CN2158072Y - Micro-feeding & positioning mechanism for precision scanning tunnel micro-technique - Google Patents
Micro-feeding & positioning mechanism for precision scanning tunnel micro-technique Download PDFInfo
- Publication number
- CN2158072Y CN2158072Y CN 93215868 CN93215868U CN2158072Y CN 2158072 Y CN2158072 Y CN 2158072Y CN 93215868 CN93215868 CN 93215868 CN 93215868 U CN93215868 U CN 93215868U CN 2158072 Y CN2158072 Y CN 2158072Y
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- elastic deformation
- deformation component
- support
- swivel nut
- screw rod
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Abstract
The utility model relates to a micro-feeding and positioning mechanism for the precision scanning tunnel micro-technique. A set of screw pairs are installed on a bracket as a first stage coarse positioning mechanism, an accurate adjustment driver, a spring and a double-layer plate spring are arranged in the center of a screw bolt as a second stage half accurate micro-feeding mechanism, and a third stage and a fourth stage micro-displacing feeding mechanisms are connected with the double-layer plate spring. A third stage piezoelectric micro positioner uses flexible hinges to control the displacement of the working face of elastic deformation elements, and a fourth stage uses a piezoelectric ceramic tube to regulate the precise displacement of a probe. The utility model has the advantages of simple structure, convenient adjustment and high adjustment precision and the adjustment of automatically entering the required tunnel gap with feedback in a needle collision prevention mode can be realized.
Description
The utility model belongs to little feeding and the detent mechanism in precision measurement in the nano technology, the processing instrument and equipment.
When carrying out the measurement of A or nanometer (nm) level with technique of scan tunnel microscope (hereinafter to be referred as " STM "), require the accurate reliable little feeding and the locating device of Subnano-class precision, and requirement can accurately, stably be adjusted to the gap between probe and test specimen in the tunnel gap of required Subnano-class easily.In the prior art, the little feeding locating device of wide region STM that Japan adopts is mounted on the cantilever shalving, do coarse adjustment and half accurate adjustment with three grades of accurate screw mandrel slide blocks, carry out accurate adjustment with the stacked piezoelectric crystal at last, the weak point of this method is that error that screw mandrel, space of slider cause is difficult to eliminate, and the screw mandrel of accurate one-level requires to have the machining precision of μ m level and adjusts precision.The U.S. adopts three accurate screws to adjust, though simpler, the difficult bearing accuracy that guarantees the nm level.Also there are three screw accurate adjustments of employing in China, carries out little feeding with lamination again, and the method is simpler, but also has the difficult problem of adjusting in gap from μ m level to the nm level.
The purpose of this utility model is to design a kind of little feeding of Subnano-class STM and the locating device that can adjust the tunnel gap with easier method realization easily and quickly.
The said little feeding detent mechanism of the utility model is made up of three grades or level Four.The first order is a coarse positioning mechanism, by the accurate thread pair that is placed on the support 8, i.e. and swivel nut 3 and screw rod 7, and parts such as knob 2, gland 4, axial thrust bearing 5 are realized.On screw rod 7, have keyway, limit its circumferential rotation with pin, be fixed on knob on the swivel nut 3, make and realize moving up and down of screw rod 7 by turn, when adjusting to probe 18 and test specimen sample stage 6, coarse adjustment screw rod 7 usefulness dog screws are locked near differing when being tens microns.The second level is half fine-tuning mechanism, form by precision adjustment driver 1, adjustment spring 15, doubling plate spring 9, be mounted with doubling plate spring 97 times at screw rod, in the centre of screw rod 7 through hole is arranged, be mounted with regulating spring 15, the two ends of regulating spring 15 contact with accurate adjustment driver 1 and doubling plate spring 9.Adjust driver 1 compression adjustment spring 15, doubling plate spring 9 is subjected to displacement.The third level is accurate micro-feed mechanism, form by piezoelectric actuator 12 and elastic deformation component 11, elastic deformation component 11 is placed on the worktable 14 on the base plate 13, piezoelectricity microbit device 12 is placed in the elastic deformation component 11, upper and lower surface at piezoelectric actuator 12 can have pad 16, the effect of pad 16 is to make the 19 energy parallel displacements of elastic deformation component's workplace, the pad 16 outer adjusting screw 17 that 12 upper and lower displacements of adjustable piezoelectric micro positioner can be arranged below, rely on flexible hinged 20 to be connected between elastic deformation component 12 workplace 19 and elastic deformation component's 11 main bodys, test specimen sample stage 6 is placed on elastic deformation component's the workplace 19.The fourth stage also is accurate micro-feed mechanism, is placed in the doubling plate spring by piezoelectric ceramic tube 10 and constitutes for 9 times, and probe 18 is placed in piezoelectric ceramic tube 10 belows, the adjustment of feedback micrometric displacement when the corresponding levels are used to scan.
The utility model has the advantages that structure is comparatively simple, easy to adjust, save time, can realize that anti-collision pin ground feeds back the adjustment that enters required tunnel gap automatically.Degree of regulation can reach the A level, and the setting range of its first order can reach 5～25 millimeters, and degree of regulation is several μ m; Partial setting range is several～tens μ m, and resolution is nanoscale; The setting range of the third level can reach about 0.3 μ m～5 μ m, and precision reaches every volt 6 nanometers; The setting range of the fourth stage can reach 0.1～0.5 μ m, and precision reaches the A level.
Little feeding of STM that accompanying drawing 1 is made up of level Four and detent mechanism a kind of;
Accompanying drawing 2 is a kind of by three grades of little feedings of the STM that forms and detent mechanism.
Be further described and describe below in conjunction with drawings and Examples.
Accompanying drawing 1 provides the STM microcomputer of being made up of level Four and gives a kind of structural representation that reaches detent mechanism embodiment.On support 8, be mounted with a cover accurate thread pair, rely on 5 one-tenth movable modes of thrust bearing to make up between its swivel nut 3 and the support 8, in the upper end of swivel nut 3 adjusting knob 2 is arranged, the gland 4 that solid bearing 5 and swivel nut 3 can be arranged on support 8 has available pin (not shown) to limit the keyway (not shown) that it circumferentially rotates on screw rod 7; Can there be a through hole centre of screw rod 7, be mounted with regulating spring 15 in the through hole, above screw rod 7, be mounted with the precision that combines with regulating spring 15 upper ends and adjust driver 1, below screw rod 7, be mounted with the doubling plate spring 9 that combines with regulating spring 15 lower ends, be mounted with piezoelectric ceramic tube 10 below doubling plate spring 9, probe is placed in the below of piezoelectric ceramic tube 10; Base plate 13 combines with support 8.The platform 14 of on base plate 13, arranging work, be mounted with elastic deformation component 11 on the worktable 14, in elastic deformation component 11, settle piezoelectric actuator 12, on piezoelectric actuator 12 and between elastic deformation component's 11 workplaces 19 and piezoelectric actuator 12 below can be added with pad 16, outside the pad 16 below adjusting screw 17 can be arranged, have flexible hinged 20 between elastic deformation component's workplace 19 and bullet spare deformation element 11 main bodys.
Except said structure, also half fine-tuning mechanism of the second level in the accompanying drawing 1 can be cancelled, and with the accurate micro-feed mechanism of the third level, be that elastic deformation component 11 and piezoelectric actuator 12 partly put upside down for main composition and be placed between said screw rod 7 and the piezoelectric ceramic tube 10, test specimen sample stage 6 directly is placed on the worktable 14.Also can on worktable, still settle elastic deformation component same as described above 11 and piezoelectric actuator 12 again, test specimen sample stage 6 is placed on elastic deformation component's workplace 19, constitute the accurate micro-feed mechanism of a kind of level Four according to the mode shown in Fig. 1.
What be worth further specifying is, said accurate to adjust driver 1 can be that step motor can be an outside micrometer also, rely on their to drive and adjust spring 15, and the displacement of control doubling plate spring 9.
Accompanying drawing 2 is according to designed a kind of three grades of little feedings of STM and the locating device of inventive concept of the present utility model.The difference of it and precedent is to save the second level half fine-tuning mechanism, the embodiment of this situation can have two kinds: a kind of is the below that piezoelectric ceramic tube 10 directly is placed in screw rod 7, promptly saves doubling plate spring 9 and accurate driver 1, the adjustment spring 15 adjusted in the accompanying drawing 1; Another kind is to be placed in after elastic deformation component 11 and piezoelectric actuator 12 whole the turning upside down below the screw rod 7 with the accurate micro-feed mechanism of the said third level, then with the accurate micro-feed mechanism of the said fourth stage, piezoelectric ceramic tube 10 is placed on elastic deformation component's the workplace 19, at the positioned beneath probe 18 of piezoelectric ceramic tube 10, said test specimen sample stage 6 can directly be placed on the worktable 6.This three grades of little feedings of STM and detent mechanism are compared with level Four, and except range of adjustment was smaller, its precision all can reach the technical standard described in the utility model.
Claims (7)
1, a kind of precision sweep little feeding of tunnel microtechnic and detent mechanism, it is characterized in that, on support, be mounted with a cover accurate thread pair, rely on thrust bearing to become movable mode to make up between its swivel nut and the support, there is adjusting knob upper end at swivel nut, the gland that solid bearing and swivel nut can be arranged on support has available pin and limits the keyway that it circumferentially rotates on screw rod; Can there be a through hole centre of screw rod, in through hole, to be mounted with regulating spring, above screw rod, be mounted with the precision that combines with the regulating spring upper end and adjust driver, below screw rod, be mounted with the doubling plate spring that combines with the regulating spring lower end, be mounted with piezoelectric ceramic tube below the doubling plate bullet, probe is placed in the piezoelectric ceramic tube below; The elastic deformation component is placed on the worktable on the base plate, in the elastic deformation component, be mounted with piezoelectric actuator, on piezoelectric actuator and between elastic deformation component's workplace and below can be added with pad, pad below is outer can adjusting screw, has flexible hinged between elastic deformation component's workplace and the elastic deformation component's main body.
According to the said mechanism of claim 1, it is characterized in that 2, said accurate adjustment driver can be a step motor, also can be milscale.
3, the little feeding detent mechanism of a kind of precision sweep tunnel microtechnic, it is characterized in that, on support, be mounted with a cover accurate thread pair, rely on thrust bearing to become movable mode to make up between its swivel nut and the support, there is adjusting knob upper end at swivel nut, the gland that solid bearing and swivel nut can be arranged on support has available pin and limits the keyway that it circumferentially rotates on screw rod; Below screw rod, be mounted with the elastic deformation component, in the elastic deformation component, be mounted with piezoelectric actuator, upper and lower surface at piezoelectric actuator can be added with pad, have flexible hinged between elastic deformation component's workplace and the elastic deformation component's main body, be mounted with piezoelectric ceramic tube below the elastic deformation component, probe is placed in the piezoelectric ceramic tube below; With base plate that support is connected on worktable is arranged.
4, press according to the said mechanism of claim 3, it is characterized in that, on said worktable, be mounted with the elastic deformation component, in the elastic deformation component, be mounted with piezoelectric actuator, on piezoelectric actuator and between the elastic deformation workplace and below can be added with pad, can there be adjusting screw at pad place below, has flexible hinged between elastic deformation component's workplace and the elastic deformation component's main body.
According to claim 3,4 said mechanisms, it is characterized in that 5, said accurate adjustment driver can be a stepper motor, also can be milscale.
6, the little feeding detent mechanism of a kind of precision sweep tunnel microtechnic, it is characterized in that, on support, be mounted with a cover accurate thread pair, rely on thrust bearing to become movable mode to make up between its swivel nut and the support, there is adjusting knob upper end at swivel nut, the gland that solid bearing and swivel nut can be arranged on support has available pin and limits the keyway that it circumferentially rotates on screw rod; Be mounted with piezoelectric ceramic tube below screw rod, probe is placed in the piezoelectric ceramic tube below; The elastic deformation component is placed on the worktable on the base plate, in the elastic deformation component, be mounted with piezoelectric actuator, on piezoelectric actuator and between elastic deformation component's workplace and below can be added with pad, pad below is outer can adjusting screw, has flexible hinged between elastic deformation component's workplace and the elastic deformation component's main body.
7, the little feeding detent mechanism of a kind of precision sweep tunnel microtechnic, it is characterized in that, on support, be mounted with a cover accurate thread pair, rely on thrust bearing to become movable mode to make up between its swivel nut and the support, there is adjusting knob upper end at swivel nut, but the gland that solid bearing and swivel nut are arranged on support has available pin and limits the keyway that it circumferentially rotates on screw rod; Below screw rod, be mounted with the elastic deformation component, in the elastic deformation component, be mounted with piezoelectric actuator, upper and lower surface at piezoelectric actuator can be added with pad, have flexible hinged between elastic deformation component's workplace and the elastic deformation component's main body, be mounted with piezoelectric ceramic tube below the elastic deformation component, probe is placed in the below of piezoelectric ceramic tube; With base plate that support links to each other on worktable is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93215868 CN2158072Y (en) | 1993-06-12 | 1993-06-12 | Micro-feeding & positioning mechanism for precision scanning tunnel micro-technique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93215868 CN2158072Y (en) | 1993-06-12 | 1993-06-12 | Micro-feeding & positioning mechanism for precision scanning tunnel micro-technique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2158072Y true CN2158072Y (en) | 1994-03-02 |
Family
ID=33796231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 93215868 Expired - Fee Related CN2158072Y (en) | 1993-06-12 | 1993-06-12 | Micro-feeding & positioning mechanism for precision scanning tunnel micro-technique |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2158072Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7675300B2 (en) | 2004-02-23 | 2010-03-09 | Zyvex Instruments, Llc | Charged particle beam device probe operation |
| CN100595625C (en) * | 2002-06-17 | 2010-03-24 | 塞威仪器公司 | Modular manipulation system for manipulating a sample under study with a microscope |
| US7799132B2 (en) | 2004-03-26 | 2010-09-21 | Zyvex Labs, Llc | Patterned atomic layer epitaxy |
| CN104880578A (en) * | 2015-06-17 | 2015-09-02 | 扬州大学 | Device for measuring micro-nano metal fiber surface topography, and use method thereof, and method for measuring driver moving distance in device |
| CN105467159A (en) * | 2015-12-29 | 2016-04-06 | 中国科学院物理研究所 | Positioning system based on scanning probe technology and utilization method for same |
-
1993
- 1993-06-12 CN CN 93215868 patent/CN2158072Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100595625C (en) * | 2002-06-17 | 2010-03-24 | 塞威仪器公司 | Modular manipulation system for manipulating a sample under study with a microscope |
| US7675300B2 (en) | 2004-02-23 | 2010-03-09 | Zyvex Instruments, Llc | Charged particle beam device probe operation |
| US7799132B2 (en) | 2004-03-26 | 2010-09-21 | Zyvex Labs, Llc | Patterned atomic layer epitaxy |
| CN104880578A (en) * | 2015-06-17 | 2015-09-02 | 扬州大学 | Device for measuring micro-nano metal fiber surface topography, and use method thereof, and method for measuring driver moving distance in device |
| CN104880578B (en) * | 2015-06-17 | 2017-06-16 | 扬州大学 | The measuring method of driver move distance in a kind of device and its application method and the device for measuring micro-nano metallic fiber surface topography |
| CN105467159A (en) * | 2015-12-29 | 2016-04-06 | 中国科学院物理研究所 | Positioning system based on scanning probe technology and utilization method for same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |