DE102007063006A1 - Method and device for producing a material measure for position measuring systems and material measure - Google Patents

Abstract

The invention relates to a method and a device for producing measuring graduations (1) and to a material measure. In order to sharply design the pole boundaries (6) between the poles (N, S) magnetized into the material measure (1) and to achieve symmetrical magnetization on both sides of the pole boundaries (6), it is provided according to the invention that at least one track of the material measure at least in sections a coarse magnetizing field (13) with a first relative to the surface (8) of the measuring graduation oriented field directions (FG) is magnetized and alternately poles (N, S) of different polarity are generated (2, 3). In the region between the poles generated by the coarse magnetizing field (13), the track is at least partially magnetized with a fine magnetizing field (15) with a second field direction (FF) substantially perpendicular to the field direction (FG) of the coarse magnetizing field (13). In the material measure thus produced, the magnetic saturation of the track at the pole boundary (6) is reduced compared to the portions of the pole boundary (6) which are adjacent in the track direction (SR).

Description

The The invention relates to a method for producing a material measure for position measuring systems, in which at least one track the measuring standard at least in sections with a coarse magnetizing field with a first relative to the surface the dimensional standard aligned field direction is magnetized and alternately poles of different polarity be generated. The invention further relates to a magnetization device for Magnetization of material measures for Position measuring devices, with a receptacle for at least a material measure and with at least one Grossmagnetisierungskopf, by the in operation on the material measure acting coarse magnetizing field with a first field direction can be generated.

The Finally, the invention also relates to a method using this method and this device produced material measure. The material measure can in particular at least a track of track-following, magnetically saturated and have alternating polarized poles.

such magnetic measuring standards are translational or rotary position measuring systems for determining an absolute or relative position, speed or acceleration used. The arrangement of the poles along the track takes place after a predetermined Scheme so that the pole sequence is a representative measure of the Change in position of one along the track relative to the material measure moving magnetic sensor is.

ever more exactly the sequence of poles in the lane the predetermined scheme, that is, the more accurate it works Position measuring system. Because the accuracy requirements of the Position measuring systems are increasingly increasing, are in the state of Technique some pamphlets with options, measuring standards to produce with a precise sequence of poles.

In the JP-A-09 055 317 For example, a method and a system for magnetizing a material measure for rotary position measuring systems is described in which a sensor detects the actual magnetization of the material measure. The detected magnetization is compared with a signal of an encoder, so that it can be determined whether the actual position of the poles corresponds to their desired position. In case of a deviation, a re-magnetization depending on the detected error is performed with the same magnetization head as in the original magnetization.

A similar procedure is in the DE-A-10 2005 049 559 described. There, too, a magnetizable layer of the material measure is first coded and then the realized accuracy of this coding is checked. Subsequently, the deviation of the actual positions of the pole boundaries at which adjacent poles of opposite polarity abut each other and the field strength of the magnetized magnetic field in the track direction has a zero crossing is determined from their target positions. Depending on this deviation, a correction value is calculated and a further coding is carried out as a function of this correction value. This procedure can be carried out until the deviations of the actual position or the size of the correction values fall below predetermined limits.

The EP-A-1 006 342 shows a marking method of measuring tracks, in which in a marking step, a write head is guided over the carrier of the measuring track. The write head applies magnetic north and south poles at predetermined positions of the carrier. To determine the actual positions of the markings, a read head is provided in addition to the write head. The actual positions of the markings are measured against a reference point and then compared with the nominal positions. In the event of deviations of the actual positions from the nominal positions, markings corrected for the same track are applied whose positions are changed by values which depend on the deviation. The correction of the magnetized track takes place in the form of a renewed correction run of the write head, so that the magnetizations are superimposed.

In the DE-A-102 17 983 It is described that the direction of the intrinsic magnetization can be adjusted in one or more layer components by heating the sections to be magnetized and applying a magnetic field.

Magnetizing heads with which material measures are magnetized, are for example in the DE-A-44 42 682 , of the WO-A-00/54293 and the US-A-2001/0030533 described.

With regard to the design of the tracks and the sequence of poles in position measuring systems is on the DE-A-42 08 918 and the prior art referred to therein.

The accuracy of a material measure is determined not only by the exact position of the pole boundaries, ie by the exact position of the transition between the alternating sections of opposite polarity. It is also essential that the transition between these sections exactly de is finished and the boundary between the sections is sharp. The smaller the extent of this transition region, the more reliably the position of the pole boundary can be determined. In particular, the need for expensive, because very fine-working sensor heads in the position measuring devices must be omitted.

at The previous systems is still problematic that the Extension of the transition areas containing the pole boundaries what is an exact determination of the position of the pole boundary in the transition area and difficult to measurement inaccuracies leads. In addition, varies in the known production process and devices in the transition region of the course of in the material measure magnetized magnetic field very strong along the track. This leads to position measuring systems, in which a sensor often detects multiple poles of a track at once, to a signal quality changing along the track and ultimately also measurement errors.

The The invention thus sets itself the goal of the known methods and devices for the production of magnetic measuring standards so as to enhance the extent of the transitional area between adjacent poles decreases and the magnetization of the transition region is made uniform along the track.

According to the invention this task for the aforementioned method thereby solved that track in the area between those of the gross magnetization field produced poles at least partially with a fine magnetization field with a second, to the field direction of the coarse magnetizing field essentially perpendicular field direction is magnetized.

For the magnetization device mentioned at the beginning becomes this object solved according to the invention that the successive poles of a track in the track direction, respectively through a magnetically unsaturated transition region are separated.

The Measuring standard produced by this method or device is inventively characterized in that the magnetic saturation of the track at the pole boundary is reduced in the track direction adjacent sections.

Surprisingly can be by this method or this device dimensional standards produce in which the pole boundaries more clearly than in the previous Procedures are defined. Due to the orientation of the fine magnetization field transverse to the coarse magnetization field can be the transition areas more accurate and uniform magnetization than at the conventional method. In particular, lets Thus, the direction of the fine magnetization effect on the measuring direction of Adjust sensors in the position measuring device and the magnetic field the finished material measure further to the measuring method or adjust the field component measured by the sensor. It results Increased accuracy in the reading of the material measure in position measuring systems.

The Method and apparatus for producing the material measure as well as the material measure itself through the following, independent developments be improved again.

So In a first development, for example, the coarse magnetization field act on the track with a higher field strength as the fine magnetization field. This can be done with the coarse magnetizing field even poles with large expansion can be magnetized quickly, while the effect of Feinmagnetisierungsfeldes preferably stays local.

Further can reduce the speed of the manufacturing process without sacrificing to be increased in accuracy when magnetized by the fine magnetizing field Sections have a smaller extent in the track direction than the portions magnetized by the coarse magnetizing field. Especially the fine magnetization field can only be in the pole boundaries magnetizing the transition area between the poles become.

The Fine magnetization field can on the one hand based on predefined empirical data are controlled in which the average error an ensemble of results of the coarse magnetizations are. This process can already be done without much effort a very high accuracy can be achieved because the systematic Error due to the magnetization device, the geometry of the Measuring standard and the material to be magnetized Track are considered.

The Fine magnetization can also after comparing the actual position at least part of the generated in the coarse magnetization step Pole boundaries performed with the desired position of these pole boundaries be, wherein after the action of Feinmagnetisie approximately field the deviation of the actual position of the finely magnetized pole boundaries is reduced from the desired position. This method with a Control measurement of the result of the respective coarse magnetization is time consuming, but allows the highest Accuracies.

Around to detect the actual position of the poles generated by the gross magnetization field, For example, the magnetizing device may include a sensor and a control device exhibit. By the control device, the detected by the sensor Actual position of the pole boundaries are compared with their desired position and the deviation of the actual position from the desired position can be determined. By the control device can control the polarity of the fine magnetization field depending on the actual position or its deviation from the setpoint position to be switched.

Problematic is in the previous methods and devices for magnetization of measuring standards, that although the magnetized track adapted to an ideal pole sequence with exact positioning of the poles However, this ideal sequence of poles is actually in fact used sensors does not lead to ideal, harmonic-free measurement signals. These harmonics ultimately affect the positioning accuracy. With the invention it is possible, the course of the magnetic field especially in the transition area to adapt to a sensor, that this one signal with improved signal quality supplies, as explained in more detail below.

The The coarse magnetizing field and the fine magnetizing field are in an embodiment preferably coordinated so that is substantially at the sensor in the position measuring device harmonic-free measurement signal results. The vote of the magnetized Magnetic field is such that of a sensor head, the in a predetermined distance from the spurt in the position measuring device is installed, a harmonic-free, sinusoidal measurement signal is produced. This can according to the invention influenced an adaptation of the magnetization curve in the transition region become.

Especially can the coarse magnetization field and the fine magnetization field on the basis of a mathematical model, the measuring behavior of the sensor and the supplied by the sensor of the position measuring device measurement signal calculated, controlled. Here, in a variant only the fine magnetization field as a function of always the same calculated Grossmagnetisierungsfeld be calculated and controlled.

Around the fine magnetization field as accurately as possible to the error to be able to adapt the pole sequence generated by the coarse magnetization field, it is advantageous if in the control measurement, comparing the Actual position with the target position, the components of the coarse magnetizing field impressed magnetic field in the direction of Feinmagnetisierungsfeldes be measured. The measurement thus detected in this embodiment already that component of the magnetic field in which the fine magnetization field acts on the material measure.

Around Hysteresis and memory effects of the coarse magnetization field impressed magnetic field as small as possible can hold, in a further advantageous embodiment of the process in the coarse magnetization step between the poles Gaps are not magnetized or demagnetized. In this case, therefore, the pole magnetization field does not become pole boundaries generated between the poles, as the poles of a track in the track direction be magnetized apart from each other.

There with regard to the fine magnetization field in the case of the coarse magnetization only limited to the accuracy of the pole boundaries and the extent of the transitional area arrives, can Acceleration of the process in the coarse magnetization step Variety of poles are generated simultaneously.

Preferably In this case, the magnetizing device has a plurality of coarse magnetization heads, their arrangement in track direction the arrangement of the poles to be magnetized corresponds. The gross magnetization heads may have permanent magnets.

The Result of the magnetization by the fine magnetization field leaves improve when the coarse magnetization field with a field direction perpendicular generated to the surface of the material measure becomes. It follows according to the invention that the fine magnetization field tangential to the surface of Measuring standard, but especially in the track direction aligned, runs. The at least one fine magnetization head The magnetization device may in this case with two in the track direction spaced pole portions of different, preferably switchable polarity be provided.

Especially when the fine magnetization field is parallel to the track direction Field direction, can be the extension of the transition region Shrink and along the track a uniform To achieve magnetization of the transition areas. At this Embodiment becomes the course of the magnetization in the transition region from the course of the fine magnetization field in the fine magnetization head determines and remains almost unchanged along the track. The transition region points in particular in this embodiment a high symmetry with respect to the pole boundary, resulting in a particularly high signal quality during scanning in the position measuring system leads.

The magnetization device may also include a plurality of fine magnetization heads , whose position is assigned to the positions of the transition regions between the poles to be magnetized by the coarse magnetization heads or the pole boundaries. Although the fine magnetization step is accelerated by this measure, but to evenly magnetize the junction areas, the fine magnetization heads must be carefully calibrated.

The Rough magnetization heads and / or the fine magnetization heads can be arranged in the magnetization device be that recording for the at least one material measure and the fine or coarse magnetization heads in the track direction are movable relative to each other.

The Magnetizing device may also at least one magnetization head in the coarse magnetization head and fine magnetization head are integrated and at the same time or successively the Feinmagnetisierungsfeld and can generate the gross magnetization field.

Further can the material measure in the transition area, in which the fine magnetization step was performed and the fine magnetizing field has acted on the track, at least have a subarea with sections that are one of polarity Have the environment opposite polarity. Furthermore, in the transition region at least a partial area with non-magnetised sections or with sections that have a random distribution of the magnetic field, be present if from the coarse magnetizing field between the poles a non-magnetized or demagnetized gap created or left has been. This embodiment has the advantage that the fine magnetization field Immediately the course of the magnetized in the transition region Magnetic field determined and not with an already existing, uneven Coarse magnetizing field interacts.

After all is claimed a material measure, the after the method in one of the embodiments described above becomes. The claimed magnetizing device is basically suitable for carrying out such a method.

in the The invention is based on exemplary embodiments explained in more detail by way of example with reference to the drawings. The compilation of features in the following Examples are for illustrative purposes only and may, as required the above embodiments and the advantages associated with these embodiments, be varied. For elements of the same function and / or the same structure are in the following the clarity always use the same reference numerals.

It demonstrate:

1 a schematic plan view of a rotary measuring scale;

2 a sectional view taken along the line II-II of the rotary measuring scale of the 1 ;

3 a schematic plan view of a translational material measure;

4 a schematic sectional view taken along the line IV-IV of the translational material measure of 3 ;

5 a schematic representation of the course of the magnetization intensity M in the track direction SR of a material measure;

6 a schematic representation of the sequence of the method according to the invention for the magnetization of material measures;

7 a schematic representation of a first embodiment of a magnetizing device according to the invention;

8th the course of the magnetization intensity M in the track direction SR according to a first embodiment of the method;

9 the magnetization intensity M in the track direction SR according to another embodiment of the method;

10 a schematic side view of another embodiment of a magnetizing device according to the invention;

11 a schematic side view of another embodiment of the magnetizing device according to the invention;

12 a schematic view along the line XII-XII of 11 ;

13 a schematic representation of the course of the degree of saturation R in the track direction SR in a material measure according to the invention;

14 a schematic sectional view in the area of the detail XIV of 1 respectively. 3 ,

First, the structure of a material measure 1 Based on the schematic representations of 1 to 4 explained.

The measure of the 1 and 2 serves to detect rotary rotational movements and is constructed essentially annular. The measuring standard 1 is alternately provided with magnetic markers N, S, forming, for example, north magnetic poles N and south magnetic poles S. The marks N, S follow one another in a track direction SR, thus forming a track 2 , The track 2 runs annular and preferably coaxial with the annular measuring scale 1 about a pivot O of the rotational movement to be monitored.

The track 2 can of one, in 1 For the sake of simplicity, a sensor of a position measuring device, which moves relative to the material measure, is scanned. The sequence of markings N, S detected by the sensor makes it possible to draw conclusions about the relative position of the material measure and the sensor, the relative speed of the material measure and sensor, and / or the relative acceleration of the material measure and sensor. In the case of the rotational dimensional standard of the 1 and 2 For example, the quantities detected by the position measuring device are, for example, the angular position, speed and acceleration.

The material measure can in addition to the track 2 also more tracks 3 that are concentric with the track 2 run and also provided with marks N, S. These tracks 3 In each case further sensors (not shown) can be assigned in the position-measuring device.

The Extension of the markers N, S in track direction SR depends from the special application case. For incremental encoders where the change of the angular position with respect to the previous angular position in incremental steps, the expansions the markings N, S in the track direction SR be the same, so that they are equi-angularly distributed over the circumference. The extension of the poles N, S determines the resolution of the Measurements and the accuracy with which the Rotational motion can be resolved.

For absolute encoders, where the angular position is in the usual way several tracks, 2 . 3 is coded as an absolute position value relative to a starting position, the extents of the markings N, S in the track direction SR can be of different sizes.

The 2 schematically shows the structure of the material measure of 1 in a sectional view along the line II-II. Accordingly, the material measure of a mechanically stable carrier 4 exist, which preferably has a low thermal expansion and forms the magnetic yoke.

On the end face and / or the outer and / or inner circumferential surface of the carrier 4 is a layer 5 made of hard magnetic material. The layer 5 can by a coating process on the support 4 be generated, for example by a liquid mass on the one end face of the carrier 4 is applied. Alternatively, ready-made layers can be used 5 in the form of rings, ribbons or foils on the support 4 be attached. The layer 5 can also be integral part of the carrier 4 be.

The translational measuring standards 1 , one of which is schematically in 3 in a plan view and in 4 in a sectional view taken along the line IV-IV of 3 is shown, in principle, have the same structure as the rotary measuring scale 1 of the 1 and 2 , They differed only in that the track direction SR is linear and the material measure 1 is designed as a straight-line scale. The relative movement between a sensor of the positioning device and the material measure 1 in this case is a straight-line movement.

The sensor K moves at a predetermined distance D from the surface. At this distance, the sensor K detects that of the material measure 1 generated magnetic field I and forms a signal Z. The invention seeks to improve the quality and accuracy of the signal Z.

Of course, with appropriate guidance of the track 2 . 3 scanning sensor the track 2 . 3 have an arbitrarily curved course.

5 schematically shows the ideal course of the magnetization strength M of a track 2 . 3 in track direction SR. In track direction, the sections N, S alternate in different polarity, ie north and south poles. Ideally, the magnetic material is the layer 5 to the pole line 6 , the zero crossing between the sections of different polarity, saturated and the transitions between north and south pole take place abruptly. The sensor moving along the track detects, as a measured value, primarily the switching from one polarity to the other polarity than the signal representative of the movement to be detected. Thus, the pole boundaries 6 determinant for motion monitoring.

In practice, the pole boundaries run 6 not as sharp as this 5 is shown, but have a measurable extent in the track direction SR. In addition, the pole boundaries smear 6 to a transition area U, in 5 shown schematically. This is the location of the pole boundary 6 Not more accurately to determine and the accuracy of the position determination is reduced.

The invention has the goal of dimensional standards 1 with sharply defined and exactly positioned pole boundaries 6 to create, in which the transition region along the track have a uniform and symmetrical magnetization curve and the position of the pole boundaries can be determined more accurately and easily.

This is inventively by in 6 achieved schematically shown method steps.

According to the invention, in a first method step, the coarse magnetization step 7 , the basic pattern of the polar sequence N, S in the material measure 1 einmagnetisiert. It acts on the material measure 1 a magnetizing coarse magnetization field whose field direction has a first orientation with respect to the surface 8th ( 2 . 4 ) of the material measure 1 having.

Subsequently, a fine magnetization step 9 performed to the extent of the in the coarse magnetization step 7 Transition areas generated in the transition areas and to reduce the degree of saturation targeted. As a result, the magnetic influence of the saturated regions of the poles N, S on the pole boundary 6 decreases and the course of the pole boundary 6 can be detected metrologically easier.

In the fine magnetization step 9 a fine magnetization field acts on the material measure 1 whose orientation is perpendicular to the orientation of the coarse magnetizing field. Preferably, the field direction of the coarse magnetization field is perpendicular to the surface 8th , The field direction of the fine magnetization field is then tangent to the surface 8th , preferably in track direction SR. In particular, with an orientation of the fine magnetization field in the track direction, it is possible to produce a uniform and symmetrical course of the pole boundaries over the track since the field magnetized in the track direction substantially follows the course of the fine magnetization field.

The gross magnetization step 7 and the fine magnetization step 9 can also be performed simultaneously, in which the fine and the coarse magnetizing field is simultaneously generated by one or more magnetic heads.

As indicated by the dotted lines in 6 is indicated, can between the coarse magnetization step 7 and the fine magnetization step 9 a step 10 be interposed in the form of a control measurement. In step 10 the actual positions are in the coarse magnetization step 7 in the track 2 . 3 generated pole boundaries 6 measured and with the predetermined desired positions of the pole boundaries 6 compared. The fine magnetization step 9 is then carried out as a function of this comparison so that after the fine magnetization step 9 the deviation of the actual positions from the desired positions of the pole boundaries 6 is reduced. This is done in step 10 a sensor along the coarsely magnetized track 2 . 3 guided and monitors the position of the sensor with a reference scale. Preferably, the sensor measures the components of the coarse magnetization step in the material measure 1 magnetized magnetic field in the direction of the yet to be applied fine magnetization field, preferably so tangential in the track direction.

With the help of the step 10 lets the accuracy of the material measure 1 increase. However, the effort is not inconsiderable. A sufficient for many applications, compared to the conventional measuring standards significantly improved accuracy can be achieved when in Feinmagnetisierungsschritt 9 the fine magnetization field is always applied the same after each coarse magnetization without a control measurement and the positioning of the fine magnetization field results from a previously performed empirical or analytical examination of the systematic error sources of the coarse magnetization step and the fine magnetization step. This can be the largest systematic errors in the magnetization of the material measure 1 can already be eliminated without a complex measuring method and complex control and traversing devices for setting the fine magnetization field are necessary.

alternative can also be the result of fine and coarse magnetization magnetic field calculated at the location of a sensor of the position measuring device and the coarse and fine magnetization field, in particular only the Fine magnetizing field can be adjusted so that a desired Magnetic field arises at the location of the sensor. In this step can also measure the behavior of the sensor, so in dependence calculated by the magnetic field generated by the sensor measuring field. In this case, fine and coarse magnetizations or at constant Gross magnetization only the fine magnetization controlled so that the sensor a desired harmonic-free and preferably sinusoidal measuring signal delivers. This procedure leads to a particularly high signal quality and measurement accuracy.

Alternatively, in step 10 not a survey of the entire track 2 . 3 but it may be a predetermined number empirically in advance determined reference points whose errors are representative of predetermined error categories. In this case, the fine magnetization step becomes 9 depending on the determined error category.

In 7 is a first embodiment of a magnetization device 11 shown. The magnetization device 11 has at least one coarse magnetization head 12 , with the in operation the coarse magnetizing field 13 can be generated with a field direction F _G , at least one fine magnetization head 14 , with the fine magnetization field in operation 15 with a perpendicular to the field direction F _{G of} the coarse magnetizing field 13 extending field direction F _F can be generated, and optionally at least one sensor 16 on, with which the location of the pole boundaries 6 and the course of the magnetization M in the transition region U between the pole sequence N, S, cf. 5 , can be recorded. In dashed lines is in 7 another, optional coarse magnetization head 17 indicated. Of course, at least one other fine magnetization head may also be used 14 (not shown for simplicity) may be provided. The gross magnetization head 12 and the fine magnetization head 14 can also be structurally integrated.

The magnetization device 11 can also drive 18 and a sensor 19 exhibit. The drive 18 generates a relative movement between the at least one coarse magnetization head 12 and / or the fine magnetization head 14 on the one hand and the material measure 1 on the other hand. The sensor 19 serves as a reference scale and determines the relative position of the material measure with high precision 1 and at least one coarse magnetization head 12 , or fine magnetization head 14 , The measuring standard 1 is held in a receptacle H.

Finally, the magnetization device 11 a control device 20 having the signal transmitting with the at least one coarse magnetization head 12 , the at least one fine magnetization head 14 , the at least one sensor 16 , the drive 18 and the sensor 19 connected is.

The control device 20 are the signals from the sensor 16 and from the sensor 19 fed. The control device 20 may also have a memory 21 in which for the desired positions of the pole boundaries 6 representative values are stored. The control device 20 controls depending on the sensor 16 detected actual position of the pole boundaries 6 in the fine magnetization step 9 the drive 18 and the fine magnetization head 14 , In addition, the controller controls 20 in the coarse magnetization step 7 the operation of the coarse magnetization head 12 and the drive 18 depending on the sensor 19 received signals.

The 8th and 9 show two different embodiments of an idealized pole sequence after the coarse magnetization step 7 in track direction SR along a track 2 . 3 ,

According to the embodiment of the 8th stay away from the gross magnetization field 13 Areas between the poles N, S unmagnetized. These areas can also be demagnetized in the coarse magnetization step. The poles are therefore through gaps 22 separated by a predetermined extent in the track direction SR. The transition region U in which the fine magnetization step 9 with the help of the fine magnetization field 15 carried out accordingly contains the gap 22 that take the place of pole boundaries 6 occurs. In this embodiment, only in the fine magnetization step 9 the pole boundaries 6 einmagnetisiert. Because the fine magnetization field 15 in this embodiment no already magnetized coarse magnetizing field 13 must compensate, the accuracy of the fine magnetization of the transition region U is significantly increased.

In the embodiment of the 9 border those from the gross magnetization field 13 generated, reversely polarized sections N, S to form the pole boundaries 6 directly to each other. The transition region U in which the fine magnetization step 9 is performed, contains the pole boundaries 6 , In addition to the sharp definition of the pole boundary 6 In the fine magnetization step, its actual position I is adapted to the predetermined desired positions P in the track direction, as indicated by the arrows 23 is indicated.

As in the 8th and 9 is shown in the track direction SR, the expansion W _G of the Grobmagnetisierungsfeld 13 generated poles N, S greater than the extent W _F in the fine magnetization field 15 magnetized areas.

Another embodiment of the magnetization device 11 is in 10 shown. This embodiment has a plurality of coarse magnetization heads 12 which are stationarily arranged at the positions that the position of the inverted polarized portions N, S in the track 2 correspond. The embodiment of the 10 has the advantage that all poles N, S at the same time during the coarse magnetization step 7 be generated. The gross magnetization heads 12 are therefore along the track 2 also arranged in alternating polarity. Preferably, permanent magnets can be used as coarse magnetization heads 12 be used.

The gross magnetization heads 12 can, if the material measure 1 only a single track 2 has, also in the manner of a spider in the circumferential direction around the outer circumference of the material measure 1 extend. In the case of a linear measuring standard, the gross magnetization heads are 12 naturally arranged in series next to each other along the track.

A corresponding variant of the magnetization device 11 is in the 11 and 12 shown.

In the schematic side view of 11 the magnetization device 11 is shown on a thorn 24 as a recording H of the material measures 1 in the axial direction A a variety of material measures 1 is laid side by side lying down. Spoke-like in the circumferential direction juxtaposed coarse magnetization heads 12 , in particular permanent magnets, define a passage opening 25 , whose clear width is only slightly larger than the outer diameter of the material measures 1 , The thorn 24 with the measuring standards 1 is in the axial direction A through the opening 25 pulled through, so in one step the entire track 2 is coarsely magnetized.

In the fine magnetization step 9 become the at least one fine magnetization head 14 and the material measure 1 moved relative to each other, so that, from the track 2 From the perspective of the fine magnetization head 14 in track direction SR over the track 2 emotional.

The control device 20 actuates the fine magnetization head 14 depending on the measured deviation of the actual position I of the pole boundaries 6 from their desired position P ( 9 ). At the same time, the polarity of the fine magnetization field becomes 15 so by the controller 20 that the polarity of the fine magnetization field coincides with the polarity of the opposite pole of the track. In the case of Feinmagnetisierungskopfes 14 with a pointing in the direction of the track SR field direction F _F are therefore the sections of the same polarity of Feinmagnetisierungskopfes 14 and the track 2 one above the other. The gap of the fine magnetization head, in which the fine magnetization field 15 forms approximately in position and extent the transition region after the fine magnetization step 9 ,

The control device 20 Switches the magnetic field of the fine magnetization head 14 when the gap of the fine magnetization head is the target position P of the pole boundary 6 has reached. After the fine magnetization step, a trace of the magnetic saturation R of the track is thus obtained 2 in track direction SR, as in 13 schematically illustrated and explained below. The magnetized magnetic field has a high symmetry with respect to the pole boundary. In particular, when always the same fine magnetization head is used, the transition regions have only a few deviations from one another.

In the area of the polar marks N, S, as determined by the coarse magnetization step 7 are generated, the saturation limit G in the magnetic material of the material measure 1 reached. In the transition area U, where the pole boundary 6 is generated, first decreases the saturation R in the direction of the pole boundary 6 down. On both sides of the transition region U, therefore, saturated poles N, S lie ahead and the pole boundary 6 is well defined. The sharpness of the transition between the alternating polarities depends on the size of the gap in which the fine magnetization field is located 15 forms. The smaller this gap, the sharper the pole boundary can be magnetized.

If one considers in a section in track direction SR the cross section of the material measure 1 more precisely, this results in 14 schematically shown picture. 14 shows the detail XIV of a rotary measuring scale ( 1 ) or translational material measure ( 3 ) in the area of a pole boundary 6 , in the course of the fine magnetization step 9 from their original position 6 ' has been moved closer to the desired position P.

in the Range of saturated poles N, S, outside the transition region U, there are almost no subsections that have a polarization reversed to the pole exhibit.

Was the gross magnetization in the in 9 the variant shown was the range between the pole boundary 6 ' from the coarse magnetization step 7 and the pole boundary 6 after the fine magnetization step 9 previously polarized almost uniformly reversed. Thus, in the transition region U due to the non-linear properties in the polarity reversal of the material of the material measure 1 still partial areas which uniformly have the original polarity as residual polarity, which is inversely directed to the predominant part of their surroundings.

In the case of the variant of the coarse magnetization step 7 of the 8th have these subareas 26 a pronounced anisotropy because they were not previously polarized.

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited patent literature

• - JP 09055317 A [0005]
• - DE 102005049559 A [0006]
• - EP 1006342 A [0007]
• - DE 10217983 A [0008]
• - DE 4442682 A [0009]
• WO 00/54293 A [0009]
• US 2001/0030533 A [0009]
• - DE 4208918 A [0010]

Claims (21)

Method for producing a material measure ( 1 ) for position measuring systems, in which at least one track ( 2 . 3 ) of the material measure at least in sections with a coarse magnetizing field ( 13 ) with a first relative to the surface ( 8th ) of the material measure aligned field direction (F _G ) is magnetized and alternately poles (N, S) of different polarity are generated, characterized in that the track ( 2 . 3 ) in the region (U) between those of the coarse magnetizing field ( 13 ) generated poles (N, S) at least in sections with a fine magnetization field ( 15 ) with a second, to the field direction (F _G ) of the Grossmagnetisierungsfeldes ( 13 ) is magnetized in substantially vertical field directions (F _F ). Method according to Claim 1, characterized in that the coarse magnetizing field ( 15 ) with a higher field strength on the track ( 2 . 3 ) acts as the fine magnetization field ( 15 ). A method according to claim 1 or 2, characterized in that the from the Feinmagnetisierungsfeld ( 15 ) magnetized portions of the track ( 2 . 3 ) have a smaller extent (W _F , W _G ) than those in the coarse magnetization step ( 7 ) magnetized sections. Method according to one of claims 1 to 3, characterized in that the fine magnetization field ( 15 ) and the coarse magnetizing field ( 13 ) in dependence on a at the location of a sensor of the position measuring device of the material measure ( 1 ) are generated and generated. Method according to claim 4, characterized in that that the measurement behavior of the sensor of the position measuring device is taken into account. Method according to one of claims 1 to 5, characterized in that in the coarse magnetization step ( 7 ) gaps between the poles (N, S) ( 22 ) are not magnetized or demagnetized. Method according to one of claims 1 to 6, characterized in that in the coarse magnetization step ( 7 ) a plurality of poles (N, S) are generated simultaneously. Method according to one of claims 1 to 7, characterized in that the coarse magnetizing field ( 13 ) with a field direction (F _G ) perpendicular to the surface ( 8th ) of the material measure ( 1 ) is produced. Measuring standard ( 1 ) for position measuring systems, produced by the method according to one of claims 1 to 8. Measuring standard ( 1 ) for position measuring systems which have at least one track ( 2 . 3 ) of successive, magnetically saturated and alternately polarized poles (N, S) in track direction (SR), characterized in that the successive poles (N, S) of a track (N) 2 . 3 ) in the track direction (SR) are each separated by a non-magnetically saturated transition region (U). Measurement standard according to claim 10, characterized in that the saturated sections of the track ( 2 . 3 ) in the track direction (SR) are larger than the unsaturated portions. Measuring standard according to claim 10 or 11, characterized in that in transition regions (U) between the poles (N, S) at least a portion ( 26 ) is present with portions having a polarity opposite to the polarity (N, S) of the environment. Measurement standard according to one of claims 10 to 12, characterized in that in the transition region (U) at least a portion ( 26 ) is present with non-magnetized sections. Magnetizing device for implementation The method according to any one of claims 1 to 8. Magnetizing device ( 11 ) for the magnetization of material measures ( 1 ) for position measuring devices, with a receptacle (H, 24 ) for at least one measuring standard ( 1 ) and with at least one coarse magnetization head ( 12 ), by which a coarse magnetizing field ( 13 ) can be generated with a first field direction (F _G ), characterized by at least one fine magnetization head ( 15 ), by the in operation a switchable Feinmagnetisierungsfeld ( 15 ) with one to the Grossmagnetisierungsfeld ( 13 ) vertical field direction (F _F ) can be generated. Magnetizing device ( 11 ) according to claim 15, characterized by a sensor ( 16 ), by which an actual position (I) of the coarse magnetizing field ( 13 ) (N, S) is detectable, and a control device ( 20 ), by which the sensor ( 16 ) detected actual position (I) of the poles (N, S) with a desired position (P) comparable and the polarity of Feinmagnetisierungsfeldes ( 15 ) is switchable as a function of the actual position (I). Magnetizing device ( 11 ) according to claim 15 or 16, characterized in that a plurality of coarse magnetization heads ( 12 ) is present, whose arrangement in the track direction (SR) corresponds to the arrangement of the poles to be magnetized (N, S) in the track direction (SR). Magnetizing device ( 11 ) according to one of claims 15 to 17, characterized in that a plurality of fine magnetization heads ( 14 ), whose position is assigned to the transition regions (U) between the poles to be magnetized by the at least one coarse magnetization head. Magnetizing device ( 11 ) according to one of claims 15 to 18, characterized in that the at least one fine magnetization head ( 15 ) forms two poles (N, S) spaced from each other in the track direction (SR). Magnetizing device ( 11 ) according to one of claims 15 to 19, characterized in that the coarse magnetization head ( 12 ) has a permanent magnet. Magnetizing device ( 1 ) according to one of claims 15 to 20, characterized in that the coarse magnetization head ( 12 ) and fine magnetization head ( 15 ) to get integrated.