DE112006003849A5 - Oszillierend auslenkbares mikromechanisches Element und Verfahren zum Betreiben des Elementes - Google Patents

Oszillierend auslenkbares mikromechanisches Element und Verfahren zum Betreiben des Elementes Download PDF

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Publication number
DE112006003849A5
DE112006003849A5 DE112006003849T DE112006003849T DE112006003849A5 DE 112006003849 A5 DE112006003849 A5 DE 112006003849A5 DE 112006003849 T DE112006003849 T DE 112006003849T DE 112006003849 T DE112006003849 T DE 112006003849T DE 112006003849 A5 DE112006003849 A5 DE 112006003849A5
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DE
Germany
Prior art keywords
oscillably
operating
deflectable
deflectable micromechanical
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112006003849T
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English (en)
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DE112006003849B4 (de
Inventor
Harald Dr. Schenk
Alexander Dr. Wolter
Thilo Dr. Sandner
Christian Drabe
Thomas Klose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE112006003849A5 publication Critical patent/DE112006003849A5/de
Application granted granted Critical
Publication of DE112006003849B4 publication Critical patent/DE112006003849B4/de
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
DE112006003849T 2006-04-24 2006-04-24 Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements Active DE112006003849B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2006/000745 WO2007121692A1 (de) 2006-04-24 2006-04-24 Oszillierend auslenkbares mikromechanisches element und verfahren zum betreiben des elementes

Publications (2)

Publication Number Publication Date
DE112006003849A5 true DE112006003849A5 (de) 2009-01-22
DE112006003849B4 DE112006003849B4 (de) 2012-09-20

Family

ID=37496574

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112006003849T Active DE112006003849B4 (de) 2006-04-24 2006-04-24 Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements

Country Status (4)

Country Link
US (1) US7932788B2 (de)
CN (1) CN101460392A (de)
DE (1) DE112006003849B4 (de)
WO (1) WO2007121692A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015089105A1 (en) 2013-12-09 2015-06-18 Respira Therapeutics, Inc. Pde5 inhibitor powder formulations and methods relating thereto
CN108732383A (zh) * 2017-04-18 2018-11-02 立锜科技股份有限公司 微机电装置
JP6753449B2 (ja) 2017-11-24 2020-09-09 株式会社村田製作所 走査反射器システム
EP3636588B1 (de) * 2018-09-26 2023-10-25 Murata Manufacturing Co., Ltd. Mems-frequenzabstimmungsfedern
JP6964102B2 (ja) * 2019-01-16 2021-11-10 株式会社鷺宮製作所 Ｍｅｍｓ梁構造およびｍｅｍｓ振動発電素子

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1800588A1 (de) * 1968-10-02 1970-06-11 Bosch Gmbh Robert Durch mindestens einen Unwuchterreger angetriebener Schwinger
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
US5739941A (en) * 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
JP3352462B2 (ja) * 1996-07-03 2002-12-03 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 損失補償手段を備えた機械式信号プロセッサ
JP2000330067A (ja) * 1999-05-20 2000-11-30 Olympus Optical Co Ltd ねじり揺動体
DE19941045A1 (de) * 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
JP3481213B2 (ja) * 2001-03-22 2003-12-22 日本電子株式会社 原子間力顕微鏡における試料観察方法および原子間力顕微鏡
US20030127785A1 (en) * 2001-09-21 2003-07-10 Esche Sven K. Adaptive shock and vibration isolation systems
KR100439908B1 (ko) * 2002-02-28 2004-07-12 (주)엠투엔 정전형 미세 구동기
DE10320725A1 (de) 2003-05-08 2004-11-25 Robert Bosch Gmbh Mikromechanischer Bewegungssensor
WO2005029107A1 (en) * 2003-09-23 2005-03-31 Qinetiq Limited Resonant magnetometer device

Also Published As

Publication number Publication date
WO2007121692A1 (de) 2007-11-01
US20090302960A1 (en) 2009-12-10
CN101460392A (zh) 2009-06-17
DE112006003849B4 (de) 2012-09-20
US7932788B2 (en) 2011-04-26

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Effective date: 20121221