DE19680913T1 - Halbleiterbauelement-Transport- und Handhabungsvorrichtung - Google Patents

Halbleiterbauelement-Transport- und Handhabungsvorrichtung

Info

Publication number
DE19680913T1
DE19680913T1 DE19680913T DE19680913T DE19680913T1 DE 19680913 T1 DE19680913 T1 DE 19680913T1 DE 19680913 T DE19680913 T DE 19680913T DE 19680913 T DE19680913 T DE 19680913T DE 19680913 T1 DE19680913 T1 DE 19680913T1
Authority
DE
Germany
Prior art keywords
handling device
semiconductor component
component transport
transport
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19680913T
Other languages
English (en)
Other versions
DE19680913C2 (de
Inventor
Kuniaki Bannai
Koichi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE19680913T1 publication Critical patent/DE19680913T1/de
Application granted granted Critical
Publication of DE19680913C2 publication Critical patent/DE19680913C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
DE19680913T 1995-09-04 1996-08-30 Halbleiterbauelement-Transport- und -Handhabungseinrichtung Expired - Fee Related DE19680913C2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22649495 1995-09-04
PCT/JP1996/002445 WO1997009629A1 (fr) 1995-09-04 1996-08-30 Appareil de transfert de dispositifs semi-conducteurs

Publications (2)

Publication Number Publication Date
DE19680913T1 true DE19680913T1 (de) 1997-12-11
DE19680913C2 DE19680913C2 (de) 1999-06-17

Family

ID=16845993

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19680913T Expired - Fee Related DE19680913C2 (de) 1995-09-04 1996-08-30 Halbleiterbauelement-Transport- und -Handhabungseinrichtung

Country Status (7)

Country Link
US (1) US6078188A (de)
JP (1) JP3009743B2 (de)
KR (1) KR100270652B1 (de)
CN (1) CN1091258C (de)
DE (1) DE19680913C2 (de)
SG (1) SG60015A1 (de)
WO (1) WO1997009629A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10115280A1 (de) * 2001-03-28 2002-10-24 Infineon Technologies Ag Verfahren zum Klassifizieren von Bauelementen
DE19962703B4 (de) * 1998-12-23 2004-07-08 Mirae Corp., Chunan Verfahren und Vorrichtung zum Steuern des Beladens/Entladens von Halbleiterbauelementen

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100216066B1 (ko) * 1997-05-20 1999-08-16 윤종용 반도체 집적회로 소자 검사공정 제어 시스템 및 제어방법
JP3951436B2 (ja) * 1998-04-01 2007-08-01 株式会社アドバンテスト Ｉｃ試験装置
JP4037962B2 (ja) * 1998-06-24 2008-01-23 株式会社アドバンテスト 部品試験装置
US6732053B1 (en) * 1998-09-30 2004-05-04 Intel Corporation Method and apparatus for controlling a test cell
JP2000118681A (ja) * 1998-10-19 2000-04-25 Shinkawa Ltd トレイ搬送装置及び方法
US6563070B2 (en) * 1999-03-30 2003-05-13 Micron Technology, Inc. Enhanced grading and sorting of semiconductor devices using modular “plug-in” sort algorithms
DE10003839C2 (de) * 2000-01-29 2002-03-14 Dual M Tech Ag Temperaturkammer
WO2001082055A1 (en) * 2000-04-25 2001-11-01 Pri Automation, Inc. Reticle management system
US6449531B1 (en) * 2000-08-25 2002-09-10 Advanced Micro Devices, Inc. System for batching integrated circuits in trays
TW494516B (en) * 2001-03-14 2002-07-11 Winbond Electronics Corp Semiconductor multi-die testing system with automatic identification functions
KR100372881B1 (ko) * 2001-04-02 2003-02-19 미래산업 주식회사 테스트 핸들러의 자동 소켓 오프 방법
KR100496861B1 (ko) * 2002-09-26 2005-06-22 삼성전자주식회사 하나의 핸들러에 2개 이상의 테스트 보드를 갖는 테스트장비 및 그 테스트 방법
JP2006033086A (ja) * 2004-07-12 2006-02-02 Canon Inc 画像処理システム、情報処理装置、画像処理装置、それらの制御方法、それらの制御プログラム並びに、その制御プログラムを格納した記憶媒体
TWI287099B (en) * 2004-07-23 2007-09-21 Advantest Corp Electronic component testing apparatus and method for configuring electronic component testing apparatus
JP4529084B2 (ja) * 2005-01-19 2010-08-25 横河電機株式会社 固体撮像素子検査システム
KR100790988B1 (ko) * 2006-04-11 2008-01-03 삼성전자주식회사 테스트 환경의 안정적 온도유지가 가능한 반도체 소자검사용 핸들러
JP5186370B2 (ja) * 2006-07-27 2013-04-17 株式会社アドバンテスト 電子部品移送方法および電子部品ハンドリング装置
KR100934034B1 (ko) 2007-12-14 2009-12-28 (주)테크윙 테스트핸들러의 테스트지원방법
JP2009245991A (ja) * 2008-03-28 2009-10-22 Tdk Corp チップ部品の実装装置
SG10201601368SA (en) * 2011-03-01 2016-03-30 Celerint Llc Method and system for utilizing stand-alone controller in multiplexed handler test cell for indexless tandem semiconductor test
TWI472778B (zh) * 2013-08-30 2015-02-11 Chroma Ate Inc System - level IC test machine automatic retest method and the test machine
KR102128545B1 (ko) * 2014-05-12 2020-07-01 (주)테크윙 테스트핸들러 및 이를 이용한 전자부품 테스트 방법
US9638749B2 (en) 2014-06-06 2017-05-02 Advantest Corporation Supporting automated testing of devices in a test floor system
US9933454B2 (en) 2014-06-06 2018-04-03 Advantest Corporation Universal test floor system
US9618574B2 (en) 2014-06-06 2017-04-11 Advantest Corporation Controlling automated testing of devices
US9678148B2 (en) * 2014-06-06 2017-06-13 Advantest Corporation Customizable tester having testing modules for automated testing of devices
US9618570B2 (en) * 2014-06-06 2017-04-11 Advantest Corporation Multi-configurable testing module for automated testing of a device
KR20210025226A (ko) * 2019-08-27 2021-03-09 삼성전자주식회사 테스트 모듈, 테스트 핸들러 및 테스트 핸들러를 이용한 반도체 소자의 테스트 방법
CN110653181B (zh) * 2019-08-30 2021-10-08 歌尔科技有限公司 一种主板自动复测机及其复测方法
CN114798484A (zh) * 2022-04-07 2022-07-29 联宝(合肥)电子科技有限公司 自动拷贝机的机体模组及自动拷贝机
CN115156069B (zh) * 2022-07-07 2023-04-07 深圳创维－Rgb电子有限公司 物料测试方法、装置、设备及计算机可读存储介质

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3123543A1 (de) * 1980-08-28 1982-06-16 Viktor Alekseevič Adoniev Sortierverfahren fuer halbleitergeraete und sortiereinrichtung zu dessen verwirklichung
EP0432292A1 (de) * 1989-12-12 1991-06-19 Advantest Corporation Prüfer für integrierte logische Schaltungen

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US3584741A (en) * 1969-06-30 1971-06-15 Ibm Batch sorting apparatus
US3664499A (en) * 1970-11-06 1972-05-23 Fairchild Camera Instr Co High speed automatic sequential tester-handler
US4755746A (en) * 1985-04-24 1988-07-05 Prometrix Corporation Apparatus and methods for semiconductor wafer testing
DE3827285A1 (de) * 1987-08-13 1989-02-23 Toshiba Machine Co Ltd Steuervorrichtung fuer eine spritzgiessmaschine
US5024978A (en) * 1989-05-30 1991-06-18 Corning Incorporated Compositions and methods for making ceramic matrix composites
US5307011A (en) * 1991-12-04 1994-04-26 Advantest Corporation Loader and unloader for test handler
US5313156A (en) * 1991-12-04 1994-05-17 Advantest Corporation Apparatus for automatic handling
JPH05188119A (ja) * 1992-01-17 1993-07-30 Fujitsu Ltd 試験データ管理装置及び試験データ管理方法
JP3060039B2 (ja) * 1992-07-06 2000-07-04 富士通株式会社 ディスク装置のオンライン診断における自動スケジュール方法
JP3014015B2 (ja) * 1992-11-04 2000-02-28 株式会社アドバンテスト 試験済ｉｃ素子分類方法
JP3263475B2 (ja) * 1993-03-29 2002-03-04 株式会社アドバンテスト 半導体試験装置の自動試験装置及び方法
JP3372586B2 (ja) * 1993-04-19 2003-02-04 株式会社アドバンテスト Ｉｃ試験装置用ローダ・アンローダ
JPH0730614A (ja) * 1993-06-24 1995-01-31 Fujitsu Ltd 自動試験装置
JP3183591B2 (ja) * 1993-07-02 2001-07-09 三菱電機株式会社 半導体デバイスのテストシステム、半導体デバイスのテスト方法、半導体デバイス挿抜ステーション及びテスト用チャンバ
JPH0792224A (ja) * 1993-08-27 1995-04-07 Mitsubishi Electric Corp Ｉｃテスト装置
JP2888750B2 (ja) * 1994-01-28 1999-05-10 株式会社東芝 半導体装置の処理装置およびその処理方法
JPH1058367A (ja) * 1996-08-23 1998-03-03 Advantest Corp Ｉｃ搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3123543A1 (de) * 1980-08-28 1982-06-16 Viktor Alekseevič Adoniev Sortierverfahren fuer halbleitergeraete und sortiereinrichtung zu dessen verwirklichung
EP0432292A1 (de) * 1989-12-12 1991-06-19 Advantest Corporation Prüfer für integrierte logische Schaltungen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19962703B4 (de) * 1998-12-23 2004-07-08 Mirae Corp., Chunan Verfahren und Vorrichtung zum Steuern des Beladens/Entladens von Halbleiterbauelementen
DE10115280A1 (de) * 2001-03-28 2002-10-24 Infineon Technologies Ag Verfahren zum Klassifizieren von Bauelementen
DE10115280C2 (de) * 2001-03-28 2003-12-24 Infineon Technologies Ag Verfahren zum Klassifizieren von Bauelementen

Also Published As

Publication number Publication date
KR100270652B1 (ko) 2000-11-01
CN1164895A (zh) 1997-11-12
DE19680913C2 (de) 1999-06-17
KR970707447A (ko) 1997-12-01
WO1997009629A1 (fr) 1997-03-13
CN1091258C (zh) 2002-09-18
JP3009743B2 (ja) 2000-02-14
SG60015A1 (en) 1999-02-22
US6078188A (en) 2000-06-20

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee