CN1774814A - Cmos图像传感器及其制造方法 - Google Patents

Cmos图像传感器及其制造方法 Download PDF

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CN1774814A
CN1774814A CNA2004800103093A CN200480010309A CN1774814A CN 1774814 A CN1774814 A CN 1774814A CN A2004800103093 A CNA2004800103093 A CN A2004800103093A CN 200480010309 A CN200480010309 A CN 200480010309A CN 1774814 A CN1774814 A CN 1774814A
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S·C·洪
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Micron Technology Inc
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Abstract

一种CMOS成像装置，包括用于红、绿和蓝光的双像素检测系统。一个像素检测红和蓝光，而另一个像素检测绿光。红和蓝的检测基于波长，并且这样构造所述装置，使得在所述红/蓝像素中，蓝光的检测是在浅衬底深度上，而同时红光的检测是在深衬底深度上。这样构造所述像素阵列，使得所述红/蓝像素与所述绿像素相邻，并且在红/蓝像素和绿像素之间进行交错。本发明还涉及形成这样的成像器阵列和像素的方法。

Description

CMOS图像传感器及其制造方法
发明领域
本发明一般地涉及CMOS图像颜色传感器及其形成方法。
发明背景
一般，CMOS成像电路包括焦平面像素单元阵列，每一个单元包括光电转换装置，例如，光电门电路、光电导体或者光电二极管。连接到每一像素单元的读出电路一般包括至少一个输出晶体管。光电转换装置把光子转换为电子，后者一般传输到连接到源极跟随器输出晶体管的栅极的浮动扩散区。还可以包括电荷传输器件并且所述电荷传输器件可以是晶体管，用以把电荷从所述光电转换装置传输到浮动扩散区。成像单元一般也具有晶体管，用以在电荷传输之前把浮动扩散区复位至预定的电荷电平。源极跟随器晶体管的输出作为输出信号由行选择晶体管控制。
例如，在Rhodes的美国专利No.6,140,630、Rhodes的美国专利No.6,376,868、Rhode s等人的美国专利No.6,310,366，Rhodes的美国专利No.6,326,652、Rhodes的美国专利No.6,204,524和Rhodes的美国专利No.6,333,205中描述了示例性CMOS成像电路、其处理步骤和成像电路的各种CMOS元件的功能的详细说明。上列每一个专利的公开都整个附此作参考。
图1举例说明CMOS成像装置308的方框图，它具有像素阵列200，每一个像素单元都具有如上所述的构造。像素阵列200包括多个像素，排列成预定数目的列和行。阵列200中每一行的像素都全部由行选择线同时导通，而每一列的像素都由各自的列选择线选择性地输出。整个阵列200设置有多个行线和列线。行线响应行地址译码器220由行驱动器210选择性地激活，而列选择线响应列地址译码器270由列驱动器260选择性地激活。于是，为每个像素设置行和列地址。CMOS成像器由控制电路250操作，控制电路250控制用以选择读出像素用的适当的行线和列线的地址泽码器220、270以及向选定的行线和列线的驱动器晶体管施加驱动电压的行和列驱动器线路210、260。一般包括像素复位信号Vrst和像素图像信号Vsjg的像素列信号由与列装置260相关联的采样和保持电路261、262读出，并为每一像素产生差分信号Vrst-Vsjg，后者被放大并由模数转换器275数字化。模数转换器275把从列驱动器260和它的相关联的采样/保持电路261、262接收的模拟像素信号转换为数字信号，馈送到图像处理器280，形成数字图像。
传统的CMOS图像传感器像素阵列一般遵循图2所示的典型的Bayer图案，每一种颜色红82、绿87和蓝83分别有一个像素并排列成如图所示的马赛克图案。因为每种颜色只有一个像素，所述阵列要求较大的表面积。图3所示的另一种类型的像素是一种试图通过在硅衬底内不同深度检出全部三种颜色把阵列面积减到最小的像素。见美国专利公开No.2002/0058353。把全部三种颜色用的光电转换区域设置在一个像素内的一个害处是，即使当它们根据光波长设置在最优深度上时，在实践中各颜色无法完全的分离，并且被堆叠的光电转换区域识别。这个不完全的颜色分离造成相邻颜色检测区域之间的串音和不良的量子效率。
概要
本发明力图通过为一种颜色，例如，绿颜色提供一个像素单元，并为其他两种颜色例如，红和蓝颜色提供另一个复合像素单元，在维持良好的颜色分离的同时，减小阵列面积。具有两种颜色的像素单元在衬底内不同的深度上具有各自的光电转换装置，它们彼此隔开，以便减少颜色串音。通过把所述两种颜色的像素设置成与所述单一颜色像素相邻并且与所述单一颜色像素交错来利用所述两种颜色的像素。因此，把用于基本颜色成像的面积减小为两个像素，而不是传统的三个像素，而同时仍旧达到良好的颜色分离。
从以下的详细说明和举例说明本发明示例性实施例的附图，本发明其余的特征将变得显而易见。
附图的简短说明
图1是具有像素阵列的传统的CMOS成像芯片的方框图；
图2是表示Bayer图案中三颜色像素阵列的马赛克排列的示意图；
图3是使用堆叠颜色敏感区域的像素的先有技术像素配置的示意图；
图4(a)是按照本发明的的双像素布置的示意图；
图4(b)是按照本发明排列的像素阵列的示意图；
图5是表示光吸收与光的不同波长的衬底深度的关系的曲线图。
图6是按照本发明示例性实施例的包含绿和复合的红/蓝的像素的集成像素阵列的一部分的顶视图；
图7表示按照本发明的三晶体管(3T)红/蓝像素；
图8是图7中描绘的3T像素通过直线8-8的部分剖面图，其中描绘了蓝像素传感器区域；
图9是图7中描绘的3T像素通过直线9-9的部分剖面图，其中描绘了红像素传感器区域；
图10表示按照本发明的四晶体管(4T)像素；
图11是图10中描绘的4T像素的通过直线11-11的部分剖面图，其中描绘了蓝像素传感器区域；
图12是图10中描绘的4T像素的通过直线12-12的部分剖面图，其中描绘了红像素传感器区域；
图13至图16示出按照本发明的处理过程的不同的阶段的半导体晶片的一部分的剖面图；以及
图17是使用具有按照本发明的像素阵列的CMOS成像器的处理系统的示意图。
详细说明
在以下的详细说明中，参照形成可以实施本发明的特定的实施例的一部分并以举例说明的方式对其加以说明的附图。对这些实施例进行足够详细的描述，使本专业的技术人员能够实践本发明，并要明白，在不脱离本发明的精神和范围的情况下，可以利用其他实施例，而且在结构上、逻辑上和电气上可以进行改变。所描述的处理步骤的进展对本发明的实施例是示例性的；但是，除了某些步骤必需按照某些顺序出现外，步骤的序列不限于在这里提出的，而是就像先有技术已知的那样可以变化。
这里使用的术语″晶片″和″衬底″应该理解为包括硅、绝缘体基外延硅(SOI)或者蓝宝石基外延硅(SOS)、掺杂和未掺杂的半导体、由基底半导体基础支持的硅外延层以及其他半导体结构。另外，当在以下描述中谈到″晶片″″或者″衬底″时，以前的处理步骤可能已经用来在基底半导体结构或者基础中或其上形成区域、结或者材料层。另外，所述半导体不必是基于硅的，也可以是基于硅-锗、锗、砷化镓或者其他半导体的。
这里使用的术语″像素″是指光电元件单元，包含用于把光子转换为电信号的光电转换装置和相关联的晶体管。为了举例说明，图中举例说明并在这里描述单一的代表性两颜色像素及其形成方式；但是，通常多个类似的像素的制造是同时进行的。因此，以下的详细说明并非意在限制，本发明的范围只由后附的权利要求书定义。
现参见附图，其中类似的标号标示类似的元件，图4(a)和图4(b)表示按照本发明的像素阵列的一部分。图4(a)表示按照本发明的两个相邻像素的一种代表性的像素布置，在同一像素中带有蓝颜色传感器85和红颜色传感器86，在单独的像素87中有绿颜色传感器，设置成与所述红/蓝像素相邻。图4(b)表示利用图4(a)的排列的像素阵列，其中像素90包含红/蓝光电传感器85、86，而第二像素87包含绿光电传感器。如图4(b)所示，红/蓝像素90与相邻的单独的绿像素87交错地排列成″棋盘″型图案，它可以代替图2传统的Bayer图案。按照本发明，颜色处理只需要两种像素区域，从而提高像素阵列密度。
图5表示光吸收与不同的光波长的硅衬底深度的关系的特性。如图5所示，蓝光具有约450nm的波长，在深度约0.5μm至1.0μm的硅中被最优地吸收。绿光具有约550nm的波长，在硅中约1.5μm的深度上被最优地吸收。红光具有约650nm的波长，在硅中约2.0μm的衬底深度上被最优地吸收。正如可以从图5中看到的，蓝和绿光在彼此比较接近的深度上被吸收。因此，当三种颜色光电传感器彼此堆叠在同一个像素中时，在所述结深度上不可避免会有不完全的信号分离。这种不完全的分离，特别是在蓝和绿传感器之间，会造成串音和不良的量子效率。
本发明通过把蓝颜色传感器85设置在从所述衬底表面起0.5μm至1.0μm的范围内的深度上，并把红颜色传感器86设置在所述蓝传感器80下面大于2μm的深度处来减轻这个问题。于是，这些传感器的电荷收集区域彼此被不发生电荷收集的区域隔开。所述绿颜色传感器在单独的像素87中形成，这联系图4进行了描述。把蓝颜色传感器85和红颜色传感器设置在不同深度上，同时它们之间不设置颜色传感器，结果是串音减轻和量子效率改善。
图6表示按照本发明示例性实施例的两个像素阵列布置的顶视图。示于图6的实施例表示三晶体管(3T)像素，其中在每一个像素中使用三个晶体管，但是，正如下面联系图10所描述的，按照本发明还可以实现四晶体管(4T)实施例，带有增加的传输晶体管。利用其他像素体系结构的其他像素实现方案也可以与本发明配合使用。图6还表示各自的红/蓝像素单元90和绿像素单元87上面的蓝/红滤光器121和绿滤光器122。
图7较详细地表示图6的3T红/蓝像素单元的顶视图。红/蓝像素单元90包括蓝光电二极管10和伴随的电路，所述伴随电路包括浮动扩散区16、具有栅极18的复位晶体管、具有栅极26的源极跟随器晶体管和具有栅极24的行选择晶体管。红光电二极管13在蓝光电二极管10的下面。与红光电二极管13相关联的电路包括浮动扩散区28、具有栅极30的复位晶体管、具有栅极38的源极跟随器晶体管和具有栅极36的行选择晶体管。图7表示像素90掺杂区的侧向广延。为了进行举例说明，这些区域掺杂如下：p+上掺杂区46(用阴影线表示)、n-上掺杂区44(用正方形点线表示)、n-下掺杂区40(用正方形点线表示)、p+下掺杂区48(用正方形点线表示)和n-下掺杂区42(用虚线表示)，其中每一个都还被比较详细地示于图8和图9的剖面图中。接地端子14、电压源端子Vaa 20、32和Vot端子22、34也示于图7。
图8表示蓝传感器区域通过图7直线8-8的截面。红/蓝像素90的蓝传感器光电二极管10的p-n结15设置在从衬底60表面的顶部起范围约0.5至1.0μm的深度d上。为了进行示例性的讨论，衬底60是p型衬底。蓝传感器在衬底60中形成，具有掺杂层或者阱61，为了进行举例说明，它也是p型的。所述光电转换装置可以是光电二极管10。光电二极管10可以是p-n结光电二极管、Schottky光电二极管或者任何其他适用的光电二极管，但是为了进行举例说明，作为PIN光电二极管处理，也如图8所示，是由p+区域46、在p阱61内的n-区域44构成的光电二极管。图8所示的剩余结构包括具有栅极18的复位晶体管、具有栅极26的源极跟随器晶体管、具有栅极24的行选择晶体管和触点22上的蓝输出端。浮动扩散区16位于触点17的下面和周围。p+区域48把光电二极管10连接到接地电路14。还表示了包围红/蓝像素单元90的浅沟槽隔离(STI)区域55。
图9表示通过图7直线9-9的部分地切除的剖面图并表示所述红传感器区域。所述红传感器还使用光电二极管13，并可以在蓝传感器光电二极管10下面，在具有掺杂p阱61的p衬底内形成。类似于蓝传感器光电二极管10，红光电二极管13是p-n结光电二极管、Schottky光电二极管或者任何其他适用光电二极管，但是为了进行举例说明，作为PIN光电二极管处理。
根据红光较长的波长(亦即，约650nm)以及所述波长的最优硅吸收，红传感器光电二极管13设置在比蓝传感器10深的结深度上。红传感器单元p-n结19设置在从所述衬底表面起大于约5μm的d’深度上。蓝传感器用的光电二极管10和红传感器用的光电二极管13之间的深度差，为二极管10、13提供物理的分离，没有其他颜色传感器区域，例如，在它们之间没有绿光电二极管，并在蓝和红传感器之间提供良好的颜色分离，减少串音。示于图9的剩余结构包括具有栅极30的复位晶体管、具有栅极38的源极跟随器晶体管、具有栅极36的行选择晶体管和触点34上的红输出端。浮动扩散区28位于触点27下面。n-区域40把红光电二极管13的n型区域42连接到浮动扩散区28。p+区域48把红光电二极管13连接到接地电路14。还示出STI区域55，它再一次把所述像素与相邻像素隔离。另外，STI区域56把组合红/蓝像素的下红光电二极管与上蓝光电二极管侧向分离，这进一步减少蓝电荷进入区域40或者28。
图7、图8和图9还示出源漏区域52、54，为了进行举例说明，它们都是n+型，用于复位、源极跟随器和行选择晶体管。如图7所示，浮动扩散节点16(图8)和28(图9)分别连接到源极跟随器栅极26、38。
图10表示红/蓝像素90′另一个实施例的顶视图。这个实施例类似于图7所描绘的，只是增加了具有相关联的栅极70、72的传输晶体管，所述栅极70、72把光电二极管10和13的n区域连接到各自的浮动扩散区16和28。类似地，除增加具有栅极70，72的传输晶体管外，图11和图12也分别类似于图8和图9。所述传输晶体管和相关联的栅极70控制在蓝光电二极管10产生的电荷到达浮动扩散区16。传输晶体管和相关联的栅极72控制在红光电二极管13产生的电荷到达浮动扩散区。另外，尽管3T和4T像素表示为本发明的示例性实施例，但是具有较少的或者较多的晶体管的其他像素电路体系结构也可以使用。
图13-16说明按照本发明在不同的处理阶段形成3T双色像素单元的示例性方法。为方便起见，本发明将描述为利用p/n光电二极管作为光电传感器，在p型衬底的p阱中形成；但是，本发明还可以被描述为在n型衬底的n阱中利用n/p光电二极管形成，并且其他光电传感器结构也可以利用。
如图13所示，形成第一衬底60。如图13所示，这个衬底60是p型硅衬底，带有在其上形成的p阱61。p型阱61可以在衬底60中的隔离区域55、56形成以前或者之后形成。可以这样进行所述p阱注入，使得像素阵列阱61与将包含用于控制该像素阵列的逻辑电路的p型外围逻辑阱具有不同的掺杂分布。如先有技术已知的，可以利用多次高能量注入来修整p型阱61的分布。
形成也示于图13中的隔离区域55、56，以便在电气上隔离随后将在其中形成各像素单元的衬底的各区域。隔离区域55、56可以通过任何已知的技术，诸如用LOCOS工艺热氧化下面的硅，或者通过蚀刻沟槽和用氧化物以STI(浅沟槽隔离)工艺填充它们。隔离区域55、56形成之后，若所述p型阱61还没有形成，则通过保护注入或者通过掩模注入来产生所述p型阱61。隔离区域56将蓝光电二极管10与红光电二极管13的浮动扩散区28侧向分离。
接着，通过众所周知的方法(例如，栅极氧化物的保护淀积；掺杂多晶硅；用于氮化硅化用的金属的淀积，以便形成硅化物，然后形成图案和蚀刻)，来形成像素传感器单元90的线路，所述线路包括：传输栅极70，72；复位晶体管栅极18，30；源极跟随器晶体管栅极26，38；和行选择晶体管栅极24，36。图14表示示例性实施例，具有用于复位晶体管18、源极跟随器晶体管26和行选择晶体管24的形成的栅极堆叠。
在栅极堆叠之后还形成浮动扩散区16、28和源极/漏极区域52、54。示于图14的掺杂区52是在p阱61中形成的，并掺杂为n型导电。为了举例说明，掺杂区52是n+掺杂，可以通过向衬底施加屏蔽，并通过离子注入来掺杂区52。形成源极/漏极区域注入之后，利用已知的技术在所述栅极堆叠的各侧面形成所述栅极堆叠的侧壁绝缘体。
图15表示n型区域40、42的注入，以便形成红光电二极管13。图15还表示用先有技术已知的方法注入蓝光电二极管10各区域、p+区域46和n-区域44。图15还表示加到复位晶体管18、源极跟随器晶体管26和行选择晶体管24的栅极堆叠上的绝缘侧壁。
在所述阶段基本上制成像素传感器单元10、13，而传统的处理方法可以用来形成绝缘、屏蔽和金属化层，以便把栅极线和其他接线连接到像素传感器单元。例如，整个表面可以用例如二氧化硅、硼硅玻璃(BSG)、磷硅玻璃(PSG)或者硼磷硅玻璃(BPSG)等钝化层88覆盖，该钝化层被化学机械抛光(CMP)平面化和蚀刻以便形成接触孔，然后将所述接触孔金属化以便形成触点。图16表示导电插塞17、20和22，它们在绝缘层88中形成，所述绝缘层可以是BPSG，涂敷在栅极堆叠上面。导电插塞17、20和22连接到有源区域，为Vaa20和Vout22提供到所述像素电路的触点。传统的导电层和绝缘层也可以用于将所述结构互联，并把所述像素连接外围电路。
如图8、9、11和12所示，在光辐射150轰击所述光电二极管时，光能量转换为电子，例如，所述电子被存储在光电二极管10、13的n区域中并被传输到浮动扩散区16和28。这种传输在3T实施例中可以在形成电子时出现，或者在4T实施例(图11、12)中可以以利用传输晶体管的选通传输的形式出现。
绿像素87示于图4(a)和4(b)中。利用形成传统像素单元的传统的处理技术形成所述绿像素传感器单元。
图17示出处理器系统300，后者包括成像器装置308(图1)，但是按照本发明，包含红/蓝像素的图像阵列与绿像素排列成阵列。成像器装置308可以从系统300接收控制或者其他数据。系统300包括处理器302，处理器302具有通过总线304与不同装置通信的中央处理单元(CPU)。一些连接到总线304的装置提供进出系统300的通信；输入/输出(I/O)装置306和成像器装置308就是这样的通信装置。其他连接到总线304的装置提供存储器，举例来说，包括随机访问存储器(RAM)310、硬盘驱动器312和一个或多个外围存储装置，诸如软盘驱动器314和光盘(CD)驱动器316。利用具有如上面联系图4-16描述的本发明的特性的像素阵列200来构成成像器装置308，如图1所示。随后，成像装置308可以连接到用于图像处理或者其他图像处理操作的处理器302。可以使用成像器装置308的基于处理器的系统的示例(不限于此)包括计算机系统、摄像机系统、扫描仪、机器视觉系统、车辆导航系统视频电话机、监视系统、自动聚焦系统、星体跟踪系统、运动检测系统、图像稳定系统等等。
上面描述的工艺和装置举例说明推荐的方法和许多可以使用和生产的典型的装置。上面的描述和附图说明达到本发明所述目的、特征和优点的实施例。但是，本发明不拟严格地限于上述的和举例说明的实施例。对本发明的任何修改，尽管当前不能预见，但落在以下权利要求书的精神和范围内的，都应该视为本发明的一部分。

Claims (118)

1.一种双色像素，它包括：
具有表面的衬底；
第一颜色分量光电转换装置，它位于所述衬底表面以下，光的第一波长的第一吸收深度上；和
第二颜色分量光电转换装置，它位于所述衬底表面以下，光的第二波长的第二吸收深度上；
其中，所述第一颜色分量光电转换装置和所述第二颜色分量光电转换装置在所述衬底内纵向重叠，使得所述第一颜色分量光电转换装置位于比所述第二颜色分量光电转换装置更接近所述衬底的表面的位置上，而且所述第一和第二颜色分量光电转换装置在深度方向上被所述衬底的不产生光生电荷的区域彼此隔开；以及
双色输出处理电路，它分别连接到所述第一和第二颜色分量光电转换装置，用于提供与所述第一和第二颜色分量光电转换装置各自产生的电荷对应的输出信号。
2.如权利要求1所述的双色像素，其中所述第一和第二颜色分量光电转换装置是光电二极管。
3.如权利要求2所述的双色像素，其中所述第一和第二光电二极管是PIN光电二极管。
4.如权利要求1所述的双色像素，其中所述第一颜色分量光电转换装置是蓝光传感器。
5.如权利要求4所述的第一颜色分量光电转换装置，其中所述蓝光传感器具有p-n结，所述p-n结位于从所述衬底顶面起从约0.5μm到约1.0μm的深度上。
6.如权利要求1所述的双色像素，其中所述第二颜色分量光电转换装置是红光传感器。
7.如权利要求6所述的光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从衬底顶面起约2.0μm或者更大的深度上。
8.如权利要求6所述的光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底顶面起约5.0μm或者更大的深度上。
9.如权利要求1所述的双色像素，其中还包括隔离区域，用于把所述第一颜色分量光电转换装置产生的电荷进入所述衬底内的接收所述第二颜色分量光电转换装置产生的电荷的区域的侧向电荷传输减到最小。
10.如权利要求9所述的双色像素，其中所述隔离区域是浅沟槽隔离区域。
11.如权利要求1所述的双色像素，其中所述第一颜色分量光电转换装置是四晶体管像素电路的一部分，所述四晶体管像素电路包括传输晶体管、复位晶体管、源极跟随器晶体管和行选择晶体管。
12.如权利要求11所述的第一颜色分量光电转换装置，其中还包括与所述第一光电转换装置相邻地形成的掺杂区，用于接收从所述第一光电转换装置传输来的图像电荷。
13.如权利要求12所述的第一颜色分量光电转换装置，其中所述掺杂区是n+。
14.如权利要求12所述的第一颜色分量光电转换装置，其中所述掺杂区是浮动扩散区。
15.如权利要求12所述的第一颜色分量光电转换装置，其中还包括形成在所述第一光电转换装置和所述掺杂区之间的传输栅极，用于选通累积在所述掺杂区的图像电荷。
16.如权利要求1所述的双色像素，其中所述第二颜色分量光电转换装置是四晶体管像素电路的一部分，所述四晶体管像素电路包括传输晶体管、复位晶体管、源极跟随器晶体管和行选择晶体管。
17.如权利要求16所述的第二颜色分量光电转换装置，其中还包括与所述第二光电转换装置相邻地形成的第一掺杂区，用于接收从所述第二光电转换装置传输来的图像电荷。
18.如权利要求17所述的第二颜色分量光电转换装置，其中所述第一掺杂区是n-。
19.如权利要求17所述的第二颜色分量光电转换装置，其中所述第一掺杂区把所述第二颜色分量光电转换装置连接到用于接收从所述第二光电转换装置传输来的图像电荷的第二掺杂区。
20.如权利要求19所述的第二颜色分量光电转换装置，其中所述第二掺杂区是n+。
21.如权利要求19所述的第二颜色分量光电转换装置，其中所述第二掺杂区是浮动扩散区。
22.如权利要求19所述的第二颜色分量光电转换装置，其中还包括形成在所述第二光电转换装置和所述第二掺杂区之间的传输栅极，用于选通累积在所述第二掺杂区的图像电荷。
23.如权利要求1所述的双色像素，其中所述第一颜色分量光电转换装置是三晶体管像素电路的一部分，所述三晶体管像素电路包括复位晶体管、源极跟随器晶体管和行选择晶体管。
24.如权利要求23所述的第一颜色分量光电转换装置，其中所述第一光电转换装置产生的电荷传输到掺杂区。
25.如权利要求24所述的第一颜色分量光电转换装置，其中所述掺杂区是n+。
26.如权利要求24所述的第一颜色分量光电转换装置，其中所述掺杂区是浮动扩散区。
27.如权利要求1所述的双色像素，其中所述第二颜色分量光电转换装置是三晶体管像素电路的一部分，所述三晶体管像素电路包复位晶体管、源极跟随器晶体管和行选择晶体管。
28.如权利要求27所述的第二颜色分量光电转换装置，其中还包括与所述第二光电转换装置相邻地形成的第一掺杂区，用于接收从所述第二光电转换装置传输来的图像电荷。
29.如权利要求28所述的第二颜色分量光电转换装置，其中所述第一掺杂区是n-。
30.如权利要求28所述的第二颜色分量光电转换装置，其中所述第一掺杂区把所述第二颜色分量光电转换装置连接到用于接收从所述第二光电转换装置传输来的图像电荷的第二掺杂区。
31.如权利要求30所述的第二颜色分量光电转换装置，其中所述第二掺杂区是n+。
32.如权利要求30所述的第二颜色分量光电转换装置，其中所述第二掺杂区是浮动扩散区。
33.如权利要求1所述的双色像素，其中掺杂区把所述第一光电转换装置连接到接地电路。
34.如权利要求33所述的第一颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
35.如权利要求1所述的双色像素，其中掺杂区把所述第二光电转换装置连接到接地电路。
36.如权利要求35所述的第二颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
37.如权利要求1所述的双色像素，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在大小上不一致。
38.如权利要求37所述的双色像素，其中所述第一光电转换装置的所述掺杂区从顶部看时比所述第二光电转换装置的所述掺杂区占用较小的面积。
39.如权利要求1所述的双色像素，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在形状上不一致。
40.一种像素传感器单元阵列，它包括：
衬底，它包括排列成行和列的阵列的多个第一和第二像素；
所述第一像素包括：第一颜色分量光电转换装置，它位于所述衬底表面以下与对光的第一波长的最优吸收深度对应的第一深度上；以及第二颜色分量光电转换装置，它位于所述衬底的表面以下与对光的第二波长的最优吸收深度相应的第二深度上；
所述第一颜色分量光电转换装置和所述第二颜色分量光电转换装置在所述衬底内纵向重叠，使得所述第一颜色分量光电转换装置位于比所述第二颜色分量光电转换装置更接近所述衬底表面的位置上，而所述第一和第二颜色分量光电转换装置在深度方向上被所述衬底的不产生光生电荷的区域彼此隔开；
其中所述第二像素包括用于光的第三波长的第三颜色分量光电转换装置；以及
其中所述第一和第二像素在所述阵列中排列成交错图案。
41.如权利要求40所述的阵列，其中所述第一像素检测红和蓝颜色的光。
42.如权利要求40所述的阵列，其中所述第一颜色分量光电转换装置是蓝光传感器。
43.如权利要求42所述的第一颜色分量光电转换装置，其中所述蓝光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起从约0.5μm到约1.0μm的深度上。
44.如权利要求40所述的阵列，其中所述第二颜色分量光电转换装置是红光传感器。
45.如权利要求44所述的第二光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约2.0μm或者更大的深度上。
46.如权利要求44所述的第二光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约5.0μm或者更大的深度上。
47.如权利要求40所述的阵列，其中还包括隔离区域，用于把所述第一颜色分量光电转换装置产生的电荷进入所述衬底中接收所述第二颜色分量光电转换装置产生的电荷的区域的侧向电荷传输减到最小。
48.如权利要求40所述的阵列，其中掺杂区把所述第一光电转换装置连接到接地电路。
49.如权利要求48所述的第一颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
50.如权利要求40所述的阵列，其中掺杂区把所述第二光电转换装置连接到接地电路。
51.如权利要求50所述的第二颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
52.如权利要求40所述的阵列，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在大小上不一致。
53.如权利要求52所述的阵列，其中所述第一光电转换装置的所述掺杂区从顶部看时占用比所述第二光电转换装置的所述掺杂区小的面积。
54.如权利要求40所述的阵列，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在形状上不一致。
55.如权利要求40所述的阵列，其中每一个所述第二像素检测绿色的光。
56.如权利要求40所述的阵列，其中所述交错图案是棋盘图案。
57.一种成像系统，它包括：
排列成行和列的像素单元的阵列，每个像素单元可以用来响应由所述单元检测出的光强度而在扩散节点上产生至少一个电压，所述像素单元阵列包括多个第一像素单元和多个第二像素单元，所述第一和第二像素单元在所述阵列中排列成交错图案；
所述第一像素单元中的每一个包括：第一颜色分量光电转换装置，它位于衬底表面以下与对光的第一波长的最优吸收深度对应的第一深度上；以及第二颜色分量光电转换装置，它位于所述衬底的表面以下与对光的第二波长的最优吸收深度对应的第二深度上；
所述第一颜色分量光电转换装置和所述第二颜色分量光电转换装置在所述衬底内垂直重叠，使得所述第一颜色分量光电转换装置位于比所述第二颜色分量光电转换装置更接近所述衬底表面的位置，而所述第一和第二颜色分量光电转换装置在深度方向上被所述衬底的不产生光生电荷的区域彼此隔开；
其中所述第二像素单元中的每一个包括用于光的第三波长的第三颜色分量光电转换装置；以及
处理电路，它连接到用于从其中产生图像信号的所述阵列。
58.如权利要求57所述的系统，其中每一个所述第一像素单元都检测红和蓝颜色的光。
59.如权利要求57所述的系统，其中所述第一颜色分量光电转换装置是蓝光传感器。
60.如权利要求59所述的第一颜色分量光电转换装置，其中所述蓝光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起从约0.5μm到约1.0μm的深度上。
61.如权利要求57所述的系统，其中所述第二颜色分量光电转换装置是红光传感器。
62.如权利要求61所述的第二颜色分量光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约2.0μm或者更大的深度上。
63.如权利要求61所述的第二颜色分量光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约5.0μm或者更大的深度上。
64.如权利要求57所述的系统，其中每一个第二像素检测绿颜色的光。
65.如权利要求57所述的系统，其中还包括隔离区域，用于把所述第一颜色分量光电转换装置产生的电荷进入所述衬底中接收所述第二颜色分量光电转换装置产生的电荷的区域的侧向电荷传输减到最小。
66.如权利要求57所述的系统，其中掺杂区把所述第一光电转换装置连接到接地电路。
67.如权利要求66所述的第一颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
68.如权利要求57所述的系统，其中掺杂区把所述第二光电转换装置连接到接地电路。
69.如权利要求68所述的第二颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
70.如权利要求57所述的系统，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在大小上不一致。
71.如权利要求70所述的系统，其中所述第一光电转换装置的所述掺杂区从顶部看时占用比所述第二光电转换装置的所述掺杂区小的面积。
72.如权利要求57所述的系统，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在形状上不一致。
73.一种成像装置，它包括：
形成在衬底内的掺杂层；
形成在所述掺杂层中的第一和第二像素单元的阵列；
其中所述第一像素单元中的每一个包括：第一颜色分量光电转换装置，它位于衬底表面以下与对光的第一波长的最优吸收深度对应的第一深度上；以及第二颜色分量光电转换装置，它位于所述衬底的表面以下与对光的第二波长的最优吸收深度对应的第二深度上；
其中所述第一颜色分量光电转换装置和所述第二颜色分量光电转换装置在所述衬底内纵向重叠，使得所述第一颜色分量光电转换装置位于比所述第二颜色分量光电转换装置更接近所述衬底表面的位置，而所述第一和第二颜色分量光电转换装置在深度方向上被所述衬底的不产生光生电荷的区域彼此隔开；
其中每一个所述第二像素单元包括用于光的第三波长的第三颜色分量光电转换装置；以及
信号电路，它形成在所述衬底内并在电气上连接到所述阵列，用于接收和处理代表从所述阵列输出的图像的信号，并用于提供代表所述图像输出的输出信号。
74.如权利要求73所述的成像装置，其中每一个所述第一像素单元检测红和蓝颜色的光。
75.如权利要求73所述的成像装置，其中所述第一颜色分量光电转换装置是蓝光传感器。
76.如权利要求75所述的第一颜色分量光电转换装置，其中所述蓝光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起从约0.5μm到约1.0μm的深度上。
77.如权利要求73所述的成像装置，其中所述第二颜色分量光电转换装置是红光传感器。
78.如权利要求77所述的第二颜色分量光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约2.0μm或者更大的深度上。
79.如权利要求77所述的第二颜色分量光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约5.0μm或者更大的深度上。
80.如权利要求73所述的成像装置，其中每一个所述第二像素检测绿颜色的光。
81.如权利要求73所述的成像装置，其中还包括隔离区域，用于把所述第一颜色分量光电转换装置产生的电荷进入所述衬底的接收所述第二颜色分量光电转换装置产生的电荷的区域的侧向电荷传输减到最小。
82.如权利要求73所述的成像装置，其中掺杂区把所述第一光电转换装置连接到接地电路。
83.如权利要求82所述的第一颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
84.如权利要求73所述的成像装置，其中掺杂区把所述第二光电转换装置连接到接地电路。
85.如权利要求84所述的第二颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
86.如权利要求73所述的成像装置，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在大小上不一致。
87.如权利要求86所述的成像装置，其中所述第一光电转换装置的所述掺杂区从顶部看时占用比所述第二光电转换装置的所述掺杂区小的面积。
88.如权利要求73所述的成像装置，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在形状上不一致。
89.一种用于形成具有两个颜色传感器的像素传感器单元的方法，所述方法包括：
在衬底内，在所述衬底表面以下与对光的第一波长的最优吸收深度对应的第一深度上，形成第一颜色分量光电转换装置；以及
在所述衬底内，在所述衬底表面以下与对光的第二波长的最优吸收深度对应的第二深度上，形成第二颜色分量光电转换装置，其中所述第二颜色分量光电转换装置在所述衬底内被所述衬底的不包括光电转换装置的区域与所述第一颜色分量光电转换装置隔开；
其中以在所述衬底内纵向重叠的形式形成所述第一颜色分量光电转换装置和所述第二颜色分量光电转换装置，使得所述第一颜色分量光电转换装置位于比所述第二颜色分量光电转换装置更接近所述衬底表面的位置上，而所述第一和第二颜色分量光电转换装置在深度方向上被所述衬底的不产生光生电荷的区域隔开。
90.如权利要求89所述的方法，其中所述第一颜色分量光电转换装置是蓝光传感器。
91.如权利要求90所述的第一颜色分量光电转换装置，其中所述蓝光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起从约0.5μm到约1.0μm的深度上。
92.如权利要求89所述的方法，其中所述第二颜色分量光电转换装置是红光传感器。
93.如权利要求92所述的光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约2.0μm或者更大的深度上。
94.如权利要求92所述的光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约5.0μm或者更大的深度上。
95.如权利要求89所述的方法，其中还包括隔离区域，用于把所述第一颜色分量光电转换装置产生的电荷进入所述衬底的接收所述第二颜色分量光电转换装置产生的电荷的区域的侧向电荷传输减到最小。
96.如权利要求89所述的方法，其中掺杂区把所述第一光电转换装置连接到接地电路。
97.如权利要求96所述的第一颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
98.如权利要求89所述的方法，其中掺杂区把所述第二光电转换装置连接到接地电路。
99.如权利要求98所述的第二颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
100.如权利要求89所述的方法，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在大小上不一致。
101.如权利要求100所述的方法，其中所述第一光电转换装置的所述掺杂区从顶部看时占用比所述第二光电转换装置的所述掺杂区小的面积。
102.如权利要求89所述的方法，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在形状上不一致。
103.一种用于形成像素传感器单元阵列的方法，所述方法包括：
在衬底上成多个第一和第二像素，其中所述多个第一和第二像素排列成行和列的阵列；
在所述第一像素中，在所述衬底表面以下与对光的第一波长的最优吸收深度对应的第一深度上，形成第一颜色分量光电转换装置；
在所述第一像素中，在所述衬底表面以下与对光的第二波长的最优吸收深度对应的第二深度上，形成第二颜色分量光电转换装置，其中所述第一颜色分量光电转换装置和所述第二颜色分量光电转换装置在所述衬底内纵向重叠，使得所述第一颜色分量光电转换装置位于比所述第二颜色分量光电转换装置更接近所述衬底表面的位置上，而所述第一和第二颜色分量光电转换装置在深度方向上被所述衬底的不产生光生电荷的区域彼此隔开；
形成包括用于光的第三波长的第三颜色分量光电转换装置的所述第二像素；以及
其中所述第一和第二像素在所述阵列中排列成交错图案。
104.如权利要求103所述的方法，其中所述第一颜色分量光电转换装置是蓝光传感器。
105.如权利要求104所述的第一颜色分量光电转换装置，其中所述蓝光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起从约0.5μm到约1.0μm的深度上。
106.如权利要求103所述的方法，其中所述第二颜色分量光电转换装置是红光传感器。
107.如权利要求106所述的光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约2.0μm或者更大的深度上。
108.如权利要求106所述的光电转换装置，其中所述红光传感器具有p-n结，所述p-n结位于从所述衬底的顶面起约5.0μm或者更大的深度上。
109.如权利要求103所述的方法，其中所述第三颜色分量光电转换装置是绿光传感器。
110.如权利要求103所述的方法，其中所述交错图案是棋盘图案。
111.如权利要求103所述的方法，其中还包括隔离区域，用于把所述第一颜色分量光电转换装置产生的电荷进入所述衬底的接收所述第二颜色分量光电转换装置产生的电荷的区域的侧向电荷传输减到最小。
112.如权利要求103所述的方法，其中掺杂区把所述第一光电转换装置连接到接地电路。
113.如权利要求112所述的第一颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
114.如权利要求103所述的方法，其中掺杂区把所述第二光电转换装置连接到接地电路。
115.如权利要求114所述的第二颜色分量光电转换装置，其中所述掺杂区是p+掺杂区。
116.如权利要求103所述的方法，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在大小上不一致。
117.如权利要求116所述的方法，其中所述第一光电转换装置的所述掺杂区从顶部看时占用比所述第二光电转换装置的所述掺杂区小的面积。
118.如权利要求103所述的方法，其中所述第一和第二颜色分量光电转换装置的掺杂区从顶部看时在形状上不一致。
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US7407830B2 (en) 2008-08-05
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TW200427079A (en) 2004-12-01
WO2004075299A1 (en) 2004-09-02
US6946715B2 (en) 2005-09-20
US20040161868A1 (en) 2004-08-19
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US20100070448A1 (en) 2010-03-18
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