CN1773268A - 用于离子束应用的改进的离子探测器 - Google Patents
用于离子束应用的改进的离子探测器 Download PDFInfo
- Publication number
- CN1773268A CN1773268A CN200510124608.6A CN200510124608A CN1773268A CN 1773268 A CN1773268 A CN 1773268A CN 200510124608 A CN200510124608 A CN 200510124608A CN 1773268 A CN1773268 A CN 1773268A
- Authority
- CN
- China
- Prior art keywords
- detecting device
- electron
- scintillator
- ion
- transfer electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3174—Etching microareas
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
- Measurement Of Radiation (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/904,438 | 2004-11-10 | ||
US10/904,438 US7119333B2 (en) | 2004-11-10 | 2004-11-10 | Ion detector for ion beam applications |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1773268A true CN1773268A (zh) | 2006-05-17 |
CN1773268B CN1773268B (zh) | 2011-04-13 |
Family
ID=36315363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200510124608.6A Active CN1773268B (zh) | 2004-11-10 | 2005-11-09 | 离子束系统和用于检测离子束的系统 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7119333B2 (zh) |
CN (1) | CN1773268B (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103038856A (zh) * | 2010-08-10 | 2013-04-10 | Fei公司 | 带电粒子检测器 |
CN103227097A (zh) * | 2012-01-25 | 2013-07-31 | 浜松光子学株式会社 | 离子检测装置 |
TWI488211B (zh) * | 2012-04-16 | 2015-06-11 | Integrated Circuit Testing | 帶電粒子偵測裝置、帶電粒子束裝置及其操作方法 |
CN107342205A (zh) * | 2016-05-03 | 2017-11-10 | 睿励科学仪器(上海)有限公司 | 一种带电粒子探测装置 |
CN109742007A (zh) * | 2019-01-18 | 2019-05-10 | 西藏大学 | 一种紧凑型带电粒子检测器 |
CN110914952A (zh) * | 2017-05-12 | 2020-03-24 | 诺威量测设备公司 | 质谱仪检测器及使用其的系统和方法 |
CN112868085A (zh) * | 2018-10-22 | 2021-05-28 | 英国质谱公司 | 离子检测器 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7557358B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7511279B2 (en) * | 2003-10-16 | 2009-03-31 | Alis Corporation | Ion sources, systems and methods |
US7521693B2 (en) * | 2003-10-16 | 2009-04-21 | Alis Corporation | Ion sources, systems and methods |
US7557359B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7557360B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7601953B2 (en) * | 2006-03-20 | 2009-10-13 | Alis Corporation | Systems and methods for a gas field ion microscope |
US7554097B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7511280B2 (en) * | 2003-10-16 | 2009-03-31 | Alis Corporation | Ion sources, systems and methods |
US7518122B2 (en) | 2003-10-16 | 2009-04-14 | Alis Corporation | Ion sources, systems and methods |
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
US7786451B2 (en) * | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7786452B2 (en) | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7557361B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
US7554096B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7446327B2 (en) * | 2005-04-21 | 2008-11-04 | Etp Electron Multipliers Pty Ltd. | Apparatus for amplifying a stream of charged particles |
WO2007109666A2 (en) * | 2006-03-20 | 2007-09-27 | Alis Corporation | Systems and methods for a helium ion pump |
US7804068B2 (en) * | 2006-11-15 | 2010-09-28 | Alis Corporation | Determining dopant information |
US7781733B2 (en) * | 2007-05-16 | 2010-08-24 | International Business Machines Corporation | In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques |
GB0806673D0 (en) * | 2008-04-11 | 2008-05-14 | Finlan Martin F | Imaging apparatus & method |
DE102009013653B4 (de) * | 2009-03-18 | 2014-09-18 | Bruker Daltonik Gmbh | Protein-Sequenzierung mit MALDI-Massenspektrometrie |
CN107251188B (zh) * | 2015-02-13 | 2019-09-13 | Dh科技发展私人贸易有限公司 | 用于质谱仪中的离子的改进检测的装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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US3898456A (en) * | 1974-07-25 | 1975-08-05 | Us Energy | Electron multiplier-ion detector system |
CN1014850B (zh) * | 1986-11-26 | 1991-11-20 | 株式会社岛津制作所 | 四级式质量分析仪 |
CN87100772A (zh) * | 1987-02-21 | 1988-08-31 | 株式会社岛津制作所 | 带电粒子探测器 |
JPH0562638A (ja) * | 1991-09-04 | 1993-03-12 | Hitachi Ltd | 集束イオンビーム装置 |
CN1030350C (zh) * | 1993-07-12 | 1995-11-22 | 水利部交通部能源部南京水利科学研究院 | 用核子方法测量大坝泄洪雾化浓度 |
US5635836A (en) * | 1994-10-21 | 1997-06-03 | International Business Machines Corporation | Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope |
US5922179A (en) * | 1996-12-20 | 1999-07-13 | Gatan, Inc. | Apparatus for etching and coating sample specimens for microscopic analysis |
JP3494889B2 (ja) * | 1998-06-03 | 2004-02-09 | セイコーインスツルメンツ株式会社 | 集束イオンビーム加工装置 |
EP1117125B1 (en) * | 1998-09-25 | 2014-04-16 | Hitachi, Ltd. | Scanning electron microscope |
US6787772B2 (en) * | 2000-01-25 | 2004-09-07 | Hitachi, Ltd. | Scanning electron microscope |
JP2002025490A (ja) * | 2000-07-13 | 2002-01-25 | Mitsubishi Electric Corp | 電子顕微鏡の試料ホルダー、試料台および試料台用治具 |
US6407850B1 (en) * | 2000-09-29 | 2002-06-18 | Intel Corporation | Auto tilt stage |
JP4178741B2 (ja) * | 2000-11-02 | 2008-11-12 | 株式会社日立製作所 | 荷電粒子線装置および試料作製装置 |
US20040060904A1 (en) * | 2002-09-30 | 2004-04-01 | International Business Machines Corporation | Tool having a plurality of electrodes and corresponding method of altering a very small surface |
US7081625B2 (en) * | 2002-11-06 | 2006-07-25 | Hitachi High-Technologies Corporation | Charged particle beam apparatus |
US6843893B2 (en) * | 2002-12-12 | 2005-01-18 | International Business Machines Corporation | Metal dry etch using electronic field |
US20040132287A1 (en) * | 2003-01-07 | 2004-07-08 | International Business Machines Corporation | Dry etch process for copper |
-
2004
- 2004-11-10 US US10/904,438 patent/US7119333B2/en active Active
-
2005
- 2005-11-09 CN CN200510124608.6A patent/CN1773268B/zh active Active
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103038856A (zh) * | 2010-08-10 | 2013-04-10 | Fei公司 | 带电粒子检测器 |
CN103038856B (zh) * | 2010-08-10 | 2015-10-07 | Fei公司 | 带电粒子检测器 |
CN103227097A (zh) * | 2012-01-25 | 2013-07-31 | 浜松光子学株式会社 | 离子检测装置 |
CN103227097B (zh) * | 2012-01-25 | 2016-10-12 | 浜松光子学株式会社 | 离子检测装置 |
TWI488211B (zh) * | 2012-04-16 | 2015-06-11 | Integrated Circuit Testing | 帶電粒子偵測裝置、帶電粒子束裝置及其操作方法 |
CN107342205A (zh) * | 2016-05-03 | 2017-11-10 | 睿励科学仪器(上海)有限公司 | 一种带电粒子探测装置 |
CN107342205B (zh) * | 2016-05-03 | 2019-07-23 | 睿励科学仪器(上海)有限公司 | 一种带电粒子探测装置 |
CN110914952A (zh) * | 2017-05-12 | 2020-03-24 | 诺威量测设备公司 | 质谱仪检测器及使用其的系统和方法 |
CN110914952B (zh) * | 2017-05-12 | 2022-09-23 | 诺威量测设备公司 | 质谱仪检测器及使用其的系统和方法 |
CN112868085A (zh) * | 2018-10-22 | 2021-05-28 | 英国质谱公司 | 离子检测器 |
CN112868085B (zh) * | 2018-10-22 | 2024-03-08 | 英国质谱公司 | 离子检测器 |
CN109742007A (zh) * | 2019-01-18 | 2019-05-10 | 西藏大学 | 一种紧凑型带电粒子检测器 |
Also Published As
Publication number | Publication date |
---|---|
CN1773268B (zh) | 2011-04-13 |
US7119333B2 (en) | 2006-10-10 |
US20060097159A1 (en) | 2006-05-11 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171206 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171206 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |