DE3271000D1 - Gasborne stage positioner for two directions x and y - Google Patents
Gasborne stage positioner for two directions x and yInfo
- Publication number
- DE3271000D1 DE3271000D1 DE8282304332T DE3271000T DE3271000D1 DE 3271000 D1 DE3271000 D1 DE 3271000D1 DE 8282304332 T DE8282304332 T DE 8282304332T DE 3271000 T DE3271000 T DE 3271000T DE 3271000 D1 DE3271000 D1 DE 3271000D1
- Authority
- DE
- Germany
- Prior art keywords
- gasborne
- directions
- stage positioner
- positioner
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70816—Bearings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0015—Orientation; Alignment; Positioning
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
- F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/304,228 US4417770A (en) | 1981-09-21 | 1981-09-21 | High vacuum compatible air bearing stage |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3271000D1 true DE3271000D1 (en) | 1986-06-12 |
Family
ID=23175616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8282304332T Expired DE3271000D1 (en) | 1981-09-21 | 1982-08-17 | Gasborne stage positioner for two directions x and y |
Country Status (6)
Country | Link |
---|---|
US (1) | US4417770A (de) |
EP (1) | EP0076566B1 (de) |
JP (1) | JPS5857516A (de) |
AU (1) | AU533593B2 (de) |
CA (1) | CA1164028A (de) |
DE (1) | DE3271000D1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6130346A (ja) * | 1984-07-23 | 1986-02-12 | Omron Tateisi Electronics Co | 静圧空気浮上ステ−ジ |
US4655604A (en) * | 1985-08-15 | 1987-04-07 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Planar oscillatory stirring apparatus |
US5160883A (en) * | 1989-11-03 | 1992-11-03 | John H. Blanz Company, Inc. | Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support |
US5166606A (en) * | 1989-11-03 | 1992-11-24 | John H. Blanz Company, Inc. | High efficiency cryogenic test station |
US5077523A (en) * | 1989-11-03 | 1991-12-31 | John H. Blanz Company, Inc. | Cryogenic probe station having movable chuck accomodating variable thickness probe cards |
US5228358A (en) * | 1990-02-21 | 1993-07-20 | Canon Kabushiki Kaisha | Motion guiding device |
US5672816A (en) * | 1992-03-13 | 1997-09-30 | Park Scientific Instruments | Large stage system for scanning probe microscopes and other instruments |
US5784925A (en) * | 1996-12-13 | 1998-07-28 | Etec Systems, Inc. | Vacuum compatible linear motion device |
JP4354039B2 (ja) * | 1999-04-02 | 2009-10-28 | 東京エレクトロン株式会社 | 駆動装置 |
NL1015738C2 (nl) * | 1999-07-28 | 2002-10-15 | Kyocera Corp | Schuifapparaat en bijbehorend platformmechanisme voor gebruik in vacu³m. |
US6467960B1 (en) | 2000-08-18 | 2002-10-22 | Nikon Corporation | Air bearing linear guide for use in a vacuum |
US6753534B2 (en) | 2000-12-08 | 2004-06-22 | Nikon Corporation | Positioning stage with stationary and movable magnet tracks |
US20030230729A1 (en) * | 2000-12-08 | 2003-12-18 | Novak W. Thomas | Positioning stage with stationary and movable magnet tracks |
US20020104453A1 (en) * | 2001-02-02 | 2002-08-08 | Martin Lee | Air bearing assembly |
US20060124864A1 (en) * | 2004-12-14 | 2006-06-15 | Nikon Corporation | Air bearing compatible with operation in a vacuum |
US20100116139A1 (en) * | 2008-11-11 | 2010-05-13 | Chang-Cheng Ho | Chain protector for a linear motion processing machine |
KR101992248B1 (ko) * | 2017-11-13 | 2019-06-24 | 한국항공우주연구원 | 열진공 시험용 광학 벤치 이송 시스템 및 이송 장치 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1220228B (de) * | 1962-05-09 | 1966-06-30 | Rheinstahl Henschel Ag | Hydrostatische Lagerung von beweglichen Maschinenteilen an Werkzeugmaschinen |
US3218108A (en) * | 1962-10-11 | 1965-11-16 | Link Division Of General Prec | Precision positioning apparatus |
US3209623A (en) * | 1962-10-15 | 1965-10-05 | Schardt Rudolf | Pneumatic positioning table |
US3520055A (en) * | 1967-04-26 | 1970-07-14 | Western Electric Co | Method for holding workpieces for radiant energy bonding |
US3803924A (en) * | 1971-10-04 | 1974-04-16 | Bendix Corp | Liquid hydrostatic gyro gimbal support |
GB1447284A (en) * | 1973-10-04 | 1976-08-25 | Chrysler Uk | Slide assemblies |
US4141456A (en) * | 1976-08-30 | 1979-02-27 | Rca Corp. | Apparatus and method for aligning wafers |
US4080009A (en) * | 1976-09-29 | 1978-03-21 | Giddings & Lewis, Inc. | Servostatic bearing system with variable stiffness |
US4191385A (en) * | 1979-05-15 | 1980-03-04 | Fox Wayne L | Vacuum-sealed gas-bearing assembly |
-
1981
- 1981-09-21 US US06/304,228 patent/US4417770A/en not_active Expired - Lifetime
-
1982
- 1982-06-28 CA CA000406167A patent/CA1164028A/en not_active Expired
- 1982-07-06 JP JP57117659A patent/JPS5857516A/ja active Granted
- 1982-08-17 DE DE8282304332T patent/DE3271000D1/de not_active Expired
- 1982-08-17 EP EP82304332A patent/EP0076566B1/de not_active Expired
- 1982-08-24 AU AU87560/82A patent/AU533593B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
EP0076566B1 (de) | 1986-05-07 |
JPS5857516A (ja) | 1983-04-05 |
US4417770A (en) | 1983-11-29 |
EP0076566A1 (de) | 1983-04-13 |
AU8756082A (en) | 1983-03-31 |
JPS6243820B2 (de) | 1987-09-17 |
AU533593B2 (en) | 1983-12-01 |
CA1164028A (en) | 1984-03-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |