embodiment, these process tools (115) and any process operation of carrying out on these process tools are uninevitable relevant with the manufacturing of semiconductor device.Yet, in order to take the clear of explanation into account, and in order to help to understand the present invention, in the content of illustrated embodiment, disclose when of the present invention, will keep and the relevant term of semiconductor manufacturing.
Fig. 2 marks according to the present invention and each selected portion of the hardware of the computer installation of setting program and operation (110) and software architecture.Among the figure and some aspect (for example, individual other adapter, basic input/output (the BasicInput/Output System of not shown this hardware and software architecture; Be called for short BIOS) and the I/O driver etc.).In order to take the clear of explanation into account, and omit these aspects, so that can not blur the present invention.Yet those of ordinary skills can understand after consulting disclosure of the present invention, and this software of computer installation (110) and hardware structure will comprise the function of many this routines.
In the embodiment shown, computer installation (110) is the workstation that adopts UNIX type operating system, but the present invention is not so limited.In fact can use such as the electronic operation device of any kind of laptop computer, desktop computer, small-size computer, mainframe computer or supercomputer etc. and implement this computer installation (110).In some alternate embodiment, computer installation (110) even can be processor or the controller that embeds process tool (115).The present invention also is not limited to UNIX type operating system.Also can adopt alternative operating system (Windows for example
TMType operating system or disc operating system (DOS) (Disk Operating System; Be called for short DOS) type operating system).The present invention is not subject to the specific embodiment of computer installation (110).
Computer installation (110) also comprises processor (205), and this processor (205) is connected to certain storage element (210) by bus system (215).This storage element (210) will comprise at least one hard disk (not shown) and random access memory (Random AccessMemory usually; Be called for short RAM) (not shown).In certain embodiments, computer installation (110) also can comprise such as CD (not shown) or floppy disk (not shown) or such as the detachable storage element of storage element of a certain other forms such as tape (not shown) or hifd (not shown) etc.Processor (205) can be any suitable processor of knowing in this technology.For example, this processor can be a general purpose microprocessor or digital signal processor (Digital Signal Processor; Be called for short DSP).In the embodiment shown, processor (205) is by Advanced Micro Devices, the Athlon that Inc. (" AMD ") supplies on market
TM64 bit processors, but the present invention is not so limited.Also alternatively adopt 64 UltraSPARC of Sun Microsystems company supply
TMOr 32 microSPARC
TM, Intel Company supply any Itanium
TMOr Pentium
TMThe Alpha of the processor of grade and the supply of Compaq Computer Company
TMProcessor.Computer installation (110) comprises monitor (240), keyboard (245) and mouse (250), and these devices have comprised user interface (260) together with relevant user interface software (255).In the embodiment shown, this user interface (260) is graphical user interface (Graphical UserInterface; Be called for short GUI), but this is not that enforcement the present invention is necessary.
Fig. 2 also illustrates some selected portions of the software architecture of computer installation (110).In the embodiment shown, each computer installation (110) comprises the software agent (265) that leaves storage element (210) in.Note that and software agent (265) can be left in these computer installations (110) other position in addition in the production procedure (100).The position of software agent (265) is not very important to enforcement of the present invention.Also please note, because the position of software agent (265) is not very important, leave in wherein so some computer installation (110) has a plurality of software agent (265), leave in wherein and other computer installation (110) may there is no any software agent (265).Such as by Consilium, Inc. (Mountain View, the WORKSTREAM that CA) provides
TMDeng automated manufacturing executive system (Manufacturing ExecutionSystem; Abbreviation MES) (270) are left at least one computer installation (110).
Please consult Fig. 1 again, as mentioned before, these computer installations (110) also may be the parts than computation machine system (125) that connects by these communication links (120).Exemplary computer system in this this embodiment will comprise LAN (Local Area Network) (Local AreaNetwork; Abbreviation LAN), wide area network (Wide Area Network; Abbreviation WAN), system local area network network (System Area Network; Abbreviation SAN), Intranet even internet.Computer system (125) adopts networked clients/server formula framework, but alternate embodiment also can adopt Peer to Peer Architecture.Therefore, in some alternate embodiment, directly communication mutually of these computer installations (110).These communication links (120) can be wireless, concentric cable, optical fiber or twisted pair wire links.Computer system (125) (in each embodiment adopt a computer system) and these communication links (120) are all relevant with embodiment, and any suitable mode of knowing in can this technology provides this computer system (125) and these communication links (120).Computer system (125) can adopt any suitable communications protocol of knowing in this technology, for example TCP (Transfer ControlProtocol/Internet Protocol; Be called for short TCP/IP).
See also Fig. 1 and Fig. 2 now, these software agent (265) jointly are responsible for instructing efficiently the wafer (135) of these batches (130) through this technology.Each process tool (115) representative adoptable a certain resource under this target.For example, process tool (115) can be the fabrication tool of certain part (that is to say layer, pattern, doping or the thermal treatment of wafer (135)) of being used for making these wafers (135).Perhaps, process tool (115) can be the measurement facility of performance that is used for assessing the each several part of production procedure (100).Therefore, these software agent (265) can be used for a plurality of resources subsequent treatment, the distribution of the wafer (135) of these batches (130) consults by the resource of these process tools (115) representative and between these process tools (115), so that with the evaluation work of these resources allocations to the subsequent treatment of the wafer (135) of these batches (130).
In the embodiment shown, these software agent (265) set up configuration on their own, have intelligence, that know state and inculcate it and independently go into action and the specific objective that will reach when activating.These software agent (265) also are to adjust voluntarily along with the change of its place environment.At an Object-oriented Programming Design (Object Oriented Programming; Abbreviation OOP) in the environment, these software agent (265) is embodied as object, but also can utilizes non-OO technology to implement the present invention.The behavior of these software agent is quite simple, and is descriptive language program or rule-based.To be designed to reach selected target the behavior, for example: reach the specified batch date of expiry, reach the quality level of predesignating, make the utilization factor maximization of machine, and arrange preventive maintenance at random.When promoting these targets, these software agent (265) are connected with MES's (270), and integrate with existing plant control system (not shown).Those skilled in the art can understand after consulting disclosure of the present invention, and the mode that this connection and integration are carried out will be according to the characteristic of MES (270) and this plant control system but be relevant with embodiment.
As mentioned below, can be at several different levels and with these software agent (265) specialization.A level is " type ", that is to say, these software agent (265) are representative " consumer " or " supplier " in production procedure (100).More specifically, the type by software agent represented entities in integral production flow process (100) decides these software agent (265) to represent consumer or supplier.For example, software agent (265) can be represented batch wafer of (130) (135) (that is to say " batch media "), process tool (115) (that is to say " machine agent ") or process materials (that is to say " resource media ").Also can be by function (that is to say the function of in production procedure, carrying out with software agent (265)) with these software agent (265) specialization.For example, software agent (265) can be configured to carry out specific function, and must not represent specific entity.For example, software agent (265) can be configured to the control action (that is to say " controller media ") of decision wafer (135) of the particular batch (130) of processing in process tool (115).The action that this controller media is taked can be depended on characteristic, and the characteristic of process tool (115) of this batch (130).Decide on certain embodiments, can be by one batch of media or machine agent call controller media.In the embodiment shown, the controller media all keeps being associated with specific process tool (115) in its whole life, yet, also can use other configuration.Software agent (265) can be carried out other function comprising scheduler program.
Hereinafter will be more among the embodiment of complete description, for example, the scheduler program media can be arranged, handle media and controller media.Note that these software agent (265) needn't exist and respectively make man-to-man enantiomorphic relationship between domain entities such as each batch (130) or process tool (115) etc.On the contrary, by most each domain entities of one group of software agent (265) representative.For example, one batch (130) or process tool (115) can have the scheduler program media and handle media.The controller media can be associated with specific process tool (115), and can handle media (that is to say the processing media that is associated with this batch (130) or this process tool (115)) by one of them and call out.This object that helps specialized design that disposes is in order to represent the behavior of specialization, so that support the single aspect of domain entities function.
In this certain embodiments, utilize the object based programming technology to implement these software agent (265).In the term of object-oriented computing, software " media " is the active object with independence.One group of computing is being offered software agent (265) afterwards, and this software agent can respond local situation and take independently to move, thereby has produced and have adaptive system action.The invention provides a kind of media enhanced system, this system can be to having independence and ambulant " software agent " defines, disposes and dispose, and these software agent emulation and promote the function such as " real world " media such as the worker of factory, material, equipment and technologies in the semiconductor fabrication factory.It will be understood by a person skilled in the art that a media or other software object can comprise one or more software objects.In the usage of this paper, term " object " refers to software object, and this software object can be made of some other software objects again.On the contrary, those skilled in the art it is also understood that, the function of an object can be combined with other function.We can be combined into the function that is described as being associated with each object the function that is associated with single object when understanding.
In addition, in this specific embodiment, these software agent (265) are " configurable ".In this particular example, can revise the description language program of control software agent behavior that is used for, or revise " control handle " (control knob), and dispose these software agent.Control handle is the parameter or the characteristic of the software agent that can externally set, in order to provide use elasticity and (or) system's adjustment.For example, some characteristic is specified and is used for guiding the curve of the system decision-making.More specifically, processing and the scheduler program of describing these software agent (265) with the descriptive language program move, and make some foregone conclusion spare cause the execution of descriptive language program section.In a certain embodiments, implement these descriptive language programs with JPython, wherein JPython is a kind of open source java applet design language that a two-way Java interface is provided.Can be by world-wide web from the website＜http://www.jpython.org/ obtain the more information of downloading comprising JPython.
Therefore, present some part of detailed description in this manual in the mode of the program of software implementation, and the program of this software implementation relates to the symbolic notation of the computing that the data bit in the internal memory in the computer system exclusive disjunction device is carried out.These descriptions and representation are that those skilled in the art are used under effective and efficient manner intension with its work and pass to instrument to others skilled in the art.These programs and computing need be carried out physical operations to physical quantity.Though non-inevitable, the form of these physical quantitys is generally and can be stored, transmits, in conjunction with, relatively reach electric signal, magnetic signal or the light signal that other mode is operated.It is comparatively convenient, main because these usages are used general to have proved when these signals are called position, numerical value, element, symbol, character, item or numeral etc.
Yet we should remember sincerely in the heart that all these terms and other similar term are all relevant with suitable physical quantity, and just are applicable to the convenience mark of these physical quantitys.Unless other special statement is arranged, or be apparent in explanation, otherwise in whole disclosure of the present invention, these descriptions mean the action and the program of an electronic installation, and but this electronic installation operation table is shown the data of physics (electronics, magnetic or the light) amount in the storage element of a certain electronic installation, and these data are converted to are expressed as in this storage element equally or other data of the physical quantity in transmitting device or the display device.The term of computing that the example of representing the term of this description includes, but is not limited to " processing ", " ", " calculating ", " decision " or " demonstration " etc.
Also note that usually and on the program storage media of a certain form, aspect each software implementation of the present invention, encode, perhaps implement the aspect of these software implementations by the transmission medium of a certain type.This program storage media can be magnetic (for example floppy disk or hard disk drive) or optics (compact disc read-only memory (Compact Disk Read Only Memory for example; Be called for short CD-ROM)), and can be read-only or random access.Similarly, this transmission medium can be a certain transmission medium of knowing in twisted-pair feeder, concentric cable, optical fiber or this technology that other is suitable for.The present invention is not limited to these aspects of any specific embodiment.
Can control in advanced processes and implement production procedure (100) under (APC) framework.The APC system comprises by batch distributed software system to the some tradable standardized software assembly formation of batch control and error detection/classification that can carry out in the production procedure (300).In the top section of this APC system with each software agent of the present invention (265) and operation layering thereof, so that obtain to be close to the semiconductor manufacture flow path of independence operation.
These component softwares of APC system are according to semiconductor equipment and (the Semiconductor Equipment and Materials International of material international association; Abbreviation SEMI) computer integrated manufacturing (Computer Integrated Manufacturing; Be called for short CIM) framework systems technology and advanced technologies control (APC) framework comply with and implement the framework standard.Can obtain CIM (SEMI E81-0699-is for the interim specification (Provisional Specification for CIM FrameworkDomain Architecture) of CIM framework field or framework) and APC (SEMI E93-0999-is for the interim specification (Provisional Specification for CIMFramework Advanced Process Control Component) of CIM framework advanced technologies Control Component) specification from SEMI publicly.The communication information of SEMI is: 8310 Capital of Texas Highway North, and Suite 290 Austin, TX 78731; Phone is 512-349-2422; Fax is 512-349-2442; Network address is＜http://www.semi.org 〉.
This specific framework extremely depends on the software that adopts Object-oriented Programming Design, and adopts (the Object Management Group of Object Management group group of distributed object system; Abbreviation OMG) common object request broker architecture (Common Object Request BrokerArchitecture; Be called for short CORBA) and the CORBA_Service specification.Also be easy to obtain publicly the information and the specification of OMG CORBA framework.
The one illustration software systems that can be suitable for carrying out the function of APC of the present invention system are by KLA-Tencor, the Catalyst system that Inc. provides on market.The communication information of KLA-Tencor is: 160 Rio Robles, and San Jose, CA 95134; Phone is 408-875-6000; Fax is 408-875-3030; Network address is＜http://www.kla-tencor.com 〉.Also can obtain the extraneous information＜http://www.kla-tencor.com/controlsolutions/catalystapc.html relevant〉from the website of KLA-Tencor with the Catalyst system.
See also Fig. 3 now, use software agent (265) according to another embodiment of the present invention shown in the figure and implement the simplified block diagram of the enforcement example of production procedure (300).Represent illustration batch (130) by one a batch of scheduler program media (310) and a batch processing media (320).Represent illustration process tool (115) by machine scheduling program media (330) and machine processing media (340).The various entities negotiations that wait such as machine scheduling program media (330) in this batch scheduler program media (310) and the production procedure (300) are so that guarantee to finish the required resource of this batch.For example, batch scheduler program media (310) and machine scheduling program media (330) can use " contract net negotiation protocol " (" contract net negotiation protocol ") method to arrange this process tool (115) is assigned to the time-histories of this batch (130).
When process tool (115) receives this batch (130) and will handle the time, can call out this batch processing media (320) and (or) machine processing media (340).This batch processing media (320) and machine processing media (340) contact controller media (350) are so that decision is configured to the operative technique method of this process tool (115) to handle the necessary control action of this batch (130).Wherein any one can call out this controller media (350) for batch processing media (320) or machine processing media (340).In one embodiment, batch processing media (320) can send the required relevant data (for example data such as dimensioning data and electric metric data) of the characteristic with this batch (130) of decision necessary control action to this controller media (350).Similarly, machine processing media (340) can send the data relevant with this process tool (115) (for example standby time, from the information of till now time of last clearing, tool status etc.) to this controller media (350).In an alternate embodiment, can with this batch (130) and (or) the relevant data storing of the characteristic of process tool (115) in centralized data storage element (360), and this controller media (350) but this data storage element of access (360).This data storage element (360) can be configured to store such as comprise before handling and handle after metric data, tool state, and the data of lot priorities etc.
To illustrate in greater detail the operation of controller media (350) now.The specific control action that this controller media (350) is taked is relevant with embodiment.For example, if this process tool (115) is the CMP instrument, amount of thickness measured value before then this controller media (350) can receive and grind (for example, the thickness of the thickness of higher fine structure, low fine structure), and the required milling time of target thickness after the grinding is finished in prediction.At this process tool (115) is in the situation of etch tool, this controller media (350) can according to before the etching and (or) the amount of thickness measured value after the etching sets up the etching performance model of this process tool (115).Controller media (350) can utilize the controlling models of this process tool (115) to produce its prediction.The linearity or the nonlinear technology that can utilize common people to know this controlling models and develop by rule of thumb.This controlling models can be a better simply equation pattern type (for example, the equation of linear, index or weighted mean etc.) or such as Connectionist model, principal component analysis (PCA) (PrincipalComponent Analysis; Be called for short PCA) model or potential structure prediction (Projectionto Latent Structure; Be called for short PLS) model etc. than complicated model.The specific implementations of this model may be different along with selected modelling technology.When utilizing this controlling models, controller media (350) can determine the operative technique method parameter such as etching period, plasma power, temperature, air pressure and reactant gas concentration etc., so that reduce the variation in thickness after the etching.The process tool of other type (115) has other control action.
During controller media (350) configuration (that is to say, during), define used globality configuration variable by this controller media (350) first with this controller media (350) hypostazation.In the embodiment shown, these globality variablees comprise from technical method management system (Recipe Management System; Be called for short RMS) variate-value and environmental variance (context variable) value of (that is to say, be used for storing the integrity data storehouse of technical method setting value of the systemic presupposition technical method of this performed current technology of this process tool (115)).Context variable values defines a control and carries out stream (control thread), and comprises the value such as each variable of tool identification code, Mission Number and job number etc. usually.In addition, numerical value is offered any necessary basic variable (baseline variable).The example of this variate-value comprises that the Email of error notification sends inventory, stand-by time value, is considered as " son " batch (" child " lot) one batch in the variate-value of the maximum wafer number of allowing and the spendable last process layer information of controller media (350) (feed-forward information) etc.
Controller media (350) can use Mission Number and the wafer count value of setting in these globality configuration variablees, and the value of decision Mission Number, serial title (family name), female batch title (parent name), equipment, wafer number and state (that is to say that this batch is female batch or sub batch).Can utilize the environmental information that before defined and RMS information to come setting controller media (350) to be used for the value of calculation control action.For example, controller media (350) but the value that defines among the root RMS and utilizes environmental information (or " carrying out stream " title) to come the value of setting control model parameter.One specific example will be: according to the etch-rate value of this etch process chamber that defines among the environment of particular etching process chamber and the RMS, and used etch-rate value in the setting control model.
In addition, controller media (350) can utilize Mission Number and process layer title, uses inquiry and from data storage element (360) retrieve feed forward metrology information.Each element in the data array that controller media (350) can be checked with particular batch is associated, and be that the value that lacks is inserted system default value.For example, the target of last technology can be used for setting a necessary measuring value that lacks, as a part by the used feed-forward information of controller media (350).Also can carry out and be used for setting the feed-forward information value that lacks to replace other method of using system default value.
Controller media (350) is set and is used for data query storage element (360) to capture required key assignments and the status architecture of state of a control that is associated with existing control execution stream.Can utilize these key assignments to carry out the stream mode data from data storage element (360) acquisition.Controller media (350) is searched the execution stream mode data in the sorting data storehouse at nearest each batch of handling with this execution stream environmental variance.If find this value, then these values are sent to the function that the user that comprises controlling models defines, this function calculation is also sent these back to and is carried out the stream mode value.If do not find any value in this storehouse, then controller media (350) can upwards be searched along data storing stratum, and has first stratum's acquisition data that these carry out the stream mode value certainly.System's this storehouse of supposition and all stratum comprise similar data, but these data have different degree of accuracy.
Controller media (350) can be implemented risk inspection (jeopardy check), its mode is to carry out inquiry in data storage element (360), and batch number value in the acquisition risk storehouse (jeopardystack) (that is to say the storehouse of each batch formation of handling after measuring operation last time on this specific execution stream).The threshold value (this is usually a value of appointment in RMS) of batch number in this value and this kind of risk can be compared.If do not surpass this risk threshold value, then controller media (350) can continue operation.If surpassed this threshold value, then controller media (350) is before the control action of existing batch of decision, but aborted (abort), and transmit the Pop-up display screen is carried out the tolerance incident in order to the indication operator to batch of selecting in the lot list in this risk storehouse certainly.
As mentioned before, controller media (350) utilizes the state of previous decision and target information to come computing controller input (technology method renewal).Controller media (350) is sent to machine processing media (340) with the result of this control action then, and machine processing media (340) is being handled this batch (130) before, upgrades the operative technique method of process tool (115) earlier.
In certain embodiments, can be at the processing of this batch (130) and with more than one controller media (350) hypostazation.For example, if this process tool (115) is a photolithography stepper, but then call controller media (350) is controlled covering (overlay), and can call out another controller media (350) and come the Control Critical size.These a plurality of controller media (350) feedback information of handling wafer that can be used to control oneself is adjusted various stepper parameters, for example parameters such as exposure dose, time shutter and focal length.In another example, also can have a plurality of controller media (350) such as the deposition tool of the instrument that is used for forming polysilicon layer etc., in order to the parameter of control such as the particle diameter (grain size) of polysilicon and the thickness of polysilicon layer etc.
When calling out these controller media (350), promptly check each environmental variance, so that determine which other controller media (350) to need the decision control action.The technology (for example, the polysilicon gate masking layer is to the second interlayer dielectric masking layer (ILD)) that the indication of operation identification code will be carried out.Only under some environmental aspect, just need each controller media (350), and only when these environmental aspects all meet, just carry out each controller media (350).For example, CD controller media (350) may only be carried out in polysilicon gate masking layer technology, but may not carry out in the 2nd ILD masking layer technology.On the other hand, overlay controller media (350) can be carried out in above-mentioned two kinds of mask events.
As described herein, when using the medium type control architecture, can promote whole plant efficiency, and robotization widely is provided.More specifically, the active software agent (265) with independence is dispatched and is begun to carry out batch scheduler program and technology.Generally speaking, preferable technology controlling and process can reduce the variability of product, thereby has improved the performance and the yield rate of product again.
These specific embodiments that preamble disclosed are just for explanation usefulness, and this is because have the knack of this skill person after consulting disclosure of the present invention, are easy to revise and implement the present invention in mode different but equivalence.In addition, except the described content of claims hereinafter, must not limit the present invention to the details of construction or design shown in this article.Therefore, obviously can change or revise these specific embodiments that preamble discloses, and this type of variation is considered as in scope of the present invention and spirit all.Therefore, the protection looked for of the present invention is narrated in following claims.
Claims (10)
1. a manufacturing system (100,300) comprises:
One process tool (115), this process tool (115) are configured to handle workpiece (130) according to the operative technique method;
One controller media (350), this controller media (350) are configured to the control action that decision is associated with the processing of this workpiece (130) in this process tool (115); And
The first technology media (320,340), this first technology media (320,340) be associated with in this process tool (115) and this workpiece (130) at least one, and this first technology media (320,340) be configured to: connect this controller media (350), receive this control action, and dispose this operative technique method according to this control action.
2. the system as claimed in claim 1 (100,300), further comprise the second technology media (320,340), in this second technology media (320,340) and this process tool (115) and this workpiece (130) not with this first technology media (320,340) one that is associated is associated, and at least one of this first technology media (320,340) and this second technology media (320,340) is configured to connect this controller media (350).
3. system (100 as claimed in claim 2,300), wherein this first technology media (320) is associated with this workpiece (130), and this first technology media (320) is configured to connect this controller media (350), so that receive this control action, and this control action is sent to this second technology media (340) that is associated with this process tool (115), this second technology media (340) is configured to dispose this operative technique method according to this control action.
4. the system as claimed in claim 1 (100,300), wherein this controller media (350) is configured to: receive at least one data that are associated with this workpiece (130) and this process tool (115), and according to controlling models and and these reception data determine this control action.
5. system (100 as claimed in claim 4,300), wherein this first technology media (320) data of being configured to be associated with this workpiece (130) offer this controller media (350), the data that this second technology media (340) is configured to be associated with this process tool (115) offer this controller media (350), and this controller media (350) is configured to determine this control action according to controlling models, the data that are associated with this workpiece (130) and the data that are associated with this process tool (115).
6. control the method for the process tool (115) that is configured to handle workpiece (130) according to the operative technique method for one kind, comprise the following step:
Will with at least one first technology media (320, the 340) hypostazation that is associated in this process tool (115) and this workpiece (130);
To be configured to controller media (350) hypostazation of the control action that decision is associated with the processing of this workpiece (130) in this process tool (115);
Make this first technology media (320,340) connect this controller media (350), so that receive this control action; And
This first technology media (320,340) and this process tool (115) are connected, so that dispose this operative technique method according to this control action.
7. method as claimed in claim 6 further comprises the following step:
Will with second technology media (320, a 340) hypostazation that is associated not being associated with this first technology media (320,340) in this process tool (115) and this workpiece (130).
Make in this first technology media (320,340) and this second technology media (320,340) at least one connect this controller media (350).
8. method as claimed in claim 7 further comprises the following step:
This control action is sent to this second technology media (340) from this first technology media (320); And
This second technology media (340) and this process tool (115) are connected, so that dispose this operative technique method according to this control action.
9. method as claimed in claim 6 further comprises the following step:
To offer this controller media (350) with at least one data that are associated of this workpiece (130) and this process tool (115); And
Reach the data that are associated with this workpiece according to controlling models and determine this control action.
10. method as claimed in claim 9 further comprises the following step:
Make this first technology media (320) connect this controller media (350), so that the data that are associated with this workpiece (130) are provided;
Make this second technology media (340) connect this controller media (350), so that the data that are associated with this process tool (115) are provided; And
Determine this control action according to controlling models and the data that are associated with this process tool (115) and this workpiece (130).
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| CN102915003A (en) * | 2011-08-04 | 2013-02-06 | 海德堡印刷机械股份公司 | Automatic printing press improvement |
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| US8014991B2 (en) | 2003-09-30 | 2011-09-06 | Tokyo Electron Limited | System and method for using first-principles simulation to characterize a semiconductor manufacturing process |
| US8032348B2 (en) | 2003-09-30 | 2011-10-04 | Tokyo Electron Limited | System and method for using first-principles simulation to facilitate a semiconductor manufacturing process |
| US8073667B2 (en) * | 2003-09-30 | 2011-12-06 | Tokyo Electron Limited | System and method for using first-principles simulation to control a semiconductor manufacturing process |
| US8296687B2 (en) | 2003-09-30 | 2012-10-23 | Tokyo Electron Limited | System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool |
| US8036869B2 (en) | 2003-09-30 | 2011-10-11 | Tokyo Electron Limited | System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model |
| US7542880B2 (en) * | 2006-04-06 | 2009-06-02 | Advanced Micro Devices, Inc. | Time weighted moving average filter |
| DE102007014970B3 (en) * | 2007-03-28 | 2008-07-31 | Siemens Ag | Process e.g. medical treatment, configuration method, involves configuring process step, where process includes parallel running process steps, and configuration of process steps determines sequence of process steps |
| DE102008035258A1 (en) * | 2008-07-29 | 2010-03-25 | Siemens Aktiengesellschaft | Method for testing data consistency of technical system, involves testing data consistency of control parameters marked by part of tag groups based on preset validation rules for providing test results |
| KR101953196B1 (en) * | 2012-02-21 | 2019-05-23 | 어플라이드 머티어리얼스, 인코포레이티드 | Enhanced rehosting capability for legacy hardware and software |
| US20130282333A1 (en) * | 2012-04-23 | 2013-10-24 | Abb Technology Ag | Service port explorer |
| DE102019218623A1 (en) * | 2019-11-29 | 2021-06-02 | Sms Group Gmbh | Control system for an industrial plant, in particular for a plant for the production or processing of metallic strips or sheets, and method for controlling an industrial plant, in particular a plant for the production or processing of metallic strips or sheets |
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| US5548505A (en) * | 1994-07-15 | 1996-08-20 | Oktrak Systems, Inc. | Scrubber control system |
| JP4276711B2 (en) * | 1998-01-05 | 2009-06-10 | 株式会社日立国際電気 | Semiconductor manufacturing equipment control system |
| JP3002776B1 (en) * | 1998-07-16 | 2000-01-24 | 横河電機株式会社 | Production system and processing apparatus selection method in production system |
| JP3704698B2 (en) * | 1998-08-12 | 2005-10-12 | 横河電機株式会社 | Production system |
| JP2000158297A (en) * | 1998-12-01 | 2000-06-13 | Dainippon Screen Mfg Co Ltd | Job management system, job management method, and record medium |
| US6485990B1 (en) * | 2000-01-04 | 2002-11-26 | Advanced Micro Devices, Inc. | Feed-forward control of an etch processing tool |
| JP2001338856A (en) * | 2000-05-30 | 2001-12-07 | Tokyo Seimitsu Co Ltd | Process controller for semiconductor manufacturing system |
| US6694275B1 (en) * | 2000-06-02 | 2004-02-17 | Timbre Technologies, Inc. | Profiler business model |
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| CN102915003A (en) * | 2011-08-04 | 2013-02-06 | 海德堡印刷机械股份公司 | Automatic printing press improvement |
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