DE3276553D1 - Silicon-glass-silicon capacitive pressure transducer - Google Patents

Silicon-glass-silicon capacitive pressure transducer

Info

Publication number: DE3276553D1
Authority: DE; Germany
Prior art keywords: silicon; glass; pressure transducer; capacitive pressure; silicon capacitive
Prior art date: 1981-10-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

DE8282903396T

Other languages

English (en)

Inventor

James L Swindal

Daniel H Grantham

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Breed Automotive Technology Inc

Original Assignee

United Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-10-13

Filing date

1982-09-30

Publication date

1987-07-16

1982-09-30 Application filed by United Technologies Corp filed Critical United Technologies Corp

1987-07-16 Application granted granted Critical

1987-07-16 Publication of DE3276553D1 publication Critical patent/DE3276553D1/de

Status Expired legal-status Critical Current

Links

229910052710 silicon Inorganic materials 0.000 title 1
239000010703 silicon Substances 0.000 title 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

DE8282903396T 1981-10-13 1982-09-30 Silicon-glass-silicon capacitive pressure transducer Expired DE3276553D1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US06/310,598 US4405970A (en)	1981-10-13	1981-10-13	Silicon-glass-silicon capacitive pressure transducer
PCT/US1982/001406 WO1983001536A1 (en)	1981-10-13	1982-09-30	Silicon-glass-silicon capacitive pressure transducer

Publications (1)

Publication Number	Publication Date
DE3276553D1 true DE3276553D1 (en)	1987-07-16

Family

ID=23203256

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8282903396T Expired DE3276553D1 (en)	1981-10-13	1982-09-30	Silicon-glass-silicon capacitive pressure transducer

Country Status (12)

Country	Link
US (1)	US4405970A (de)
EP (1)	EP0090845B1 (de)
JP (1)	JPS58501697A (de)
AU (1)	AU560246B2 (de)
BR (1)	BR8207904A (de)
CA (1)	CA1185454A (de)
DE (1)	DE3276553D1 (de)
DK (1)	DK247283A (de)
GR (1)	GR76713B (de)
IE (1)	IE53532B1 (de)
IT (1)	IT1153238B (de)
WO (1)	WO1983001536A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5855732A (ja) *	1981-09-30	1983-04-02	Hitachi Ltd	静電容量型圧力センサ
US4527428A (en) *	1982-12-30	1985-07-09	Hitachi, Ltd.	Semiconductor pressure transducer
US4513348A (en) *	1984-01-13	1985-04-23	United Technologies Corporation	Low parasitic capacitance pressure transducer and etch stop method
US4530029A (en) *	1984-03-12	1985-07-16	United Technologies Corporation	Capacitive pressure sensor with low parasitic capacitance
FI842307A (fi) *	1984-06-07	1985-12-08	Vaisala Oy	Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI75426C (fi) *	1984-10-11	1988-06-09	Vaisala Oy	Absoluttryckgivare.
US4586109A (en) *	1985-04-01	1986-04-29	Bourns Instruments, Inc.	Batch-process silicon capacitive pressure sensor
US4743836A (en) *	1985-12-06	1988-05-10	United Technologies Corporation	Capacitive circuit for measuring a parameter having a linear output voltage
US4730496A (en) *	1986-06-23	1988-03-15	Rosemount Inc.	Capacitance pressure sensor
JP2570420B2 (ja) *	1988-06-23	1997-01-08	富士電機株式会社	静電容量式圧力検出器
US4951174A (en) *	1988-12-30	1990-08-21	United Technologies Corporation	Capacitive pressure sensor with third encircling plate
US4998179A (en) *	1989-02-28	1991-03-05	United Technologies Corporation	Capacitive semiconductive sensor with hinged diaphragm for planar movement
US5245504A (en) *	1989-02-28	1993-09-14	United Technologies Corporation	Methodology for manufacturing hinged diaphragms for semiconductor sensors
US5009690A (en) *	1990-03-09	1991-04-23	The United States Of America As Represented By The United States Department Of Energy	Method of bonding single crystal quartz by field-assisted bonding
US5155061A (en) *	1991-06-03	1992-10-13	Allied-Signal Inc.	Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
FR2701564B1 (fr) *	1993-02-12	1995-05-19	Suisse Electronique Microtech	Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs.
US5444901A (en) *	1993-10-25	1995-08-29	United Technologies Corporation	Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
US5440931A (en) *	1993-10-25	1995-08-15	United Technologies Corporation	Reference element for high accuracy silicon capacitive pressure sensor
US5375034A (en) *	1993-12-02	1994-12-20	United Technologies Corporation	Silicon capacitive pressure sensor having a glass dielectric deposited using ion milling
US5381299A (en) *	1994-01-28	1995-01-10	United Technologies Corporation	Capacitive pressure sensor having a substrate with a curved mesa
US5448444A (en) *	1994-01-28	1995-09-05	United Technologies Corporation	Capacitive pressure sensor having a reduced area dielectric spacer
US5578843A (en) *	1994-10-06	1996-11-26	Kavlico Corporation	Semiconductor sensor with a fusion bonded flexible structure
US5535626A (en) *	1994-12-21	1996-07-16	Breed Technologies, Inc.	Sensor having direct-mounted sensing element
US5600072A (en) *	1995-06-23	1997-02-04	Motorola, Inc.	Capacitive pressure sensor and method for making the same
US5966617A (en) *	1996-09-20	1999-10-12	Kavlico Corporation	Multiple local oxidation for surface micromachining
US6324914B1 (en)	1997-03-20	2001-12-04	Alliedsignal, Inc.	Pressure sensor support base with cavity
US6058780A (en) *	1997-03-20	2000-05-09	Alliedsignal Inc.	Capacitive pressure sensor housing having a ceramic base
US6678927B1 (en) *	1997-11-24	2004-01-20	Avx Corporation	Miniature surface mount capacitor and method of making same
US6387318B1 (en)	1997-12-05	2002-05-14	Alliedsignal, Inc.	Glass-ceramic pressure sensor support base and its fabrication
JP3771425B2 (ja)	2000-07-04	2006-04-26	株式会社山武	容量式圧力センサおよびその製造方法
WO2002008712A1 (de) *	2000-07-26	2002-01-31	Endress + Hauser Gmbh + Co. Kg	Kapazitiver drucksensor
US7028551B2 (en) *	2004-06-18	2006-04-18	Kavlico Corporation	Linearity semi-conductive pressure sensor
US7683444B2 (en) *	2005-09-30	2010-03-23	The United States Of America As Represented By The Secretary Of The Navy	Metamaterial structure has resonant and strip line elements comprising a photoconductive semiconductor material formed on substrate to induce negative permeability and negative permittivity in operating frequency range
US7345867B2 (en)	2005-11-18	2008-03-18	Alps Electric Co., Ltd	Capacitive pressure sensor and method of manufacturing the same
US9837935B2 (en)	2013-10-29	2017-12-05	Honeywell International Inc.	All-silicon electrode capacitive transducer on a glass substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3634727A (en) *	1968-12-03	1972-01-11	Bendix Corp	Capacitance-type pressure transducer
US3965746A (en) *	1974-11-04	1976-06-29	Teledyne Industries, Inc.	Pressure transducer
US4168518A (en) *	1977-05-10	1979-09-18	Lee Shih Y	Capacitor transducer
US4168517A (en) *	1977-11-10	1979-09-18	Lee Shih Y	Capacitive pressure transducer
US4287553A (en) *	1980-06-06	1981-09-01	The Bendix Corporation	Capacitive pressure transducer

1981
- 1981-10-13 US US06/310,598 patent/US4405970A/en not_active Expired - Lifetime
1982
- 1982-09-30 DE DE8282903396T patent/DE3276553D1/de not_active Expired
- 1982-09-30 BR BR8207904A patent/BR8207904A/pt not_active IP Right Cessation
- 1982-09-30 WO PCT/US1982/001406 patent/WO1983001536A1/en active IP Right Grant
- 1982-09-30 JP JP57503363A patent/JPS58501697A/ja active Pending
- 1982-09-30 EP EP82903396A patent/EP0090845B1/de not_active Expired
- 1982-10-08 CA CA000413169A patent/CA1185454A/en not_active Expired
- 1982-10-11 IE IE2453/82A patent/IE53532B1/en not_active IP Right Cessation
- 1982-10-11 GR GR69502A patent/GR76713B/el unknown
- 1982-10-13 IT IT23728/82A patent/IT1153238B/it active
1983
- 1983-02-17 AU AU11630/83A patent/AU560246B2/en not_active Ceased
- 1983-06-01 DK DK247283A patent/DK247283A/da not_active Application Discontinuation

Also Published As

Publication number	Publication date
AU1163083A (en)	1984-08-23
DK247283D0 (da)	1983-06-01
AU560246B2 (en)	1987-04-02
EP0090845A1 (de)	1983-10-12
IE53532B1 (en)	1988-12-07
DK247283A (da)	1983-06-01
IE822453L (en)	1983-04-13
EP0090845B1 (de)	1987-06-10
US4405970A (en)	1983-09-20
GR76713B (de)	1984-08-29
JPS58501697A (ja)	1983-10-06
IT8223728A0 (it)	1982-10-13
CA1185454A (en)	1985-04-16
WO1983001536A1 (en)	1983-04-28
EP0090845A4 (de)	1984-11-22
IT1153238B (it)	1987-01-14
BR8207904A (pt)	1983-09-13

Legal Events

Date	Code	Title	Description
1988-07-14	8364	No opposition during term of opposition
1999-08-26	8327	Change in the person/name/address of the patent owner	Owner name: BREED AUTOMOTIVE TECHNOLOGY, INC., LAKELAND, FLA.,
1999-08-26	8328	Change in the person/name/address of the agent	Free format text: HENKEL, FEILER & HAENZEL, 81675 MUENCHEN

Publication	Publication Date	Title
DE3263468D1 (en)	1985-06-20	Capacitive pressure transducer
DE3276553D1 (en)	1987-07-16	Silicon-glass-silicon capacitive pressure transducer
DE3166692D1 (en)	1984-11-22	Capacitive pressure transducer
AU560245B2 (en)	1987-04-02	Silicon-glass-silicon capacitive pressure transducer
DE3374432D1 (en)	1987-12-17	Capacitive pressure transducer
HK89885A (en)	1985-11-22	Capacitive pressure transducer
JPS5764978A (en)	1982-04-20	Capacitive pressure transducer
GB2102959B (en)	1985-01-16	Linear capacitive pressure transducer system
DE3375513D1 (en)	1988-03-03	Multiple range capacitive pressure transducer
JPS57182614A (en)	1982-11-10	Capacitive transducer
GB2112605B (en)	1985-08-29	A capacitive transducer
IL66234A (en)	1986-02-28	Capacitance pressure sensor
JPS57149933A (en)	1982-09-16	Capacitive pressure sensor
DE3269818D1 (en)	1986-04-17	Variable capacitance pressure transducer
ZA852233B (en)	1986-05-28	Linearized capacitive pressure transducer
DE3462379D1 (en)	1987-03-19	Capacitive pressure sensor
DE3376506D1 (en)	1988-06-09	Capacitive differential-pressure transducer
GB2059071B (en)	1983-07-06	Capacitive pressure transducer
GB2118724B (en)	1986-09-24	Pressure transducer
GB8809220D0 (en)	1988-05-25	Capacitive pressure transducer
GB2159957B (en)	1988-01-20	Capacitive pressure transducers
GB2114742B (en)	1985-12-04	Pressure transducer
GB2091883B (en)	1984-04-26	Differential pressure transducer
IL62654A0 (en)	1981-06-29	Pressure transducer
GB2124770B (en)	1985-12-11	Differential capacitance pressure transducer