CN1918695A - Stage drive method and stage drive apparatus, exposure apparatus, and device producing method - Google Patents
Stage drive method and stage drive apparatus, exposure apparatus, and device producing method Download PDFInfo
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- CN1918695A CN1918695A CN 200580002269 CN200580002269A CN1918695A CN 1918695 A CN1918695 A CN 1918695A CN 200580002269 CN200580002269 CN 200580002269 CN 200580002269 A CN200580002269 A CN 200580002269A CN 1918695 A CN1918695 A CN 1918695A
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Abstract
When a stage state is changed from a first state where one stage (WST1 (or WST2)) is positioned at a first region directly under a projection optical system (PL), to which liquid (Lq) is supplied, to a second state where the other stage (WST2 (or WST1)) is positioned at the first region, both stages are simultaneously driven in the X-axis direction while being maintained close to each other relative to the X-axis direction. As a consequence, the first state can be changed to the second state with the liquid supplied between the projection optical system and a specific stage directly under the system. This enables to reduce time from the completion of exposure operation at the one stage side to the start of exposure operation at the other stage side, enabling processing at high throughput. Further, since the liquid is always present on the image surface side of the optical projection system, occurrence of a water mark on an optical member, on the image surface side, of the projection optical system is prevented.
Description
Technical field
The invention relates to microscope carrier driving method and bearing table device, exposure device, reach manufacturing method, in more detail, be about microscope carrier driving method that can drive and the bearing table device that is suitable for implementing this microscope carrier driving method at two microscope carriers that the zone of the first area in including the local two-dimensional surface of supplying of liquid be moved, supply fluid and make the exposure device of base plate exposure between projection optical system and substrate, and the manufacturing method that uses this exposure device by projection optical system and this liquid.
Background technology
Known, supplying to make semiconductor element (integrated circuit etc.), the lithography step of electronic components such as liquid crystal display cells, the main reduced projection exposure device (so-called stepper) that uses stepping to repeat (step and repeat) mode, or the projection aligner of step-scan (step and scan) mode (so-called scanning stepper (being also referred to as scanning machine)), with mask or graticule (below, be referred to as " graticule ") pattern image pass through projection optical system, be needed on a plurality of each irradiation area on the sensing optical activity substrate (below, be called " substrate " or " wafer ") of the wafer that is coated with photoresist (emulsion) or glass plate etc.
The resolution R of the projection optical system that projection aligner possessed, can represent with Rayleigh (Rayleigh) formula of following formula (1):
R＝K
1×λ/NA (1)
At this, λ is an exposure wavelength, and NA is the numerical aperture of projection optical system, K
1Be to handle coefficient.Because the employed exposure wavelength of formula (1) (wavelength of exposure light) is short more, and the numerical aperture of projection optical system (NA) is big more, resolution R is then high more.Therefore, miniaturization along with integrated circuit, the exposure wavelength that is used in projection aligner is short wavelengthization more every year then, is the also practicability of exposure device of light source at present with the ArF excimer laser (wavelength 193nm) than KrF excimer laser (wavelength 248nm) short wavelength.Again, the numerical aperture of projection optical system also increases gradually.
When exposing, same with resolution, the depth of focus (DOF) is also very important.Depth of focus δ can represent with following formula (2):
δ＝K
2×λ/NA
2 (2)
At this, K
2Be to handle coefficient.According to formula (1), formula (2), in order to improve resolution R,, make numerical aperture NA become big (big NAization) if exposure wavelength is shortened, learn that then depth of focus δ can diminish.At projection aligner, be that the image planes of the surface engagement projection optical system of wafer are exposed, therefore, the preferably answers the tool degree big for depth of focus δ.
Yet by the short wavelengthization of above-mentioned exposure light and the big NAization of projection optical system, depth of focus δ more and more diminishes.Again, exposure wavelength becomes in the future that more the short wavelengthization is definite, if keep this trend, it is too small that depth of focus δ then can become, and the anxiety of the focus nargin deficiency when producing exposure actions.
Therefore, be used as exposure wavelength is shortened, and than making the depth of focus become the method for big (broadness) in the air, utilize the exposure device of immersion method then to cause recently and gaze at.Utilize the exposure device of this immersion method, know: below projection optical system and between the wafer surface, fill up the state of the liquid of water or organic solvent etc., (for example, with reference to the following patent documentation 1) that exposes with the part.The exposure device that this patent documentation 1 is put down in writing, it is the wavelength that utilizes the exposure light in liquid, doubly (n is a liquid refractive index can to become airborne 1/n, common 1.2～1.6 degree), improve resolution, and, can make the depth of focus expand as n doubly, promptly than making the depth of focus enlarge n in fact doubly in the air compared with not using immersion method can obtain projection optical system (manufacturing of supposing this kind projection optical system is possible) with this resolution equal resolution.
Yet the exposure device that patent documentation 1 is put down in writing is when wafer exchange, stage before wafer carrying bench leaves under the projection optical system, liquid temporarily need be reclaimed, make between the following and wafer surface of projection optical system, become dried state from wet condition.But, so,, need carry out the recovery and the supply of liquid if whenever when wafer exchange, the required time of the recovery that can determine liquid and supply can become the main cause that the production capacity of exposure device reduces.
As above-mentioned, the optical path space of the image planes side of projection optical system when wet condition becomes dried state, if continue dried state, is then being constituted projection optical system optical component (so-called forecourt, lens or glass plate etc. bottom again; Below, be called " front lens ") the surface, have the anxiety that produces water wave (washmarking).Again, if the situation of optical component (for example prism) of the member of formation of configuration autofocus mechanism, the optical component surface at the member of formation of this autofocus mechanism has the anxiety that produces water wave (washmarking) near this front lens.The generation of this water wave, the transmitance that then can become projection optical system reduce or the essential factor of flash of light (flare), and then maybe can become other knot of making projection optical system essential factor as mis-behave.Again, as if the situation in generation washmarkings such as above-mentioned prisms, the image planes that make wafer surface and projection optical system in automatic focusing mode are to the punctual anxiety that accurate precision then has reduction of facing.Again, if the generation of washmarking needs the replacing of front lens or optical component when serious, but it is changed required time and can become the essential factor that the running rate that makes exposure device reduces.
At this specification, when making the liquid beyond the water, the decorative pattern that is formed at front lens etc. is also referred to as water wave (washmarking) again.
Summary of the invention
The present invention, because above-mentioned situation, according to first viewpoint, a kind of microscope carrier driving method is proposed, be in the two-dimensional surface that includes the local supply of liquid the first area, with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area, drive first microscope carrier and second microscope carrier, wherein:
When the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, make this first microscope carrier and second microscope carrier, be maintained at and be the arbitrary state that closely connects state and contact condition on second direction of principal axis that intersects with this first direction of principal axis, and this first, second microscope carrier is driven simultaneously towards this second direction of principal axis.
At this, so-called " first microscope carrier and second microscope carrier are the state that closely connects ", be meant with from leakage liquid not between first microscope carrier and second microscope carrier, or the few degree of the leakage of liquid, make first microscope carrier and second microscope carrier be the state that closely connects.But the feasible value at the interval of first microscope carrier and second microscope carrier is because of differences such as the material of this two microscope carrier or the kinds of liquid.This specification is to stand in the performance that this viewpoint is used " first microscope carrier and second microscope carrier are the state that closely connects ".
According to this, first area in the two-dimensional surface that comprises local supply with liquid, with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area, when making first microscope carrier and the second microscope carrier drive, be positioned at the situation of second state of this first area at first state transition to another microscope carrier that is positioned at this first area from a microscope carrier, first, second microscope carrier, keep second direction of principal axis that intersects with first direction of principal axis and be each other and closely connect state or contact condition, and drive simultaneously towards second direction of principal axis.By this, forming the state that liquid soaks the zone at least one microscope carrier in first, second microscope carrier, frontier defense ends or suppresses clearance leakage liquid from first, second microscope carrier (two microscope carriers), and the limit can be from first state transition to the second state.That is, keep the state of liquid, through on both sides' microscope carrier, keeping the state of liquid, keep the state of liquid to another microscope carrier, needn't can make its migration through the full recovery of liquid, the step of supply once again from a microscope carrier.Therefore, will carry out with the short time from the migration energy of first state to the second state.
The present invention according to second viewpoint, proposes a kind of microscope carrier driving method, be in the two-dimensional surface that includes the local supply of liquid the first area, with the zone of the set scope of the second area of first direction of principal axis, one side that is positioned at this first area, drive first microscope carrier; Comprise this first area, with the zone of set scope in the 3rd zone of this first axial opposite side that is positioned at this first area, drive second microscope carrier, wherein:
When the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, make this first microscope carrier and second microscope carrier, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first, second microscope carrier is driven simultaneously towards this first direction of principal axis.
According to this, comprising the first area in the two-dimensional surface of the local supply of liquid, set scope zone with the second area of first direction of principal axis, one side that is positioned at this first area, drive first microscope carrier, comprising this first area, set scope zone with the 3rd zone of this first axial opposite side that is positioned at this first area, when driving second microscope carrier, when first state transition to another microscope carrier that is positioned at the first area from a microscope carrier is positioned at second state of first area, first microscope carrier and second microscope carrier, keep with first direction of principal axis and be the arbitrary state that closely connects state or contact condition, and drive simultaneously towards first direction of principal axis.By this, forming the state that liquid soaks the zone at least one microscope carrier in first, second microscope carrier, frontier defense ends or suppresses clearance leakage liquid from first, second microscope carrier, and the limit can be from first state transition to the second state.That is, keep the state of liquid, through on both sides' microscope carrier, keeping the state of liquid, keep the state of liquid to another microscope carrier, needn't can make its migration through the full recovery of liquid, the step of supply once again from a microscope carrier.Therefore, will carry out with the short time from the migration energy of first state to the second state.
The present invention according to the 3rd viewpoint, provides first bearing table device, possesses:
First, second microscope carrier, can be in the first area in the two-dimensional surface that includes the local supply of liquid, with the set scope zone drive of the second area of first direction of principal axis, one side that is positioned at this first area; And
Control device, when the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, this first microscope carrier and this second microscope carrier, keep second direction of principal axis that intersects with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, so that this first, second microscope carrier is controlled this first, second microscope carrier towards the mode that this second direction of principal axis moves simultaneously.
According to this, microscope carrier from first, second microscope carrier is positioned at first state of the first area of the two-dimensional surface that the local supply of liquid is arranged, when migrating to another microscope carrier and being positioned at second state of this first area, pass through control device, control first, second microscope carrier, make first, second microscope carrier keep second direction of principal axis that intersects with first direction of principal axis and be each other and closely connect state or contact condition, and move simultaneously towards second direction of principal axis.By this, forming the state that liquid soaks the zone at least one microscope carrier in first, second microscope carrier, frontier defense ends or suppresses clearance leakage liquid from first, second microscope carrier (two microscope carriers), and the limit can be from first state transition to the second state.That is, keep the state of liquid, through on both sides' microscope carrier, keeping the state of liquid, keep the state of liquid to another microscope carrier, needn't can make its migration through the full recovery of liquid, the step of supply once again from a microscope carrier.Therefore, will carry out with the short time from the migration energy of first state to the second state.
The present invention according to the 4th viewpoint, provides second bearing table device, possesses:
First microscope carrier can be in the first area in the two-dimensional surface that includes the local supply of liquid, mobile with the zone of the set scope of the second area of first direction of principal axis, one side that is positioned at this first area;
Second microscope carrier can comprise this first area, move with the set scope zone in the 3rd zone of this first axial opposite side that is positioned at this first area; And
Control device, make a microscope carrier from this first, second microscope carrier be positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, this first, second microscope carrier is controlled to, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, so that this first, second microscope carrier moves simultaneously towards this first direction of principal axis.
According to this, microscope carrier from first, second microscope carrier is positioned at first state of the first area of the two-dimensional surface that the local supply of liquid is arranged, when migrating to another microscope carrier and being positioned at second state of this first area, pass through control device, control first microscope carrier and second microscope carrier, first, second microscope carrier is kept with first direction of principal axis be the arbitrary state that closely connects state and contact condition, and move simultaneously towards first direction of principal axis.By this, forming the state that liquid soaks the zone at least one microscope carrier in first, second microscope carrier, frontier defense ends or suppresses clearance leakage liquid from first, second microscope carrier, and the limit can be from first state transition to the second state.That is, keep the state of liquid, through on both sides' microscope carrier, keeping the state of liquid, keep the state of liquid to another microscope carrier, needn't can make its migration through the full recovery of liquid, the step of supply once again from a microscope carrier.Therefore, will carry out with the short time from the migration energy of first state to the second state.
The present invention according to the 5th viewpoint, provides first exposure device, is supply fluid between projection optical system and substrate, by this projection optical system and this liquid, makes this base plate exposure by the energy light beam, possesses:
First microscope carrier can comprise first area under this projection optical system of waiting to supply this liquid, move with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this projection optical system;
Second microscope carrier can comprise this first area, mobile with the zone in the 3rd zone of the first axial opposite side that is positioned at this projection optical system;
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and second microscope carrier, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first, second microscope carrier is driven simultaneously towards this first direction of principal axis;
First mark detecting system is disposed at this second area top, for detecting the mark that is present on this first microscope carrier; And
Second mark detecting system is disposed at top, the 3rd zone, for detecting the mark that is present on this second microscope carrier.
According to this, when making first state transition to another microscope carrier that is positioned at the first area under the projection optical system for the treatment of supply fluid from a microscope carrier be positioned at second state of first area, by the microscope carrier drive system, keep first, second microscope carrier and first direction of principal axis and be and closely connect state and contact condition, this first, second microscope carrier is driven simultaneously towards first direction of principal axis.Therefore, keeping the state of liquid on projection optical system and at least one microscope carrier under it, frontier defense ends or suppresses clearance leakage liquid from first, second microscope carrier, and the limit can be from first state transition to the second state.Promptly, after using a microscope carrier to carry out the exposure actions of the substrate by projection optical system and liquid, during using another microscope carrier to begin till the exposure actions of the substrate by projection optical system and liquid, from keeping the state of liquid between a microscope carrier and the projection optical system, through between both sides' microscope carrier and projection optical system, keeping the state of liquid, to the state that keeps liquid between another microscope carrier and the projection optical system, the step that needn't pass through the full recovery of liquid, supply once again can make its migration.Therefore, the exposure actions with another microscope carrier of use after the exposure actions end of use one microscope carrier can begin with the short time.Again, in the image planes side of projection optical system, because of continuing to exist liquid, so can prevent from effectively to produce aforesaid water wave (washmarking) at the optical component of the image planes side of projection optical system.Again, because of carrying out together respectively that the exposure actions of the substrate on first microscope carrier and mark with the substrate on second microscope carrier of second mark detecting system are detected action (alignment actions), and the exposure actions of the substrate on second microscope carrier and mark with the substrate on first microscope carrier of first mark detecting system detected action (alignment actions), so, can expect the raising of production capacity compared to the situation of using a microscope carrier that substrate exchange, mark detection (aligning) and exposure actions are carried out one by one.
The present invention according to the 6th viewpoint, provides second exposure device, is supply fluid between projection optical system and substrate, by this projection optical system and liquid, makes this base plate exposure by the energy light beam, possesses:
First microscope carrier can comprise first area under this projection optical system of supplying this liquid, move with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area, and can this substrate of mounting;
Second microscope carrier can comprise this first area, mobile with the zone in the 3rd zone of the first axial opposite side that is positioned at this first area, and be used for set measurement; And
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and this second microscope carrier, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first microscope carrier and second microscope carrier are driven simultaneously towards this first direction of principal axis.
According to this, when first state transition to another microscope carrier that is positioned at the first area under the projection optical system for the treatment of supply fluid from a microscope carrier is positioned at second state of first area, by the microscope carrier drive system, first, second microscope carrier, keep with first direction of principal axis and be the arbitrary state that closely connects state and contact condition, first, second microscope carrier is driven simultaneously to first direction of principal axis.Therefore, keeping the state of liquid between projection optical system and at least one microscope carrier under it, frontier defense ends or suppresses clearance leakage liquid from first microscope carrier and second microscope carrier, and the limit can be from first state transition to the second state.Promptly, after substrate on first microscope carrier carried out the exposure actions of substrate by projection optical system and liquid, during using second microscope carrier till beginning measurement under the projection optical system, from keeping the state of liquid between first microscope carrier and the projection optical system, through between both sides' microscope carrier and projection optical system, keeping the state of liquid, to the state that keeps liquid between second microscope carrier and the projection optical system, the step that needn't pass through the full recovery of liquid, supply once again can make its migration.Again, after end is measured to second microscope carrier, till extremely first microscope carrier being begun to expose, too.Therefore, with the measurement action of use second microscope carrier after the exposure actions end of use first microscope carrier, and the exposure actions of use first microscope carrier after the measurement release of use second microscope carrier, can obtain the raising of production capacity with the short time.Again, in the image planes side of projection optical system, because of continuing to exist liquid, so can prevent from effectively to produce aforesaid water wave (washmarking) at the optical component of the image planes side of projection optical system.With using the exposure actions of the substrate of first microscope carrier to move, can carry out together according to measuring action with the detection of the substrate that uses second microscope carrier again.
The present invention according to the 7th viewpoint, provides the 3rd exposure device, is supply fluid between projection optical system and substrate, by this projection optical system and liquid, makes this base plate exposure, possesses:
First microscope carrier can comprise first area under this projection optical system of supplying this liquid, move with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area;
Second microscope carrier can independently move with this first microscope carrier in the zone that comprises this first area and this second area; And
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and this second microscope carrier, be maintained at and be the arbitrary state that closely connects state and contact condition on second direction of principal axis that intersects with this first direction of principal axis, and this first, second microscope carrier is driven simultaneously towards this second direction of principal axis.
According to this, when first state transition to another microscope carrier that is positioned at the first area under the projection optical system for the treatment of supply fluid from a microscope carrier is positioned at second state of first area, by the microscope carrier drive system, first, second microscope carrier, keep with second direction of principal axis (direction of the first direction of arranging with first area and second area is intersected) and be the arbitrary state that closely connects state and contact condition, first, second microscope carrier is driven simultaneously to second direction of principal axis.Therefore, keeping the state of liquid between projection optical system and at least one microscope carrier under it, frontier defense ends or suppresses clearance leakage liquid from first microscope carrier and second microscope carrier, and the limit can be from first state transition to the second state.Promptly, after a microscope carrier side is carried out the exposure actions of substrate by projection optical system and liquid, during another microscope carrier side begins the exposure actions of substrate by projection optical system and liquid till, from keeping the state of liquid between a microscope carrier and the projection optical system, through between both sides' microscope carrier and projection optical system, keeping the state of liquid, to the state that keeps liquid between another microscope carrier and the projection optical system, the step that needn't pass through the full recovery of liquid, supply once again can make its migration.Therefore, with the measurement action of use second microscope carrier after the exposure actions end of use one microscope carrier, and the exposure actions of another microscope carrier of use after the measurement release of use second microscope carrier, can obtain the raising of production capacity with the short time.Again, in the image planes side of projection optical system, because of continuing to exist liquid, so can prevent from effectively to produce aforesaid water wave (washmarking) at the optical component of the image planes side of projection optical system.
The present invention according to the 8th viewpoint, provides the 4th exposure device, is supply fluid between projection optical system and substrate, by this projection optical system and this liquid, makes this base plate exposure, possesses:
First microscope carrier, can the first area under comprising this projection optical system of waiting to supply this liquid, and with the zone of this first area zones of different in mobile;
Second microscope carrier, can comprise this first area, and with the zone of this second area zones of different in, independently mobile with this first microscope carrier;
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and this second microscope carrier, keep with set direction and be the state that closely connects, and this first, second microscope carrier is driven simultaneously towards this set direction; And
Suppress member, be arranged at least one side of this first microscope carrier and this second microscope carrier, it is positioned at the gap of this two microscope carrier during from this first state transition to this second state, prevents that by this this liquid is from this clearance leakage.
According to this, from can be in the first area that comprises under the projection optical system, and with the zone of this first area zones of different in move first, one microscope carrier of second microscope carrier, be positioned at first state of first area, when migrating to another microscope carrier and being positioned at second state of first area, by making first microscope carrier and second microscope carrier and first direction of principal axis be the state that closely connects, and make the inhibition member (be arranged at first, at least one side of second microscope carrier, in order to suppress the leakage of liquid) drive simultaneously towards this set direction with the state in the gap that is positioned at two microscope carriers, during from first state transition to the second state, so can do one's utmost to prevent that liquid from leaking between two microscope carriers.
Again,, use each first～the 4th exposure device of the present invention, make base plate exposure with this energy light beam at lithography step, by this, can be on substrate with the transfer printing well of element pattern precision, the result can improve the productivity of the microcomponent of high integration.Therefore, the present invention further from another viewpoint, also can claim manufacturing method, and it comprises any that uses first～the 4th exposure device of the present invention, makes the lithography step of base plate exposure with this energy light beam.
Description of drawings
Fig. 1 is the skeleton diagram of the exposure device of expression first example.
Fig. 2 is the vertical view of the wafer carrying bench device of expression first example.
Fig. 3 is the stereogram of the wafer carrying bench WST1 of presentation graphs 2.
Fig. 4 is the approximate vertical view of express liquid for row mechanism.
Fig. 5 is the calcspar of control system main composition of the exposure device of expression first example.
Fig. 6 is the figure (its 1) in order to the driving method of two wafer carrying bench of explanation parallel processing action.
Fig. 7 is the figure (its 2) in order to the driving method of two wafer carrying bench of explanation parallel processing action.
Fig. 8 is the figure (its 3) in order to the driving method of two wafer carrying bench of explanation parallel processing action.
Fig. 9 is the figure (its 4) in order to the driving method of two wafer carrying bench of explanation parallel processing action.
Figure 10 is the figure of expression flexible sealing component.
Figure 11 is the calcspar of control system main composition of the exposure device of expression second example.
Figure 12 is the vertical view of the wafer carrying bench device of expression second example.
Figure 13 A is the figure (its 1) in order to the driving method of two wafer carrying bench of the parallel processing action that second example is described.
Figure 13 B is the figure (its 1) in order to the driving method of two wafer carrying bench of the parallel processing action that second example is described.
Figure 14 A is the figure (its 2) in order to the driving method of two wafer carrying bench of the parallel processing action that second example is described.
Figure 14 B is the figure (its 2) in order to the driving method of two wafer carrying bench of the parallel processing action that second example is described.
Figure 15 A is the figure (its 3) in order to the driving method of two wafer carrying bench of the parallel processing action that second example is described.
Figure 15 B is the figure (its 3) in order to the driving method of two wafer carrying bench of the parallel processing action that second example is described.
Figure 16 is the vertical view of the wafer carrying bench device of expression the 3rd example.
Figure 17 A is in order to the wafer carrying bench of the parallel processing action that the 3rd example is described and the figure (its 1) of the driving method of measuring microscope carrier.
Figure 17 B is in order to the wafer carrying bench of the parallel processing action that the 3rd example is described and the figure (its 1) of the driving method of measuring microscope carrier.
Figure 18 A is in order to the wafer carrying bench of the parallel processing action that the 3rd example is described and the figure (its 2) of the driving method of measuring microscope carrier.
Figure 18 B is in order to the wafer carrying bench of the parallel processing action that the 3rd example is described and the figure (its 2) of the driving method of measuring microscope carrier.
Figure 19 A is the figure that suppresses the deformation of members example in order to explanation.
Figure 19 B is the figure that suppresses the deformation of members example in order to explanation.
Figure 19 C is the figure that suppresses the deformation of members example in order to explanation.
Figure 20 is the vertical view of the wafer carrying bench device of expression the 4th example.
Figure 21 is the figure that expression wafer carrying bench and measurement microscope carrier closely connect state.
Figure 22 A is in order to the wafer carrying bench of the parallel processing action that the 4th example is described and the figure (its 1) of the driving method of measuring microscope carrier.
Figure 22 B is in order to the wafer carrying bench of the parallel processing action that the 4th example is described and the figure (its 1) of the driving method of measuring microscope carrier.
Figure 23 A is in order to the wafer carrying bench of the parallel processing action that the 4th example is described and the figure (its 2) of the driving method of measuring microscope carrier.
Figure 23 B is in order to the wafer carrying bench of the parallel processing action that the 4th example is described and the figure (its 2) of the driving method of measuring microscope carrier.
Figure 24 is in order to the figure of the variation that the 4th example is described (its 1).
Figure 25 A is in order to the figure of the variation that the 4th example is described (its 2).
Figure 25 B is in order to the figure of the variation that the 4th example is described (its 2).
Figure 26 is in order to the flow chart of manufacturing method of the present invention to be described.
Figure 27 is the flow chart of concrete example of the step 204 of expression Figure 26.
The main element symbol description:
5: liquid supplying apparatus
6: liquid withdrawal system
10: illuminator
11: graticule microscope carrier drive division
12: basal disc
15: moving lens
16,18:X axle interferometer
17X, 117X:X moving lens
17Y, 117Y:Y moving lens
20: main control unit
21,22,27,28: supply pipe
21a, 21b, 21c, 22a, 22b, 22c, 27a, 28a: supply mouth
23,24,29,30: recovery tube
23a, 23b, 24a, 24b, 29a, 29b, 30a, 30b: reclaim mouth
32: liquid is for heat-extraction system
40: lens barrel
44,46,48:Y axle interferometer
47X, 49X:X moving lens
47Y
1, 47Y
2, 49Y
1, 49Y
2: the Y moving lens
49,49 ': groove
50,50 ', 50 ": the wafer carrying bench device
70: body
72a～72d: accessory plate
80～87: the wafer carrying bench drive division
80,81,136Y
1, 136Y
2, 138Y
1, 138Y
2, 186,187,188,189:Y axis linear guiding element (Y-axis linear motor)
82,83,84,85,86,87,136X, 138X, 180,181:X axis linear guiding element (X-axis linear motor)
90a: irradiation system
90b: receiving system
91: front lens
93,93 ', 93 ": containment member, flexible sealing component
94: flat board
95: the water-sprinkling tunicle
100: exposure device
111a: flange part
111b: section portion
111c: teat
116: the graticule interferometer
118,118A: interferometer system
124,124A: wafer carrying bench drive division
151X
1, 151X
2, 151X
3, 151X
4, 151Y
1, 151Y
2: interferometer
171: the first drive divisions
172: the second drive divisions
178,179:X movable piece
182,183,184,185:Y movable piece
195: the first bindiny mechanisms
196: the second bindiny mechanisms
ALG1, ALG2: alignment system
B11X, B12X, B11Y, B12Y, B13Y: survey axle
AX: optical axis
FM1, FM2: reference mark plate
H1, H2: chip holder
IA: exposure area
IF1, IF5, IF6:X axle interferometer
IF2, IF3, IF4:Y axle interferometer
IL: illumination light (exposure light)
Lq: liquid
MST, MST ': measure microscope carrier
PL: projection optical system
PU: projecting cell
R: graticule
RAa, Rab: reticle alignment detection system
RST: graticule microscope carrier
Sb, Sc, Se: end face
W1, W2: wafer
WST1, WST2, WST1 ', WST2 ', WST1 ", WST2 ": wafer carrying bench
Embodiment
First example:
Below, according to Fig. 1～Figure 10 first example of the present invention is described.
At Fig. 1, represent that the summary of the exposure device 100 of first example constitutes.This exposure device 100 is projection aligners of step-scan (step and scan) mode, promptly so-called scanning stepper (being also referred to as scanning machine).This exposure device 100 possesses: illuminator 10; Graticule microscope carrier RST is in order to keep being used as the graticule R that mask uses; Projecting cell PU; Wafer carrying bench device 50 has and is used as wafer carrying bench WST1, the WST2 that first, second microscope carrier uses; Off-axis is aimed at (off axisalignment) system ALG1, ALG2, is used as first, second mark detecting system; And the control system of these members.On wafer carrying bench WST1, WST2, mounting is as the wafer of substrate.At Fig. 1, mounting wafer W 1 on wafer carrying bench WST1, mounting wafer W 2 on wafer carrying bench WST2.
Aforementioned illuminator 10, TOHKEMY 2001-313250 communique and disclose corresponding to this No. 2003/0025890 specification of U.S. Patent Application Publication for example comprises: light source, illumination homogenizing optical system (containing light integrator), beam splitter, relay lens, variable ND filter, reticle blind etc. (all not icon).This illuminator 10, with the slit-shaped field of illumination on the graticule R that reticle blind limited, by illumination light (exposure light) IL (as the energy light beam) with roughly illumination illumination uniformly.At this, illumination light IL as an example, uses ArF excimer laser (wavelength 193nm).Again, light integrator can use fly's-eye lens, rod-type integrator (inner face reflection-type integrator) or diffractive optical elements etc.Other, illuminator 10 also can adopt Japanese kokai publication hei 6-349701 communique for example and corresponding to this United States Patent (USP) formation that the 5th, 534, No. 970 grade is disclosed.In the scope that domestic decree allowed of the specified designated state of this case (or selected selection state), quote above-mentioned each communique and corresponding to this U.S. Patent Application Publication specification or the announcement of United States Patent (USP), as the part of the record of this specification.
On aforementioned graticule microscope carrier RST, will form the graticule R that circuit pattern equals its pattern plane (below Fig. 1 is), for example fix by vacuum suction.Graticule microscope carrier RST, for example the graticule microscope carrier drive division 11 by comprising linear motor etc. is (at Fig. 1 icon not, with reference to Fig. 5), can little driving in perpendicular to the XY plane of the optical axis of illuminator 10 (consistent) in the optical axis AX of projection optical system PL described later, and can (, be made as Y direction) towards set scanning direction and drive with specified sweep speed with Fig. 1 paper orthogonal direction at this.
Position in the microscope carrier all-moving surface of graticule microscope carrier RST is by graticule laser interferometer (hereinafter referred to as " graticule interferometer ") 116, and by moving lens 15, for example the resolution with 0.5～1nm degree continues to detect.At this, in fact, though the Y moving lens and the X moving lens with reflecting surface of the X-direction of being orthogonal to of the reflecting surface with the Y direction of being orthogonal to are set on graticule microscope carrier RST, corresponding these moving lens are provided with graticule Y interferometer and graticule X interferometer, but are that these elements of representative are represented at Fig. 1 with moving lens 15, graticule interferometer 116.Also can be for example the end face mirror finish of graticule microscope carrier RST be formed reflecting surface (being equivalent to above-mentioned X moving lens, the reflecting surface of Y moving lens) again.Again, substitute the reflecting surface (being used in the position probing of the scanning direction (is Y direction at this example) of graticule microscope carrier RST) that extends towards X-direction, also can use at least one corner cube mirror (corner cube mirror) (for example retroreflector).At this, the interferometric side of graticule Y interferometer and graticule X, graticule Y interferometer for example, be to have 22 interferometers surveying major axis, according to the interferometric measured value of this graticule Y, except the Y position of graticule microscope carrier RST, the also rotation of the axial direction of rotation of energy measurement Z (θ z direction).
The measured value of graticule interferometer 116, deliver to main control unit 20 (at Fig. 1 icon not, with reference to Fig. 5), main control unit 20, calculate X, the Y of graticule microscope carrier RST, the position of θ z direction according to the measured value of this graticule interferometer 116, and calculate the result according to this and control graticule microscope carrier drive division 11, control the position (and speed) of graticule microscope carrier RST by this.
Above graticule R, with TTR (Through The Reticle) a pair of reticle alignment detection system RAa, the RAb that alignment system constituted of light that use exposure wavelength along X-direction every both set a distance settings, in order to the reference mark on graticule mark on the graticule R and the pairing reference mark plate is observed simultaneously by projection optical system PL.These reticle alignment detection systems RAa, RAb for example use with Japanese kokai publication hei 7-176468 communique and corresponding to this United States Patent (USP) same formation that the 5th, 646, No. 413 grade is disclosed.In the scope that domestic decree allowed of the specified designated state of this case (or selected selection state), quote above-mentioned communique and corresponding to this announcement of United States Patent (USP), as the part of the record of this specification.
Projecting cell PU is disposed at the below of the graticule microscope carrier RST of Fig. 1.Projecting cell PU comprises: lens barrel 40; And projection optical system PL, form by a plurality of optical elements that in this lens barrel 40, keep with set position relation.Projection optical system PL, the dioptric system that for example uses a plurality of lens (lens element) by common optical axis AX to be constituted with Z-direction.This projection optical system PL, for example the heart far away has set projection multiplying power (for example 1/4 times, 1/5 times or 1/8 times) in both sides.Therefore, if make the field of illumination illumination of graticule R with illumination light IL from illuminator 10, by illumination light IL by this graticule R, by projecting cell PU (projection optical system PL), the reduced image (reduced image of the part of circuit pattern) of the circuit pattern of the graticule R in this field of illumination is formed in surface coated to be had on the wafer of photoresist (emulsion).
Again, at the exposure device 100 of this example, owing to be the exposure that is suitable for immersion method, so follow numerical aperture NA to increase in fact, it is big that the aperture of graticule side also becomes as described later.Therefore,, satisfy amber and cut down (Petzval) condition now and become difficulty at the dioptric system that only constitutes with lens, and the trend that has the projection optical system of making to maximize.In order to avoid the maximization of this projection optical system, also can use the reflected refraction system (catadioptric system) that comprises speculum and lens and constitute.
Again, this example, the lens of the image planes side (wafer side) that constitutes projection optical system PL (below, be called " front lens ") 91 and wafer carrying bench WST1 or WST2 on wafer between (or between front lens 91 and wafer carrying bench WST1 or WST2), liquid in order to local supply fluid is set for heat-extraction system 32.At Fig. 1, expression constitutes the mouth of this liquid for the row unit, represents liquid for heat-extraction system 32.Again, liquid is supplied the formation of heat-extraction system 32 etc., will give aftermentioned.
Aforementioned wafer carrying bench device 50 possesses: basal disc 12; Wafer carrying bench WST1, WST2 are disposed at this top above basal disc 12; Interferometer system 118 (with reference to Fig. 5) comprises the interferometric position-measurement device of the position that is used for measuring described wafer carrying bench WST1, WST2; And wafer carrying bench drive division 124 (with reference to Fig. 5), in order to drive wafer carrying bench WST1, WST2.
Bottom surface at wafer carrying bench WST1, WST2, with the non-contact bearing of icon not, for example vacuum preloading type aerostatic bearing (below, be called " air cushion ") be arranged at a plurality of positions, by the static pressure of the forced air that is sprayed above 12 from described air cushion towards basal disc, wafer carrying bench WST1, WST2 are floated support non-contactly by the gap of number μ m degree above on basal disc 12.Again, wafer carrying bench WST1, WST2, by wafer carrying bench drive division 124, being independent of X-direction (left and right directions in Fig. 1 paper) and Y direction (with the direction of Fig. 1 paper quadrature) can drive along two-dimensional directional.
On basal disc 12, shown in the vertical view of Fig. 2, with a pair of X-axis linear guide (the X fixture that extends towards X-direction) 86,87 along Y direction every set arranged spaced.These X-axis linear guides 86,87, for example by interior establish permanent magnet group (along X-direction with the N utmost point magnet of set interval and alternate configurations and S utmost point magnet many groups constituted) magnetic pole unit constitute.Above these X-axis linear guides 86,87, each two saddle 82,84 and 83,85 is set, form state and noncontact that pairing X-axis linear guide 86,87 is surrounded from the top.Promptly, add up to four saddles 82,84,83,85, shape with cross section reverse U shape, form with X-axis linear guide 86,87 from the top and the side surround, pairing X-axis linear guide 86,87 is for example floated support with the gap of counting μ m degree by the air cushion of icon not respectively.Each saddle 82,84,83,85 for example constitutes by establishing along the armature unit of X-direction with the armature coil of set arranged spaced in respectively.That is, at this example, the X-axis linear guide 86 that saddle 82,84 that is made of the armature unit and magnetic pole unit are constituted constitutes the X-axis linear motor of moving-coil type respectively.Similarly, by saddle 83,85 and X-axis linear guide 87, constitute the X-axis linear motor of moving-coil (moving coil) type respectively.Below, to above-mentioned four each X-axis linear motors, use the symbol identical with the saddle 82,84,83,85 of each movable piece of formation, be called X-axis linear motor 82, X-axis linear motor 84, X-axis linear motor 83, X-axis linear motor 85.
In above-mentioned four X-axis linear motors, constitute the saddle of two X-axis linear motors 82,83, be individually fixed in an end and the other end of the long side direction of Y-axis linear guide 80 (being used as the Y fixture that extends towards Y direction).Again, constitute the saddle of other two X-axis linear motors 84,85, be fixed in Y-axis linear guide 81 end and the other end of (being used as the Y fixture that extends towards Y direction).Therefore, Y-axis linear guide 80,81 by each a pair of X-axis linear motor 82,83,84,85, makes it drive respectively along X-axis.
Aforementioned each Y-axis linear guide 80,81 for example constitutes by establishing along the armature unit of Y direction with the armature coil of set arranged spaced in respectively.
One Y-axis linear guide 81 is arranged at the opening that is formed on wafer carrying bench WST1 with the insertion state.In the inside of the above-mentioned opening of this wafer carrying bench WST1, be provided with and have permanent magnet group (for example along Y direction with the N utmost point magnet of set interval and alternate configurations and S utmost point magnet many groups constituted) magnetic pole unit.Magnetic pole unit and Y-axis linear guide 81 constitute the Y-axis linear motor along the dynamic magnetic of Y direction driving with wafer carrying bench WST1 thus.Similarly, another Y-axis linear guide 80 is arranged at the opening that is formed on wafer carrying bench WST2 with the insertion state.In the inside of the above-mentioned opening of this wafer carrying bench WST2, be provided with and the same magnetic pole unit of wafer carrying bench WST1 side.Magnetic pole unit and Y-axis linear guide 80 constitute the Y-axis linear motor along moving magnetic (movingmagnet) type of Y direction driving with wafer carrying bench WST2 thus.Following, to these Y-axis linear motors, use the symbol identical with the linear guide 81,80 of each fixture of formation, be called Y-axis linear motor 81, Y-axis linear motor 80.
At this example, comprise X-axis linear motor 82～85 and Y-axis linear motor 80,81, constitute wafer carrying bench drive division 124 shown in Figure 5.Constitute above-mentioned each linear motor of this wafer carrying bench drive division 124, then by main control unit shown in Figure 5 20 controls.
Again, slightly different by the thrust that a pair of X-axis linear motor 84,85 (or 82,83) is produced respectively, can control wafer microscope carrier WST1 the shaking partially of (or WST2) (yawing).
At this example, each wafer carrying bench WST1, WST2, though with single microscope carrier icon, in fact, possess: the microscope carrier body is driven respectively by Y-axis linear motor 81,80; Wafer station, by Z leveling driving mechanism (for example voice coil loudspeaker voice coil engine) mounting in this microscope carrier upper part of body, to the direction of rotation (θ x direction) around Z-direction and the X-axis, the little driving of direction of rotation (θ y direction) around the Y-axis relatively of microscope carrier body.
On aforementioned wafer carrying bench WST1 (on the wafer station), as shown in Figure 1, chip holder H1 is set, by maintenance wafer W 1 such as vacuum suction.Chip holder H1 shown in the stereogram of Fig. 3, possesses: body 70, and overlook (observing) and roughly be square from the top; Four accessory plate 72a～72d are disposed in the mode that is overlapped in body 70 from the top around the mounting zone of wafer W 1.The surface of these accessory plates 72a～72d forms the surperficial roughly the same height with wafer W 1.Again, accessory plate 72a～72d also can be made of a member.Again, if can keep liquid Lq in the image planes side of projection optical system PL, also can be between wafer surface and accessory plate surface the section of having poor.
On wafer carrying bench WST1, X moving lens 17X (having reflecting surface with the X-axis quadrature at the end (+X side) of X-direction) is extended towards Y direction, Y moving lens 17Y (having reflecting surface with the Y-axis quadrature at the end (+Y side) of Y direction) is extended towards X-direction.Each reflecting surface to these moving lens 17X, 17Y, as shown in Figure 2, will be from interferometric interferometer light beam (the surveying long light beam) projection that constitutes interferometer 118 (with reference to Fig. 5) of system described later, by receiving this reverberation with each interferometer, will be from the reference position of each moving lens reflecting surface the displacement measurement of (generally being in projecting cell PU side, or the side of alignment system ALG1 configuration stationary mirror) as datum level, by this, measure the two-dimensional position of wafer carrying bench WST1.The preferably also is made as the height roughly the same with wafer W 1 for moving lens 17X, 17Y top.
At this, as shown in Figure 3, between each accessory plate 72a～72d and wafer W 1, though there is clearance D, the size of clearance D is to set in the mode that becomes 0.1～1mm.Therefore again, in wafer W 1, though have breach (breach of V font) in its part, the size of breach also is a 1mm degree only, the Therefore, omited icon.
Again, accessory plate 72a forms circular open in its part, in its opening, embeds reference mark plate FM1.Reference mark plate FM1 is to make its surface and accessory plate 72a for roughly simultaneously same.On the surface of reference mark plate FM1, form first reference mark that at least one pair of reticle alignment is used, and as described later with second reference mark that alignment system ALG1 was detected (all not icon) etc.
On aforementioned wafer carrying bench WST2 (on the wafer station), as shown in Figure 1, chip holder H2 is set, by maintenance wafer W 2 such as vacuum suction.This chip holder H2 is to constitute same with aforesaid chip holder H1.Therefore, in the circular open of a part that is formed at an accessory plate that constitutes this chip holder H2, embed reference mark plate FM2 (at Fig. 1 icon not, with reference to Fig. 2).
Again, on wafer carrying bench WST2, X moving lens 117X (having reflecting surface with the X-axis quadrature at the end (X side) of X-direction) is extended towards Y direction, Y moving lens 117Y (having reflecting surface with the Y-axis quadrature at the end (+Y side) of Y direction) is extended towards X-direction.Each reflecting surface to these moving lens 117X, 117Y, as shown in Figure 2, will be from interferometric interferometer light beam (the surveying long light beam) projection of formation interferometer described later system 118, by receiving this reverberation with each interferometer, to measure the two-dimensional position of wafer carrying bench WST2 by this from the displacement measurement of the reference position of each moving lens reflecting surface.
For example, the end face of wafer carrying bench WST1, WST2 can be formed moving lens (reflecting surface that is equivalent to aforesaid moving lens 17X, 17Y, 117X, 117Y) as mirror finish again.
Again, at the face of wafer carrying bench WST1, WST2 side opposite to one another, for example wafer carrying bench WST1-the X side, comprehensive at it, as shown in figure 10, attach containment member 93.This containment member 93 for example uses by containing the flexible sealing component that fluorubber etc. is constituted.
Again, substitute wafer carrying bench WST1-the X side, also containment member 93 can be attached at wafer carrying bench WST2+the X side, also containment member 93 can be attached at wafer carrying bench WST1-X side and wafer carrying bench WST2+X side both sides.
Get back to Fig. 1, respectively every same distance in projecting cell PU+the X side ,-position of X side, dispose aforesaid off-axis alignment system (below, outline be " alignment system ") ALG1, ALG2 respectively.In fact these alignment systems ALG1, ALG2, are to be installed in order to keep the retaining member of projecting cell PU.These alignment systems ALG1, ALG2, for example use the sensor of FIA (FieldImage Alignment) system of image processing mode, this image processing mode, be that (the detection light beam irradiates of wideband (broad band) that will not make the photoresist sensitization on the wafer is in object tag with the picture of object tag, by from the reverberation of this object tag knot picture in sensitive surface) with after the picture of the pointer of icon (being arranged at the pointer pattern on the dial plate alignment system ALG1, ALG2 in) uses photographic element (CCD etc.) to photograph, these photography signals are exported.Again, alignment system ALG1, ALG2, be not limited to the FIA system, to be concerned with (coherent) detection with rayed in object tag, detection is from scattered light or diffraction light that this object tag produced, or make two diffraction light producing from this object tag (for example with the diffraction light of number of times, or diffraction is in equidirectional diffraction light) interfere the aligning sensor that detects, separately or appropriate combination use and certainly may.
At this example, alignment system ALG1 is to use in the alignment mark that is formed on the wafer W 1 on the wafer carrying bench WST1 and is formed on position measurement of the reference mark on the reference mark plate FM1 etc.Again, alignment system ALG2 is to use in the alignment mark that is formed on the wafer W 2 on the wafer carrying bench WST2 and is formed on position measurement of the reference mark on the reference mark plate FM2 etc.
From the data of these alignment systems ALG1, ALG2, as shown in Figure 5, be supplied to main control unit 20.
Secondly, the formation of interferometer system 118 etc. is described with reference to Fig. 2.As shown in Figure 2, interferometer system 118, have: three Y- axis interferometers 46,48,44, have respectively and survey axle BI2Y, a BI3Y, BI1Y, be parallel to the Y-axis of each inspection center of projection centre (optical axis AX) by projection optical system PL, alignment system ALG1, ALG2; And two X-axis interferometers 16,18, have respectively and survey axle BI1X, a BI2X, be parallel to the X-axis of the inspection center of the projection centre (optical axis AX) that links projection optical system PL and alignment system ALG1, ALG2.
At this, be positioned near the zone (first area) the position under the optical axis of projection optical system PL as wafer carrying bench WST1, when the wafer on this wafer carrying bench WST1 is exposed, manage the position of wafer carrying bench WST1 by X-axis interferometer 18, Y-axis interferometer 46.Below, the coordinate system of X-axis interferometer 18, Y-axis interferometer 46 thus respectively being surveyed the major axis defined is called the first exposure coordinate system.
Again, wafer carrying bench WST2 when the wafer on this wafer carrying bench WST2 is exposed, is managed the position of wafer carrying bench WST2 when projection optical system PL is positioned at the first area by X-axis interferometer 16, Y-axis interferometer 46.Below, with X-axis interferometer 16, Y-axis interferometer 46 each other coordinate system of surveying the major axis defined are called the second exposure coordinate system thus.
Again, as wafer carrying bench WST1, be positioned near the zone (second area) the position under the inspection center of alignment system ALG1, when being formed at the detection of alignment mark of the wafer on its wafer carrying bench WST1, in the time of for example will carrying out wafer aligned described later, manage the position of wafer carrying bench WST1 by X-axis interferometer 18, Y-axis interferometer 48.Below, the coordinate system of X-axis interferometer 18, Y-axis interferometer 48 thus respectively being surveyed the major axis defined is called the first alignment coordinates system.
Again, as wafer carrying bench WST2, be positioned near the zone (the 3rd zone) the position under the inspection center of alignment system ALG2, when being formed at the detection of alignment mark of the wafer on its wafer carrying bench WST2, in the time of for example will carrying out wafer aligned described later, manage the position of wafer carrying bench WST2 by X-axis interferometer 16, Y-axis interferometer 44.Below, with X-axis interferometer 16, Y-axis interferometer 44 each other coordinate system of surveying the major axis defined are called the second alignment coordinates system thus.
Learn from above-mentioned explanation,,, continue to shine respectively moving lens 17X, 117X in wafer carrying bench WST1, WST2 in the universe of the moving range of wafer carrying bench WST1, WST2 from the interferometer light beam of X-axis interferometer 18,16 at this example.Therefore, to X-direction, when using projection optical system PL exposure, even any situation such as when using alignment system ALG1, ALG2, the position of wafer carrying bench WST1, WST2 is then managed by X-axis interferometer 18,16.These X-axis interferometers 18,16 are the multiaxis interferometers with at least three optical axises that leave with respect to Y direction and Z-direction, and the output valve of each optical axis can independent measurement.Therefore, these X-axis interferometers 18,16, except the position measurement of the X-direction of wafer carrying bench WST1, WST2, also rotation amount (rolling amount (rolling)) and the axial rotation amount of Z (amount of shaking partially) around the energy measurement Y-axis.
Again, above-mentioned Y- axis interferometer 46,48,44 for example is two interferometers with each two optical axis that leaves with respect to Z-direction, and the output valve of each optical axis can independent measurement.Therefore, these Y- axis interferometers 46,48,44, except the position measurement of the Y direction of wafer carrying bench WST1, WST2, the also rotation amount (pitching amount (pitching)) around the energy measurement X-axis.
Again, above-mentioned multiaxis interferometer, also 45 ° of tiltables and be arranged at the reflecting surface of wafer carrying bench WST1, WST2, to being arranged at reflecting surface illuminating laser beam, detect station-keeping data with respect to the optical axis direction (Z-direction) of projection optical system PL with the pallet (not icon) of projection optical system PL mounting.
Secondly, illustrate that according to Fig. 4 aforementioned liquids is for heat-extraction system 32.This liquid possesses for heat-extraction system 32: liquid supplying apparatus 5; Liquid withdrawal system 6; Supply pipe 21,22,27,28 is connected in liquid supplying apparatus 5; And recovery tube 23,24,29,30, be connected in liquid withdrawal system 6.
Aforementioned liquids feeding mechanism 5 comprises: liquid tank; Force (forcing) pump; Temperature control equipment; And a plurality of valves, in order to control to the supply of the liquid of each supply pipe 21,22,27,28, stop etc.Each valve, for example the preferably is the use traffic control valve, the not only supply of liquid, stops, and can carry out the flow adjustment.The aforementioned temperature control device is to be used for fluid temperature with in the liquid tank, is adjusted into and takes in the temperature of the temperature same degree in the chamber (not icon) of the exposure device body that projecting cell PU for example etc. constituted.
Again, do not need and all to be located at exposure device 100 in order to the groove of supply fluid, force (forcing) pump, temperature control equipment, valve etc., can substitute by the equipment of factory that exposure device 100 is set etc. to major general's part.
Aforementioned liquids retracting device 6 comprises: liquid tank; Suction pump; And a plurality of valves, the recovery of the liquid by each recovery tube 23,24,29,30 respectively in order to control, stop etc.Each valve, the preferably is the valve of corresponding aforesaid liquid supplying apparatus 5 sides, the use traffic control valve.
Aforementioned recovery tube 30 is connected in liquid withdrawal system 6 with the one end, and other end is branched into two strands, forms recovery mouth 30a, 30b that (or setting) is made of the wide mouth of tail respectively in each branch end.These reclaim mouth 30a, 30b, are across supply mouth 27a, and across exposure area IA respectively subtend dispose in reclaiming mouth 29a, 29b.The front end that each reclaims mouth 30a, 30b and supply mouth 27a roughly disposes on the same straight line that is parallel to Y-axis.
Again, do not need and all to be located at exposure device 100 in order to the groove of withdrawal liquid, suction pump, valve etc., can substitute by the equipment of factory that exposure device 100 is set etc. to major general's part.
At this example, aforesaid liquid is to use the ultra-pure water that can pass through ArF excimer laser (wavelength 193nm) (below, when needing especially, simply be called " water ").Ultra-pure water can obtain in that semiconductor fabrication factory is easily a large amount of, and has coating the advantage that photoresist (emulsion) on the wafer or optical lens etc. have no adverse effects.Again, ultra-pure water has no adverse effects to environment, and because of the amount of impurity is extremely low, so also can expect the clean effect to the surface of the surface of wafer and front lens 91.
To the refractive index n of the water of ArF excimer laser, be roughly 1.44.In this water, the wavelength of illumination light IL then makes its short wavelength turn to the about 134nm of 193nm * 1/n=.
Aforementioned liquids feeding mechanism 5 and liquid withdrawal system 6 possess controller respectively, and each controller is controlled (with reference to Fig. 5) by main control unit 20.For example, when the direction shown in the solid arrow A in Fig. 4 (Y direction) makes wafer W 1 (or W2) mobile, the controller of liquid supplying apparatus 5, indication according to main control unit 20, open the valve that is connected in supply pipe 21 with set aperture, making other valve is full cut-off, by the supply mouth 21a～21c court-Y direction that is arranged at supply pipe 21 water is supplied between front lens 91 and the wafer W 1 (or W2).Again, at this moment, the controller of liquid withdrawal system 6, indication according to main control unit 20, open the valve that is connected in recovery tube 23 with set aperture, making other valve is full cut-off, by reclaiming mouth 23a, 23b between front lens 91 and the wafer W 1 (or W2) water being recycled to the inside of liquid withdrawal system 6.At this moment, main control unit 20, liquid supplying apparatus 5, liquid withdrawal system 6 are sent instruction, make from supply mouth 21a～21c court-Y direction and be supplied to the water yield between front lens 91 and the wafer W 1 (or W2), equate with the water yield that reclaims by recovery mouth 23a, 23b.Therefore, between front lens 91 and wafer W 1 (or W2), keep a certain amount of water Lq (with reference to Fig. 1).In this situation, the water Lq that remains between front lens 91 and the wafer W 1 (or W2) continues to replace.
Again, dotted arrow A in Fig. 4 ' shown in direction (+Y direction) when making wafer W 1 (or W2) mobile, the controller of liquid supplying apparatus 5, indication according to main control unit 20, open the valve that is connected in supply pipe 22 with set aperture, making other valve is full cut-off, by the supply mouth 22a～22c court+Y direction that is arranged at supply pipe 22 water is supplied between front lens 91 and the wafer W 1 (or W2).Again, at this moment, the controller of liquid withdrawal system 6, indication according to main control unit 20, open the valve that is connected in recovery tube 24 with set aperture, making other valve is full cut-off, by reclaim mouth 24a, 24b between front lens 91 and the wafer W 1 (or W2) to the inside recycle-water of liquid withdrawal system 6.At this moment, main control unit 20, liquid supplying apparatus 5, liquid withdrawal system 6 are sent instruction, make from supply mouth 22a～22c court+Y direction and be supplied to the water yield between front lens 91 and the wafer W 1 (or W2), equate with the water yield that reclaims by recovery mouth 24a, 24b.Therefore, between front lens 91 and wafer W 1 (or W2), keep a certain amount of water Lq (with reference to Fig. 1).In this situation, the water Lq that remains between front lens 91 and the wafer W 1 (or W2) continues to replace.
So, at this example, because of across exposure area IA at Y direction one side and opposite side, be provided with respectively each other in groups supply mouth group with reclaim mouth group, even so will with wafer court+Y direction or-when the either party of Y direction moves, between wafer W 1 (or W2) and front lens 91, make water stably continue to fill up.That is, even arbitrary situation of the negative scanning of positive scanner uni also can stably keep water between front lens 91 and wafer.
Again, because of water can flow on the wafer W 1 (or W2), so even on wafer W 1 (or W2), adhere to the foreign matter situation of (comprising the particle that disperses from photoresist), can be with this foreign matter water flushing.Again, because of supply be the both water of fixed temperature by liquid supplying apparatus 5 adjusted, and this water is to continue to replace, so even illumination light IL shines on wafer W 1 (or W2) when exposing, at wafer and flow between the water on this wafer and carry out heat exchange, can prevent that the temperature of wafer surface from rising.Again, at this example, because of water along flowing with the direction equidirectional of mobile wafer, so can not make absorbed foreign matter or hot liquid holdup under front lens the exposure area and it can be reclaimed.
Again, if will be in Fig. 4 during the mobile wafer W 1 of the direction shown in the solid arrow B (+directions X) (or W2), the controller of liquid supplying apparatus 5, indication according to main control unit 20, open the valve that is connected in supply pipe 27 with set aperture, making other valve is full cut-off, by the supply mouth 27a court+directions X that is arranged at supply pipe 27 water is supplied between front lens 91 and the wafer W 1 (or W2).Again, at this moment, the controller of liquid withdrawal system 6, indication according to main control unit 20, open the valve that is connected in recovery tube 29 with set aperture, making other valve is full cut-off, by reclaim mouth 29a, 29b with water from being recycled to the inside of liquid withdrawal system 6 between front lens 91 and the wafer W 1 (or W2).At this moment, main control unit 20 sends instruction to liquid supplying apparatus 5, liquid withdrawal system 6, makes from supply mouth 27a and is supplied to the water yield between front lens 91 and the wafer W 1 (or W2), equates with the water yield by recovery mouth 29a, 29b recovery.Therefore, between front lens 91 and wafer W 1 (or W2), keep a certain amount of water Lq (with reference to Fig. 1).In this situation, the water Lq that remains between front lens 91 and the wafer W 1 (or W2) continues to replace.
Again, if will be in Fig. 4 during the mobile wafer W 1 of the direction shown in the dotted arrow B ' (directions X) (or W2), the controller of liquid supplying apparatus 5, indication according to main control unit 20, open the valve that is connected in supply pipe 28 with set aperture, making other valve is full cut-off, by the supply mouth 28a court-directions X that is arranged at supply pipe 28 water is supplied between front lens 91 and the wafer W 1 (or W2).Again, at this moment, the controller of liquid withdrawal system 6, indication according to main control unit 20, open the valve that is connected in recovery tube 30 with set aperture, making other valve is full cut-off, by reclaim mouth 30a, 30b with water from being recycled to the inside of liquid withdrawal system 6 between front lens 91 and the wafer W 1 (or W2).At this moment, main control unit 20 sends instruction to liquid supplying apparatus 5, liquid withdrawal system 6, makes from supply mouth 28a and is supplied to the water yield between front lens 91 and the wafer W 1 (or W2), equates with the water yield by recovery mouth 30a, 309b recovery.Therefore, between front lens 91 and wafer W 1 (or W2), keep a certain amount of water Lq (with reference to Fig. 1).In this situation, the water Lq that remains between front lens 91 and the wafer W 1 (or W2) continues to replace.
By this, wafer W 1 (or W2) is same towards the situation that Y direction moves with making, though will with wafer court+directions X or-when the either party of directions X moves, water stably is filled between wafer and the front lens 91.Therefore, between what is called irradiation, during stepping,, also can between wafer and front lens 91, stably continue maintenance water even its step direction is any direction.
Again, more than, though to the situation explanation that between wafer and front lens 91, water is kept, but as described above, because of the surface of wafer surface and chip holder H1, H2 becomes roughly with one side, thus even chip holder H1 (or H2) is positioned at the situation of the position of the exposure area IA under the corresponding projecting cell P, with above-mentioned equally, water then remains in front lens 91 and chip holder H1 (or H2), also promptly and between the aforesaid accessory plate.During stepping,, also can stop the supply and the recovery of water if between wafer and front lens 91, can keep the situation of water again.
Except the mouth of the supply of carrying out water from X-direction or Y direction and recovery, for example also can be provided with in order to carry out the mouth of the supply and the recovery of water from tilted direction again.
Again, also can be irrelevant with the moving direction of wafer, continue supply fluid Lq from supply mouth 21a～21c, 22a～22c, 27a, 28a, from reclaiming mouth 23a, 23b, 24a, 24b, 29a, 29b, 30a, the lasting withdrawal liquid Lq of 30b.
Again, liquid supplies heat-extraction system to be not limited to the form of above-mentioned Fig. 4, soak the zone as long as can form liquid in the image planes side of projection optical system PL, can be suitable for various forms.
This example 100, further at retaining member in order to the not icon that keeps projecting cell PU, oblique fire is set goes into the multiple spot focal position detection system of mode, be (at Fig. 1 icon not by irradiation system 90a, with reference to Fig. 5) and receiving system 90b (at Fig. 1 icon not, with reference to Fig. 5) constitute, with for example Japanese kokai publication hei 6-283403 communique and corresponding to this United States Patent (USP) the 5th, it is same that 448,332 grades are disclosed.Irradiation system 90a has the light source with main control unit 20 control switchs of Fig. 5, penetrates light beam in order to the picture that forms most pin holes or slit towards the knot image planes of projection optical system PL.The light beam that this is emitted, the prism of the not icon of the lens barrel by being arranged at projecting cell PU (part of the optical system in the irradiation system 90a) shines in wafer surface from tilted direction optical axis AX.On the other hand, the folded light beam of these light beams that are reflected in wafer surface, other prism (part of the optical system in the receiving system 90b) reflection with the not icon of the lens barrel that is arranged at projecting cell PU is subjected to light by the photo detector in the receiving system 90b.
The focal shift signal (focus-out signal) of the output of the receiving system 90b of this focal position detection system (90a, 90b) is to be supplied to main control unit 20.Main control unit 20, when scan exposure described later etc., calculate focal shift signal (focus-out signal) from receiving system 90b, for example calculate the Z position and the θ x of wafer surface according to the S curve signal, θ y rotation, make the Z position and the θ x of the wafer surface of being calculated, θ y rotation becomes zero to the difference of described desired value, promptly will make focal shift is zero, by passing through wafer carrying bench drive division 124 control wafer microscope carrier WST1, moving of the Z-direction of WST2, and the inclination of two-dimensional directional (promptly, θ x, the rotation of θ y direction), execution makes the knot image planes of projection optical system PL and the consistent in fact automatic focusing (auto focus) and the automatic leveling (auto levelling) in surface of wafer in the irradiation area (zone common with aforesaid irradiation area) of illumination light IL.Again,, quote the announcement of above-mentioned Japanese kokai publication hei 6-283403 communique and corresponding United States Patent (USP), as the part of the record of this specification in the scope that domestic decree allowed of the specified designated state of this case (or selected selection state).
Again, the focal position detection system also can detect the position information of wafer surface by liquid, also can not detect by liquid.Again, the focal position detection system is not limited to the position information in the image planes side detection wafer surface of projection optical system PL, also can leave the position information that detects wafer surface from projection optical system PL.
At Fig. 5, represent the main composition of control system of the exposure device 100 of this example.This control system, the main control unit 20 that is constituted with the microcomputer (or work station) that will install all Comprehensive Control is that the center constitutes.
The action of each one when secondly, exposure device 100 exposures of this example being described.At this, as shown in Figure 2, the situation of exposing in wafer carrying bench WST1 side is described.
During the beginning of this exposure actions, at main control unit 20, always aim at (EGA according to for example enhancement mode of being carried out in advance, Enhanced Global Alignment) result of etc. wafer aligned etc., the limit monitors the measured value of interferometer 18,46, limit control X-axis linear motor 84,85 and Y-axis linear motor 81, and wafer carrying bench WST1 is moved in order to the exposure of first irradiation area of wafer W 1 with scanning starting position (acceleration starting position).At this exposure order, be the location management that on the first exposure coordinate system, carries out wafer carrying bench WST1.
Secondly, at main control unit 20, beginning is with respect to the relative scanning of graticule R (graticule microscope carrier RST) with the Y direction of wafer W 1 (wafer carrying bench WST1).During this relative scanning, main control unit 20, the limit monitors the measured value of aforesaid interferometer 18,46 and graticule interferometer 116, limit control graticule microscope carrier drive division 11 and Y-axis linear motor 81 (and X-axis linear motor 84,85).
Then, when two microscope carrier RST, WST1 accelerate to each targeted scans speed,, the light source of icon (ArF excimer laser apparatus) is not sent instruction, the beginning pulsed illumination at main control unit 20.Then, as two microscope carrier RST, when WST1 reaches the constant speed synchronous regime, make the area of the pattern of graticule R begin illumination, the beginning scan exposure by illumination light IL (ultraviolet pulse light) from illuminator 10.Though before this scan exposure begins, as above-mentioned, the pulsed illumination of light source begins, but by main control unit 20, the set blade synchronization of the movable reticle blind (not icon) in the illuminator 10 moves in graticule microscope carrier RST, prevents from by this before the beginning of scan exposure wafer W 1 to be carried out unnecessary exposure.
Then,, area of the pattern is comprehensively thrown light on, finish the scan exposure of first irradiation area on the wafer W 1 by finishing with throw light on the successively area of the pattern of graticule R of illumination light IL.By this, the pattern of graticule R dwindles first irradiation area that is needed on the wafer W 1 by projection optical system PL.
In this situation, after scan exposure finishes,, make movable reticle blinds (not icon) in the illuminator 10 be synchronized with graticule microscope carrier RST and move also by main control unit 20, prevent the unnecessary exposure of wafer W 1 by this.
As above-mentioned, after finishing the scan exposure of first irradiation area, by main control unit 20, by X-axis linear motor 84,85 and Y-axis linear motor 81 wafer carrying bench WST1 is moved along X, the stepping of Y direction, move to acceleration starting position (scanning starting position) in order to the exposure of second irradiation area.Between this irradiation during stepping, main control unit 20, according to the measured value of interferometer 18,46 with the position displacement of X, the Y of wafer carrying bench WST1, θ z direction in real time (real time) detect.And, according to this measurement result, main control unit 20, the position of control wafer microscope carrier WST1 makes the XY position displacement of wafer carrying bench WST1 become set state.Again, main control unit 20, according to the data of the θ z direction of wafer carrying bench WST1, at least one rotation of control graticule microscope carrier RST (graticule fine motion microscope carrier) and wafer carrying bench WST1 makes the swing offset compensation of its wafer side.
Then, after stepping finishes between irradiation,,, control the action of each one, second irradiation area on the wafer W 1 is carried out and above-mentioned same scan exposure with above-mentioned same by main control unit 20.
As above-mentioned, the scan exposure that carries out the irradiation area on the wafer W 1 repeatedly with do for the irradiation spacer step precession of irradiation exposure next time, it is whole to make the pattern of graticule R be needed on the irradiation area of the exposure object on the wafer W 1 in regular turn.
Again, in the exposure actions of above-mentioned step-scan mode to wafer W 1, according to the variation of the moving direction of wafer W 1, by main control unit 20, as described above, carrying out liquid then is natural for the switch control of each valve of the liquid supplying apparatus 5 of heat-extraction system 32 and liquid withdrawal system 6.Therefore, in the exposure actions of above-mentioned step-scan mode to wafer W 1, between front lens 91 and wafer W 1, keep and continue state that a certain amount of water is stably kept.
Secondly, to using the parallel processing action of two wafer carrying bench WST1, WST2, with reference to Fig. 2 and Fig. 6～Fig. 9 explanation.Again, in the following action, by main control unit 20, moving direction according to the wafer carrying bench that is positioned at the first area under the projecting cell PU, carry out the switch control of liquid as described above, under the front lens 91 of projection optical system PL, continue to fill up water for each valve of the liquid supplying apparatus 5 of heat-extraction system 32 and liquid withdrawal system 6.But, below, understand easily in order to make explanation, will omit about the explanation of the control of liquid supplying apparatus 5 and liquid withdrawal system 6.
Represent at Fig. 2: the wafer W on the wafer carrying bench WST1 1 is exposed in the step-scan mode as described above, and parallel therewith, in wafer carrying bench WST2 side, the state to the wafer aligned of wafer W 2 is carried out in the 3rd zone below alignment system ALG2.
As above-mentioned, wafer W 1 is carried out between exposure period in the step-scan mode, in wafer carrying bench WST2 side, then carry out action as described below.
That is, before above-mentioned wafer aligned,, do not carry out wafer exchange between the wafer transfer mechanism of icon and the wafer carrying bench WST2 in the left side " loaded " position.At this, so-called left side " loaded " position, be meant be set at reference mark plate FM2 be positioned at alignment system ALG2 under the position.In this situation,, before second reference mark on the alignment system ALG2 detection reference marking plate FM2, carry out the replacement (reset) of Y-axis interferometer 44 by main control unit 20 in the left side " loaded " position.
During the detection of above-mentioned second reference mark, main control unit 20, use alignment system ALG2 to get the into image of second reference mark, its signal of video signal is applied set processing, and the pointer center that the signal after it is handled by parsing detects with alignment system ALG2 is the position of second reference mark of benchmark.Again, main control unit 20, the measurement result of the interferometer 16,44 during according to the testing result of the position of its second reference mark and its detection, the position coordinates of calculating second reference mark in the second alignment coordinates system.
Secondly, main control unit 20, in the aforementioned second alignment coordinates system, manage the position in the XY face of wafer carrying bench WST2 by the limit, the limit uses alignment system ALG2 to detect the position information (to the position information of the inspection center of alignment system ALG2) of the alignment mark (sample labeling) of the specific a plurality of irradiation areas (illumination of sample zone) that are attached on the wafer W 2, obtains the position information of the sample labeling in the second alignment coordinates system.Then, main control unit 20, according to the position coordinates in the design of its testing result and specific irradiation area, carry out Japanese kokai publication sho 61-22249 communique for example and corresponding to this United States Patent (USP) the 4th, 780, the statistical calculation that No. 617 grades are disclosed is calculated the position coordinates in the second alignment coordinates system of a plurality of irradiation areas on the wafer W 2.That is,, carry out EGA (enhancement mode is always aimed at) as above-mentioned.And, main control unit 20, by the position coordinates in the second alignment coordinates system of a plurality of irradiation areas on wafer W 2 position coordinates of aforementioned second reference mark is subtracted calculation, the position that the position coordinates of a plurality of irradiation areas is converted to second reference mark is the position coordinates of initial point.Again, in the scope that domestic decree allowed of the specified designated state of this case (or selected selection state), the announcement of quoting above-mentioned communique and corresponding United States Patent (USP) is as the part of the record of this specification.
Above-mentioned on two wafer carrying bench WST1, WST2 the parallel and exposure order that carries out and wafer exchange/aim at order, common, be that wafer exchange/aligning order finishes at first.Therefore, finished the wafer carrying bench WST2 that aims at, then be wait state at set position of readiness.
And in wafer carrying bench WST1 side, at the time point to the end exposure of wafer W 1, main control unit 20 begins wafer carrying bench WST1, WST2 respectively to move towards both allocations shown in Figure 6.
And, wafer carrying bench WST1, WST2 moved to position shown in Figure 6 after, main control unit 20 then begins to make the action of wafer carrying bench WST1 and wafer carrying bench WST2 court+directions X driving simultaneously.Again, at the state of Fig. 6, wafer carrying bench WST1 is to contact by the flexible sealing component 93 that is arranged at wafer carrying bench WST1 with wafer carrying bench WST2.
As above-mentioned, by main control unit 20, wafer carrying bench WST1, WST2 are moved simultaneously, state at Fig. 6, remain in the front lens 91 of projecting cell PU and the water between the wafer W 1, then follow wafer carrying bench WST1, WST2 court+X side shifting, on wafer W 1 → wafer carrying bench WST1 (more specifically being chip holder H1) → wafer carrying bench WST2 (more specifically being chip holder H2), move in regular turn.Again, during above-mentioned move, wafer carrying bench WST1, WST2 then keep the position relation that contacts with each other by flexible sealing component 93 equally with the state of Fig. 6.At Fig. 7, expression: above-mentioned midway mobile, the state when water is present in wafer carrying bench WST1, WST2 (chip holder H1, H2) simultaneously promptly treats that from wafer carrying bench WST1 giving wafer carrying bench WST2 with water goes up state before.
From the state of Fig. 7,, then as shown in Figure 8, be formed on the state that keeps water between zone that comprises reference mark plate FM2 on the wafer carrying bench WST2 and the front lens 91 when further making wafer carrying bench WST1, WST2 court+directions X drive both set a distances simultaneously.In advance in this, main control unit 20 making interferometer light beam from Y-axis interferometer 46 can shine arbitrary time point in moving lens 117Y, is carried out the replacement of Y-axis interferometer 46.
Then, main control unit 20 begins the driving of wafer carrying bench WST1 towards right side " loaded " position shown in Figure 9.This right side " loaded " position is set at the position of reference mark plate FM1 position under alignment system ALG1.
Walk abreast with mobile the beginning towards the wafer carrying bench WST1 of above-mentioned right side " loaded " position, main control unit 20, a pair of first reference mark of using illumination light IL to carry out on the reference mark plate FM2 by a pair of reticle alignment RAa of system, RAb (with reference to Fig. 1) detects with relative position corresponding to projection image on the wafer of the reticle alignment mark on its graticule R.At this moment, the detection of a pair of first reference mark on the reference mark plate FM2 and the picture of reticle alignment mark is to be undertaken by projection optical system PL and water.
And, main control unit 20, according to the relative position data that this detected, with position information to each irradiation area on the wafer W 2 of second reference mark asked in advance, and the position of first reference mark of both having known and second reference mark relation, calculate the projected position (projection centre of projection optical system PL) of the pattern of graticule R and the relative position relation of each irradiation area on the wafer W 2.And, calculate the result according to it, main control unit 20, same with the situation of aforesaid wafer W 1, in the position of the second exposure coordinate system top management wafer carrying bench WST2, the limit is with step-scan mode pattern transfer each irradiation area on wafer W 2 with graticule R.
Parallel with the action of above-mentioned wafer carrying bench WST2 side, wafer carrying bench WST1 side, in the right side " loaded " position, and do not carry out wafer exchange between the wafer transfer system of icon, with the wafer exchange while or thereafter, use alignment system ALG1 to carry out the detection of second reference mark on the reference mark plate FM1 by main control unit 20.Main control unit 20 was carried out the replacement of Y-axis interferometer 48 earlier in the past in the detection of this second reference mark.Thereafter, main control unit 20, wafer carrying bench WST1 is managed on the limit on first pair of punctual coordinate system, and the EGA of alignment system ALG1 is used on the limit to wafer W 2.
After, by main control unit 20, carry out concurrent activity repeatedly with above-mentioned wafer carrying bench WST1, WST2.
When using the parallel processing of wafer carrying bench WST1 and wafer carrying bench WST2, at end exposure to the wafer on the wafer carrying bench, to the exposure of the wafer on another wafer carrying bench was wanted between elementary period, though can carry out (promptly from the state of a wafer carrying bench under projecting cell PU, water-clogged state on a wafer carrying bench), migrate to the state of another wafer carrying bench under projecting cell PU (promptly, water-clogged state on another wafer carrying bench), but this moment, as described above, keep wafer carrying bench WST1, WST2 is contact condition (state of Figure 10) in X-direction by flexible sealing component 93.Therefore, as shown in Figure 7, even wafer carrying bench WST1, WST2 each other chien shih water cross over the state of (liquid soaks the zone), by flexible sealing component 93 can prevent really sealing (liquid) by wafer carrying bench WST1, WST2 gap each other to the leakage of microscope carrier below.
Again, in the mobile way of wafer carrying bench WST1 and wafer carrying bench WST2, though can exist from interferometer 46,48 arbitrary interferometer light beams and not shine state (during moving in the moving lens 17Y of wafer carrying bench WST1, moving section), again, existence is not shone state in the moving lens 117Y of wafer carrying bench WST2 (during moving from interferometer 46,44 arbitrary interferometer light beams yet, moving section), but at this example, the two plates microscope carrier WST1 of this situation, the position of WST2 are to be managed by the uniform enconding machine of icon (linear encorder) not.Again, when using the uniform enconding machine to manage the position of wafer carrying bench, can shine in the time point of moving lens 17Y or 117Y, carry out the interferometric replacement of Y-axis by main control unit 20 from the interferometric interferometer light beam of arbitrary Y-axis.
As seen from the above description,, constitute at least a portion of microscope carrier drive system by wafer carrying bench drive division 124 at this example.Again, microscope carrier drive system thus constitutes at least a portion of bearing table device with wafer carrying bench WST1, WST2.
As above detailed description, according to exposure device 100 of this example and the bearing table device that this exposure device possessed, and at the performed wafer carrying bench WST1 of this exposure device 100, the driving method of WST2, be positioned at first state of first area (include the projecting cell PU (projection optical system PL) of liquid (water) supply under position) from a wafer carrying bench WST1 (or WST2), when migrating to another wafer carrying bench WST2 (or WST1) and being positioned at second state of first area, by microscope carrier drive system (124 etc.), wafer carrying bench WST1, WST2 is maintained at X-direction and is contact condition by flexible sealing component 93, wafer carrying bench WST1, WST2 drives simultaneously towards X-direction.
Therefore, at projection optical system PL (projecting cell PU) and specific wafer carrying bench (this wafer carrying bench that is positioned under it, follow to move and switch to another wafer carrying bench from a wafer carrying bench) between supplying the state of water, water can be from the clearance leakage of two plates microscope carrier, can make first state that is positioned at the first area from a wafer carrying bench WST1 (or WST2), migrate to second state that another wafer carrying bench WST2 (or WST1) is positioned at the first area.Promptly, after a wafer carrying bench side is carried out the exposure actions of wafer by projection optical system PL and water (liquid), during till extremely before another wafer carrying bench side is by the exposure actions of projection optical system PL and water (liquid) beginning wafer, can be from the state that water is kept, migrate to the state that water is kept, and do not need steps such as full recovery, supply once again through water.
Therefore, can shorten (promptly since the time that the exposure actions of a wafer carrying bench side finishes till the exposure actions of another wafer carrying bench side, be maintained common exposure device (non-liquid immersion exposure apparatus) same degree with non-immersion exposure), can obtain the raising of production capacity.Again, because of the image planes side at projection optical system PL continues to exist water, produce water wave (washmarking so can prevent optical component (for example the prism of front lens 91 and aforesaid multiple spot focal position detection system etc.) effectively in the image planes side of projection optical system PL, water mark), can keep the accuracy of detection of the knot of projection optical system PL for a long time well as performance and multiple spot focal position detection system.
Again, by parallel processing action, (use a wafer carrying bench, with wafer exchange, wafer aligned and exposure actions compared with the known exposure device that possesses the single-chip microscope carrier at aforementioned two wafer carrying bench WST1, WST2, carry out in regular turn), can obtain the raising of production capacity.
Again, the reason immersion exposure, carry out high image resolution and,, for example be used as the transfer printing that component specification (devicerule) can realize the fine pattern of 70～100nm degree so the pattern precision of graticule R can be needed on the wafer well than the exposure of the large focal spot degree of depth in the air.
Again,, contact the impact except can prevent from from the leaking of the gap of two plates microscope carrier, also can reduce wafer carrying bench WST1 to contact the time with wafer carrying bench WST2 by flexible sealing component 93 by wafer carrying bench WST1 and wafer carrying bench WST2 at this example.
Moreover, at this example, because of wafer carrying bench WST1-X side and wafer carrying bench WST2+the X side is not provided with the moving lens that interferometer is used, so even the two plates microscope carrier is to be the state that closely connects in X-direction, because of can closely not connecing mutually each other, the reflecting surface of the moving lens on the two plates microscope carrier do not face, so the two plates microscope carrier along X-direction drive simultaneously during, can not only monitor by interferometer system 118 position of two plates microscope carriers also can prevent reflecting surface attached water at moving lens.
Second example:
Secondly, according to Figure 11～Figure 15 B second example of the present invention is described.At this, to the same or equal part of aforementioned first example, use same symbol, and its explanation simplified or omit.At the exposure device of this second example, the formation of wafer carrying bench device etc., and use the parallel processing action of two wafer carrying bench then different with first example.Again, mark detecting system only is provided with one, and is also different with aforementioned first example.The formations of other parts etc. are then identical with aforementioned first example.Therefore, below, be that the center illustrates only, in order to avoid repeat specification with different place.
Figure 11 is the originally formation of the control system of the exposure device of second example of expression.If this Figure 11 and Fig. 5 are made comparisons, learn then to substitute the wafer carrying bench drive division 124 of aforementioned first example that wafer carrying bench drive division 124A is set, and this point is different with aforesaid first example at this second example.
At this second example, substitute aforesaid wafer carrying bench device 50, wafer carrying bench device 50 ' shown in Figure 12 is set.This wafer carrying bench device 50 ' as shown in figure 12, possesses: basal disc 12; Wafer carrying bench WST1 ' is first microscope carrier that is disposed at this top (in the paper front side of Figure 12) above basal disc 12, and wafer carrying bench WST2 ', is second microscope carrier; Six interferometer 151X
1, 151X
2, 151X
3, 151X
4, 151Y
1, 151Y
2, be the position measuring system that is used for measuring the position of these wafer carrying bench WST1 ', WST2 '; First drive division 171, second drive division 172, are overlooked (observing from the top) in order to wafer carrying bench WST1 ', WST2 ' are individually driven and are roughly H font; First bindiny mechanism 195 and second bindiny mechanism 196 (at Figure 12 icon not, with reference to Figure 11).
At this, by above-mentioned six interferometer 151X
1, 151X
2, 151X
3, 151X
4, 151Y
1, 151Y
2, the 118A of interferometer system of formation Figure 11; Comprise first drive division 171, second drive division 172, first bindiny mechanism 195 and second bindiny mechanism 196, constitute the wafer carrying bench drive division 124A of Figure 11.
Aforementioned first drive division 171 possesses: X-axis linear motor 136X is to use so that the linear actuators (linear actuator) that wafer carrying bench WST1 ' (or WST2 ') drives towards X-direction; And a pair of Y-axis linear motor 136Y
1, 136Y
2, use so that wafer carrying bench WST1 ' (or WST2 ') drives towards the Y direction of scanning direction integratedly with X-axis linear motor 136X.
Aforementioned X-axis linear motor 136X possesses: X-axis linear guide 181 is fixtures of X-direction being used as long side direction; And X movable piece 179, move along this X-axis linear guide 181 and towards X-direction.
X-axis linear guide 181, by the framework of extending towards X-direction, and the armature unit with a plurality of armature coils that portion within it sets along X-direction with set interval constitutes.In an end of the long side direction (X-direction) of this X-axis linear guide 181, fix a Y-axis linear motor 136Y
1Movable piece (Y movable piece) 184, fix another Y-axis linear motor 136Y in the other end
2Movable piece (Y movable piece) 185.
Aforementioned X movable piece 179 for example, has the shape of tubular (forming X-axis linear guide 181 from surrounding) on every side, and portion is provided with the movable piece yoke of the contrary U font in YZ cross section within it.At this movable piece yoke, along its long side direction alternate configurations a plurality of N utmost point permanent magnet and a plurality of S utmost point permanent magnet.Therefore, in the inner space of X movable piece 179, form AC magnetic field along X-direction.
In this situation, by X movable piece 179, and the electromagnetic interaction between the X-axis linear guide 181, the actuating force (Lorentz (Lorentz) power) that makes its generation that X movable piece 179 is driven towards X-direction.That is, X-axis linear motor 136X is the linear motor of dynamic magnetic electric power type of drive.
X movable piece 179-the Y side, first bindiny mechanism 195 (at Figure 12 icon not, with reference to Figure 11) is set, in order to wafer carrying bench WST1 ' (or WST2 ') is connected.This first bindiny mechanism 195 for example can use the magnetic attraction that utilizes electromagnetism, or the mechanism that wafer carrying bench WST1 ' (or WST2 ') is mechanically engaged etc.Main control unit 20 is controlled this first bindiny mechanism 195, makes wafer carrying bench WST1 ' (or WST2 ') be connected in X movable piece 179, or makes it remove its connection.Again, in connection status, wafer carrying bench WST1 ' (or WST2 ') is become the state of monolateral support by X movable piece 179.At Figure 12, expression X movable piece 179 states with the monolateral support of wafer carrying bench WST1 '.
One Y-axis linear motor 136Y
1, possess: Y-axis linear guide 188 is the fixtures that extend towards Y direction; And Y movable piece 184, move along this Y-axis linear guide 188.Aforementioned Y-axis linear guide 188 uses and the aforementioned X-axis linear guide 181 same armature unit that constitute.Again, Y movable piece 184 though be the shape of the contrary U font in XZ cross section, uses and the same magnetic pole unit that constitutes of aforesaid X movable piece.That is Y-axis linear motor 136Y,
1, be the linear motor of dynamic magnetic electric power type of drive.
Another Y-axis linear motor 136Y
2, possess: Y-axis linear guide 189 is the fixtures that extend towards Y direction; And Y movable piece 185, move along this Y-axis linear guide 189.This Y-axis linear motor 136Y
2, be and Y-axis linear motor 136Y
1The linear motor of the same dynamic magnetic electric power type of drive that constitutes.
Again, as described above, by Y movable piece 184,185 is fixed at the both ends of X-axis linear guide 181 respectively, if Y-axis linear motor 136Y
1, 136Y
2Produce the actuating force of Y direction, then wafer carrying bench WST1 ' (or WST2 ') is driven in Y direction with X-axis linear motor 136X.In this situation, by making Y-axis linear motor 136Y
1, 136Y
2The actuating force difference that is produced is by the axial rotation of Z of X-axis linear motor 136X energy control wafer microscope carrier WST1 ' (or WST2 ').
Aforementioned second drive division 172, be disposed at aforementioned first drive division 171-the Y side, in the paper of Figure 12, form roughly symmetry.This second drive division 172 is to constitute equally with above-mentioned first drive division 171.That is, this second drive division 172 possesses: X-axis linear motor 138X is the linear actuators that is made of X-axis linear guide 180 and X movable piece 178; Y-axis linear motor 138Y
1, constituted by the Y movable piece 182 and the Y-axis linear guide 186 of an end that is arranged at X-axis linear guide 180; And Y-axis linear motor 138Y
2, constituted by the Y movable piece 183 and the Y-axis linear guide 187 of the other end that is arranged at X-axis linear guide 180.
X movable piece 178+the Y side, same with X movable piece 179, second bindiny mechanism 196 (at Figure 12 icon not, with reference to Figure 11) is set, same with aforesaid first bindiny mechanism, in order to wafer carrying bench WST1 ' (or WST2 ') is connected.Main control unit 20 is controlled this second bindiny mechanism 196, makes wafer carrying bench WST1 ' (or WST2 ') be connected in X movable piece 178, or makes it remove its connection.Again, at Figure 12, expression wafer carrying bench WST1 ' is connected in the state that X movable piece 178 becomes monolateral support.
Aforementioned wafer carrying bench WST1 ' possesses: the microscope carrier body, and different with the wafer carrying bench WST1 that constitutes aforementioned first example, the magnetic pole unit part is not set; And wafer station, be be formed in this microscope carrier body top set aforementioned wafer carrying bench WST1 is same for (tilt) driving mechanism by the Z of icon tilts.At this above wafer station, setting+Y moving lens 47Y
1,-Y moving lens 47Y
2,+X moving lens 47X in ± Y side end and+the X side end near.
Aforementioned wafer carrying bench WST2 ' constitutes with above-mentioned wafer carrying bench WST1 ' same.On the wafer station that constitutes this wafer carrying bench WST2 ', setting+Y moving lens 49Y
1,-Y moving lens 49Y
2,-X moving lens 49X in ± Y side end and-the X side end near.
Again, at this second example, near the also side (X side) the moving lens of wafer carrying bench WST1 ' not being disposed at, and near at least one side of the side (+X side) the moving lens of wafer carrying bench WST2 ' not being disposed at, the flexible sealing component same with flexible sealing component shown in Figure 10 93 is set.
Again, as shown in figure 12, projection optical system PL-the Y side is every both set a distances, and the alignment system ALG of mark detecting system is set.
The aforementioned interferometer 118A of system as shown in figure 12, has: two Y- axis interferometer 151Y
1, 151Y
2, have the parallel survey major axis of Y-axis that links with inspection center with the projection centre (optical axis) of projection optical system PL and alignment system ALG; Two X-axis interferometer 151X
1, 151X
2, have respectively with at the projection centre (optical axis) of projection optical system PL and interferometer 151Y
1The parallel survey major axis of X-axis of survey major axis square crossing; And two X-axis interferometer 151X
3, 151X
4, have respectively with at inspection center and the interferometer 151Y of alignment system ALG
2The parallel survey major axis of X-axis of survey major axis square crossing.
Four X-axis interferometer 151X
1～151X
4, be with respect to Y direction and Z-direction is left and have the multiaxis interferometer of three optical axises at least, the output valve of each optical axis can independent measurement.Therefore, at these X-axis interferometers 151X
1～151X
4, except the position measurement of the X-direction of wafer carrying bench WST1 ' or WST2 ', also rotation amount (rolling amount) and the axial rotation amount of Z (amount of shaking partially) around the energy measurement Y-axis.
Above-mentioned two Y- axis interferometer 151Y
1, 151Y
2, be two interferometers that leave and have each two optical axis with respect to Z-direction, the output valve of each optical axis can independent measurement.Therefore, at these Y- axis interferometers 151Y
1, 151Y
2, except the position measurement of the Y direction of wafer carrying bench WST1 ' or WST2 ', the also rotation amount (pitching amount) around the energy measurement X-axis.
In this situation, wafer carrying bench WST1 ' is positioned near the zone (first area) of the position under the optical axis of projection optical system PL, in the time of carrying out the exposure to the wafer on its wafer carrying bench WST1 ' (in Figure 12 wafer W 1), with X-axis interferometer 151X
1, Y-axis interferometer 151Y
1Each is surveyed on the first exposure coordinate system of major axis defined, carries out the location management in the XY plane of wafer carrying bench WST1 '.
Again, wafer carrying bench WST2 ' is positioned near the zone (first area) the position under the optical axis of projection optical system PL, in the time of carrying out the exposure to the wafer on its wafer carrying bench WST2 ' (in Figure 12 wafer W 2), with X-axis interferometer 151X
2, Y-axis interferometer 151Y
1Each is surveyed on the second exposure coordinate system of major axis defined, carries out the location management in the XY plane of wafer carrying bench WST2 '.
Again, wafer carrying bench WST1 ' is positioned near the zone (second area) the position under the alignment system ALG, in the time of carrying out the aligning (EGA) of the wafer on its wafer carrying bench WST1 ' (in Figure 12 wafer W 1) etc., with X-axis interferometer 151X
3, Y-axis interferometer 151Y
2Each is surveyed in the first alignment coordinates system of major axis defined, carries out the location management in the XY plane of wafer carrying bench WST1 '.
Moreover wafer carrying bench WST2 ' is positioned near the zone (second area) the position under the alignment system ALG, in the time of carrying out the aligning (EGA) of the wafer on its wafer carrying bench WST2 ' (in Figure 12 wafer W 2) etc., with X-axis interferometer 151X
4, Y-axis interferometer 151Y
2Each is surveyed in the second alignment coordinates system of major axis defined, carries out the location management in the XY plane of wafer carrying bench WST2 '.
Other component part, be comprise liquid for heat-extraction system 32 interior constitute with aforesaid first example same.
Secondly,, a series of action that exposure device carried out of this second example be described, comprise exposure actions, and the parallel processing of the alignment actions of the wafer on another wafer carrying bench etc. is moved the wafer on the wafer carrying bench according to Figure 12～Figure 15 B.Again, in the following action, by main control unit 20, moving direction according to the wafer carrying bench that is positioned at the first area under the projection optical system PL, as described above, carry out the open and close controlling of liquid, under the front lens 91 of projection optical system PL, continue to fill up water for each valve of the liquid supplying apparatus 5 of heat-extraction system 32 and liquid withdrawal system 6.But, below, understand easily in order to make explanation, omit the explanation that liquid supplying apparatus 5 and liquid withdrawal system 6 are correlated with.
Again, in the mobile way of wafer carrying bench WST1 ' and wafer carrying bench WST2 ', exist, do not shine, cause the interval that will become difficulty with the location management that interferometer carries out wafer carrying bench in moving lens from X-axis interferometer or the interferometric interferometer light beam of Y-axis.The wafer carrying bench position of this situation, be to manage by the uniform enconding machine of icon (linear encorder) not, as above-mentioned if when using the uniform enconding machine to manage the position of wafer carrying bench, at the time point that can be contacted with moving lens from desired interferometric interferometer light beam, carry out this interferometric replacement by main control unit 20.But, below, for miscellaneousization that will prevent to illustrate, carry out the position measurement and the interferometric replacement of wafer carrying bench about using the uniform enconding machine, then omit its explanation.
At Figure 12, expression: to the wafer W 1 of mounting on wafer carrying bench WST1 ', expose in the step-scan mode equally, be parallel to this with aforementioned first example, in wafer carrying bench WST2 ' side, the second area below alignment system ALG carries out the state to the aligning of wafer W 2.
Again, above-mentioned exposure actions to wafer W 1, main control unit 20, in the position of the aforementioned first exposure coordinate system top management wafer carrying bench WST1 ', the limit is by making aforesaid X-axis linear motor 136X, a pair of Y-axis linear motor 136Y
1, 136Y
2Drive controlling, mobile wafer carrying bench WST1 ' carries out.
In wafer carrying bench WST1 ' side wafer W 1 is carried out between exposure period in the step-scan mode,, carried out following action in wafer carrying bench WST2 ' side.
That is, before above-mentioned wafer aligned,, between the wafer transfer mechanism of icon not and wafer carrying bench WST2 ', carry out wafer exchange in set " loaded " position.
After the wafer exchange, main control unit 20, position in the XY face of the aforesaid top management wafer carrying bench WST2 ' of the second alignment coordinates system, the limit uses alignment system ALG to carry out the aforementioned EGA that comprises the position information that detects sample labeling (being attached to the specific a plurality of illumination of sample zone on the wafer W 2), calculates the position coordinates in the second alignment coordinates system of a plurality of irradiation areas on the wafer W 2.Again, at Figure 12, the state when the expression sample labeling detects.Again, main control unit 20 in the front and back of the position information that detects sample labeling, detects the position information of second reference mark that is formed at the reference mark plate FM2 on the wafer carrying bench WST2 '.And, main control unit 20, with the position coordinates in the second alignment coordinates system of a plurality of irradiation areas on the wafer W 2 of being tried to achieve in advance, the position that is converted to second reference mark is the position coordinates of initial point.
Again, the wafer carrying bench WST2 ' during above-mentioned wafer aligned etc. moves, and is to make aforesaid X-axis linear motor 138X, a pair of Y-axis linear motor 138Y by main control unit 20
1, 138Y
2Drive controlling is carried out.
To the wafer aligned action of the wafer W 2 on the above-mentioned wafer carrying bench WST2 ',, usually, be wafer aligned action FEFO with exposure actions to the wafer W on the wafer carrying bench WST1 ' 1.Therefore, main control unit 20 is after the end of wafer aligned, by X-axis linear motor 138X, a pair of Y-axis linear motor 138Y
1, 138Y
2Wafer carrying bench WST2 ' is moved to the set position of readiness shown in Figure 13 A, wait in its position.
Thereafter, after the exposure actions end to the wafer W on the wafer carrying bench WST1 ' 1, main control unit 20 is then by X-axis linear motor 136X, a pair of Y-axis linear motor 136Y
1, 136Y
2Make wafer carrying bench WST1 ' move to the position shown in Figure 13 A.Again, to the end exposure position of wafer W 1, the preferably is set near the position of this Figure 13 A.
After wafer carrying bench WST1 ' moved to the position shown in Figure 13 A, main control unit 20 was by X-axis linear motor 138X and a pair of Y-axis linear motor 138Y
1, 138Y
2Make wafer carrying bench WST2 ' move to the set position of readiness shown in Figure 13 B.Move to the state of the position of Figure 13 B at wafer carrying bench WST2 ', wafer carrying bench WST1 ' and wafer carrying bench WST2 ' then are contact condition by flexible sealing component equally with aforementioned first example.
Secondly, main control unit 20, control X-axis linear motor 136X, a pair of Y-axis linear motor 136Y
1, 136Y
2, and X-axis linear motor 138X and a pair of Y-axis linear motor 138Y
1, 138Y
2, wafer carrying bench WST1 ' and wafer carrying bench WST2 ' while court+directions X are moved.At Figure 14 A, expression: move from the state while court+directions X of Figure 13 B as above-mentioned two plates microscope carrier WST1 ', WST2 ', between zone that comprises the reference mark plate FM2 on the wafer carrying bench WST2 ' and front lens 91, keep the state of water.
At the state of Figure 13 B, remain in the front lens 91 of projecting cell PU and the water between the wafer W 1, then follow wafer carrying bench WST1 ', WST2 ' court+X side shifting, on wafer W 1 → wafer carrying bench WSTl ' → wafer carrying bench WST2 ', move in regular turn.Again, during above-mentioned the moving, wafer carrying bench WST1 ', WST2 ' then concern by the position that flexible sealing component 93 keeps contacting with each other.
Secondly, main control unit 20, will be with the connection status of X movable piece 179 with the wafer carrying bench WST1 ' of aforementioned first bindiny mechanism 195, reach connection status with X movable piece 178 with the wafer carrying bench WST2 ' of aforementioned second bindiny mechanism 196, after removing together, with X movable piece 179 court+Y directions, X movable piece 178 is driven a little to-Y direction.At Figure 14 B, represent state after the driving of this X movable piece 179,178.
Again, at the state of Figure 14 B, wafer carrying bench WST1 ', WST2 ' by the air cushion of the not icon that is arranged at each bottom surface (face of Z side), float and are supported on the basal disc 12.But, be not limited thereto, also can telescopic support pin be set in wafer carrying bench WST1 ', WST2 ' side or basal disc 12 sides, before contacting of wafer carrying bench WST1 ', WST2 ' and X movable piece 179,178 removed, by supporting that pin makes wafer carrying bench WST1 ', WST2 ' stably be supported in basal disc 12 tops.
Secondly, main control unit 20 is by Y-axis linear motor 136Y
1, 136Y
2, X-axis linear motor 136X drives X movable piece 179, moves to the position that can be connected in wafer carrying bench WST2 ', and, by Y-axis linear motor 138Y
1, 138Y
2, X-axis linear motor 138X drives X movable piece 178, moves to the position that can be connected in wafer carrying bench WST1 '.At this moment, the position of each X movable piece is to be managed by the encoder of icon not.
At Figure 15 A, expression: as above-mentioned, drive X movable piece 179, move to the position that can be connected in wafer carrying bench WST2 ', drive X movable piece 178, move to the state of the position that can be connected in wafer carrying bench WST1 '.Thereafter, main control unit 20 is connected in X movable piece 179 by first bindiny mechanism 195 with wafer carrying bench WST2 ', and by second bindiny mechanism 196 wafer carrying bench WST1 ' is connected in X movable piece 178.Again, can not move yet, move dismounting with wafer carrying bench WST1 ', WST2 ' towards directions X and carry out X movable piece 178,179 towards Y direction.
As above-mentioned, be connected in wafer carrying bench WST2 ' at X movable piece 179, after X movable piece 178 is connected in wafer carrying bench WST1 ', main control unit 20, in the position of the aforementioned second exposure coordinate system top management wafer carrying bench WST2 ', a pair of first reference mark on the aforementioned reticle alignment RAa of system, the RAb measuring basis marking plate FM2 and a pair of reticle alignment mark on the graticule R are used in the limit.And,, wafer carrying bench WST2 ' is moved in order to be exposed to the acceleration starting position of the primary irradiation area on the wafer W 2 according to the result of its measurement result with the wafer aligned of being carried out in advance.Then, main control unit 20, in the position of the second exposure coordinate system top management wafer carrying bench WST2 ', the limit is by X-axis linear motor 136X and a pair of Y-axis linear motor 136Y
1, 136Y
2, make wafer carrying bench WST2 ' drive controlling, the exposure actions of the step-scan mode of wafer W 2 is then carried out equally with aforementioned first example.
On the other hand, main control unit 20 is by Y-axis linear motor 138Y
1, 138Y
2, and X-axis linear motor 138X, wafer carrying bench WST1 ' is moved to " loaded " position.The position of wafer carrying bench WST1 ' during this moves is to manage in the aforesaid first alignment coordinates system.And in " loaded " position, after the wafer of the wafer W of having exposed on the wafer carrying bench WST1 ' 1 and next exposure object exchanged, main control unit 20 carried out the wafer aligned action to new wafer equally with above-mentioned.
And, wafer aligned at wafer carrying bench WST1 ' finishes, and in the stage that the exposure actions of wafer carrying bench WST2 ' finishes, wafer carrying bench WST1 ' and wafer carrying bench WST2 ' then pass through and the antipodal approach of above-mentioned approach, make it be back to the state of Figure 12 once again.
So, the exposure device of this second example is the conversion (switching) of the limit being carried out wafer carrying bench WST1 ', WST2 ', and the limit will be to the exposure actions of the wafer on another wafer carrying bench, with wafer exchange and the wafer aligned action on another wafer carrying bench, carry out with the while parallel processing.
Learn from above explanation,, constitute the microscope carrier drive system by wafer carrying bench drive division 124A and main control unit 20 at this second example.Again, the microscope carrier drive system constitutes bearing table device with wafer carrying bench WST1 ', WST2 ' thus.Again, by first bindiny mechanism 195, second bindiny mechanism, Y-axis linear motor 136Y
1～136Y
4, X-axis linear motor 136X, 138X and the main control unit 20 of controlling these members constitute conversion equipments.
As above detailed description, the bearing table device that exposure device and this exposure device possessed according to this second example, and the wafer carrying bench WST1 ' that this exposure device is performed, the driving method of WST2 ', if first state transition that will be positioned at the first area under the projection optical system PL that liquid supply is arranged from a wafer carrying bench WST1 ' (or WST2 ') is when another wafer carrying bench WST2 ' (or WST1 ') is positioned at second state of first area, by microscope carrier drive system (20,124A), wafer carrying bench WST1 ', WST2 ' keeps by flexible sealing component 93 in X-direction (direction that near the Y direction of arranging of the second area the position under aforementioned first area and the alignment system ALG is intersected) and is contact condition, makes wafer carrying bench WST1 ', WST2 ' drives towards X-direction simultaneously.
Therefore, can be with water (liquid) with at projection optical system PL and specific wafer carrying bench (this wafer carrying bench that is positioned under it, follow to move and be converted to another wafer carrying bench from a wafer carrying bench) between the state of supply (maintenance), do not make the clearance leakage of liquid, and be positioned at second state of first area from first state transition that a wafer carrying bench WST1 ' (or WST2 ') is positioned at the first area to another wafer carrying bench WST2 ' (or WST1 ') from the two plates microscope carrier.Promptly, after a wafer carrying bench side is carried out the exposure actions of wafer by projection optical system PL and water, during till another wafer carrying bench side is by the exposure actions of projection optical system PL and water (liquid) beginning wafer, from keeping the state of water between a wafer carrying bench and the projection optical system PL, to the state that keeps water between another wafer carrying bench and the projection optical system PL, do not need the full recovery through water, step such as supply can make its migration again.Therefore, can shorten exposure actions in a wafer carrying bench side finish to the time till the exposure actions of another wafer carrying bench side begins (promptly, can be maintained at common exposure device (non-liquid immersion exposure apparatus) same degree with non-immersion exposure), and can obtain the raising of production capacity.Again, because of continuing to exist at the image planes side water of projection optical system PL, by with the same reason of aforementioned first example, can make the knot of projection optical system PL well maintained for a long time as the accuracy of detection of performance and multiple spot focus detection system.
Again, the parallel processing action by aforementioned two wafer carrying bench WST1 ', WST2 ' compared with the exposure device that possesses known single-chip microscope carrier (use a wafer carrying bench, carry out wafer exchange one by one, wafer aligned and exposure actions), can obtain the raising of production capacity.
At the exposure device of this second example, by with immersion exposure, carry out high image resolution and, the pattern precision of graticule R is needed on the wafer well than the exposure of the large focal spot degree of depth in the air again.
Again, at this second example, by with the same reason of aforementioned first example, the impact except can prevent from from the gap of two plates microscope carrier leaks, further can lower wafer carrying bench WST1 ' to contact the time with wafer carrying bench WST2 '.
Again, at this second example, same with aforementioned first example, because of wafer carrying bench WST1 '-X side and wafer carrying bench WST2 '+the X side is not provided with the moving lens that interferometer is used, even so closely connect state with respect to X-direction two plates microscope carrier, because of the speculum of the moving lens on the two plates microscope carrier can closely not connect each other to facing, so the position of two plates microscope carrier can be monitored in the two plates microscope carrier drives simultaneously during X-direction by the 118A of interferometer system.Can prevent that also sealing adheres at the speculum of moving lens again.
Again, at this second example, though dispose three moving lens respectively on wafer carrying bench WST1 ', WST2 ', with six of interferometer configuration, moving lens and interferometric configuration are not limited to the configuration of above-mentioned second example.For example, also can adopt at the two plates microscope carrier and dispose two moving lens respectively, use the interferometer configuration of the position of these two moving lens energy measurement two plates microscope carriers.
At this second example, remain on the water under the front lens 91 again,, though after moving on another microscope carrier from a microscope carrier, carry out the replacement of X movable piece 178,179, go forward, carry out the replacement of X movable piece 178,179 but also can move to another microscope carrier from a microscope carrier at water.
The 3rd example:
Secondly, according to Figure 16～Figure 18 B the 3rd example of the present invention is described.At this, to the same or equal part of aforementioned first example, use same symbol, and its explanation simplified or omit.At the exposure device of this 3rd example, only formation of wafer carrying bench device etc. is different with first example, and the formation of other parts etc. are then identical.Therefore, below, be the center explanation only for avoiding repeat specification with different place.
The wafer carrying bench 50 of this 3rd example ", different with the wafer carrying bench device 50 of the exposure device of aforesaid formation first example as shown in figure 16, possess: wafer carrying bench WST that can the mounting wafer; And the special-purpose measurement microscope carrier MST of measurement.
Described wafer carrying bench WST and measure microscope carrier MST, the wafer carrying bench WST1 and the wafer carrying bench WST2 of corresponding aforementioned first example are by with the same wafer carrying bench drive division (80～87) of first example it being driven in two-dimensional surface.
Near projection optical system PL (lens barrel of projecting cell PU), an alignment system ALG only is set again.Again, in fact projecting cell PU and alignment system ALG, are embedded state as shown in figure 16.That is, in the outside (peripheral part of front lens) of the part that forms path than near the other parts the bottom of projecting cell PU and the below part of the large-diameter portion of projecting cell PU, with the location, bottom at least of alignment system ALG.
On aforementioned measurement microscope carrier MST, various measurement members are set.Member is used in this measurement, for example, comprises: the reference mark plate forms with Japanese kokai publication hei 5-21314 communique and corresponding to a plurality of reference marks that this 5th, 243, No. 195 grades of United States Patent (USP) are disclosed; And sensor, by projection optical system PL illumination light IL is subjected to light etc.Sensor, for example, can adopt: the illumination monitor, have the light accepting part of set area, on the image planes of Japanese kokai publication hei 11-16816 communique and the projection optical system PL that disclosed corresponding to this No. 2002/0061469 specification of U.S. Patent Application Publication etc., illumination light IL is subjected to light; The uneven illumination sensor has the light accepting part of pin hole shape, on Japanese kokai publication sho 57-117238 communique and the image planes of the 4th, 465, No. 368 projection optical system PL that grade is disclosed of United States Patent (USP) corresponding to this illumination light IL is subjected to light; The aerial image measuring appliance, the luminous intensity of the aerial image of measured pattern (projection image) is by the projection optical system PL projection that is disclosed at TOHKEMY 2002-14005 communique and corresponding to this No. 2002/0041377 specification of U.S. Patent Application Publication etc. etc.In the scope that domestic decree allowed of the specified designated state of this case (or selected selection state), quote above-mentioned communique and corresponding to this U.S. Patent Application Publication specification or the announcement of United States Patent (USP), as the part of the record of this specification.Again, the measurement member of mounting on wafer carrying bench WST is not limited to this cited person, looks necessary the various measurement members of energy mounting.
Again, at this example, correspondence is carried out immersion exposure (by projection optical system PL and water by exposure light (illumination light) the IL wafer that exposes), above-mentioned illumination monitor, uneven illumination sensor, aerial image measuring appliance being used in the measurement of illumination light IL are subjected to light by projection optical system PL and water with illumination light IL.Again, each sensor, for example also can be only with a part of mounting of optical system etc. in measuring microscope carrier MST, also sensor all can be disposed at and measure microscope carrier MST.
Again, at wafer carrying bench WST, but mounting is measured and to be used member, also mounting not.
Again, same at this 3rd example with aforementioned first example, wafer carrying bench WST-the X side with measure microscope carrier MST+at least one side of X side, the flexible sealing component same with the flexible sealing component 93 of Figure 10 is set.
Below, to using this 3rd example wafer carrying bench WST that is possessed and the parallel processing action of measuring microscope carrier MST, be illustrated according to Figure 16～Figure 18 B.Again,, also be provided with and the same interferometer system of first example, make wafer carrying bench WST and the position of measuring microscope carrier MST, managed equally with first example at the exposure device of this 3rd example.The following description in order to avoid repeat specification, is omitted the record about two microscope carrier location managements of interferometer system.Again, in the following action, by main control unit 20, moving direction according to the microscope carrier that is positioned at the first area under the projecting cell PU, carry out the open and close controlling of liquid as described above, under the front lens 91 of projection optical system PL, continue to fill up water for each valve of the liquid supplying apparatus 5 of heat-extraction system 32 and liquid withdrawal system 6.But, below, understand easily in order to make explanation, omit explanation about the control of liquid supplying apparatus 5 and liquid withdrawal system 6.
At Figure 16, the expression and first example carry out the state to the exposure of the step-scan mode of the wafer W on the wafer carrying bench WST equally.At this moment, measure microscope carrier MST, wait at set position of readiness (can not conflict) with wafer carrying bench WST.
And in wafer carrying bench WST side, in the stage of the end exposure of for example 1 batch (1 batch is 25 or 50) wafer W, main control unit 20 makes measurement microscope carrier MST move to the position shown in Figure 17 A.At the state of this Figure 17 A, measure microscope carrier MST and wafer carrying bench WST, be by aforementioned flexible sealing component contact.
Secondly, main control unit 20, the limit keeps measurement microscope carrier MST wafer carrying bench WST and measures the position relation of the X-direction of microscope carrier MST, and the limit begins the action with two microscope carrier WST, MST court+directions X driving simultaneously.
As above-mentioned, by main control unit 20, after wafer carrying bench WST, measurement microscope carrier MST are driven simultaneously, state at Figure 17 A, remain in the front lens 91 of projecting cell PU and the water between the wafer W, then follow wafer carrying bench WST, measure microscope carrier MST court+X side shifting, on wafer W → wafer carrying bench WST → measurement microscope carrier MST, move in regular turn.During above-mentioned move, wafer carrying bench WST, measure microscope carrier MST and then keep the position relation that contacts with each other by flexible sealing component equally with the state of Figure 17 A again.At Figure 17 B, expression: in above-mentioned mobile way, water (liquid soaks the zone) is crossed in wafer carrying bench WST simultaneously, is measured microscope carrier MST and state when existing, promptly goes up from wafer carrying bench WST water is waited to be supplied in the state of microscope carrier MST before going up of measuring.
From the state of Figure 17 B, further make wafer carrying bench WST, measurement microscope carrier MST court+directions X drive both set a distances simultaneously, then shown in Figure 18 A, form the state that keeps water between microscope carrier MST and the front lens 91 of measuring.
Secondly, main control unit 20 makes wafer carrying bench WST move to set wafer exchange position and carries out the exchange of wafer, and is parallel therewith, carries out as required and uses the set measurement of measuring microscope carrier MST.This measures, and for example carries out after the exchange of the graticule on the graticule microscope carrier RST.The base line measurement of alignment system ALG can be used as an example.Particularly, main control unit 20, use the aforesaid reticle alignment RAa of system, RAb detects simultaneously goes up reticle alignment mark on the corresponding graticule of a pair of first reference mark of (be arranged at and measure on the microscope carrier MST) with reference mark plate FM, detects the position relation of the reticle alignment mark of corresponding a pair of first reference mark.Meanwhile, main control unit 20 by second reference mark that detects with alignment system ALG on the said reference marking plate FM, detects the inspection center of alignment system ALG and the position relation of second reference mark.And, main control unit 20, concern with the position of second reference mark according to the inspection center of the position relation of the reticle alignment mark of above-mentioned a pair of first reference mark of correspondence and alignment system ALG, and the position of a pair of first reference mark of both having known and second reference mark relation, try to achieve the distance of projection centre (projected position) and the inspection center (detection position) of alignment system ALG of the graticule pattern of projection optical system PL.Again, the state with this moment is shown in Figure 18 B.
Again, measure the baseline of above-mentioned alignment system ALG, and on graticule with reticle alignment mark plural number to forming, on reference mark plate FM, form plural number to first reference mark corresponding to this, with at least two pairs first reference mark and the relative position of pairing reticle alignment mark, by the limit graticule microscope carrier RST, measurement microscope carrier MST are moved, the limit uses the reticle alignment RAa of system, RAb to measure, and carries out reticle alignment.
In this situation, use the detection of the mark of the reticle alignment RAa of system, RAb, be to be undertaken by projection optical system PL and water.
Then, the stage of the end of job on above-mentioned two microscope carrier WST, MST, main control unit 20, for example will measure microscope carrier MST and wafer carrying bench WST, keeping by flexible sealing component making it be contact condition, in the XY face, driving, equally the wafer W after the exchange is being carried out wafer aligned with aforementioned, promptly use the detection of the alignment mark on the wafer W after alignment system ALG exchanges, and calculate the position coordinates of a plurality of irradiation areas on the wafer W.
Thereafter, main control unit 20, opposite with aforementioned person, the limit keeps wafer carrying bench WST and the position relation of measuring microscope carrier MST, the limit drives two microscope carrier WST, MST court-directions X simultaneously, after making wafer carrying bench WST (wafer W) move to the below of projection optical system PL, promptly liquid soaks the zone after measure microscope carrier MST and move to wafer carrying bench WST (wafer W) and go up, and makes to measure microscope carrier MST and keep out of the way to both allocations.
Thereafter, main control unit 20 is carried out the exposure actions of step-scan mode to wafer W, and the graticule pattern is needed on a plurality of irradiation areas on the wafer W in regular turn.Again, for the exposure of each irradiation area on the wafer W, wafer carrying bench WST moves to and quickens the starting position, is the position coordinates according to a plurality of irradiation areas on the wafer W of the gained as a result of above-mentioned wafer aligned, carries out with measured before baseline.
Again, in above-mentioned explanation, measure action, though to carrying out the situation explanation of base line measurement, be not limited thereto, also can use and measure microscope carrier MST, with illumination photometry, uneven illumination measurement, aerial image measurement etc., for example carry out, use its measurement result, react on the exposure of the wafer W that will carry out thereafter with wafer exchange.Again, mounting is in the sensor of measuring microscope carrier MST, is not limited to above-mentionedly, also the sensor that for example carries out wavefront measurement can be set.
Again, at above-mentioned the 3rd example, though during the end exposure of bright wafer W to 1 batch, make wafer carrying bench WST contact and move with measurement microscope carrier MST, make at projection optical system PL and measure between the microscope carrier MST to keep water, but preferable for whenever in each wafer exchange, carry out above-mentioned action, make at projection optical system PL and measure between the microscope carrier MST to keep water, then needn't say more.Again, the measurement of baseline etc. as described above, also can be whenever carried out when 1 batch end exposure, also can be whenever in wafer exchange, or both carried out behind the end exposure of the wafer of stator number.
As seen from the above description, same at this 3rd example with first example, by at least a portion of wafer carrying bench drive division (80～87) formation microscope carrier drive system.Again, by microscope carrier drive system and wafer carrying bench WST with measure at least a portion that microscope carrier MST constitutes bearing table device.
As mentioned above, the bearing table device that exposure device and this exposure device possessed of Yi Bendi three examples, from wafer carrying bench WST (or measuring microscope carrier MST), first state transition that is positioned at the first area under the projection optical system PL of liquid is arranged (water) supply is when measuring microscope carrier MST (or wafer carrying bench WST) and be positioned at second state of first area, by above-mentioned microscope carrier drive system, keep two microscope carriers and be contact condition by flexible sealing component, wafer carrying bench WST, measurement microscope carrier MST are driven simultaneously towards X-direction in X-direction.Therefore, with at projection optical system PL and specific microscope carrier (this microscope carrier that is positioned under it, follow mobile, be converted to another microscope carrier from a microscope carrier) between supplying the state of water (liquid), can not make leak of liquid, enable to be positioned at second state of first area from first state transition to another microscope carrier that a microscope carrier is positioned at the first area from the gap of two microscope carriers.Promptly, after wafer carrying bench WST side is carried out exposure actions by projection optical system PL and water (liquid), during till measuring microscope carrier MST to begin measurement under the projection optical system PL, from the state that keeps water between a wafer carrying bench WST and the projection optical system PL to the state of measuring maintenance water between microscope carrier MST and the projection optical system PL, do not need full recovery through water, step such as supply can make its migration again.Again, after the measurement of use measuring microscope carrier MST finished, till beginning to the exposure of using wafer carrying bench WST, also identical.
Therefore, to finish from the exposure actions of wafer carrying bench WST side to the time of the measurement action beginning of measuring microscope carrier MST side, and from measuring the measurement end of microscope carrier MST side, shorten (promptly to the time that the exposure actions of wafer carrying bench WST side begins, be maintained at common exposure device (non-liquid immersion exposure apparatus) same degree with non-immersion exposure), can obtain the raising of production capacity.In the image planes side of projection optical system PL,, produce so can prevent aforesaid water wave (washmarking) effectively because of continuing to exist water (liquid) again.
Again,, carry out high image resolution and, the pattern precision of graticule R is needed on the wafer well, for example be used as the transfer printing that component specification can realize the fine pattern of 70～100nm degree than the exposure of the large focal spot degree of depth in the air by immersion exposure.
Again, because of can be whenever in the exchange of wafer etc., use mounting to carry out various measurements with member in the measurement of measuring microscope carrier MST, make measurement result react on thereafter exposure actions, so can be to continue to be adjusted into the exposure that high-precision state carries out wafer.
Again, be not use illumination light IL if use to measure the measurement action that microscope carrier MST carried out, also can measure the measurement action of microscope carrier MST side, carry out with the exposure actions of the wafer W of wafer carrying bench WST side.
Again, at above-mentioned the 3rd example, though be contact condition by flexible sealing component and carry out wafer aligned will measure microscope carrier MST and wafer carrying bench WST, but also can be before will carrying out wafer aligned, so that two microscope carriers are contact condition, wafer carrying bench WST is moved to the below of projection optical system PL (and alignment system ALG), make measure microscope carrier MST and keep out of the way after, carry out wafer aligned.
Again, at above-mentioned the 3rd example, though first reference mark and second reference mark on the reference mark plate FM are measured simultaneously, also can measure a side of first reference mark and second reference mark after, to move and measure the opposing party measuring the state that keeps water on the microscope carrier MST.
Again, the employed flexible sealing component of above-mentioned first～the 3rd example, shown in Figure 19 A, also can adopt flexible sealing component 93 ', at a microscope carrier (at this, be microscope carrier WST2 (WST2 ', MST))+the X side forms the roughly groove 49 of trapezoidal shape of cross section, at this groove 49 to imbed the state assembling.So constitute, also can obtain and the same effect of above-mentioned each example.To the formation shown in this Figure 19 A, also can be not only at a microscope carrier, and in both sides' microscope carrier setting.
Again, shown in Figure 19 B, also can be at a microscope carrier (at this, be microscope carrier WST1 (WST1 ', WST))+the Z face forms the roughly groove 49 ' of trapezoidal shape of cross section, at this groove 49 ' with flexible sealing component 93 " to imbed state assembling; on another microscope carrier (, being microscope carrier WST2 (WST2 ', MST))+the X side end is provided with dull and stereotyped 94 at this.In this situation, be the state that closely connects at two microscope carriers, be contacted with flexible sealing component 93 by dull and stereotyped 94 ", shown in Figure 19 B, water can not leaked between two microscope carriers.
Again, shown in Figure 19 C, also can be by for example applying drying tunicle 95 by Teflon (login trade mark) etc. in each side of two microscope carriers institute subtend, with in the infiltration of the anti-sealing in the gap of two microscope carriers and leak.By this, because of keeping contactless state between two microscope carriers, so can not cause the anxiety of microscope carrier distortion that closely connecing of two microscope carriers caused or position control accuracy deterioration etc.
At above-mentioned first～the 3rd example,, the inhibition member that flexible sealing component and other inhibition are leaked can be set also though flexible sealing component is set again.In this situation, also can be positioned at from a microscope carrier state transition to another microscope carrier under the projection optical system PU be positioned at state under the projection optical system PU during, two microscope carriers are directly contacted.Again, though decide by kind of the surface state of the material of two microscope carriers, two microscope carriers or shape, liquid etc., even but two microscope carriers closely connect state (for example two microscope carriers is below the 2mm at interval) when migration, if do not make leak of liquid by the surface tension of liquid, then also can not apply the drying tunicle.Mainly be to keep not make the position relation of liquid, the migration of two microscope carriers is got final product from leaking between two microscope carriers.
Again, if the leakage of water (liquid) between two microscope carriers during migration is the leakage rate pettiness, because of the situation of being allowed is sometimes also arranged, so the interval of two microscope carriers in when migration, not only to consider the kind of the surface state of the material of microscope carrier or microscope carrier or shape, liquid, can consider that also allowable leakage decides.
Again, at above-mentioned first～the 3rd example, though do not form the reflecting surface of moving lens at the contact-making surface of two microscope carriers, this is not must important document, as long as can prevent that sealing leaks from two microscope carriers, and also can be at the reflecting surface of the contact-making surface formation moving lens of at least one microscope carrier.This example for example can be considered the 4th following example.
The 4th example:
Secondly, according to Figure 20～Figure 23 B the 4th example of the present invention is described.At this, to the identical or equal part of aforementioned the 3rd example, use identical symbol, and its explanation simplified or omit.At the exposure device of this 4th example, only the formation of wafer carrying bench device (comprising interferometric configuration) is different with aforementioned the 3rd an example part, the formation of other parts etc., and then the device with the 3rd example is identical.Therefore, below, in order to avoid repeat specification, be the center explanation only with different place.
The wafer carrying bench device 150 of this 4th example as shown in figure 20, possesses: wafer carrying bench WST ', energy mounting wafer; Measure special-purpose measurement microscope carrier MST '; And the interferometer system, comprise six laser interferometers (below, be called for short " interferometer ") IF1～IF6.
Aforementioned wafer carrying bench WST ', though following 2 is different with the wafer carrying bench WST of aforementioned the 3rd example, that is, first point, as shown in figure 21, with its-the upper end part of X side (measuring the side of microscope carrier MST ' subtend) forms the tabular flange part 111a more outstanding than other parts, and second point, its+X side end face Se and+Y side end face Sd is provided with the formed reflecting surface of mirror finish, substitutes aforesaid moving lens, but other parts then constitute identical with wafer carrying bench WST.Again, above this wafer carrying bench WST ', with the state of mounting wafer W, comprise wafer W surface and flange part 111a, be roughly same plane (with one side) comprehensively.
Aforementioned measurement microscope carrier MST ', though following 2 is different with the measurement microscope carrier MST of aforementioned the 3rd example, promptly, first point, as shown in figure 21, its+X side (with the side of wafer carrying bench WST ' subtend) is provided with teat 111c, will be sticked in the section portion 111b end provided thereon of the 111a of said flange portion across set gap; And second point, its-X side end face Sa ,+Y side end face Sb, and+end face of X side (teat 111c+end face of X side) Sc, the formed reflecting surface of mirror finish is set, substitute aforesaid moving lens; But other parts then constitute with to measure microscope carrier MST identical.In this situation, as shown in figure 21, at the flange part 111a of wafer carrying bench WST ' and measure the state that the 111b of section portion of microscope carrier MST ' engage, make the top of wafer carrying bench WST ' and the top all of measurement microscope carrier MST ' can form whole plane.
Wafer carrying bench WST ' of this example and measurement microscope carrier MST ', same with the wafer carrying bench WST and the measurement microscope carrier MST of aforesaid the 3rd example, by wafer carrying bench drive division (80～87) it is driven in two-dimensional surface.
Aforementioned interferometer system, as shown in figure 20, have: three Y-axis interferometer IF3, IF4, IF2, has the projection centre (optical axis AX) of passing through projection optical system PL respectively respectively, each inspection center of alignment system ALG, and from the projection centre of projection optical system PL from both set a distances in the position of-directions X and be parallel to the survey major axis of Y direction; Two interferometer IF1, IF5 have the inspection center of the projection centre (optical axis AX) that links projection optical system PL and alignment system ALG respectively and are parallel to the survey major axis of X-axis; And interferometer IF6, have with arise from by projection centre from projection optical system PL-the Y direction is from the parallel survey major axis of the X-direction of set distance and position.
At this, wafer carrying bench WST ' is positioned near the zone (first area) the position under the optical axis of projection optical system PL, when the wafer on its wafer carrying bench WST ' is exposed, manage the position of wafer carrying bench WST ' by X-axis interferometer IF5, Y-axis interferometer IF3.Below, will be called the exposure coordinate system by the coordinate system of respectively surveying the major axis defined of X-axis interferometer IF5, Y-axis interferometer IF3.
Again, wafer carrying bench WST ' is positioned near the zone (second area) the position under the inspection center of alignment system ALG, be formed at the detection of the alignment mark of the wafer on its wafer carrying bench WST ', for example during wafer aligned etc., manage the position of wafer carrying bench WST ' by X-axis interferometer IF5, Y-axis interferometer IF4.Below, will be called the alignment coordinates system by the coordinate system of respectively surveying the major axis defined of X-axis interferometer IF5, Y-axis interferometer IF4.
Again, measure microscope carrier MST ', when being positioned near the position of readiness as shown in figure 20 regional, manage the position of measuring microscope carrier MST ' by X-axis interferometer IF1, Y-axis interferometer IF2.Below, will be called the wait coordinate system by the coordinate system of respectively surveying the major axis defined of X-axis interferometer IF1, Y-axis interferometer IF2.
X-axis interferometer IF6 during the wafer exchange after wafer exposure finishes etc., measures the position with respect to the X-direction of wafer carrying bench WST '.
As seen from the above description, at this example, X-axis interferometer IF5, IF1 are the multiaxis interferometers with at least three optical axises that leave with respect to X-direction and Z-direction, and the output valve of each optical axis can independent measurement.Therefore, at described X-axis interferometer IF5, IF1, except wafer carrying bench WST ', measure the position measurement of X-direction of microscope carrier MST ', also rotation amount (rolling amount) and the axial rotation amount of Z (amount of shaking partially) around the energy measurement Y-axis.Again, X-axis interferometer IF6, but also multiaxis interferometer, but the also interferometer of one on optical axis.
Again, above-mentioned Y-axis interferometer IF2, IF3, IF4 are two interferometers with each two optical axis that leaves with respect to Z-direction, and the output valve of each optical axis can independent measurement.Therefore, at described Y-axis interferometer IF2, IF3, IF4, except wafer carrying bench WST ' or measure the position measurement of Y direction of microscope carrier MST ', the also rotation amount (pitching amount) around the energy measurement X-axis.
Below, to wafer carrying bench WST ' that exposure device possessed that uses this 4th example and the parallel processing action of measuring microscope carrier MST ', be illustrated according to Figure 20～Figure 23 B.Again, in the following action, by main control unit 20, moving direction according to the microscope carrier that is positioned at the first area under the projecting cell PU, as described above, carry out the open and close controlling of liquid, under the front lens 91 of projection optical system PL, continue to fill up water for each valve of the liquid supplying apparatus 5 of heat-extraction system 32 and liquid withdrawal system 6.But, below, understand easily in order to make explanation, omit the explanation that liquid supplying apparatus 5 and liquid withdrawal system 6 are correlated with.
At Figure 20, expression will be to the exposure of the step-scan mode of the wafer W on the wafer carrying bench WST ', the state that carries out equally with aforesaid first example.At this moment, measure microscope carrier MST ', wait at the set position of readiness that does not conflict with wafer carrying bench WST '.In this situation, main control unit 20 will be measured the position of microscope carrier MST ' and manage on aforesaid wait coordinate system, and the position of wafer carrying bench WST ' is managed on aforesaid exposure coordinate system.
And in wafer carrying bench WST ' side, to stage of the end exposure of the wafer W of 1 batch (1 batch is 25 or 50), main control unit 20 makes and measures microscope carrier MST ' and move to the position shown in Figure 22 A for example.At the state of this Figure 22 A, measure microscope carrier MST ' and wafer carrying bench WST ', become as shown in figure 21 the flange part 111a that is arranged at wafer carrying bench WST '-111b of section portion of X side end face and measurement microscope carrier MST '-the X side closely connects the state of (or contact).
At this, because of width dimensions with the X-direction of the flange part 111a of wafer carrying bench WST ' side, width dimensions than the X-direction of the 111b of section portion that measures microscope carrier MST ' side is made as greatly, thus can prevent to make mirror finish end face (reflecting surface) Sc of measurement microscope carrier MST ' with except that the flange part 111a of wafer carrying bench WST '-X side end face (part below the flange part 111a of X side end face) contact.
Secondly, main control unit 20, the limit keeps the position relation of wafer carrying bench WST ' and the X-direction of measuring microscope carrier MST ', and the limit begins to make two microscope carriers to drive action in+directions X simultaneously.
As above-mentioned, if by main control unit 20, wafer carrying bench WST ', measurement microscope carrier MST ' are driven simultaneously, state at Figure 22 A, remain in the front lens 91 of projecting cell PU and the water between the wafer W, then follow wafer carrying bench WST ', measure microscope carrier MST '+the X side shifting, mobile in regular turn on wafer W → wafer carrying bench WST ' → measurements microscope carrier MST '.Again, during above-mentioned the moving in, wafer carrying bench WST ' with measure microscope carrier MST ' and keep as shown in figure 21 position relation.At Figure 22 B, be illustrated in above-mentioned move water (liquid soaks the zone) midway crosses over simultaneously be present in wafer carrying bench WST ', the state when measuring microscope carrier MST ' and going up, promptly represent to go up water is supplied in to measure microscope carrier MST ' and go up state before from wafer carrying bench WST '.Be the position relation that keeps as shown in figure 21 with measuring microscope carrier MST ' also at this state wafer carrying bench WST '.At the state of Figure 21, because of the gap at the top edge of the measurement microscope carrier MST ' of the edge of the flange part 111a of wafer carrying bench WST ' and subtend flange part 111a is to be maintained at below the 0.3mm, so, can prevent that sealing infiltrates its gap even water is displaced on its gap.In this situation, by with the top of flange part 111a with measure microscope carrier MST ' top form respectively water-repellancy (with the contact angle of water be more than 80 °), can infiltrate its gap by more certain anti-sealing.Again, in this moves, though the interferometer light beam from interferometer IF2 does not expose to the end face Sb that measures microscope carrier MST ', but because of the therewith about simultaneously interferometer light beam of (before or after it) interferometer IF3 can expose to the end face Sb that measures microscope carrier MST ', so in of the replacement of its time point by main control unit 20 execution interferometer IF3.
If from the state of Figure 22 B, further, shown in Figure 23 A, become the state that keeps water between microscope carrier MST ' and the front lens 91 measuring with wafer carrying bench WST ', measurement microscope carrier MST ' both set a distance drivings of court+directions X simultaneously.
Secondly, main control unit 20, with make wafer carrying bench WST ' drive in+directions X and-the Y direction is parallel, make measure microscope carrier MST ' court+directions X and+driving of Y direction.During this drives, because of end face Se at wafer carrying bench WST ', no longer shine interferometer light beam from interferometer IF5, and make the interferometer light beam irradiates of interferometer IF6, so main control unit 20, with the state of two interferometer light beam irradiates, use the measured value of interferometer IF5, interferometer IF6 is reset.On the other hand, because of the interferometer light beam from interferometer IF4 can expose to the end face Sb that measures microscope carrier MST ',, interferometer IF4 is reset so main control unit 20 at arbitrary time point of two interferometer light beam irradiates, uses the measured value of interferometer IF3.Again,, can shine interferometer light beam, so main control unit 20 is then carried out the replacement (or replacement of the measured value of consideration interferometer IF1) of interferometer IF5 from interferometer IF5 because of at the end face Sc that measures microscope carrier MST '.
As above-mentioned, form the configuration of two microscope carriers shown in Figure 23 B, that is, wafer carrying bench WST ' is positioned at set wafer exchange position, and measurement microscope carrier MST ' is positioned under the projection optical system PL.Again, at wafer carrying bench WST ', if the interferometer light beam of interferometer IF4 does not shine, by the interferometer system, though the Y position of managing wafer carrying bench WST ' can be waited by the linear encoder of icon not in the position of energy measurement Y direction not.Or also can append the also interferometer of the position of the Y direction of energy measurement wafer carrying bench WST ' when the wafer exchange position of wafer carrying bench WST '.At the state shown in Figure 23 B, carry out wafer exchange in wafer carrying bench WST ' side, parallel therewith, measuring microscope carrier MST ' side according to the set measurement of necessity execution.This measures, for example after the graticule exchange of graticule microscope carrier RST with the base line measurement of alignment system ALG, carry out equally with above-mentioned the 3rd example.In this situation, measure the position of the X-direction of microscope carrier MST ', measure for using interferometer IF5 than interferometer IF1 preferably.By the interferometer IF5 of the position of the X-direction of use measurement microscope carrier MST ' in the exposure of wafer W, the position of microscope carrier MST ' is measured on the limit, and base line measurement is carried out on the limit, can be with the aligning (location) of high accuracy execution according to the wafer W of its baseline (amount).
Again, same with above-mentioned the 3rd example, with the base line measurement of above-mentioned alignment system ALG, carry out aforesaid reticle alignment.
And, the stage of the end of job on above-mentioned two microscope carrier WST ', MST ', main control unit 20, for example will measure microscope carrier MST ' and wafer carrying bench WST ', revert to the state of Figure 23 A, the limit is kept and is made wafer carrying bench WST ' and measure the state that microscope carrier MST ' closely connects (or contact), the limit drives in the XY face, equally the wafer W after the exchange is carried out wafer aligned with aforementioned, promptly use the detection of the alignment mark on the wafer W after alignment system ALG exchanges, calculate the position coordinates of a plurality of irradiation areas on the wafer W.Again, the location management of the wafer carrying bench WST ' during this wafer aligned is then managed in aforesaid alignment coordinates system.
Thereafter, main control unit 20, the limit keeps the wafer carrying bench WST ' and the position of the X-direction of measuring microscope carrier MST ' to concern, the limit is opposite with aforementioned person, two microscope carrier WST ', MST ' are driven simultaneously to-directions X, and after making wafer carrying bench WST ' (wafer W) move to the below of projection optical system PL, will measure microscope carrier MST ' and keep out of the way to both allocations.During this period, also carry out the interferometric replacement etc. of interferometer system with the step opposite with aforementioned person.
Thereafter, main control unit 20, same with above-mentioned each example, wafer W is carried out the exposure actions of step-scan mode, the graticule pattern is needed on a plurality of irradiation areas on the wafer W in regular turn.
Again,, measure action in above-mentioned explanation, though to carrying out the situation explanation of base line measurement, be not limited thereto, same with above-mentioned the 3rd example, also can carry out illumination photometry, uneven illumination measurement, aerial image instrumentation amount etc.Same with above-mentioned the 3rd example again, be not limited to 1 batch end exposure after, whenever, also can carry out various measurements according to necessity in both wafer exchange of stator number (for example 1).Again, also can make it measure action, measure the corrugated aberration of projection optical system PL measuring microscope carrier MST ' mounting corrugated aberration measurement device.Or, also can the observation video camera be set at measurement microscope carrier MST ', check that the liquid of the image planes side that is formed at projection optical system PL soaks the state in zone.
Again, use the detection of the alignment mark of the wafer W after alignment system ALG exchanges, not necessarily need to make wafer carrying bench WST ' closely the connect state limit set to carry out with measuring the maintenance of microscope carrier MST ' limit, also can after leaving, two microscope carriers begin the detection of alignment mark, after also can two microscope carriers closely connecing the detection of alignment mark that state carries out a part, two microscope carriers are left, carry out the detection of remaining alignment mark.
As mentioned above, Yi Bendi four examples, same with the 3rd example, wafer carrying bench WST ' (or measuring microscope carrier MST '), from first state transition of the first area under the projection optical system PL that is positioned at supply fluid (water) when measuring microscope carrier MST ' and be positioned at second state of first area, by microscope carrier drive system (comprising wafer carrying bench drive division (80～87) constitutes), make the flange part 111sa of wafer carrying bench WST ' side become fastening state, can realize whole plane by the top of wafer carrying bench WST ' and the top of measurement microscope carrier MST ' with the 111b of section portion that measures microscope carrier MST '.Therefore, at projection optical system PL and at least one microscope carrier (this microscope carrier under it, follow to move and be converted to another microscope carrier from a microscope carrier) between to keep the state of water (liquid), can not make leak of liquid, can be positioned at second state of first area from first state transition to another microscope carrier that a microscope carrier is positioned at the first area from the gap of two microscope carriers.Promptly, after wafer carrying bench WST ' side is carried out exposure actions by projection optical system PL and water (liquid), to beginning during till the measurement under the projection optical system PL measuring microscope carrier MST ' side, extremely measuring the state that keeps water between microscope carrier MST ' and the projection optical system PL from the state that keeps water between wafer carrying bench WST ' and the projection optical system PL, do not need full recovery through water, step such as supply can make its migration again.Again, after the measurement of use measuring microscope carrier MST ' finishes, during use wafer carrying bench WST ' to begin till the exposure too.
Therefore, can make from the exposure actions of wafer carrying bench WST ' side and finish time till the measurement action beginning of measuring microscope carrier MST ', and the time till finishing to begin to the exposure actions of wafer carrying bench WST ' side from the measurement of measuring microscope carrier MST ' side shortens (promptly, be maintained at common exposure device (non-liquid immersion exposure apparatus) same degree with non-immersion exposure), can obtain the raising of production capacity.Again, because of the image planes side at projection optical system PL, water (liquid) continues to exist, so can prevent the generation of aforesaid water wave (washmarking) effectively.
Again, at this 4th example, because of flange part 111a being set at wafer carrying bench WST ', the 111b of section portion of engaging therewith is arranged at measurement microscope carrier MST ', even event is provided with reflecting surface at the end face Sc of the projection optical system PL of two microscope carriers institute subtend, can not produce obstacle, can be from the state transition that keeps water between wafer carrying bench WST ' and the projection optical system PL to projection optical system PL and the state (or it is opposite) of measuring maintenance water between the microscope carrier MST '.
Again,, carry out high image resolution and, the pattern precision of graticule R can be needed on the wafer well, for example be used as the transfer printing that component specification can realize the fine pattern of 70～100nm degree than the exposure of the large focal spot degree of depth in the air by immersion exposure.
Again, at above-mentioned the 4th example, though to flange part 111a being set in wafer carrying bench WST ' side, situation explanation at the teat 111c that measures microscope carrier MST ' the side setting section of the having 111b of portion, but the present invention is not limited to this, the teat of the section of having portion also can be set at wafer carrying bench WST ', flange part be set in measurement microscope carrier MST ' side.Again, at above-mentioned the 4th example, though to measure microscope carrier MST '+end of X side to be to form the situation of the section 111b of portion in the single teat formation of upper end, be illustrated, but, this constitutes owing to the end face Sc that need make its teat 111c+X side forms reflecting surface, not necessarily will constitute so.For example, if do not need to form reflecting surface, be equivalent to the part of teat 111b, then can form the section portion that is sticked in flange part 111a across set gap in the upper end, but also Any shape of other parts.Equally, wafer carrying bench WST ' side is as long as be provided with flange part 111a in the upper end, and the shape of other parts also can be Any shape.
At above-mentioned the 4th example,, also can form flange part 111a from the board member of this physical efficiency of wafer carrying bench WST ' loading and unloading though flange part 111a is integrally formed at wafer carrying bench WST ' again.
Again, also can adopt the formation that flexible sealing component is set,, make the flexible containment member that between flange part 111a and the 111b of section portion, is situated between with flange part 111a and the state that the 111b of section portion engages.That is, for example, by flange part 111a-the X side end is provided with flexible sealing component, can prevent wafer carrying bench WST ' fully and measure leaking between the microscope carrier MST '.Again, by flexible sealing component is set, even, can lower its impact in wafer carrying bench WST ' and the situation that measurement microscope carrier MST ' can contact.Certainly, also flexible sealing component can be arranged at and measure microscope carrier MST ' side, elasticity of substitution containment member also can apply the drying tunicle in the position of wafer carrying bench WST ' with at least one or two microscope carrier subtend of measuring microscope carrier MST '.
Again, flange part is set a side of the microscope carrier of above-mentioned the 4th example, the notion in the opposing party's section of setting portion, not only two microscope carriers are situations of measuring microscope carrier and wafer carrying bench, all are situations of wafer carrying bench at two microscope carriers, also can adopt.
Promptly, for example, adopt situation as the formation of the bearing table device of above-mentioned first example (with reference to Fig. 2) or second example (with reference to Figure 12), because of wafer carrying bench WST1 and wafer carrying bench WST2 position relationship with respect to X-direction, so as shown in figure 24, can adopt X-direction one side possess flange part 111a, possess formation the teat 111c of section portion 111b end formed thereon at the X-direction opposite side of another wafer carrying bench at a wafer carrying bench.
Again, for example, shown in Figure 25 A, if adopt wafer carrying bench WST1 ', WST2 " during bearing table device that can change with respect to the position relation of X-direction; shown in Figure 25 B, need to adopt to make each wafer carrying bench WST1 ", WST2 ", possess the formation of flange part and the teat of the section of having portion.By adopting as above-mentioned constituting, even wafer carrying bench WST1 " be positioned at-the X side; wafer carrying bench WST2 " be positioned at+situation of X side, or wafer carrying bench WST1 " be positioned at+the X side; wafer carrying bench WST2 " be positioned at-situation of X side, same with aforementioned the 4th example, in case the state of leak-stopping water, can migrate to water contact condition on another wafer carrying bench from water contact condition on the wafer carrying bench.
Again,, remain in the water under the front lens 91, when a microscope carrier moves on another microscope carrier, also can keep water 91 times, the supply of water and recovery are stopped at front lens at above-mentioned each example.Especially, the situation that can raise at the pressure by the supply water of water is because of the gap from two microscope carriers leaks easily, so the preferably is supply and the recovery that stops water.
Again, at above-mentioned each example, though liquid is to use ultra-pure water (water), the present invention is not limited to this certainly.Liquid also can use the transmitance height of chemical stabilization, illumination light IL, the liquid of safety, and for example using fluorine is inert fluid.This fluorine is an inert fluid, for example can use Fluorinert (trade name of Minnesota Mining and Manufacturing Company).This fluorine is an inert fluid, and is also good to cooling effect.Again, liquid, also can use has permeability and refractive index high as far as possible to illumination light IL, again, to projection optical system or coat the photoresist stable (for example, red deal oil) of wafer surface.Again, if use F
2Laser is during as light source, and it is liquid (for example, Feng Buer oil (Fomblin oil)) that liquid can use fluorine.
Again, at above-mentioned each example, also the liquid that is reclaimed can be utilized again, in this situation, the preferably will be for being arranged at liquid withdrawal system or recovery tube etc. in order to the filter of removing impurity from the liquid that is reclaimed.
Again, at above-mentioned example, though the optical element of the image planes side of projection optical system PL is a front lens 91, but this optical element is not limited to lens, also can be optical sheet (planopaallel plate etc.), in order to adjusting the optical characteristics of projection optical system PL, for example adjustment of aberration (spherical aberration, coma aberration), also simple cover glass.The optical element (is front lens 91 at above-mentioned example) of the image planes side of projection optical system PL, result from by adhering to of the impurity of irradiation from disperse particle or liquid that photoresist produced of illumination light IL etc., can contact with liquid (is water at above-mentioned example), make its surface contamination.Therefore, its optical element also can load and unload the foot that (exchange) is fixed in lens barrel 40 freely, exchanges periodically.
As above-mentioned situation, be lens if be contacted with the optical element of liquid, the cost costliness of its exchange member, and the time that the clearing house needs is elongated, can cause the rising of maintenance cost (operating cost) or the reduction of production capacity.Therefore, be contacted with the optical element of liquid, for example also can use planopaallel plate than front lens 91 cheapnesss.
Again, at above-mentioned each example, make the scope of liquid flow can be made as view field's (irradiation area of the illumination light IL) universe that makes the pattern image that covers graticule, though its size can be any, but, in order to control flow velocity, flow, the preferably dwindles its scope for a little little according to penetrating the zone as far as possible.
Again, at above-mentioned each example, though to the situation explanation of the scanning exposure apparatus that the present invention is applicable to step-scan mode etc., the scope of application of the present invention is not limited thereto certainly.That is, also can be applicable to the reduced projection exposure device of stepping repetitive mode suitably.
The purposes of exposure device is not limited to the exposure device of semiconductor manufacturing usefulness, for example, can be widely applicable in order to the liquid crystal exposure device of liquid crystal display cells pattern transfer in the glass plate of square, or in order to make organic EL, film magnetic head, photographic element (CCD etc.), micromachine, and the exposure device of DNA chip etc.Again, be not only the microcomponent of semiconductor element etc., for making light exposure device, EUV exposure device, X line exposing device, and employed graticule or mask such as electron exposure device,, also can be suitable for the present invention at the exposure device of transfer printing circuit patterns such as glass substrate or silicon wafer.
Again, the light source at the exposure device of above-mentioned each example is not limited to the ArF excimer laser source, also can use KrF excimer laser source, F
2The pulsed laser source of lasing light emitter etc., or send g line (wavelength 436nm), i line light superpressures such as (wavelength 365nm) mercury vapor lamp etc.
Again, the infrared territory that dfb semiconductor laser or optical-fiber laser are vibrated, or the single wavelength laser of visible range, for example the fiber amplifier with erbium doped (or erbium and yttrium both sides) amplifies, and uses nonlinear optics crystallization wavelength Conversion also can as the higher harmonics of ultraviolet light.Again, the multiplying power of projection optical system is not only reduction system, also can be etc. doubly and any of amplification system.
Manufacturing method:
Secondly, the example to manufacturing method that the exposure device of above-mentioned example is used at lithography step is illustrated.
At Figure 26, the flow chart of the Production Example of expression element (semiconductor chips such as IC or LSI, liquid crystal panel, CCD, film magnetic head, micromachine etc.).As shown in figure 26, at first,, carry out function, the performance design (for example, the circuit design of semiconductor element etc.) of element, carry out in order to realize the design of this function at step 201 (design procedure).Then, in step 202 (mask fabrication step), make the mask that is formed with designed circuit pattern.On the other hand, in step 203 (wafer fabrication steps), use made wafers such as silicon.
Secondly,, use mask and the wafer prepared in step 201～step 203, as described later, on wafer, forms the circuit of reality etc. by photoetching technique etc. in step 204 (processing of wafers step).Secondly, at step 205 (element number of assembling steps), use at the handled wafer of step 204 and carry out the element assembling.In this step 205, as required, comprise cutting step, engagement step, reach encapsulation step steps such as (chip inclosures).
At last, in step 206 (inspection step), carry out the inspection of confirming operation test, durable test etc. at the element of step 205 made.After process as the above-mentioned step, element is then finished and shipment.
At Figure 27, the detailed process example of the above-mentioned steps 204 of expression semiconductor element.At Figure 27, make the surface oxidation of wafer in step 211 (oxidation step).Form dielectric film in step 212 (CVD step) in wafer surface.On wafer, form electrode in step 213 (electrode formation step) with evaporation.In step 214 (ion implantation step) at the wafer implanting ions.Above step 211～step 214 constitutes treatment step before each stage of processing of wafers respectively, carries out according to needed processing selecting of each stage.
In each stage of processing of wafers, after the end of above-mentioned treatment step before, it is as follows to carry out post-processing step.At this post-processing step, at first, in step 215 (photoresist formation step), in the wafer coating emulsion.Then, in step 216 (step of exposure), the circuit pattern of mask is needed on wafer by as above illustrated exposure device.Secondly,, the wafer that is exposed is developed in step 217 (development step), at step 218 (etching step), with photoresist the member that exposes of the part beyond the residual part remove with etching.And in step 219 (photoresist removal step), removal has been finished etching and has been become photoresist not.
By repeating these pre-treatment steps and post-processing step, can on wafer, form the circuit pattern of multilayer.
Use the manufacturing method of discussed above example, make wafer (substrate) exposure by the exposure device that uses above-mentioned each example in step of exposure (step 216) with energy light beam (illumination light IL), because of on wafer, forming element pattern, so energy is realized high production capacity and high-precision exposure for a long time.Therefore, can improve the productivity of the microcomponent of the Gao Jiti degree that forms fine pattern.
As described above, microscope carrier drive unit of the present invention is suitable for driving first microscope carrier and second microscope carrier.Again, exposure device of the present invention is suitable for supply fluid between projection optical system and substrate, makes the aforesaid base plate exposure by projection optical system and liquid by the energy light beam.Again, manufacturing method of the present invention is suitable for the production of microcomponent.
Claims (43)
1, a kind of microscope carrier driving method, be in the two-dimensional surface that includes the local supply of liquid the first area, with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area, drive first microscope carrier and second microscope carrier is characterized in that:
When the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, make this first microscope carrier and second microscope carrier, be maintained at and be the arbitrary state that closely connects state and contact condition on second direction of principal axis that intersects with this first direction of principal axis, and this first, second microscope carrier is driven simultaneously towards this second direction of principal axis.
2, microscope carrier driving method as claimed in claim 1 is characterized in that:
Described first, second microscope carrier by driving respectively with one group of linear actuators that can engage with the mode that arbitrary microscope carrier of this first, second microscope carrier loads and unloads, drives towards this second direction of principal axis at least with the specific microscope carrier with fastening state;
During described migration, a microscope carrier and a linear actuators, another microscope carrier and another linear actuators are fastening state respectively; After this migration, make the releasing that engages of each microscope carrier and linear actuators, and carry out a microscope carrier and another linear actuators engage, reach engaging of another microscope carrier and a linear actuators.
3, microscope carrier driving method as claimed in claim 1 is characterized in that:
During described migration, be positioned on the microscope carrier of this first area, described liquid continuous maintenance.
4, microscope carrier driving method as claimed in claim 1 is characterized in that:
To first, second speculum on described first, second microscope carrier (when being arranged at this migration respectively two microscope carriers closely connect or the face of contact side beyond face) reflecting surface, long light beam is surveyed in irradiation respectively, survey the reverberation of long light beam according to each, manage the position of this first, second microscope carrier from the reflecting surface of this first, second speculum.
5, a kind of microscope carrier driving method, be in the two-dimensional surface that includes the local supply of liquid the first area, with the zone of the set scope of the second area of first direction of principal axis, one side that is positioned at this first area, drive first microscope carrier; Comprise this first area, with the zone of set scope in the 3rd zone of this first axial opposite side that is positioned at this first area, drive second microscope carrier, it is characterized in that:
When the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, make this first microscope carrier and second microscope carrier, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first, second microscope carrier is driven simultaneously towards this first direction of principal axis.
6, microscope carrier driving method as claimed in claim 5 is characterized in that:
During described migration, be positioned on the microscope carrier of this first area, described liquid continuous maintenance.
7, microscope carrier driving method as claimed in claim 5 is characterized in that:
To first, second speculum on this first, second microscope carrier (when being arranged at this migration respectively two microscope carriers closely connect or the face of contact side beyond face) reflecting surface, long light beam is surveyed in irradiation respectively, survey the reverberation of long light beam according to each, manage the position of this first, second microscope carrier from the reflecting surface of this first, second speculum.
8, a kind of bearing table device is characterized in that possessing:
First, second microscope carrier, can be in the first area in the two-dimensional surface that includes the local supply of liquid, with the set scope zone drive of the second area of first direction of principal axis, one side that is positioned at this first area; And
Control device, when the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, this first, second microscope carrier is controlled to: make this first microscope carrier and this second microscope carrier, be maintained at and be the arbitrary state that closely connects state and contact condition on second direction of principal axis that intersects with this first direction of principal axis, and this first, second microscope carrier is moved simultaneously towards this second direction of principal axis.
9, a kind of bearing table device is characterized in that possessing:
First microscope carrier can be in the first area in the two-dimensional surface that includes the local supply of liquid, mobile with the zone of the set scope of the second area of first direction of principal axis, one side that is positioned at this first area;
Second microscope carrier can comprise this first area, move with the set scope zone in the 3rd zone of this first axial opposite side that is positioned at this first area; And
Control device, when the microscope carrier from this first, second microscope carrier is positioned at first state of this first area, when migrating to another microscope carrier and being positioned at second state of this first area, this first, second microscope carrier is controlled to, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first, second microscope carrier is moved simultaneously towards this first direction of principal axis.
10, a kind of exposure device is a supply fluid between projection optical system and substrate, by this projection optical system and this liquid, makes this base plate exposure by the energy light beam, it is characterized in that possessing:
First microscope carrier can comprise first area under this projection optical system of waiting to supply this liquid, move with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this projection optical system;
Second microscope carrier can comprise this first area, mobile with the zone in the 3rd zone of the first axial opposite side that is positioned at this projection optical system;
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, this first microscope carrier and second microscope carrier, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first, second microscope carrier is driven simultaneously towards this first direction of principal axis;
First mark detecting system is disposed at this second area top, for detecting the mark that is present on this first microscope carrier; And
Second mark detecting system is disposed at top, the 3rd zone, for detecting the mark that is present on this second microscope carrier.
11, exposure device as claimed in claim 10 is characterized in that:
Described first, second microscope carrier all is can be for the microscope carrier of mounting substrate.
12, exposure device as claimed in claim 10 is characterized in that:
Microscope carrier in this first, second microscope carrier, its upper end part with another microscope carrier subtend is more outstanding than other parts, and tabular flange part is set by this;
To be sticked in the section portion of the leading section at least of this flange part across set gap, be arranged at least a portion this another microscope carrier and face this microscope carrier subtend, the state that engages with this section portion with this flange part, this at least a portion and this another at least a portion above microscope carrier above microscope carrier can form both whole planes of sizing.
13, exposure device as claimed in claim 10 is characterized in that:
This first, second microscope carrier respectively, the upper end part of first direction of principal axis, one side is more outstanding than other parts, tabular flange part is set by this, and at least a portion section of setting portion of the face of this first axial opposite side of each microscope carrier, it can be sticked in the leading section at least of this flange part of another microscope carrier across set gap;
At the state that this flange part of a microscope carrier engages with this section portion of another microscope carrier, this at least a portion and this another at least a portion above microscope carrier above microscope carrier can form both whole planes of sizing.
14, exposure device as claimed in claim 10 is characterized in that:
This microscope carrier drive system is to keep to make this first microscope carrier and second microscope carrier be the state that closely connects when this migration;
At least one side at this first microscope carrier and second microscope carrier is provided with the inhibition member, is located at the gap of this two microscope carrier during by this migration, prevents that this liquid is from this clearance leakage.
15, exposure device as claimed in claim 14 is characterized in that:
This suppresses member, is at least one side who comprises containment member and drying tunicle.
16, exposure device as claimed in claim 10 is characterized in that:
During this migration, between this projection optical system and microscope carrier in this first area, should liquid continuous maintenance.
17, exposure device as claimed in claim 10 is characterized in that, further possesses:
First, second speculum, when being arranged at this migration on this first, second microscope carrier respectively two microscope carriers closely connect or the face of contact side beyond face; And
Interferometer shines respectively the reflecting surface of this first, second speculum and to survey long light beam, according to the reverberation of the long light beam of each survey from the reflecting surface of this first, second speculum, measures the position of this first, second microscope carrier.
18, a kind of exposure device is a supply fluid between projection optical system and substrate, by this projection optical system and liquid, makes this base plate exposure by the energy light beam, it is characterized in that possessing:
First microscope carrier can comprise first area under this projection optical system of supplying this liquid, move with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area, and can this substrate of mounting;
Second microscope carrier can comprise this first area, mobile with the zone in the 3rd zone of the first axial opposite side that is positioned at this first area, and be used for set measurement; And
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and this second microscope carrier, keep with this first direction of principal axis and be the arbitrary state that closely connects state and contact condition, and this first microscope carrier and second microscope carrier are driven simultaneously towards this first direction of principal axis.
19, exposure device as claimed in claim 18 is characterized in that:
In this second microscope carrier setting: by this projection optical system this energy light beam is subjected to light sensor at least a portion and be formed with both at least one sides of reference mark plate of at least one reference mark.
20, exposure device as claimed in claim 18 is characterized in that:
This second microscope carrier is the measurement that is subjected to the light result that is used to use by this energy light beam of this projection optical system and liquid.
21, exposure device as claimed in claim 18 is characterized in that:
This microscope carrier drive system, when making base plate exposure by this energy light beam, at least a portion according to the measurement result of using this second microscope carrier drives this first microscope carrier.
22, exposure device as claimed in claim 21 is characterized in that:
This microscope carrier drive system during the substrate exchange of carrying out on this first microscope carrier, drives each microscope carrier in the mode of carrying out the measurement of using this second microscope carrier.
23, exposure device as claimed in claim 18 is characterized in that:
In at least a portion this second microscope carrier and face this first microscope carrier subtend, the reflecting surface that the position measurement of this second microscope carrier is used is set.
24, exposure device as claimed in claim 18 is characterized in that:
Microscope carrier in this first, second microscope carrier will be more outstanding than other parts with the upper end part of another microscope carrier subtend, and tabular flange part is set by this;
To be sticked in the section portion of the leading section at least of this flange part across set gap, be arranged at least a portion this another microscope carrier and face this microscope carrier subtend, the state that engages with section portion at this flange part, this at least a portion and this another at least a portion above microscope carrier above microscope carrier can form both whole planes of sizing.
25, exposure device as claimed in claim 18 is characterized in that:
This first, second microscope carrier respectively, the upper end part of first direction of principal axis, one side is more outstanding than other parts, tabular flange part is set by this, and at least a portion section of setting portion of the face of this first axial opposite side of each microscope carrier, it can be sticked in the leading section at least of this flange part of another microscope carrier across set gap;
At the state that this flange part of a microscope carrier engages with this section portion of another microscope carrier, this at least a portion and this another at least a portion above microscope carrier above microscope carrier can form both whole planes of sizing.
26, exposure device as claimed in claim 18 is characterized in that:
This microscope carrier drive system is to keep to make this first microscope carrier and this second microscope carrier be the state that closely connects when this migration;
At least one side at this first microscope carrier and second microscope carrier is provided with the inhibition member, is located at the gap of this two microscope carrier during by this migration, prevents that this liquid is from this clearance leakage.
27, exposure device as claimed in claim 26 is characterized in that:
This suppresses member, is at least one side who comprises containment member and drying tunicle.
28, exposure device as claimed in claim 18 is characterized in that:
During this migration, between this projection optical system and microscope carrier in this first area, should liquid continuous maintenance.
29, exposure device as claimed in claim 18 is characterized in that, further possesses:
First, second speculum, when being arranged at this migration on this first, second microscope carrier respectively two microscope carriers closely connect or the face of contact side beyond face; And
Interferometer shines respectively the reflecting surface of this first, second speculum and to survey long light beam, according to the reverberation of the long light beam of each survey from the reflecting surface of this first, second speculum, measures the position of this first, second microscope carrier.
30, a kind of exposure device is a supply fluid between projection optical system and substrate, by this projection optical system and liquid, makes this base plate exposure, it is characterized in that possessing:
First microscope carrier can comprise first area under this projection optical system of supplying this liquid, move with the set scope zone of the second area of first direction of principal axis, one side that is positioned at this first area;
Second microscope carrier can independently move with this first microscope carrier in the zone that comprises this first area and this second area; And
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and this second microscope carrier, be maintained at and be the arbitrary state that closely connects state and contact condition on second direction of principal axis that intersects with this first direction of principal axis, and this first, second microscope carrier is driven simultaneously towards this second direction of principal axis.
31, exposure device as claimed in claim 30 is characterized in that:
This microscope carrier drive system comprises one group of linear actuators, and the mode that can load and unload with the arbitrary microscope carrier to this first, second microscope carrier engages, and the specific microscope carrier of fastening state can be driven towards second direction of principal axis, to drive two microscope carriers respectively.
32, exposure device as claimed in claim 31 is characterized in that, further possesses:
Conversion equipment after this migration, in order to engage with a linear actuators and another microscope carrier and the state that another linear actuators engages from a microscope carrier, is converted to the state that a microscope carrier engages with another linear actuators and another microscope carrier engages with a linear actuators.
33, exposure device as claimed in claim 30 is characterized in that:
This first, second microscope carrier all is the microscope carrier of energy mounting substrate;
And further possess mark detecting system, be disposed at this second area, for detecting existing mark on the specific microscope carrier that is positioned in this first and second microscope carrier under it.
34, exposure device as claimed in claim 30 is characterized in that:
This first, second microscope carrier respectively, the upper end part of its first direction of principal axis, one side is more outstanding than other parts, tabular flange part is set by this, and at least a portion section of setting portion of this first axial another side of each microscope carrier, it is sticked in the leading section at least of this flange part of another microscope carrier across set gap;
At the state that this flange part of a microscope carrier engages with this section portion of another microscope carrier, this at least a portion and this another at least a portion above microscope carrier above microscope carrier can form both whole planes of sizing.
35, exposure device as claimed in claim 30 is characterized in that:
This microscope carrier drive system is to keep to make this first microscope carrier and second microscope carrier be the state that closely connects during this migration;
At least one side at this first microscope carrier and this second microscope carrier is provided with the inhibition member, is located at the gap of this two microscope carrier during by this migration, prevents that this liquid is from this clearance leakage.
36, exposure device as claimed in claim 35 is characterized in that:
This suppresses member, is at least one side who comprises containment member and drying tunicle.
37, exposure device as claimed in claim 30 is characterized in that:
During this migration, between this projection optical system and microscope carrier in this first area, should liquid continuous maintenance.
38, exposure device as claimed in claim 28 is characterized in that, further possesses:
First, second speculum, when being arranged at this migration on this first, second microscope carrier respectively two microscope carriers closely connect or the face of contact side beyond face; And
Interferometer shines respectively the reflecting surface of this first, second speculum and to survey long light beam, according to the reverberation of the long light beam of each survey from the reflecting surface of this first, second speculum, measures the position of this first, second microscope carrier.
39, a kind of exposure device is a supply fluid between projection optical system and substrate, by this projection optical system and this liquid, makes this base plate exposure, it is characterized in that possessing:
First microscope carrier, can the first area under comprising this projection optical system of waiting to supply this liquid, and with the zone of this first area zones of different in mobile;
Second microscope carrier, can comprise this first area, and with the zone of this second area zones of different in, independently mobile with this first microscope carrier;
The microscope carrier drive system, this first, second microscope carrier is driven, and when making first state transition to another microscope carrier that is positioned at this first area from a microscope carrier be positioned at second state of this first area, make this first microscope carrier and this second microscope carrier, keep with set direction and be the state that closely connects, and this first, second microscope carrier is driven simultaneously towards this set direction; And
Suppress member, be arranged at least one side of this first microscope carrier and this second microscope carrier, it is positioned at the gap of this two microscope carrier during from this first state transition to this second state, prevents that by this this liquid is from this clearance leakage.
40, exposure device as claimed in claim 39 is characterized in that:
This suppresses member, is at least one side who comprises containment member and drying tunicle.
41, exposure device as claimed in claim 39 is characterized in that:
During this migration, between this projection optical system and microscope carrier in this first area, should liquid continuous maintenance.
42, exposure device as claimed in claim 39 is characterized in that, further possesses:
First, second speculum, when being arranged at this migration on this first, second microscope carrier respectively two microscope carriers closely connect or the face of contact side beyond face; And
Interferometer shines respectively the reflecting surface of this first, second speculum and to survey long light beam, according to the reverberation of the long light beam of each survey from the reflecting surface of this first, second speculum, measures the position of this first, second microscope carrier.
43, a kind of manufacturing method is characterized in that: be to comprise each the described exposure device that uses in the claim 10 to 42, make the lithography step of base plate exposure with this energy light beam.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004025837 | 2004-02-02 | ||
| JP025837/2004 | 2004-02-02 | ||
| JP300566/2004 | 2004-10-14 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101689947A Division CN101685263B (en) | 2004-02-02 | 2005-01-27 | Exposure apparatus and device producing method |
Publications (2)
| Publication Number | Publication Date |
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| CN1918695A true CN1918695A (en) | 2007-02-21 |
| CN100552879C CN100552879C (en) | 2009-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2005800022692A Active CN100552879C (en) | 2004-02-02 | 2005-01-27 | Microscope carrier driving method and bearing table device, exposure device, and manufacturing method |
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| CN (1) | CN100552879C (en) |
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| CN101681121B (en) * | 2007-12-14 | 2012-09-26 | 株式会社尼康 | Exposure apparatus, exposure method, and device manufacturing method |
| CN102323727B (en) * | 2004-10-18 | 2014-01-15 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN102473588B (en) * | 2009-07-03 | 2015-06-03 | 应用材料公司 | Substrate processing system |
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| CN105204296A (en) * | 2004-08-03 | 2015-12-30 | 株式会社尼康 | Exposure Equipment, Exposure Method And Device Manufacturing Method |
| CN105204296B (en) * | 2004-08-03 | 2018-07-17 | 株式会社尼康 | Control method, exposure device and the manufacturing method of exposure device |
| CN102323727B (en) * | 2004-10-18 | 2014-01-15 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN101681121B (en) * | 2007-12-14 | 2012-09-26 | 株式会社尼康 | Exposure apparatus, exposure method, and device manufacturing method |
| US9176393B2 (en) | 2008-05-28 | 2015-11-03 | Asml Netherlands B.V. | Lithographic apparatus and a method of operating the apparatus |
| US11187991B2 (en) | 2008-05-28 | 2021-11-30 | Asml Netherlands B.V. | Lithographic apparatus and a method of operating the apparatus |
| CN102473588B (en) * | 2009-07-03 | 2015-06-03 | 应用材料公司 | Substrate processing system |
| CN104749765A (en) * | 2013-12-27 | 2015-07-01 | 精工爱普生株式会社 | Optical module, electronic apparatus, and method of driving optical module |
| CN104749765B (en) * | 2013-12-27 | 2018-01-12 | 精工爱普生株式会社 | The driving method of optical module, electronic equipment and optical module |
| CN113994189A (en) * | 2019-06-21 | 2022-01-28 | 科磊股份有限公司 | Six-freedom-degree workpiece carrying platform |
| CN114001254A (en) * | 2021-11-15 | 2022-02-01 | 盐城工学院 | Test concentration contrast display device for potential step method and display method thereof |
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| CN100552879C (en) | 2009-10-21 |
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