DE102004015668B3 - Apparatus for quick temperature measurement of a work piece on coordinate measurement apparatus with a measuring probe head and using a temperature sensor - Google Patents
Apparatus for quick temperature measurement of a work piece on coordinate measurement apparatus with a measuring probe head and using a temperature sensor Download PDFInfo
- Publication number
- DE102004015668B3 DE102004015668B3 DE200410015668 DE102004015668A DE102004015668B3 DE 102004015668 B3 DE102004015668 B3 DE 102004015668B3 DE 200410015668 DE200410015668 DE 200410015668 DE 102004015668 A DE102004015668 A DE 102004015668A DE 102004015668 B3 DE102004015668 B3 DE 102004015668B3
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- temperature
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- 239000000523 sample Substances 0.000 title claims abstract description 66
- 238000009529 body temperature measurement Methods 0.000 title claims abstract description 12
- 238000005259 measurement Methods 0.000 title description 7
- 238000000034 method Methods 0.000 claims abstract description 18
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- 238000011156 evaluation Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 241001422033 Thestylus Species 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 238000013213 extrapolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Die Erfindung betrifft eine Vorrichtung zur schnellen Werkstücktemperaturmessung auf Koordinatenmessgeräten mit einem Tastkopf vom messenden Typ sowie ein Verfahren zur schnellen Werkstücktemperaturmessung.The The invention relates to a device for rapid workpiece temperature measurement on coordinate measuring machines with a probe of the measuring type as well as a method for fast Workpiece temperature measurement.
In der Koordinatenmesstechnik ist es notwendig, die Temperatur eines Werkstückes zum Zeitpunkt der Messung zu erfassen, da die endliche Wärmeausdehnung der meisten in der Technik gebräuchlichen Materialien zu Maßveränderungen führt, wenn sich die Temperatur von der Bezugstemperatur von 20 °C entfernt.In Coordinate metrology it is necessary to change the temperature of a workpiece at the time of measurement, since the finite thermal expansion most common in the art Materials leads to dimensional changes when the temperature of the reference temperature of 20 ° C away.
In der Koordinatenmesstechnik sind Tastköpfe bekannt, die sich im Wesentlichen in zwei Kategorien beschreiben lassen, die das Verfahren kennzeichnen, mit dem die Berührung (Antastung) des Antastkörpers, üblicherweise ein Taststift mit Antastkugel, am Werkstück erkannt wird.In Coordinate metrology probes are known, which are essentially be described in two categories that characterize the procedure, with the touch (Probing) of the probe, usually a stylus with probing ball is detected on the workpiece.
Tastköpfe vom schaltenden Typ erkennen die Antastung beispielsweise durch Auswerten eines Körperschallimpulses, der bei der Berührung mit dem Werkstück entsteht, oder durch Öffnen beziehungsweise Schließen eines Stromkreises, wenn durch die Antastkräfte ein kinematisches Lager aus seiner Ruhelage gebracht wird. Diese schaltenden Tastköpfe sind mit einer Einrichtung verbunden, die es ermöglicht, sie in drei Raumrichtungen frei zu bewegen mit dem Ziel, die Antastkugel an jeder beliebigen Stelle mit dem Werkstück in Kontakt zu bringen. Diese Tastköpfe haben den Vorteil, dass sie mechanisch einfach und damit kostengünstig realisierbar sind. Sie haben allerdings den Nachteil, dass mit ihnen ein kontinuierliches Abtasten (Scannen) des Werkstückes nicht möglich ist.Probes from switching type detect the probing, for example, by evaluating a structure-borne sound impulse, the one at the touch with the workpiece arises, or by opening or close of a circuit, if by the probing forces a kinematic bearing is brought from its rest position. These switching probes are connected to a device that allows it in three spatial directions free to move with the aim of having the probing ball at any one Place with the workpiece to bring into contact. These probes have the advantage that they are mechanically simple and therefore inexpensive to implement. They have however the disadvantage that with them a continuous scanning (Scanning) of the workpiece not possible is.
Hierzu benötigt man Tastköpfe vom messenden Typ. Sie bestehen aus einem festen Teil, das mit einer Einrichtung verbunden ist, die den Tastkopf in drei Raumdimensionen innerhalb eines definierten Messvolumens frei bewegen und positionieren kann, sowie aus drei üblicherweise orthogonalen, gegenüber dem festen Teil beweglichen Teilen. Die beweglichen Teile sind häufig als Schaukeln mit Parallelfederblechführung ausgebildet, die eine exakte Führung in jeweils einer Raumrichtung ermöglicht. Die drei Schaukeln bauen kinematisch so aufeinander auf, so dass die letzte Schaukel der kinematischen Kette innerhalb eines Bewegungsspielraumes in Form eines Würfels von typisch einigen Millimetern Kantenlänge gegenüber dem festen Teil frei beweglich ist. Weiter sind Rückstellelemente vorgesehen, die die Tastkopfschaukeln in eine Ruhestellung bringen, die etwa in der Mitte des Bewegungsspielraumes liegt, wenn keine äußeren Kräfte auf die Schaukeln wirken. Darüber hinaus sind Positionsmesseinrichtungen vorgesehen, die die Abweichung von der Ruhelage der einzelnen Schaukeln messen und damit einen Auslenkvektor der kinematisch letzten Schaukel gegenüber dem festen Teil definieren. Die Nullpunkte dieser Positionsmesseinrichtungen definieren üblicherweise die genannte Ruhelage.For this needed man probes of the measuring type. They consist of a solid part that with a Device connected to the probe in three room dimensions move and position freely within a defined measuring volume can, as well as three commonly orthogonal, opposite the fixed part of moving parts. The moving parts are often as Swings formed with parallel spring plate guide, the one exact guidance in each case allows a spatial direction. The three swings build kinematically on each other so that the last swing the kinematic chain within a range of motion in shape a cube of typically a few millimeters edge length relative to the fixed part freely movable is. Next are reset elements provided that bring the probe rockers in a rest position, which is located approximately in the middle of the range of motion, if no external forces the swings are working. About that In addition, position measuring devices are provided which measure the deviation from the rest position of each swings measure and thus one Deflection vector of the kinematically last swing opposite the Define fixed part. The zero points of these position measuring devices usually define the quiescent position.
An der letzten Schaukel ist üblicherweise eine mechanische Schnittstelle vorgesehen, die ein automatisches Wechseln von so genannten Tasterkombinationen ermöglicht. Diese Schnittstelle besteht aus einer kinematisch definierten Lagerung, die genau alle sechs kinematischen Freiheitsgrade festlegt, damit beim wiederholten Einwechseln derselben Tasterkombination die Relativlage zwischen der Tastkopfschaukel und dieser Tasterkombination möglichst exakt reproduziert wird.At the last swing is usually one mechanical interface provided, which allows automatic switching of so-called probe combinations allows. This interface consists of a kinematically defined storage, which is exactly all Defines six kinematic degrees of freedom, thus repeated Replacing the same probe combination the relative position between the probe rocker and this combination of probes possible is exactly reproduced.
Zum
Stand der Technik (
Nachteilig bei diesem Verfahren ist die Notwendigkeit eines eigenständigen Temperaturmesskopfes, der darüber hinaus Platz in dem Magazin wegnimmt, das zur Aufbewahrung von Tasterkombinationen dient, die automatisch eingewechselt werden können.adversely in this method, the need for an independent temperature probe, the above In addition, takes away space in the magazine, the storage of button combinations serves, which can be replaced automatically.
Zum
Stand der Technik (
Das der Erfindung zugrunde liegende technische Problem besteht darin, eine Vorrichtung und ein Verfahren zur schnellen Werkstücktemperaturmessung anzugeben, bei dem die genannten Nachteile nicht auftreten.The The technical problem underlying the invention is that an apparatus and method for rapid workpiece temperature measurement indicate that the disadvantages mentioned do not occur.
Dieses technische Problem wird durch eine Vorrichtung mit den Merkmalen des Anspruches 1 sowie durch ein Verfahren mit den Merkmalen des Anspruches 5 gelöst.This technical problem is caused by a device with the features of claim 1 and by a method having the features of the claim 5 solved.
Gemäß der Erfindung weist die Vorrichtung zur schnellen Werkstücktemperaturmessung auf Koordinatenmessgeräten mit einem Tastkopf vom messenden Typ einen Temperatursensor auf, der eine in Richtung der Werkstückoberfläche ausgerichtete Kontaktfläche besitzt, die mit dem Werkstück in Kontakt gebracht wird. Die Temperaturmesswerte werden wäh rend einer bestimmten Zeitdauer erfasst. Der Temperatursensor ist an einer Unterseite des Tastkopfes angeordnet, an der auch eine mechanische Schnittstelle für die Aufnahme einer Tasterkombination vorgesehen ist, wobei der Temperatursensor außerhalb des Bereiches der Schnittstelle angeordnet ist.According to the invention has the device for fast workpiece temperature measurement on coordinate measuring machines a probe of the measuring type on a temperature sensor, the has a contact surface oriented in the direction of the workpiece surface, the one with the workpiece is brought into contact. The temperature readings are taken during a certain period of time. The temperature sensor is on one Bottom of the probe arranged, on which also a mechanical Interface for the inclusion of a probe combination is provided, the temperature sensor outside the area of the interface is arranged.
Durch die erfindungsgemäße Ausbildung der Vorrichtung erfolgt die Antasterkennung in gleicher Weise wie bei einem normalen Antastvorgang mit einem Taster, das heißt über die Wegmesssysteme der beweglichen Schaukeln des Tastkopfes.By the training of the invention the device is the detection in the same way as in a normal probing with a button, that is on the Position measuring systems of the movable rockers of the probe.
Die erfindungsgemäße Vorrichtung hat den Vorteil, dass der Temperatursensor an der Unterseite des Tastkopfes, das heißt an der letzten Tastkopfschaukel angeordnet ist. Es ist nicht erforderlich, einen gesonderten Temperaturmesskopf einzuwechseln, der einen Platz in dem Magazin, das zur Aufbewahrung der Tasterkombinationen dient, wegnehmen würde.The inventive device has the advantage that the temperature sensor at the bottom of the Probe, that is is arranged on the last Tastkopfschaukel. It is not necessary, to exchange a separate temperature measuring head, which has a place in the magazine, which is used to store the probe combinations, would take away.
Ein weiterer Vorteil besteht darin, dass im Zustand eines eingewechselten Tasters die Tasteraufnahme sich mit dem Temperaturfühler in Kontakt befindet. Damit kann zumindest indirekt auf die Temperatur des Taststiftes während der Antastung geschlossen werden, was eine thermische Längenkorrektur des Taststiftes ermöglicht.One Another advantage is that in the state of a substitute Taster the button recording itself with the temperature sensor in Contact is located. This can at least indirectly affect the temperature of the stylus during the probing be closed, giving a thermal length correction of the stylus allows.
Vorteilhaft ist der Temperatursensor fest an der Unterseite des Tastkopfes an der kinematisch letzten Tastkopfschaukel angeordnet.Advantageous the temperature sensor is firmly attached to the underside of the probe the kinematically last probe rocker arranged.
Gemäß einer vorteilhaften Ausgestaltung der Erfindung ist der Temperatursensor auf einer Druckfeder gelagert, so dass sich die Kontaktfläche des Temperatursensors in Richtung der Werkstückoberfläche ausrichten kann.According to one advantageous embodiment of the invention is the temperature sensor stored on a compression spring, so that the contact surface of the temperature sensor align in the direction of the workpiece surface can.
Die Federkraft der Druckfeder ist so zu wählen, dass durch Kontakt des Temperatursensors mit dem Werkstück die Tastkopfschaukel ausgelenkt wird, die in Richtung Antastkraft beweglich ist, so dass über das Wegmesssystem dieser Tastkopfschaukel feststellbar ist, dass eine Auslenkung und damit ein Kontakt stattgefunden hat.The Spring force of the compression spring is to be chosen so that by contact of the Temperature sensor with the workpiece the probe swing is deflected in the direction of probing force is movable, so over the displacement measuring system of this probe rocker is ascertainable that a deflection and thus a contact has taken place.
Das erfindungsgemäße Verfahren umfasst folgende Verfahrensschritte:
- 1. Der Temperatursensor des Tastkopfes, bei dem die Tasteraufnahme aus der Schnittstelle entfernt ist, wird mit dem Werkstück in Kontakt gebracht;
- 2. durch den Kontakt wird wenigstens eine Tastkopfschaukel ausgelenkt;
- 3. die Auslenkung wird durch wenigstens ein Wegmesssystem des Tastkopfes erfasst;
- 4. nach Erreichen einer vorbestimmten Auslenkung der untersten Tastkopfschaukel werden die Antriebe der Koordinatenmessmaschine stillgesetzt;
- 5. die Werkstücktemperaturerfassung wird gestartet, derart, dass die Werkstücktemperaturmesswerte erfasst und ausgewertet werden.
- 1. The temperature sensor of the probe, wherein the probe receptacle is removed from the interface, is brought into contact with the workpiece;
- 2. by the contact at least one Tastkopfschaukel is deflected;
- 3. the deflection is detected by at least one displacement measuring system of the probe;
- 4. After reaching a predetermined deflection of the lowermost Tastkopfschaukel the drives of the coordinate measuring machine are stopped;
- 5. The workpiece temperature detection is started, such that the workpiece temperature measured values are recorded and evaluated.
Gemäß einer vorteilhaften Ausgestaltung der Erfindung werden die Werkstücktemperaturmesswerte erst nach einer vorbestimmten Zeit nach der Antastung erfasst und ausgewertet. Dieses vorbestimmte Zeitintervall richtet sich nach der Art und Ausführung des Temperatursensors. Je nach Temperatursensor erfasst dieser nicht unmittelbar ab dem Berührungszeitpunkt die Temperaturänderungen. Üblicherweise wird ein gewisser Zeitraum benötigt, bis eine Temperaturänderung der Kontaktfläche von dem eigentlichen Sensorelement erfasst wird.According to one Advantageous embodiment of the invention, the workpiece temperature readings recorded after a predetermined time after probing and evaluated. This predetermined time interval depends on the type and design of the temperature sensor. Depending on the temperature sensor does not detect this immediately after the contact time the temperature changes. Usually will a certain period of time needed to a temperature change the contact surface is detected by the actual sensor element.
Gemäß einer weiteren vorteilhaften Ausgestaltung der Erfindung wird der Verlauf der Temperaturmesswerte aufgezeichnet und über ein numerisches Auswerteverfahren an eine vorgegebene Funktion angepasst, so dass die tatsächliche Werkstücktemperatur mit Hilfe der so ermittelten Anpasstemperatur bestimmt wird.According to one Another advantageous embodiment of the invention, the course recorded the temperature readings and a numerical evaluation adapted to a given function, so that the actual Workpiece temperature determined with the help of the thus determined fitting temperature.
Dazu
wird der gemessene Temperaturverlauf TF(t)
beispielsweise an eine Funktion der Form
- TF =
- Fühlertemperatur,
- TWS =
- Werkstücktemperatur,
- t =
- Messdauer,
- τ =
- kontaktspezifische Konstante (materialabhängig)
- T F =
- Sensor temperature,
- T WS =
- Workpiece temperature,
- t =
- Measurement time,
- τ =
- contact-specific constant (depending on material)
Aus der Anpassung erhält man die beiden Anpassungsparameter TWS und τ, wobei TWS die Werkstücktemperatur ist, die sich nach genügend langer Messdauer einstellt, während τ eine kontaktspezifische Größe ist. Durch dieses Auswerteverfahren ist eine Extrapolation der Werkstücktemperatur mit einer Genauigkeit von 0,1 °K möglich bei einer Verkürzung der Messdauer um einen Faktor 5 bis 6 gegenüber dem tatsächlichen Erreichen der Werkstücktemperatur durch den Temperaturfühler.From the adaptation one obtains the two adaptation parameters T WS and τ, where T WS is the workpiece temperature, which adjusts after a sufficiently long measurement period, while τ is a contact-specific variable. By means of this evaluation method, an extrapolation of the workpiece temperature with an accuracy of 0.1 ° K is possible with a shortening of the measuring time by a factor of 5 to 6 compared to the actual reaching of the workpiece temperature by the temperature sensor.
Ein
derartiges Extrapolationsverfahren ist zum Beispiel in der Druckschrift
Die erfindungsgemäße Vorrichtung hat den Vorteil, dass durch die Registrierung des Berührungszeitpunktes sowie durch das spezielle Auswerteverfahren so eine kurze Messzeit erreicht wird bei gleichzeitiger Sicherheit, dass der Temperatursensor auch tatsächlich am Werkstück anliegt. Mit Hilfe des beschriebenen Auswerteverfahrens ist eine Verkürzung der Messdauer möglich im Vergleich zu einer Messung, bei der das Erreichen der Werkstücktemperatur durch den Fühler abgewartet wird. Ein sicheres flächiges Anliegen des Temperatursensors am Werkstück ist durch die federnde Lagerung des Temperatursensors gewährleistet. Darüber hinaus hat die erfindungsgemäße Vorrichtung den Vorteil, dass auch schon kleinste Auslenkungen detektiert werden, während bei der zum Stand der Technik gehörenden Ausführungsform mit einem schaltenden Temperaturmesskopf eine gewisse Antastkraft erst überwunden werden muss.The inventive device has the advantage that by registering the touch time as well as a short measuring time due to the special evaluation procedure is achieved while ensuring that the temperature sensor too indeed on the workpiece is applied. With the help of the described evaluation is a shortening the measuring duration possible compared to a measurement in which the achievement of the workpiece temperature through the feeler is waited. A safe areal Concern of the temperature sensor on the workpiece is due to the resilient mounting ensures the temperature sensor. About that In addition, the device according to the invention the advantage that even the smallest deflections are detected, while in the prior art embodiment with a switching temperature probe overcome a certain probing force must become.
Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der ein Ausführungsbeispiel eines erfindungsgemäßen Tastkopfes nur beispielhaft dargestellt ist. In der Zeichnung zeigen:Further Features and advantages of the invention will become apparent from the accompanying drawings, in the one embodiment a probe according to the invention is shown only by way of example. In the drawing show:
An
einer Tasteraufnahme (
An
einer Unterseite (
In
Die dadurch bestimmte Werkstücktemperatur kann nun dazu verwendet werden, die temperaturabhängige Längenausdehnung des Werkstückes zu korrigieren.The thereby certain workpiece temperature can now be used to the temperature-dependent length expansion of the workpiece too correct.
- 11
- Tastkopfprobe
- 2, 3, 42, 3, 4
- Tastkopfschaukelscanning head rocker
- 2', 3', 4'2 ', 3', 4 '
- fester Teil der Tastkopfschaukelsolid Part of the probe swing
- 2'', 3'', 4''2 '', 3 '', 4 ''
- beweglicher Teil der TastkopfschaukelPortable Part of the probe swing
- 5, 6, 75, 6, 7
- Federblechespring plates
- 88th
- TasteraufnahmeProbe body
- 9, 10, 119 10, 11
- Wegmesssystememeasuring systems
- 12, 13, 1412 13, 14
- GewichtsausgleichsfedernCounterbalancing springs
- 1515
- Spindelmutterspindle nut
- 1616
- Spindelspindle
- 1717
- Motorengine
- 18, 19, 2018 19, 20
- Lagercamp
- 2121
- Hakenhook
- 2222
-
Unterseite
des Tastkopfes (
1 )Bottom of the probe (1 ) - 2323
- Temperatursensortemperature sensor
- 2424
- Druckfedercompression spring
- A, BA, B
- KurveCurve
Claims (7)
Priority Applications (1)
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DE200410015668 DE102004015668B3 (en) | 2004-03-31 | 2004-03-31 | Apparatus for quick temperature measurement of a work piece on coordinate measurement apparatus with a measuring probe head and using a temperature sensor |
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DE200410015668 DE102004015668B3 (en) | 2004-03-31 | 2004-03-31 | Apparatus for quick temperature measurement of a work piece on coordinate measurement apparatus with a measuring probe head and using a temperature sensor |
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DE102004015668B3 true DE102004015668B3 (en) | 2005-09-08 |
Family
ID=34833245
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Cited By (29)
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US20100250175A1 (en) * | 2006-08-31 | 2010-09-30 | Faro Technologies, Inc. | Smart probe |
US8001697B2 (en) | 2010-01-20 | 2011-08-23 | Faro Technologies, Inc. | Counter balance for coordinate measurement device |
US8284407B2 (en) | 2010-01-20 | 2012-10-09 | Faro Technologies, Inc. | Coordinate measuring machine having an illuminated probe end and method of operation |
US8533967B2 (en) | 2010-01-20 | 2013-09-17 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8615893B2 (en) | 2010-01-20 | 2013-12-31 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine having integrated software controls |
US8630314B2 (en) | 2010-01-11 | 2014-01-14 | Faro Technologies, Inc. | Method and apparatus for synchronizing measurements taken by multiple metrology devices |
US8638446B2 (en) | 2010-01-20 | 2014-01-28 | Faro Technologies, Inc. | Laser scanner or laser tracker having a projector |
US8677643B2 (en) | 2010-01-20 | 2014-03-25 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
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US8875409B2 (en) | 2010-01-20 | 2014-11-04 | Faro Technologies, Inc. | Coordinate measurement machines with removable accessories |
US8898919B2 (en) | 2010-01-20 | 2014-12-02 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter used to establish frame of reference |
US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
US9074883B2 (en) | 2009-03-25 | 2015-07-07 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
USRE45854E1 (en) | 2006-07-03 | 2016-01-19 | Faro Technologies, Inc. | Method and an apparatus for capturing three-dimensional data of an area of space |
US9329271B2 (en) | 2010-05-10 | 2016-05-03 | Faro Technologies, Inc. | Method for optically scanning and measuring an environment |
US9372265B2 (en) | 2012-10-05 | 2016-06-21 | Faro Technologies, Inc. | Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration |
US9417056B2 (en) | 2012-01-25 | 2016-08-16 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
US9417316B2 (en) | 2009-11-20 | 2016-08-16 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
US10175037B2 (en) | 2015-12-27 | 2019-01-08 | Faro Technologies, Inc. | 3-D measuring device with battery pack |
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EP0546784A2 (en) * | 1991-12-11 | 1993-06-16 | Renishaw Metrology Limited | Temperature sensor for coordinate positioning apparatus |
DE4039336C2 (en) * | 1990-12-10 | 1999-12-09 | Zeiss Carl Fa | Process for fast workpiece temperature measurement on coordinate measuring machines |
-
2004
- 2004-03-31 DE DE200410015668 patent/DE102004015668B3/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE4039336C2 (en) * | 1990-12-10 | 1999-12-09 | Zeiss Carl Fa | Process for fast workpiece temperature measurement on coordinate measuring machines |
EP0546784A2 (en) * | 1991-12-11 | 1993-06-16 | Renishaw Metrology Limited | Temperature sensor for coordinate positioning apparatus |
Cited By (47)
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