CN1741685A - 电容式麦克风中膜片破裂的检测及控制 - Google Patents
电容式麦克风中膜片破裂的检测及控制 Download PDFInfo
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- CN1741685A CN1741685A CNA2005100922039A CN200510092203A CN1741685A CN 1741685 A CN1741685 A CN 1741685A CN A2005100922039 A CNA2005100922039 A CN A2005100922039A CN 200510092203 A CN200510092203 A CN 200510092203A CN 1741685 A CN1741685 A CN 1741685A
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Images
Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
- H04R3/007—Protection circuits for transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
Abstract
Description
Claims (28)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57276304P | 2004-05-21 | 2004-05-21 | |
US60/572,763 | 2004-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1741685A true CN1741685A (zh) | 2006-03-01 |
CN1741685B CN1741685B (zh) | 2011-11-30 |
Family
ID=34936562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005100922039A Expired - Fee Related CN1741685B (zh) | 2004-05-21 | 2005-05-20 | 电容式麦克风中膜片破裂的检测及控制 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7548626B2 (zh) |
EP (1) | EP1599067B1 (zh) |
KR (1) | KR101138447B1 (zh) |
CN (1) | CN1741685B (zh) |
Cited By (17)
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---|---|---|---|---|
CN101443633A (zh) * | 2006-05-17 | 2009-05-27 | Nxp股份有限公司 | 容性mems传感器设备 |
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CN102547520A (zh) * | 2010-12-23 | 2012-07-04 | 北京卓锐微技术有限公司 | 电容式麦克风及其控制系统和控制方法 |
CN102860042A (zh) * | 2009-11-03 | 2013-01-02 | 意法爱立信有限公司 | 麦克风组件 |
CN102957388A (zh) * | 2011-08-25 | 2013-03-06 | 英飞凌科技股份有限公司 | 用于低失真电容式信号源放大器的系统和方法 |
CN103067820A (zh) * | 2011-06-24 | 2013-04-24 | 快捷半导体(苏州)有限公司 | 用于提供音频换能器保护的装置和方法 |
CN103139674A (zh) * | 2011-11-28 | 2013-06-05 | 英飞凌科技股份有限公司 | 麦克风及用于校准麦克风的方法 |
CN103226368A (zh) * | 2012-01-27 | 2013-07-31 | 亚德诺半导体股份有限公司 | 快速加电偏置电压电路 |
CN104918194A (zh) * | 2014-03-14 | 2015-09-16 | 欧姆龙株式会社 | 声响转换器 |
CN105191347A (zh) * | 2013-03-14 | 2015-12-23 | 罗伯特·博世有限公司 | 用于mems电容性麦克风的重置电路 |
CN103200475B (zh) * | 2007-11-14 | 2016-04-27 | 英飞凌科技股份有限公司 | 电子电路和电子器件 |
US9413317B2 (en) | 2012-04-16 | 2016-08-09 | Infineon Technologies Ag | System and method for high input capacitive signal amplifier |
CN107079224A (zh) * | 2014-09-10 | 2017-08-18 | 罗伯特·博世有限公司 | 高电压重置mems麦克风网络和检测其缺陷的方法 |
CN109842838A (zh) * | 2017-11-29 | 2019-06-04 | Tdk株式会社 | 用于调节麦克风的偏压的电路 |
CN111726741A (zh) * | 2020-06-22 | 2020-09-29 | 维沃移动通信有限公司 | 麦克风状态检测方法及装置 |
CN111869237A (zh) * | 2017-12-27 | 2020-10-30 | 美商楼氏电子有限公司 | 换能器组件故障检测 |
JPWO2021002233A1 (ja) * | 2019-07-02 | 2021-12-09 | 新電元工業株式会社 | 制御回路、制御装置及びシステム |
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---|---|---|---|---|
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JP4440121B2 (ja) * | 2005-01-06 | 2010-03-24 | Necエレクトロニクス株式会社 | 電圧供給回路およびマイクユニット |
US7929716B2 (en) * | 2005-01-06 | 2011-04-19 | Renesas Electronics Corporation | Voltage supply circuit, power supply circuit, microphone unit using the same, and microphone unit sensitivity adjustment method |
CN101371492B (zh) | 2006-01-17 | 2012-08-15 | 美国博通公司 | 以太网供电控制器及对供电设备检测和分级的方法 |
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US8094846B2 (en) | 2006-12-18 | 2012-01-10 | Epcos Pte Ltd. | Deep sub-micron MOS preamplifier with thick-oxide input stage transistor |
US8542848B1 (en) * | 2007-08-13 | 2013-09-24 | Thomas Joseph Krutsick | Musical instrument preamplifier |
US8542850B2 (en) * | 2007-09-12 | 2013-09-24 | Epcos Pte Ltd | Miniature microphone assembly with hydrophobic surface coating |
DE102007058951B4 (de) * | 2007-12-07 | 2020-03-26 | Snaptrack, Inc. | MEMS Package |
US8288971B2 (en) * | 2008-01-11 | 2012-10-16 | Broadcom Corporation | Integrated and programmable microphone bias generation |
KR101524900B1 (ko) * | 2008-04-15 | 2015-06-01 | 에프코스 피티이 엘티디 | 집적된 자체 테스트 회로를 구비하는 마이크 어셈블리 |
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DE102009000950A1 (de) | 2009-02-02 | 2010-08-05 | Robert Bosch Gmbh | Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Mikrofonbauelements |
DE102010006132B4 (de) | 2010-01-29 | 2013-05-08 | Epcos Ag | Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC |
US8233643B1 (en) | 2010-03-23 | 2012-07-31 | Fiberplex Technologies, LLC | System and method for amplifying low level signals provided on electrical supply power |
EP2432249A1 (en) | 2010-07-02 | 2012-03-21 | Knowles Electronics Asia PTE. Ltd. | Microphone |
EP2681928A1 (en) | 2011-03-04 | 2014-01-08 | Sony Mobile Communications AB | Method for driving a condenser microphone |
KR101205512B1 (ko) * | 2011-04-28 | 2012-11-28 | 주식회사 씨자인 | 가변 입력 임피던스 전처리 증폭기를 포함하는 디지털 콘덴서형 마이크로폰 및 상기 전처리 증폭기의 가변 입력 임피던스 조절 방법 |
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US8630429B2 (en) | 2011-12-16 | 2014-01-14 | Robert Bosch Gmbh | Preventing electrostatic pull-in in capacitive devices |
JP5926440B2 (ja) * | 2012-03-30 | 2016-05-25 | エプコス アクチエンゲゼルシャフトEpcos Ag | 自動バイアス制御を有するマイクロフォン |
US9281744B2 (en) | 2012-04-30 | 2016-03-08 | Infineon Technologies Ag | System and method for a programmable voltage source |
US9214911B2 (en) * | 2012-08-30 | 2015-12-15 | Infineon Technologies Ag | System and method for adjusting the sensitivity of a capacitive signal source |
DK2723098T3 (en) | 2012-10-18 | 2017-03-13 | Sonion Nederland Bv | Double transducer with common membrane |
US9247359B2 (en) | 2012-10-18 | 2016-01-26 | Sonion Nederland Bv | Transducer, a hearing aid comprising the transducer and a method of operating the transducer |
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KR101475263B1 (ko) * | 2013-05-22 | 2014-12-22 | 주식회사 씨자인 | 스타트업 회로, 그 스타트업 회로를 구비한 커패시터 센서용 증폭 디바이스 및 그 스타트업 방법 |
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US9136796B2 (en) * | 2013-06-18 | 2015-09-15 | Texas Instruments Incorporated | Negative audio signal voltage protection circuit and method for audio ground circuits |
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US10546095B2 (en) | 2017-06-13 | 2020-01-28 | International Business Machines Corporation | Parameter collapsing and corner reduction in an integrated circuit |
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EP3531720B1 (en) | 2018-02-26 | 2021-09-15 | Sonion Nederland B.V. | An assembly of a receiver and a microphone |
DK3531713T3 (en) | 2018-02-26 | 2023-02-06 | Sonion Nederland Bv | Miniature Speaker with Acoustical Mass |
EP3995795A1 (en) | 2018-04-30 | 2022-05-11 | Sonion Nederland B.V. | Vibration sensor |
EP3579578B1 (en) | 2018-06-07 | 2022-02-23 | Sonion Nederland B.V. | Miniature receiver |
US10951169B2 (en) | 2018-07-20 | 2021-03-16 | Sonion Nederland B.V. | Amplifier comprising two parallel coupled amplifier units |
US11564580B2 (en) | 2018-09-19 | 2023-01-31 | Sonion Nederland B.V. | Housing comprising a sensor |
EP4300995A3 (en) | 2018-12-19 | 2024-04-03 | Sonion Nederland B.V. | Miniature speaker with multiple sound cavities |
US11190880B2 (en) | 2018-12-28 | 2021-11-30 | Sonion Nederland B.V. | Diaphragm assembly, a transducer, a microphone, and a method of manufacture |
EP3675522A1 (en) | 2018-12-28 | 2020-07-01 | Sonion Nederland B.V. | Miniature speaker with essentially no acoustical leakage |
DK3726855T3 (en) | 2019-04-15 | 2021-11-15 | Sonion Nederland Bv | A personal hearing device with a vent channel and acoustic separation |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4439641A (en) * | 1981-09-02 | 1984-03-27 | Polaroid Corporation | Ultrasonic transducer for use in a vibratory environment |
JPH06292293A (ja) * | 1993-03-31 | 1994-10-18 | Sony Corp | マイクロホン装置 |
WO1996022515A1 (en) * | 1995-01-19 | 1996-07-25 | Honeywell Inc. | Apparatus for detection of a diaphragm rupture in a pressure sensor |
US5949892A (en) * | 1995-12-07 | 1999-09-07 | Advanced Micro Devices, Inc. | Method of and apparatus for dynamically controlling operating characteristics of a microphone |
US5870482A (en) * | 1997-02-25 | 1999-02-09 | Knowles Electronics, Inc. | Miniature silicon condenser microphone |
US6084973A (en) * | 1997-12-22 | 2000-07-04 | Audio Technica U.S., Inc. | Digital and analog directional microphone |
US6088463A (en) * | 1998-10-30 | 2000-07-11 | Microtronic A/S | Solid state silicon-based condenser microphone |
JP3805543B2 (ja) * | 1998-11-19 | 2006-08-02 | 三菱電機株式会社 | 半導体集積回路 |
JP4129108B2 (ja) * | 2000-02-25 | 2008-08-06 | 三菱電機株式会社 | マイクロフォン用フィルタおよびマイクロフォン装置 |
JP2001295925A (ja) * | 2000-04-10 | 2001-10-26 | Nikkiso Co Ltd | ダイアフラムの破損検出方法および装置 |
JP2002131161A (ja) * | 2000-10-27 | 2002-05-09 | Denso Corp | 半導体圧力センサ |
WO2002052894A1 (en) * | 2000-12-22 | 2002-07-04 | Brüel & Kjær Sound & Vibration Measurement A/S | A micromachined capacitive transducer |
WO2002073792A2 (en) * | 2001-03-09 | 2002-09-19 | Techtronic A/S | An electret condensor microphone preamplifier that is insensitive to leakage currents at the input |
US6859542B2 (en) * | 2001-05-31 | 2005-02-22 | Sonion Lyngby A/S | Method of providing a hydrophobic layer and a condenser microphone having such a layer |
US20070237345A1 (en) * | 2006-04-06 | 2007-10-11 | Fortemedia, Inc. | Method for reducing phase variation of signals generated by electret condenser microphones |
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US7903835B2 (en) * | 2006-10-18 | 2011-03-08 | The Research Foundation Of State University Of New York | Miniature non-directional microphone |
-
2005
- 2005-05-17 EP EP05010608.7A patent/EP1599067B1/en active Active
- 2005-05-20 CN CN2005100922039A patent/CN1741685B/zh not_active Expired - Fee Related
- 2005-05-20 US US11/133,877 patent/US7548626B2/en active Active
- 2005-05-21 KR KR1020050042800A patent/KR101138447B1/ko not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
EP1599067A2 (en) | 2005-11-23 |
EP1599067B1 (en) | 2013-05-01 |
US20060008097A1 (en) | 2006-01-12 |
CN1741685B (zh) | 2011-11-30 |
EP1599067A3 (en) | 2006-01-18 |
KR101138447B1 (ko) | 2012-04-26 |
KR20060048056A (ko) | 2006-05-18 |
US7548626B2 (en) | 2009-06-16 |
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