DE19781667T1 - Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle - Google Patents

Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle

Info

Publication number
DE19781667T1
DE19781667T1 DE19781667T DE19781667T DE19781667T1 DE 19781667 T1 DE19781667 T1 DE 19781667T1 DE 19781667 T DE19781667 T DE 19781667T DE 19781667 T DE19781667 T DE 19781667T DE 19781667 T1 DE19781667 T1 DE 19781667T1
Authority
DE
Germany
Prior art keywords
generation method
inductively coupled
plasma generation
coupled plasma
plasma source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19781667T
Other languages
English (en)
Other versions
DE19781667B4 (de
Inventor
Kaihan Ashtiani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials Research Corp
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of DE19781667T1 publication Critical patent/DE19781667T1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32688—Multi-cusp fields
DE19781667T 1996-03-27 1997-03-04 Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle Pending DE19781667T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/624,010 US5669975A (en) 1996-03-27 1996-03-27 Plasma producing method and apparatus including an inductively-coupled plasma source
PCT/US1997/003048 WO1997036022A1 (en) 1996-03-27 1997-03-04 Plasma producing method and apparatus including an inductively-coupled plasma source

Publications (1)

Publication Number Publication Date
DE19781667T1 true DE19781667T1 (de) 1999-04-08

Family

ID=24500251

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19781667T Pending DE19781667T1 (de) 1996-03-27 1997-03-04 Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle
DE19781667A Expired - Fee Related DE19781667B4 (de) 1996-03-27 1997-03-04 Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19781667A Expired - Fee Related DE19781667B4 (de) 1996-03-27 1997-03-04 Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle

Country Status (8)

Country Link
US (1) US5669975A (de)
JP (1) JP3653524B2 (de)
AU (1) AU2058397A (de)
CH (1) CH696036A5 (de)
DE (2) DE19781667T1 (de)
GB (1) GB2326974B (de)
TW (1) TW340295B (de)
WO (1) WO1997036022A1 (de)

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Also Published As

Publication number Publication date
GB2326974A (en) 1999-01-06
GB2326974B (en) 2000-11-15
DE19781667B4 (de) 2007-07-05
TW340295B (en) 1998-09-11
CH696036A5 (de) 2006-11-30
GB9820829D0 (en) 1998-11-18
WO1997036022A1 (en) 1997-10-02
AU2058397A (en) 1997-10-17
US5669975A (en) 1997-09-23
JP2001503554A (ja) 2001-03-13
JP3653524B2 (ja) 2005-05-25

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Legal Events

Date Code Title Description
8127 New person/name/address of the applicant

Owner name: TOKYO ELECTRON LTD., ORANGEBURG, N.Y., US

8127 New person/name/address of the applicant

Owner name: TOKYO ELECTRON LTD., TOKIO/TOKYO, JP

8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: H05H 146