DE3175125D1 - Semiconductor memory device and method for manufacturing the same - Google Patents
Semiconductor memory device and method for manufacturing the sameInfo
- Publication number
- DE3175125D1 DE3175125D1 DE8181305349T DE3175125T DE3175125D1 DE 3175125 D1 DE3175125 D1 DE 3175125D1 DE 8181305349 T DE8181305349 T DE 8181305349T DE 3175125 T DE3175125 T DE 3175125T DE 3175125 D1 DE3175125 D1 DE 3175125D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- same
- memory device
- semiconductor memory
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
- H01L29/7885—Hot carrier injection from the channel
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
Applications Claiming Priority (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55163932A JPS5787164A (en) | 1980-11-20 | 1980-11-20 | Manufacture of semiconductor memory storage |
JP55163933A JPS5787165A (en) | 1980-11-20 | 1980-11-20 | Semiconductor memory storage |
JP55163931A JPS5787163A (en) | 1980-11-20 | 1980-11-20 | Semiconductor memory storage |
JP16861980A JPS5792489A (en) | 1980-11-29 | 1980-11-29 | Semiconductor storage device |
JP16862080A JPS5792490A (en) | 1980-11-29 | 1980-11-29 | Semiconductor storage device |
JP16861780A JPS5792866A (en) | 1980-11-29 | 1980-11-29 | Semiconductor memory device |
JP16861880A JPS5792867A (en) | 1980-11-29 | 1980-11-29 | Semiconductor memory device |
JP55168616A JPS5792865A (en) | 1980-11-29 | 1980-11-29 | Manufacture of semiconductor memory device |
JP18095180A JPS57104263A (en) | 1980-12-20 | 1980-12-20 | Semiconductor memory storage |
JP56007558A JPS57121273A (en) | 1981-01-21 | 1981-01-21 | Semiconductor memory |
JP56119782A JPS5823390A (ja) | 1981-07-30 | 1981-07-30 | 半導体記憶装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3175125D1 true DE3175125D1 (en) | 1986-09-18 |
Family
ID=27581777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8181305349T Expired DE3175125D1 (en) | 1980-11-20 | 1981-11-11 | Semiconductor memory device and method for manufacturing the same |
Country Status (3)
Country | Link |
---|---|
US (2) | US4803529A (de) |
EP (1) | EP0052982B1 (de) |
DE (1) | DE3175125D1 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3175125D1 (en) * | 1980-11-20 | 1986-09-18 | Toshiba Kk | Semiconductor memory device and method for manufacturing the same |
JPS6288368A (ja) * | 1985-10-15 | 1987-04-22 | Seiko Instr & Electronics Ltd | 半導体不揮発性メモリ |
JP2607504B2 (ja) * | 1987-02-20 | 1997-05-07 | 株式会社東芝 | 不揮発性半導体メモリ |
FR2616576B1 (fr) * | 1987-06-12 | 1992-09-18 | Commissariat Energie Atomique | Cellule de memoire eprom et son procede de fabrication |
US4920512A (en) * | 1987-06-30 | 1990-04-24 | Mitsubishi Denki Kabushiki Kaisha | Non-volatile semiconductor memory capable of readily erasing data |
US5332914A (en) * | 1988-02-05 | 1994-07-26 | Emanuel Hazani | EEPROM cell structure and architecture with increased capacitance and with programming and erase terminals shared between several cells |
US5033023A (en) * | 1988-04-08 | 1991-07-16 | Catalyst Semiconductor, Inc. | High density EEPROM cell and process for making the cell |
US4949309A (en) * | 1988-05-11 | 1990-08-14 | Catalyst Semiconductor, Inc. | EEPROM utilizing single transistor per cell capable of both byte erase and flash erase |
US5168465A (en) * | 1988-06-08 | 1992-12-01 | Eliyahou Harari | Highly compact EPROM and flash EEPROM devices |
US5268319A (en) * | 1988-06-08 | 1993-12-07 | Eliyahou Harari | Highly compact EPROM and flash EEPROM devices |
US5095344A (en) * | 1988-06-08 | 1992-03-10 | Eliyahou Harari | Highly compact eprom and flash eeprom devices |
US4945393A (en) * | 1988-06-21 | 1990-07-31 | At&T Bell Laboratories | Floating gate memory circuit and apparatus |
JPH0797608B2 (ja) * | 1988-10-19 | 1995-10-18 | 株式会社東芝 | 不揮発性半導体メモリおよびその製造方法 |
JP2515009B2 (ja) * | 1989-01-13 | 1996-07-10 | 株式会社東芝 | 不揮発性半導体メモリの製造方法 |
DE4020007C2 (de) * | 1989-06-22 | 1994-09-29 | Nippon Telegraph & Telephone | Nichtflüchtiger Speicher |
KR100204721B1 (ko) * | 1989-08-18 | 1999-06-15 | 가나이 쓰도무 | 메모리블럭으로 분활된 메모리셀 어레이를 갖는 전기적 소거 가능한 반도체 불휘발성 기억장치 |
IT1236980B (it) * | 1989-12-22 | 1993-05-12 | Sgs Thomson Microelectronics | Cella di memoria eprom non volatile a gate divisa e processo ad isolamento di campo autoallineato per l'ottenimento della cella suddetta |
US4994403A (en) * | 1989-12-28 | 1991-02-19 | Texas Instruments Incorporated | Method of making an electrically programmable, electrically erasable memory array cell |
US5153143A (en) * | 1990-02-26 | 1992-10-06 | Delco Electronics Corporation | Method of manufacturing CMOS integrated circuit with EEPROM |
JP2624864B2 (ja) * | 1990-02-28 | 1997-06-25 | 株式会社東芝 | 不揮発性半導体メモリ |
US5343063A (en) * | 1990-12-18 | 1994-08-30 | Sundisk Corporation | Dense vertical programmable read only memory cell structure and processes for making them |
US5512505A (en) * | 1990-12-18 | 1996-04-30 | Sandisk Corporation | Method of making dense vertical programmable read only memory cell structure |
JPH04255996A (ja) * | 1991-02-08 | 1992-09-10 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置 |
US5291439A (en) * | 1991-09-12 | 1994-03-01 | International Business Machines Corporation | Semiconductor memory cell and memory array with inversion layer |
US5138576A (en) * | 1991-11-06 | 1992-08-11 | Altera Corporation | Method and apparatus for erasing an array of electrically erasable EPROM cells |
US6222762B1 (en) | 1992-01-14 | 2001-04-24 | Sandisk Corporation | Multi-state memory |
US7071060B1 (en) * | 1996-02-28 | 2006-07-04 | Sandisk Corporation | EEPROM with split gate source side infection with sidewall spacers |
US5712180A (en) * | 1992-01-14 | 1998-01-27 | Sundisk Corporation | EEPROM with split gate source side injection |
US5313421A (en) * | 1992-01-14 | 1994-05-17 | Sundisk Corporation | EEPROM with split gate source side injection |
US5336936A (en) * | 1992-05-06 | 1994-08-09 | Synaptics, Incorporated | One-transistor adaptable analog storage element and array |
WO1994015363A1 (en) * | 1992-12-28 | 1994-07-07 | Yu Shih Chiang | Non-volatile semiconductor memory cell |
US5723888A (en) * | 1993-05-17 | 1998-03-03 | Yu; Shih-Chiang | Non-volatile semiconductor memory device |
US5436480A (en) * | 1993-02-22 | 1995-07-25 | Yu; Shih-Chiang | Integrated circuit interconnection programmable and erasable by a plurality of intersecting control traces |
US5675531A (en) * | 1995-04-05 | 1997-10-07 | International Business Machines Corporation | Device for information storage using field emission |
US5579259A (en) * | 1995-05-31 | 1996-11-26 | Sandisk Corporation | Low voltage erase of a flash EEPROM system having a common erase electrode for two individually erasable sectors |
US6038171A (en) * | 1997-03-25 | 2000-03-14 | Altera Corporation | Field emission erasable programmable read-only memory |
TW449746B (en) * | 1998-10-23 | 2001-08-11 | Kaitech Engineering Inc | Semiconductor memory device and method of making same |
US6534816B1 (en) | 1999-03-24 | 2003-03-18 | John M. Caywood | Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
US6384451B1 (en) | 1999-03-24 | 2002-05-07 | John Caywood | Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
US20040021170A1 (en) * | 1999-03-24 | 2004-02-05 | Caywood John M. | Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
DE19929619C2 (de) * | 1999-06-28 | 2001-06-28 | Infineon Technologies Ag | Halbleiter-Speicherzellenpaar |
WO2004071885A2 (en) | 2003-02-13 | 2004-08-26 | Martin Marietta Materials, Inc. | Insulated cargo containers |
TWI270198B (en) * | 2004-03-29 | 2007-01-01 | Promos Technologies Inc | An array structure, mask and fabrication method of a dynamic random access memory |
US7541638B2 (en) | 2005-02-28 | 2009-06-02 | Skymedi Corporation | Symmetrical and self-aligned non-volatile memory structure |
US7439133B2 (en) * | 2006-01-02 | 2008-10-21 | Skymedi Corporation | Memory structure and method of manufacturing a memory array |
US7450424B2 (en) * | 2007-01-31 | 2008-11-11 | Skymedi Corporation | Method for reading a memory array with a non-volatile memory structure |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3825946A (en) * | 1971-01-15 | 1974-07-23 | Intel Corp | Electrically alterable floating gate device and method for altering same |
JPS525233B2 (de) * | 1972-02-29 | 1977-02-10 | ||
JPS5213782A (en) * | 1975-07-23 | 1977-02-02 | Hitachi Ltd | Semiconductor non-vol atile memory unit |
US4119995A (en) * | 1976-08-23 | 1978-10-10 | Intel Corporation | Electrically programmable and electrically erasable MOS memory cell |
US4099196A (en) * | 1977-06-29 | 1978-07-04 | Intel Corporation | Triple layer polysilicon cell |
US4203158A (en) * | 1978-02-24 | 1980-05-13 | Intel Corporation | Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same |
US4302766A (en) * | 1979-01-05 | 1981-11-24 | Texas Instruments Incorporated | Self-limiting erasable memory cell with triple level polysilicon |
US4267558A (en) * | 1979-01-05 | 1981-05-12 | Texas Instruments Incorporated | Electrically erasable memory with self-limiting erase |
US4300212A (en) * | 1979-01-24 | 1981-11-10 | Xicor, Inc. | Nonvolatile static random access memory devices |
US4314265A (en) * | 1979-01-24 | 1982-02-02 | Xicor, Inc. | Dense nonvolatile electrically-alterable memory devices with four layer electrodes |
US4561004A (en) * | 1979-10-26 | 1985-12-24 | Texas Instruments | High density, electrically erasable, floating gate memory cell |
US4331968A (en) * | 1980-03-17 | 1982-05-25 | Mostek Corporation | Three layer floating gate memory transistor with erase gate over field oxide region |
DE3175125D1 (en) * | 1980-11-20 | 1986-09-18 | Toshiba Kk | Semiconductor memory device and method for manufacturing the same |
US4531203A (en) * | 1980-12-20 | 1985-07-23 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor memory device and method for manufacturing the same |
-
1981
- 1981-11-11 DE DE8181305349T patent/DE3175125D1/de not_active Expired
- 1981-11-11 EP EP81305349A patent/EP0052982B1/de not_active Expired
- 1981-11-13 US US06/321,322 patent/US4803529A/en not_active Expired - Lifetime
-
1988
- 1988-05-12 US US07/193,079 patent/US4910565A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0052982A2 (de) | 1982-06-02 |
US4910565A (en) | 1990-03-20 |
EP0052982A3 (en) | 1983-05-25 |
US4803529A (en) | 1989-02-07 |
EP0052982B1 (de) | 1986-08-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP |
|
8328 | Change in the person/name/address of the agent |
Free format text: EITLE, W., DIPL.-ING. HOFFMANN, K., DIPL.-ING. DR.RER.NAT. LEHN, W., DIPL.-ING. FUECHSLE, K., DIPL.-ING. HANSEN, B., DIPL.-CHEM. DR.RER.NAT. BRAUNS, H., DIPL.-CHEM. DR.RER.NAT. GOERG, K., DIPL.-ING. KOHLMANN, K., DIPL.-ING., PAT.-ANW. NETTE, A., RECHTSANW., 8000 MUENCHEN |
|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) |