DE19836357B8 - Einseitiges Herstellungsverfahren zum Bilden eines monolithischen Tintenstrahldruckelementarrays auf einem Substrat - Google Patents

Einseitiges Herstellungsverfahren zum Bilden eines monolithischen Tintenstrahldruckelementarrays auf einem Substrat Download PDF

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Publication number
DE19836357B8
DE19836357B8 DE19836357A DE19836357A DE19836357B8 DE 19836357 B8 DE19836357 B8 DE 19836357B8 DE 19836357 A DE19836357 A DE 19836357A DE 19836357 A DE19836357 A DE 19836357A DE 19836357 B8 DE19836357 B8 DE 19836357B8
Authority
DE
Germany
Prior art keywords
substrate
forming
ink jet
jet printing
element array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19836357A
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English (en)
Other versions
DE19836357A1 (de
DE19836357B4 (de
Inventor
Christopher Corvallis Beatty
Naoto Corvallis Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Publication of DE19836357A1 publication Critical patent/DE19836357A1/de
Application granted granted Critical
Publication of DE19836357B4 publication Critical patent/DE19836357B4/de
Publication of DE19836357B8 publication Critical patent/DE19836357B8/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE19836357A 1997-10-22 1998-08-11 Einseitiges Herstellungsverfahren zum Bilden eines monolithischen Tintenstrahldruckelementarrays auf einem Substrat Expired - Fee Related DE19836357B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/956,235 1997-10-22
US08/956,235 US6322201B1 (en) 1997-10-22 1997-10-22 Printhead with a fluid channel therethrough

Publications (3)

Publication Number Publication Date
DE19836357A1 DE19836357A1 (de) 1999-04-29
DE19836357B4 DE19836357B4 (de) 2010-01-07
DE19836357B8 true DE19836357B8 (de) 2010-06-10

Family

ID=25497967

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19836357A Expired - Fee Related DE19836357B8 (de) 1997-10-22 1998-08-11 Einseitiges Herstellungsverfahren zum Bilden eines monolithischen Tintenstrahldruckelementarrays auf einem Substrat

Country Status (5)

Country Link
US (3) US6322201B1 (de)
JP (1) JP3340967B2 (de)
KR (1) KR100595081B1 (de)
DE (1) DE19836357B8 (de)
GB (1) GB2330557B (de)

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US6336714B1 (en) * 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
US6305790B1 (en) 1996-02-07 2001-10-23 Hewlett-Packard Company Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle
US6543884B1 (en) 1996-02-07 2003-04-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having etched back PSG layer
IT1309735B1 (it) * 1999-12-27 2002-01-30 Olivetti Lexikon Spa Testina a canali multipli di alimentazione dell'inchiostro
US6482574B1 (en) 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
IT1320392B1 (it) 2000-06-05 2003-11-26 Olivetti Lexikon Spa Processo di fabbricazione di una testina di stampa monolitica conugelli tronco-conici.
US6402301B1 (en) 2000-10-27 2002-06-11 Lexmark International, Inc Ink jet printheads and methods therefor
US6364466B1 (en) * 2000-11-30 2002-04-02 Hewlett-Packard Company Particle tolerant ink-feed channel structure for fully integrated inkjet printhead
KR100506079B1 (ko) * 2000-12-05 2005-08-04 삼성전자주식회사 버블젯 방식의 잉크젯 프린트 헤드
US6675476B2 (en) 2000-12-05 2004-01-13 Hewlett-Packard Development Company, L.P. Slotted substrates and techniques for forming same
US6450619B1 (en) * 2001-02-22 2002-09-17 Eastman Kodak Company CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same
US6471340B2 (en) 2001-02-12 2002-10-29 Hewlett-Packard Company Inkjet printhead assembly
US6475402B2 (en) * 2001-03-02 2002-11-05 Hewlett-Packard Company Ink feed channels and heater supports for thermal ink-jet printhead
US7160806B2 (en) * 2001-08-16 2007-01-09 Hewlett-Packard Development Company, L.P. Thermal inkjet printhead processing with silicon etching
US6698868B2 (en) * 2001-10-31 2004-03-02 Hewlett-Packard Development Company, L.P. Thermal drop generator for ultra-small droplets
US7125731B2 (en) * 2001-10-31 2006-10-24 Hewlett-Packard Development Company, L.P. Drop generator for ultra-small droplets
US6627467B2 (en) 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Fluid ejection device fabrication
US6962402B2 (en) * 2002-12-02 2005-11-08 Silverbrook Research Pty Ltd Inkjet printhead with ink supply passage formed from both sides of the wafer by overlapping etches
JP3856123B2 (ja) * 2002-04-17 2006-12-13 セイコーエプソン株式会社 マスク及びその製造方法、エレクトロルミネッセンス装置及びその製造方法並びに電子機器
US6767474B2 (en) 2002-07-19 2004-07-27 Hewlett-Packard Development Company, L.P. Fluid ejector head having a planar passivation layer
US6655787B1 (en) * 2002-08-26 2003-12-02 Eastman Kodak Company Drop-on-demand liquid emission using symmetrical electrostatic device
US6966110B2 (en) * 2002-09-25 2005-11-22 Eastman Kodak Company Fabrication of liquid emission device with symmetrical electrostatic mandrel
US6672712B1 (en) * 2002-10-31 2004-01-06 Hewlett-Packard Development Company, L.P. Slotted substrates and methods and systems for forming same
US7152958B2 (en) 2002-11-23 2006-12-26 Silverbrook Research Pty Ltd Thermal ink jet with chemical vapor deposited nozzle plate
US6672710B1 (en) 2002-11-23 2004-01-06 Silverbrook Research Pty Ltd Thermal ink jet printhead with symmetric bubble formation
US6692108B1 (en) 2002-11-23 2004-02-17 Silverbrook Research Pty Ltd. High efficiency thermal ink jet printhead
US6719406B1 (en) * 2002-11-23 2004-04-13 Silverbrook Research Pty Ltd Ink jet printhead with conformally coated heater
US7581822B2 (en) * 2002-11-23 2009-09-01 Silverbrook Research Pty Ltd Inkjet printhead with low voltage ink vaporizing heaters
US6755509B2 (en) * 2002-11-23 2004-06-29 Silverbrook Research Pty Ltd Thermal ink jet printhead with suspended beam heater
KR100468160B1 (ko) * 2002-12-02 2005-01-26 삼성전자주식회사 모노리식 버블 잉크젯 프린트 헤드 및 그 제조방법
US6926390B2 (en) * 2003-02-05 2005-08-09 Hewlett-Packard Development Company, L.P. Method of forming mixed-phase compressive tantalum thin films using nitrogen residual gas, thin films and fluid ejection devices including same
US6916090B2 (en) 2003-03-10 2005-07-12 Hewlett-Packard Development Company, L.P. Integrated fluid ejection device and filter
ITTO20030841A1 (it) * 2003-10-27 2005-04-28 Olivetti I Jet Spa Testina di stampa a getto d'inchiostro e suo processo di fabbricazione.
KR100517515B1 (ko) 2004-01-20 2005-09-28 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드의 제조방법
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
US7322104B2 (en) * 2004-06-25 2008-01-29 Canon Kabushiki Kaisha Method for producing an ink jet head
US7164611B2 (en) * 2004-10-26 2007-01-16 Micron Technology, Inc. Data retention kill function
KR100717028B1 (ko) * 2005-09-13 2007-05-10 삼성전자주식회사 전도성 에폭시 수지를 구비한 잉크젯 프린터 헤드
US8043517B2 (en) * 2005-09-19 2011-10-25 Hewlett-Packard Development Company, L.P. Method of forming openings in substrates and inkjet printheads fabricated thereby
JP2007237718A (ja) * 2006-03-13 2007-09-20 Seiko Epson Corp インクジェットヘッドの製造方法
US8474947B2 (en) * 2008-02-27 2013-07-02 Hewlett-Packard Development Company, L.P. Printhead assembly having grooves externally exposing printhead die
EP2346692A1 (de) * 2008-10-30 2011-07-27 Hewlett-Packard Development Company, L.P. Versorgungsübergangskammer für einen thermischen tintenstrahldruckkopf und kühlverfahren dafür
US8419169B2 (en) 2009-07-31 2013-04-16 Hewlett-Packard Development Company, L.P. Inkjet printhead and method employing central ink feed channel
US8425787B2 (en) * 2009-08-26 2013-04-23 Hewlett-Packard Development Company, L.P. Inkjet printhead bridge beam fabrication method
US8267504B2 (en) * 2010-04-27 2012-09-18 Eastman Kodak Company Printhead including integrated stimulator/filter device
US8287101B2 (en) * 2010-04-27 2012-10-16 Eastman Kodak Company Printhead stimulator/filter device printing method
CN103328220B (zh) * 2011-01-31 2016-04-27 惠普发展公司，有限责任合伙企业 流体喷射组件和相关方法
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JP2015054410A (ja) * 2013-09-10 2015-03-23 キヤノン株式会社 液体吐出ヘッド及び液体吐出装置

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DE19536429A1 (de) * 1995-09-29 1997-04-10 Siemens Ag Tintenstrahldruckkopf und Verfahren zum Herstellen eines solchen Tintenstrahldruckkopfes
EP0783970A2 (de) * 1996-01-12 1997-07-16 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Flüssigkeitstrahlaufzeichnungskopfes
JPH1098557A (ja) * 1996-09-24 1998-04-14 Ricoh Co Ltd Ｉｓｄｎターミナルアダプター装置
US6000787A (en) * 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head

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EP0244214A1 (de) * 1986-04-28 1987-11-04 Hewlett-Packard Company Thermischer Tintenstrahldruckkopf
DE19536429A1 (de) * 1995-09-29 1997-04-10 Siemens Ag Tintenstrahldruckkopf und Verfahren zum Herstellen eines solchen Tintenstrahldruckkopfes
EP0783970A2 (de) * 1996-01-12 1997-07-16 Canon Kabushiki Kaisha Verfahren zum Herstellen eines Flüssigkeitstrahlaufzeichnungskopfes
US6000787A (en) * 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
JPH1098557A (ja) * 1996-09-24 1998-04-14 Ricoh Co Ltd Ｉｓｄｎターミナルアダプター装置

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Title
JP 0040052144 A (englischsprachiger Abstract) JP 0010098557 A (englischsprachiger Abstract)
JP 10098557 A (englischsprachiger Abstract) *
JP 40052144 B (englischsprachiger Abstract) *

Also Published As

Publication number Publication date
DE19836357A1 (de) 1999-04-29
JP3340967B2 (ja) 2002-11-05
US6137443A (en) 2000-10-24
GB9820523D0 (en) 1998-11-11
KR100595081B1 (ko) 2006-09-22
US6365058B1 (en) 2002-04-02
KR19990037265A (ko) 1999-05-25
GB2330557B (en) 2001-08-01
JPH11192714A (ja) 1999-07-21
US6322201B1 (en) 2001-11-27
GB2330557A (en) 1999-04-28
DE19836357B4 (de) 2010-01-07

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