DE1141554T1 - Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen - Google Patents

Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen

Info

Publication number
DE1141554T1
DE1141554T1 DE1141554T DE99946950T DE1141554T1 DE 1141554 T1 DE1141554 T1 DE 1141554T1 DE 1141554 T DE1141554 T DE 1141554T DE 99946950 T DE99946950 T DE 99946950T DE 1141554 T1 DE1141554 T1 DE 1141554T1
Authority
DE
Germany
Prior art keywords
electrostatic
pneumatic actuators
variable surfaces
variable
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1141554T
Other languages
English (en)
Inventor
Cleopatra Cabuz
R Ohnstein
R Elgersma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE1141554T1 publication Critical patent/DE1141554T1/de
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C13/00—Control systems or transmitting systems for actuating flying-control surfaces, lift-increasing flaps, air brakes, or spoilers
    • B64C13/24—Transmitting means
    • B64C13/38—Transmitting means with power amplification
    • B64C13/40—Transmitting means with power amplification using fluid pressure
    • B64C13/48—Transmitting means with power amplification using fluid pressure characterised by the fluid being gaseous
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C21/00—Influencing air flow over aircraft surfaces by affecting boundary layer flow
    • B64C21/10—Influencing air flow over aircraft surfaces by affecting boundary layer flow using other surface properties, e.g. roughness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C23/00—Influencing air flow over aircraft surfaces, not otherwise provided for
    • B64C23/005—Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C3/00—Wings
    • B64C3/38—Adjustment of complete wings or parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C3/00—Wings
    • B64C3/38—Adjustment of complete wings or parts thereof
    • B64C3/44—Varying camber
    • B64C3/46—Varying camber by inflatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08—Characterised by the construction of the motor unit
    • F15B15/10—Characterised by the construction of the motor unit the motor being of diaphragm type
    • F15B15/103—Characterised by the construction of the motor unit the motor being of diaphragm type using inflatable bodies that contract when fluid pressure is applied, e.g. pneumatic artificial muscles or McKibben-type actuators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/10—Influencing flow of fluids around bodies of solid material
    • F15D1/12—Influencing flow of fluids around bodies of solid material by influencing the boundary layer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0078—Fabrication methods specifically adapted for microvalves using moulding or stamping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/10—Drag reduction
DE1141554T 1998-12-29 1999-09-10 Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen Pending DE1141554T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/223,083 US6215221B1 (en) 1998-12-29 1998-12-29 Electrostatic/pneumatic actuators for active surfaces
PCT/US1999/021212 WO2000039467A1 (en) 1998-12-29 1999-09-10 Electrostatic/pneumatic actuators for active surfaces

Publications (1)

Publication Number Publication Date
DE1141554T1 true DE1141554T1 (de) 2002-06-13

Family

ID=22834961

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69928441T Expired - Lifetime DE69928441T2 (de) 1998-12-29 1999-09-10 Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen
DE1141554T Pending DE1141554T1 (de) 1998-12-29 1999-09-10 Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69928441T Expired - Lifetime DE69928441T2 (de) 1998-12-29 1999-09-10 Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen

Country Status (6)

Country Link
US (2) US6215221B1 (de)
EP (1) EP1141554B1 (de)
JP (1) JP2002533230A (de)
CA (1) CA2358115C (de)
DE (2) DE69928441T2 (de)
WO (1) WO2000039467A1 (de)

Families Citing this family (167)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6358021B1 (en) * 1998-12-29 2002-03-19 Honeywell International Inc. Electrostatic actuators for active surfaces
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6611642B1 (en) 2000-02-17 2003-08-26 Jds Uniphase Inc. Optical coupling arrangement
US7283223B2 (en) * 2002-08-21 2007-10-16 Honeywell International Inc. Cytometer having telecentric optics
US7553453B2 (en) 2000-06-02 2009-06-30 Honeywell International Inc. Assay implementation in a microfluidic format
US8071051B2 (en) 2004-05-14 2011-12-06 Honeywell International Inc. Portable sample analyzer cartridge
US6598409B2 (en) 2000-06-02 2003-07-29 University Of Florida Thermal management device
US20060263888A1 (en) * 2000-06-02 2006-11-23 Honeywell International Inc. Differential white blood count on a disposable card
US6970245B2 (en) * 2000-08-02 2005-11-29 Honeywell International Inc. Optical alignment detection system
US7130046B2 (en) * 2004-09-27 2006-10-31 Honeywell International Inc. Data frame selection for cytometer analysis
US6883337B2 (en) * 2000-06-02 2005-04-26 University Of Florida Research Foundation, Inc. Thermal management device
US7262838B2 (en) * 2001-06-29 2007-08-28 Honeywell International Inc. Optical detection system for flow cytometry
US7215425B2 (en) * 2000-08-02 2007-05-08 Honeywell International Inc. Optical alignment for flow cytometry
US7242474B2 (en) * 2004-07-27 2007-07-10 Cox James A Cytometer having fluid core stream position control
US7471394B2 (en) * 2000-08-02 2008-12-30 Honeywell International Inc. Optical detection system with polarizing beamsplitter
US7016022B2 (en) * 2000-08-02 2006-03-21 Honeywell International Inc. Dual use detectors for flow cytometry
US6837476B2 (en) 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US7978329B2 (en) * 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7630063B2 (en) * 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US8329118B2 (en) * 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
US7277166B2 (en) * 2000-08-02 2007-10-02 Honeywell International Inc. Cytometer analysis cartridge optical configuration
US6382228B1 (en) 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
WO2002033268A2 (en) * 2000-10-18 2002-04-25 Research Foundation Of State University Of New York Microvalve
US6626416B2 (en) * 2000-12-12 2003-09-30 Eastman Kodak Company Electrostrictive valve for modulating a fluid flow
US6450773B1 (en) * 2001-03-13 2002-09-17 Terabeam Corporation Piezoelectric vacuum pump and method
US6868314B1 (en) 2001-06-27 2005-03-15 Bentley D. Frink Unmanned aerial vehicle apparatus, system and method for retrieving data
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US7008193B2 (en) * 2002-05-13 2006-03-07 The Regents Of The University Of Michigan Micropump assembly for a microgas chromatograph and the like
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
TW590982B (en) * 2002-09-27 2004-06-11 Agnitio Science & Technology I Micro-fluid driving device
DE10302304B3 (de) * 2003-01-22 2004-01-29 Festo Ag & Co. Elektronisches Mikroventil und Verfahren zu seinem Betreiben
US7382355B2 (en) * 2003-03-25 2008-06-03 Sony Ericsson Mobile Communications Ab Extractable terminal keypad
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US6917099B2 (en) * 2003-08-27 2005-07-12 Hewlett-Packard Development Company, L.P. Die carrier with fluid chamber
US20050067919A1 (en) * 2003-09-30 2005-03-31 Horning Robert D. Polymer actuator having a circular unit cell
US7038824B2 (en) * 2003-11-18 2006-05-02 Honeywell International Inc. Dynamic reflector array and method of making the same
US7446450B2 (en) * 2004-06-07 2008-11-04 California Institute Of Technology Method and system using liquid dielectric for electrostatic power generation
CA2575314A1 (en) * 2004-07-29 2006-02-09 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
US7612871B2 (en) * 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US20060065622A1 (en) * 2004-09-27 2006-03-30 Floyd Philip D Method and system for xenon fluoride etching with enhanced efficiency
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7553684B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7630075B2 (en) 2004-09-27 2009-12-08 Honeywell International Inc. Circular polarization illumination based analyzer system
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7369296B2 (en) * 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7327510B2 (en) * 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7893919B2 (en) * 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US20060127247A1 (en) * 2004-12-10 2006-06-15 Hamilton Sundstrand Corporation Magnetic pulse pump/compressor system
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
JP4965561B2 (ja) * 2005-04-29 2012-07-04 ハネウェル・インターナショナル・インコーポレーテッド サイトメータ細胞計数及びサイズ測定システム
WO2006119274A2 (en) * 2005-05-04 2006-11-09 The Board Of Trustees Of The University Of Illinois Thin welded sheets fluid pathway
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
JP2009500612A (ja) 2005-07-01 2009-01-08 ハネウェル・インターナショナル・インコーポレーテッド 流量測定分析器
US8361410B2 (en) 2005-07-01 2013-01-29 Honeywell International Inc. Flow metered analyzer
EP1902298B1 (de) 2005-07-01 2012-01-18 Honeywell International Inc. Geformte kassette mit dreidimensionaler hydrodynamischer fokussierung
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
JP2009503565A (ja) 2005-07-22 2009-01-29 クアルコム，インコーポレイテッド Ｍｅｍｓデバイスのための支持構造、およびその方法
EP2495212A3 (de) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
WO2008041963A2 (en) * 2005-07-27 2008-04-10 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
US8628055B2 (en) * 2005-07-27 2014-01-14 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
US7843563B2 (en) * 2005-08-16 2010-11-30 Honeywell International Inc. Light scattering and imaging optical system
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US8123834B2 (en) * 2005-10-06 2012-02-28 The Board Of Trustees Of The University Of Illinois High gain selective metal organic framework preconcentrators
US7630114B2 (en) * 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
WO2007075919A2 (en) 2005-12-22 2007-07-05 Honeywell International Inc. Portable sample analyzer system
WO2007075922A2 (en) 2005-12-22 2007-07-05 Honeywell International Inc. Portable sample analyzer cartridge
JP2009521683A (ja) * 2005-12-22 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド アナライザーシステム
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7450295B2 (en) * 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) * 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7545552B2 (en) * 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US7733552B2 (en) * 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7569488B2 (en) * 2007-06-22 2009-08-04 Qualcomm Mems Technologies, Inc. Methods of making a MEMS device by monitoring a process parameter
JP2009083382A (ja) * 2007-10-01 2009-04-23 Brother Ind Ltd 画像形成装置および画像処理プログラム
US8123841B2 (en) 2008-01-16 2012-02-28 The Board Of Trustees Of The University Of Illinois Column design for micro gas chromatograph
US8269029B2 (en) * 2008-04-08 2012-09-18 The Board Of Trustees Of The University Of Illinois Water repellent metal-organic frameworks, process for making and uses regarding same
US7851239B2 (en) * 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US20100034704A1 (en) * 2008-08-06 2010-02-11 Honeywell International Inc. Microfluidic cartridge channel with reduced bubble formation
US8037354B2 (en) 2008-09-18 2011-10-11 Honeywell International Inc. Apparatus and method for operating a computing platform without a battery pack
US7719754B2 (en) * 2008-09-30 2010-05-18 Qualcomm Mems Technologies, Inc. Multi-thickness layers for MEMS and mask-saving sequence for same
US7864403B2 (en) * 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
KR20130100232A (ko) 2010-04-09 2013-09-10 퀄컴 엠이엠에스 테크놀로지스, 인크. 전기 기계 디바이스의 기계층 및 그 형성 방법
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8741235B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Two step sample loading of a fluid analysis cartridge
US8741233B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8663583B2 (en) 2011-12-27 2014-03-04 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741234B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8803861B2 (en) 2012-02-23 2014-08-12 Qualcomm Mems Technologies, Inc. Electromechanical systems device
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
CN103821800B (zh) * 2014-03-18 2016-03-16 上海交通大学 基于电磁激振的主动涡流发生器
US9850922B2 (en) 2014-04-14 2017-12-26 President And Fellows Of Harvard College Soft buckling actuators
US9790968B2 (en) 2014-07-17 2017-10-17 President And Fellows Of Harvard College Soft actuators and soft actuating devices
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
WO2017046802A1 (en) * 2015-09-16 2017-03-23 Technion Research & Development Foundation Limited Dynamic microfluidic devices and use thereof
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
US11067200B2 (en) 2018-10-24 2021-07-20 Toyota Motor Engineering & Manufacturing North America, Inc. Self-healing microvalve
US11548261B2 (en) 2018-10-24 2023-01-10 Toyota Motor Engineering & Manufacturing North America, Inc. Structure with selectively variable stiffness
US11088635B2 (en) 2018-10-25 2021-08-10 Toyota Motor Engineering & Manufacturing North America, Inc. Actuator with sealable edge region
US10946535B2 (en) 2018-10-25 2021-03-16 Toyota Motor Engineering & Manufacturing North America, Inc. Earthworm-like motion of soft bodied structure
US11081975B2 (en) 2018-10-25 2021-08-03 Toyota Motor Engineering & Manufacturing North America, Inc. Somersaulting motion of soft bodied structure
US11041576B2 (en) 2018-10-25 2021-06-22 Toyota Motor Engineering & Manufacturing North America, Inc. Actuator with static activated position
WO2020097114A1 (en) 2018-11-06 2020-05-14 Deep Science, Llc Systems and methods for active control of surface drag using wall coupling
US11498270B2 (en) 2018-11-21 2022-11-15 Toyota Motor Engineering & Manufacturing North America, Inc. Programmable matter
US11744157B2 (en) 2018-11-30 2023-08-29 Deep Science, Llc Systems and methods of active control of surface drag using selective wave generation
US11195506B2 (en) 2018-12-03 2021-12-07 Toyota Motor Engineering & Manufacturing North America, Inc. Sound-modulating windows
US10859101B2 (en) 2018-12-10 2020-12-08 Toyota Motor Engineering & Manufacturing North America, Inc. Soft-bodied actuator with pinched configuration
US11066016B2 (en) 2018-12-18 2021-07-20 Toyota Motor Engineering & Manufacturing North America, Inc. Adjusting vehicle mirrors
US11479308B2 (en) 2019-01-09 2022-10-25 Toyota Motor Engineering & Manufacturing North America, Inc. Active vehicle interface for crosswind management
CN111313741B (zh) * 2019-01-29 2021-04-16 北京纳米能源与系统研究所 一种可拉伸发电的发电装置
US11192469B2 (en) 2019-01-30 2021-12-07 Toyota Motor Engineering & Manufacturing North America, Inc. Vehicle seat with morphing bolsters
US11473567B2 (en) 2019-02-07 2022-10-18 Toyota Motor Engineering & Manufacturing North America, Inc. Programmable surface
WO2020257670A1 (en) * 2019-06-19 2020-12-24 The Texas A&M University System Aircraft airfoils including wave assemblies, systems including wave assemblies, and methods of using the same
WO2021150755A1 (en) * 2020-01-23 2021-07-29 Deep Science, Llc Systems and methods for active control of surface drag using intermittent or variable actuation
US11905983B2 (en) 2020-01-23 2024-02-20 Deep Science, Llc Systems and methods for active control of surface drag using electrodes
US11453482B2 (en) * 2020-06-10 2022-09-27 United States Of America As Represented By The Secretary Of The Navy Vehicle with surface array of transducers controlling drag
KR102418095B1 (ko) 2020-09-22 2022-07-08 한국과학기술연구원 액츄에이터를 구비한 액티브 플레이트
US11466709B2 (en) 2021-02-17 2022-10-11 Deep Science, Llc In-plane transverse momentum injection to disrupt large-scale eddies in a turbulent boundary layer

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2403692A (en) * 1944-12-29 1946-07-09 George C Tibbetts Piezoelectric device
US3304446A (en) * 1963-12-26 1967-02-14 Union Oil Co Electrostrictive fluid transducer
JPS4829420A (de) * 1971-08-20 1973-04-19
US4197737A (en) * 1977-05-10 1980-04-15 Applied Devices Corporation Multiple sensing device and sensing devices therefor
US4140936A (en) * 1977-09-01 1979-02-20 The United States Of America As Represented By The Secretary Of The Navy Square and rectangular electroacoustic bender bar transducer
DE3320441A1 (de) * 1983-06-06 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern
US4654546A (en) 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
JPH01174278A (ja) * 1987-12-28 1989-07-10 Misuzu Erii:Kk インバータ
JP2709318B2 (ja) * 1988-08-31 1998-02-04 セイコープレシジョン株式会社 液晶パネルおよび液晶パネルを用いた変換装置
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
EP0518112B1 (de) * 1991-05-24 1997-04-02 Sumitomo Electric Industries, Ltd. Verfahren zur Herstellung von Micromaschinen
DE4119955C2 (de) * 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
US5176358A (en) 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5350966A (en) * 1991-11-12 1994-09-27 Rockwell International Corporation Piezocellular propulsion
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5780958A (en) * 1995-11-03 1998-07-14 Aura Systems, Inc. Piezoelectric vibrating device
US5729077A (en) * 1995-12-15 1998-03-17 The Penn State Research Foundation Metal-electroactive ceramic composite transducer
DE69733125T2 (de) * 1996-02-10 2006-03-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bistabiler microantrieb mit gekoppelten membranen
DE19617852A1 (de) 1996-04-23 1997-10-30 Karlsruhe Forschzent Verfahren zur planaren Herstellung von pneumatischen und fluidischen Miniaturmanipulatoren
US5941501A (en) * 1996-09-06 1999-08-24 Xerox Corporation Passively addressable cantilever valves
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US5901939A (en) * 1997-10-09 1999-05-11 Honeywell Inc. Buckled actuator with enhanced restoring force

Also Published As

Publication number Publication date
EP1141554A1 (de) 2001-10-10
EP1141554B1 (de) 2005-11-16
DE69928441D1 (de) 2005-12-22
DE69928441T2 (de) 2006-07-27
CA2358115A1 (en) 2000-07-06
US6288472B1 (en) 2001-09-11
JP2002533230A (ja) 2002-10-08
CA2358115C (en) 2008-07-22
WO2000039467A1 (en) 2000-07-06
US6215221B1 (en) 2001-04-10

Similar Documents

Publication Publication Date Title
DE1141554T1 (de) Elektrostatische/pneumatische aktuatoren für veränderliche oberflächen
DE69823728D1 (de) Betätigungsvorrichtung für Schalter
DE69814956D1 (de) Elektrostatischer Betätiger
DE69726082D1 (de) Betätigungsvorrichtung für Flugzeugsteuerflächen
DE59906326D1 (de) Piezoelektischer Aktor für einen Stellantrieb
DE4397555T1 (de) Konstruktionskörper für Betätigungselemente
DE69835069D1 (de) Elektropneumatischer Stellantrieb
DE69814928D1 (de) Entkuppler für abgassysteme
DE69937587D1 (de) Treiberstufe für einen schwingenden Aktuator
DE69824364D1 (de) Elektrostatischer Betätiger
FR2794101B1 (fr) Actionneur pneumatique
DE69904598D1 (de) Lösungsmittel für amorfe fluoropolymere
DE69721969D1 (de) Klemmvorrichtung für pneumatisches Stellelement
DE69620425D1 (de) Anschlag für industrieroboter
DE69815382D1 (de) Ventilbetätiger
DE69817623D1 (de) Stellantrieb für objektivlinse
DE29810102U1 (de) Steuereinrichtung für fluidbetätigte Verbraucher
DE59910579D1 (de) Steuerelement für Fluid
DE69725128D1 (de) Mehrschichtige verpackungsstoffe für elektrostatische anwendungen
DE69511999T2 (de) Verbesserungen für mikromechanische Geräte
DE69805794D1 (de) Werkzeug für dekorateur
DE69808513D1 (de) Herstellungsverfahren für meta-xylol
DE29903503U1 (de) Steller für Deckel
DE9419119U1 (de) Beschichtung für bewegliche Objekte
DE29801687U1 (de) Bewegbare Cockpit-Anordnung für Simulationssysteme