DE19982072T1 - Hochgeschwindigkeits-Präzisionspositioniervor- richtung - Google Patents
Hochgeschwindigkeits-Präzisionspositioniervor- richtungInfo
- Publication number
- DE19982072T1 DE19982072T1 DE19982072T DE19982072T DE19982072T1 DE 19982072 T1 DE19982072 T1 DE 19982072T1 DE 19982072 T DE19982072 T DE 19982072T DE 19982072 T DE19982072 T DE 19982072T DE 19982072 T1 DE19982072 T1 DE 19982072T1
- Authority
- DE
- Germany
- Prior art keywords
- stage
- forces
- motion
- planar
- cancellation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/156,895 US6144118A (en) | 1998-09-18 | 1998-09-18 | High-speed precision positioning apparatus |
PCT/US1999/020932 WO2000017724A1 (en) | 1998-09-18 | 1999-09-13 | High-speed precision positioning apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
DE19982072T1 true DE19982072T1 (de) | 2001-01-04 |
Family
ID=22561554
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19982072T Withdrawn DE19982072T1 (de) | 1998-09-18 | 1999-09-13 | Hochgeschwindigkeits-Präzisionspositioniervor- richtung |
DE69937547T Expired - Lifetime DE69937547T2 (de) | 1998-09-18 | 1999-09-13 | Geraet zur genauen hochgeschwindigkeits-positionierung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69937547T Expired - Lifetime DE69937547T2 (de) | 1998-09-18 | 1999-09-13 | Geraet zur genauen hochgeschwindigkeits-positionierung |
Country Status (8)
Country | Link |
---|---|
US (3) | US6144118A (de) |
EP (1) | EP1055163B1 (de) |
JP (3) | JP4970651B2 (de) |
KR (1) | KR100583040B1 (de) |
AT (1) | ATE378625T1 (de) |
DE (2) | DE19982072T1 (de) |
TW (1) | TW449680B (de) |
WO (1) | WO2000017724A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013102477A1 (de) * | 2013-03-12 | 2014-09-18 | Carl Mahr Holding Gmbh | Positioniervorrichtung für mehrachsige Verstelltische |
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- 1999-09-13 AT AT99946884T patent/ATE378625T1/de not_active IP Right Cessation
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- 1999-09-13 DE DE69937547T patent/DE69937547T2/de not_active Expired - Lifetime
- 1999-09-13 KR KR1020007005405A patent/KR100583040B1/ko not_active IP Right Cessation
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- 1999-09-13 JP JP2000571323A patent/JP4970651B2/ja not_active Expired - Fee Related
- 1999-10-06 TW TW088116067A patent/TW449680B/zh not_active IP Right Cessation
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2000
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Also Published As
Publication number | Publication date |
---|---|
US6949844B2 (en) | 2005-09-27 |
KR100583040B1 (ko) | 2006-05-24 |
KR20010032211A (ko) | 2001-04-16 |
US6144118A (en) | 2000-11-07 |
WO2000017724A1 (en) | 2000-03-30 |
EP1055163A4 (de) | 2000-12-06 |
DE69937547T2 (de) | 2008-03-06 |
EP1055163A1 (de) | 2000-11-29 |
JP2002525858A (ja) | 2002-08-13 |
US6744228B1 (en) | 2004-06-01 |
JP4970651B2 (ja) | 2012-07-11 |
DE69937547D1 (de) | 2007-12-27 |
US20040140780A1 (en) | 2004-07-22 |
JP5562789B2 (ja) | 2014-07-30 |
JP2014140049A (ja) | 2014-07-31 |
JP2011091392A (ja) | 2011-05-06 |
EP1055163B1 (de) | 2007-11-14 |
TW449680B (en) | 2001-08-11 |
WO2000017724A9 (en) | 2001-04-05 |
ATE378625T1 (de) | 2007-11-15 |
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