DE102005049228B4 - Detector with an array of photodiodes - Google Patents
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- 238000011156 evaluation Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000002591 computed tomography Methods 0.000 claims description 14
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- 238000003384 imaging method Methods 0.000 description 3
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- 239000011358 absorbing material Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
- A61B6/02—Devices for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
- A61B6/03—Computerised tomographs
- A61B6/032—Transmission computed tomography [CT]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20182—Modular detectors, e.g. tiled scintillators or tiled photodiodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20183—Arrangements for preventing or correcting crosstalk, e.g. optical or electrical arrangements for correcting crosstalk
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2985—In depth localisation, e.g. using positron emitters; Tomographic imaging (longitudinal and transverse section imaging; apparatus for radiation diagnosis sequentially in different planes, steroscopic radiation diagnosis)
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B42/00—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means
- G03B42/02—Obtaining records using waves other than optical waves; Visualisation of such records by using optical means using X-rays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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- H—ELECTRICITY
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/30—Transforming light or analogous information into electric information
- H04N5/32—Transforming X-rays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
Abstract
Detektor mit einem Array von Photodioden (10), welche hinsichtlich der Größe ihrer lichtsensitiven Empfangsfläche jeweils einem Pixel entsprechen, wobei jede Photodiode (20) in gleicher Weise in wenigstens zwei Sub-Photodioden (21, 22) untergliedert ist, und wobei jede Photodiode (20) wenigstens einen elektrischen Schalter (23) aufweist, so dass nur eine oder alle Sub-Photodioden (21, 22) der Photodiode (20) mit einer Auswerteschaltung (13) verbindbar sind, wobei jede Photodiode (20) in eine erste (21) und in eine zweite (22) Sub-Photodiode untergliedert ist, wobei die erste Sub-Photodiode (21) hinsichtlich ihrer lichtsensitiven Empfangsfläche quadratisch oder rechteckförmig ausgebildet ist, und wobei der Detektor weiterhin ein dem Array von Photodioden (10) zugeordnetes und relativ zu dem Array von Photodioden (10) ausgerichtetes Array von Szintillatorelementen (9) aufweist, so dass einer Photodiode (20) jeweils ein Szintillatorelement (14) zugeordnet ist, wobei die Szintillatorelemente (14) jeweils in mehrere Sub-Elemente (15, 16, 17, 18) unterteilt sind, wobei genau ein Sub-Element (18) eines Szintillatorelementes (14) der ersten Sub-Photodiode (21) zugeordnet ist und die restlichen Sub-Elemente (15, 16, 17) des Szintillatorelementes (14) der zweiten Sub-Photodiode (22) zugeordnet sind, wobei die Szintillatorelemente (14) sowie die Sub-Elemente (15, 16, 17, 18) durch Schlitze (30, 31, 32) voneinander getrennt sind, die mit einem Licht reflektierenden Material gefüllt sind.Detector with an array of photodiodes (10), each of which corresponds to a pixel in terms of the size of its light-sensitive receiving surface, each photodiode (20) being subdivided in the same way into at least two sub-photodiodes (21, 22), and each photodiode ( 20) has at least one electrical switch (23) so that only one or all of the sub-photodiodes (21, 22) of the photodiode (20) can be connected to an evaluation circuit (13), each photodiode (20) in a first (21 ) and is subdivided into a second (22) sub-photodiode, the first sub-photodiode (21) having a square or rectangular shape with regard to its light-sensitive receiving surface, and the detector also having an array of photodiodes (10) assigned and relative to has an array of scintillator elements (9) aligned with the array of photodiodes (10), so that one scintillator element (14) is assigned to each photodiode (20), the scintillator elements te (14) are each divided into several sub-elements (15, 16, 17, 18), with exactly one sub-element (18) of a scintillator element (14) being assigned to the first sub-photodiode (21) and the remaining sub -Elements (15, 16, 17) of the scintillator element (14) are assigned to the second sub-photodiode (22), the scintillator elements (14) and the sub-elements (15, 16, 17, 18) through slots (30, 31, 32), which are filled with a light-reflecting material.
Description
Die Erfindung betrifft einen Detektor insbesondere für Röntgenstrahlung mit einem Array von Photodioden, welche hinsichtlich der Größe ihrer lichtsensitiven Empfangsfläche jeweils einem Pixel entsprechen.The invention relates to a detector, in particular for X-ray radiation, having an array of photodiodes which correspond in each case to one pixel in terms of the size of their light-sensitive receiving surface.
Bei der Bildgebung mit einem Röntgengerät, z. B. mit einem Röntgen-Computertomographiegerät, welches ein Röntgenaufnahmesystem mit einer Röntgenstrahlenquelle und einem Röntgenstrahlendetektor aufweist, ist man bestrebt, die Detektionsfläche des zur Bildgewinnung zur Verfügung stehenden Röntgenstrahlendetektors möglichst groß auszuführen, um beispielsweise in einem Umlauf des Röntgensystems um einen Patienten ganze Organe, wie das Herz des Patienten, abscannen zu können. Ein derartiger, auch als Flächendetektor bezeichneter Röntgenstrahlendetektor ist in der Regel aus einer Vielzahl von Detektormodulen aufgebaut, welche zweidimensional aneinander gereiht sind. Jedes Detektormodul weist ein Array von Szintillatorelementen und ein Array von Photodioden auf, welche zueinander ausgerichtet sind. Ein Szintillatorelement und eine Photodiode bilden dabei ein Detektorelement des Detektormoduls. Ein Detektorelement repräsentiert ein Pixel des Detektors. Die Szintillatorelemente wandeln auf sie auftreffende Röntgenstrahlung in sichtbares Licht um, welches von den nachgelagerten Photodioden des Arrays von Photodioden in elektrische Signale umgesetzt wird.When imaging with an X-ray machine, z. B. with an X-ray computed tomography device, which has an X-ray recording system with an X-ray source and an X-ray detector, one strives to make the detection surface of the X-ray detector available for image acquisition as large as possible, for example, in a single revolution of the X-ray system to a patient whole organs such the patient's heart to be able to scan. Such an X-ray detector, which is also referred to as an area detector, is generally constructed from a multiplicity of detector modules, which are arranged two-dimensionally next to one another. Each detector module has an array of scintillator elements and an array of photodiodes aligned with each other. A scintillator element and a photodiode thereby form a detector element of the detector module. A detector element represents a pixel of the detector. The scintillator elements convert incident X-radiation into visible light, which is converted by the downstream photodiodes of the array of photodiodes into electrical signals.
In bestimmten medizinischen Diagnosefällen besteht der Wunsch, mit dem Röntgengerät Bilder von einem Untersuchungsobjekt erzeugen zu können, die eine höhere Ortsauflösung haben als die durch das Raster der Detektorelemente bzw. das Raster der Pixel vorgegebene Ortsauflösung des verwendeten Röntgenstrahlendetektors. Hierzu ist es aus der
Um zusätzlich zu Röntgenaufnahmen mit einer dem Raster der Pixel entsprechenden Ortsauflösung auch Röntgenaufnahmen mit höherer Ortsauflösung gewinnen zu können, ist die Hochauflösungsblende in der Regel motorisch zwischen einer Arbeitsstellung und einer axial versetzten Nichtbetriebsstellung verfahrbar. Demnach ist an dem Röntgenaufnahmesystem zusätzlich eine bewegte Komponente, nämlich die Hochauflösungsblende, vorhanden, die für den Betrieb justiert werden muss und für die zusätzlicher Bauraum an dem Röntgenaufnahmesystem bereit gestellt werden muss, um die Hochauflösungsblende im Falle der Nichtbenutzung so aufnehmen zu können, dass sie die anderweitige Bildgewinnung mit dem Röntgenaufnahmesystem nicht behindert. Des Weiteren erfordert das Verfahren der Hochauflösungsblende in eine Arbeitsstellung und eine Nichtbetriebsstellung eine aufwändige und somit teuere Mechanik.In order to be able to obtain x-ray images with a higher spatial resolution in addition to x-ray exposures having a spatial resolution corresponding to the grid of the pixels, the high-resolution diaphragm can generally be moved between a working position and an axially offset non-operating position by motor means. Accordingly, the X-ray recording system additionally has a moving component, namely the high-resolution diaphragm, which must be adjusted for operation and for which additional space must be provided on the X-ray recording system in order to be able to record the high-definition diaphragm in the event of non-use in such a way that it can the other image acquisition with the X-ray recording system is not hindered. Furthermore, the method of high-resolution diaphragm in a working position and a non-operating position requires a complex and therefore expensive mechanics.
Die Druckschrift
Der Erfindung liegt daher die Aufgabe zugrunde, einen Detektor der eingangs genannten Art derart anzugeben, dass mit dem Detektor Röntgenaufnahmen mit höherer Ortsauflösung möglich sind, ohne eine Hochauflösungsblende verwenden zu müssen.The invention is therefore based on the object to provide a detector of the type mentioned above such that with the detector X-ray images with higher spatial resolution are possible without having to use a high-resolution aperture.
Nach der Erfindung wird diese Aufgabe gelöst durch einen Detektor mit einem Array von Photodioden, welche hinsichtlich der Größe ihrer lichtsensitiven Empfangsfläche jeweils einem Pixel entsprechen, wobei jede Photodiode in gleicher Weise in wenigstens zwei Sub-Photodioden untergliedert ist, und wobei jede Photodiode wenigstens einen elektrischen Schalter aufweist, so dass nur eine oder alle Sub-Photodioden der Photodiode mit einer Auswerteschaltung verbindbar sind. Es wird also vorgeschlagen, die lichtsensitive Empfangsfläche jeder Photodiode des Arrays, welche einem Pixel entspricht, nochmals in wenigstens zwei Sub-Photodioden zu unterteilen, und die Photodiode derart mit einem Schalter zu versehen, dass zur Aufnahme von Röntgenprojektionen mit hoher Ortsauflösung nur die eine Sub-Photodiode aktiv ist und im Falle der Aufnahme von Röntgenprojektionen mit normaler Ortsauflösung alle Sub-Photodioden aktiv sind, was dem konventionellen Betrieb der Photodiode entsprechen würde. Auf diese Weise können Röntgenprojektionen mit einer erhöhten Ortsauflösung gewonnen werden, ohne eine spezielle Hochauflösungsblende verwenden zu müssen, um jeweils einen Teil der Detektorfläche zur Gewinnung von Röntgenprojektion mit erhöhter Ortsauflösung abzuschatten.According to the invention, this object is achieved by a detector having an array of photodiodes, each corresponding to a pixel in size of their light-sensitive receiving surface, wherein each photodiode is subdivided in the same way in at least two sub-photodiodes, and wherein each photodiode at least one electrical Has switch, so that only one or all sub-photodiodes of the photodiode can be connected to an evaluation circuit. It is therefore proposed to subdivide the light-sensitive receiving surface of each photodiode of the array, which corresponds to one pixel, into at least two sub-photodiodes, and to provide the photodiode with a switch such that only one sub-substrate is required to acquire X-ray projections with high spatial resolution Photodiode is active and in the case of recording X-ray projections with normal spatial resolution all sub-photodiodes are active, which would correspond to the conventional operation of the photodiode. In this way, X-ray projections with an increased spatial resolution can be obtained without having to use a special high-resolution diaphragm in order to shade each part of the detector surface for obtaining X-ray projection with increased spatial resolution.
Nach einer Variante der Erfindung handelt es sich bei dem Schalter um einen Schalter in CMOS-Technik, der sich in einfacher Weise in eine Photodiode integrieren lässt. Der Schalter wird vorzugsweise über die Auswerteschaltung gesteuert betrieben, so dass je nach Betriebsmodus des Detektors entweder alle Sub-Photodioden einer Photodiode zur Signalgenerierung der Photodiode beitragen, oder dass jeweils nur eine bestimmte Sub-Photodiode einer Photodiode aktiv ist, um die Röntgenprojektion mit erhöhter Ortsauflösung zu gewinnen.According to a variant of the invention, the switch is a switch in CMOS technology, which can be easily integrated into a photodiode. The switch is preferably operated in a controlled manner via the evaluation circuit, so that depending on the operating mode of the detector, either all sub-photodiodes of a photodiode contribute to the signal generation of the photodiode, or that in each case only a specific sub-photodiode of a photodiode is active, the X-ray projection with increased spatial resolution to win.
Erfindungsgemäß ist jede Photodiode in eine erste und in eine zweite Sub-Photodiode untergliedert, wobei die erste Sub-Photodiode hinsichtlich ihrer lichtsensitiven Empfangsfläche quadratisch oder rechteckförmig ausgebildet ist. Nach einer Variante der Erfindung ist die zweite Sub-Photodiode hinsichtlich ihrer lichtsensitiven Empfangsfläche L-förmig ausgebildet. Vorzugsweise ergänzen sich die erste Sub-Photodiode und die zweite Sub-Photodiode zu einer im Wesentlichen quadratischen oder rechteckförmigen Photodiode des Arrays von Photodioden. Auf diese Weise kann durch eine Untergliederung einer konventionellen Photodiode in nur zwei Sub-Photodioden die Aufnahme von Röntgenprojektionen mit erhöhter Ortsauflösung ermöglicht werden. Die für die erhöhte Ortsauflösung verwendete erste Sub-Photodiode weist dabei die quadratische oder rechteckförmige Gestalt auf, wie sie auch eine konventionelle Photodiode an sich aufweist.According to the invention, each photodiode is subdivided into a first and a second sub-photodiode, wherein the first sub-photodiode is square or rectangular in terms of its light-sensitive receiving surface. According to a variant of the invention, the second sub-photodiode is L-shaped with respect to its light-sensitive receiving surface. Preferably, the first sub-photodiode and the second sub-photodiode complement each other to form a substantially square or rectangular photodiode of the array of photodiodes. In this way, by a subdivision of a conventional photodiode in only two sub-photodiodes the recording of X-ray projections with increased spatial resolution can be made possible. The first sub-photodiode used for the increased spatial resolution in this case has the square or rectangular shape, as it also has a conventional photodiode itself.
Weiterhin erfindungsgemäß ist dem Array von Photodioden ein relativ zu dem Array von Photodioden ausgerichtetes Array von Szintillatorelementen so zugeordnet, dass einer Photodiode jeweils ein Szintillatorelement zugeordnet ist. Die Szintillatorelemente sind jeweils in wenigstens zwei Sub-Elemente unterteilt. Die Unterteilung der Szintillatorelemente in Sub-Elemente kann dabei in gleicher Weise erfolgen wie die Unterteilung der Photodiode in Sub-Photodioden. Aus Gründen der einfacheren Herstellung des Arrays von Szintillatorelementen sind die Szintillatorelemente insbesondere im Hinblick auf die quadratische oder rechteckförmige Ausbildung der ersten Sub-Photodiode und der L-förmigen Ausbildung der zweiten Sub-Photodiode in vier Sub-Elemente unterteilt. Dabei ist genau ein Sub-Element eines Szintillatorelementes der ersten Sub-Photodiode und sind die restlichen Sub-Elemente des Szintillatorelementes der zweiten Sub-Photodiode zugeordnet.Furthermore, according to the invention, an array of scintillator elements aligned relative to the array of photodiodes is associated with the array of photodiodes in such a way that a scintillator element is assigned to each photodiode. The scintillator elements are each subdivided into at least two sub-elements. The subdivision of the scintillator elements into sub-elements can take place in the same way as the subdivision of the photodiode into sub-photodiodes. For reasons of simplifying the manufacture of the array of scintillator elements, the scintillator elements are subdivided into four subelements, in particular with regard to the square or rectangular configuration of the first sub-photodiode and the L-shaped configuration of the second sub-photodiode. In this case, exactly one sub-element of a scintillator element of the first sub-photodiode and the remaining sub-elements of the scintillator element of the second sub-photodiode are assigned.
Gemäß der vorliegenden Erfindung sind die Szintillatorelemente sowie die Sub-Elemente durch Schlitze voneinander getrennt, die mit einem Licht reflektierenden Material gefüllt sind, wobei die Schlitze zwischen den Szintillatorelementen breiter als die Schlitze zwischen den Sub-Elementen sind. Auf diese Weise wird eine an das Array der Photodioden angepasste Strukturierung des Arrays von Szintillatorelementen erreicht.According to the present invention, the scintillator elements as well as the sub-elements are separated from each other by slits filled with a light-reflecting material, wherein the slits between the scintillator elements are wider than the slits between the sub-elements. In this way, a structuring of the array of scintillator elements adapted to the array of photodiodes is achieved.
Nach einer Ausführungsform der Erfindung weist der Detektor mehrere Detektormodule mit jeweils einem Array von Szintillatorelementen und einem Array von Photodioden auf, von denen wenigstens eines ein Array von Photodioden umfasst, dessen Photodioden in gleicher Weise in wenigstens zwei Sub-Photodioden untergliedert sind. Der Detektor muss also nicht vollständig derartige Detektormodule aufweisen, sondern kann auch zum Teil konventionell ausgeführte Detektormodule umfassen, worunter Detektormodule verstanden werden, deren Photodioden und Szintillatorelemente nicht weiter unterteilt sind.According to one embodiment of the invention, the detector has a plurality of detector modules each having an array of scintillator elements and an array of photodiodes, at least one of which comprises an array of photodiodes whose photodiodes are subdivided in the same way into at least two sub-photodiodes. Thus, the detector does not have to have completely such detector modules, but may also partially comprise conventional detector modules, which are understood to be detector modules whose photodiodes and scintillator elements are not further subdivided.
Vorzugsweise ist der Detektor für ein Röntgengerät, insbesondere für ein Röntgen-Computertomographiegerät vorgesehen.The detector is preferably provided for an X-ray device, in particular for an X-ray computed tomography device.
Ausführungsbeispiele der Erfindung sind in den beigefügten schematischen Zeichnungen dargestellt. Es zeigen:Embodiments of the invention are illustrated in the accompanying schematic drawings. Show it:
In
Der Röntgenstrahlendetektor
Ein Detektormodul
Um mit dem Computertomographiegerät
In
Wie der
Im Falle des vorliegenden Ausführungsbeispiels sind die Szintillatorelemente
Die Erfindung wurde vorstehend am Beispiel eines Röntgen-Computertomographiegerätes beschrieben. Die Erfindung ist jedoch nicht auf ein Röntgen-Computertomographiegerät beschränkt. Vielmehr können auch andere Röntgengeräte einen Detektor mit derart ausgebildeten Photodioden aufweisen.The invention has been described above using the example of an X-ray computed tomography device. However, the invention is not limited to an X-ray computed tomography device. Rather, other X-ray devices can also have a detector with photodiodes formed in this way.
Des Weiteren ist eine Anwendung der Erfindung außerhalb der Medizintechnik möglich.Furthermore, an application of the invention outside of medical technology is possible.
Falls vorteilhaft, kann eine Photodiode auch mehrere Schalter aufweisen, um beispielsweise beide Sub-Photodioden unabhängig voneinander betreiben zu können.If advantageous, a photodiode can also have a plurality of switches in order to be able to operate, for example, both sub-photodiodes independently of one another.
Des Weiteren kann eine Photodiode auch in mehr als zwei Sub-Photodioden unterteilt sein.Furthermore, a photodiode can also be subdivided into more than two sub-photodiodes.
Claims (8)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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DE102005049228.2A DE102005049228B4 (en) | 2005-10-14 | 2005-10-14 | Detector with an array of photodiodes |
JP2006279747A JP5305575B2 (en) | 2005-10-14 | 2006-10-13 | X-ray detector having an array of photodiodes |
US11/546,994 US8822938B2 (en) | 2005-10-14 | 2006-10-13 | Detector having an array of photodiodes |
CN200610130956.9A CN101034163B (en) | 2005-10-14 | 2006-10-16 | Detector having photodiode arrangement |
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DE102005049228.2A DE102005049228B4 (en) | 2005-10-14 | 2005-10-14 | Detector with an array of photodiodes |
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DE102005049228A1 DE102005049228A1 (en) | 2007-04-19 |
DE102005049228B4 true DE102005049228B4 (en) | 2014-03-27 |
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US (1) | US8822938B2 (en) |
JP (1) | JP5305575B2 (en) |
CN (1) | CN101034163B (en) |
DE (1) | DE102005049228B4 (en) |
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KR102062450B1 (en) * | 2018-05-09 | 2020-01-06 | (주)에프씨언와이어드 | A radiation detecting device usnig multi-photo-diode and a radiation detecting method usnig multi-photo-diode |
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Also Published As
Publication number | Publication date |
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CN101034163B (en) | 2012-07-18 |
DE102005049228A1 (en) | 2007-04-19 |
US20070096033A1 (en) | 2007-05-03 |
US8822938B2 (en) | 2014-09-02 |
CN101034163A (en) | 2007-09-12 |
JP5305575B2 (en) | 2013-10-02 |
JP2007105480A (en) | 2007-04-26 |
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