DE3367903D1 - Fabrication of preforms for optical fibers by chemical vapor deposition using a plasma torch - Google Patents

Fabrication of preforms for optical fibers by chemical vapor deposition using a plasma torch

Info

Publication number
DE3367903D1
DE3367903D1 DE8383105736T DE3367903T DE3367903D1 DE 3367903 D1 DE3367903 D1 DE 3367903D1 DE 8383105736 T DE8383105736 T DE 8383105736T DE 3367903 T DE3367903 T DE 3367903T DE 3367903 D1 DE3367903 D1 DE 3367903D1
Authority
DE
Germany
Prior art keywords
plasma
chemical vapor
vapor deposition
ring
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383105736T
Other languages
English (en)
Inventor
Dilip Kumar Nath
Pablo Capco Pureza
Shin Moo Oh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent NV
Original Assignee
International Standard Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Standard Electric Corp filed Critical International Standard Electric Corp
Application granted granted Critical
Publication of DE3367903D1 publication Critical patent/DE3367903D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C03B37/01426—Plasma deposition burners or torches
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/28—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/15—Nonoxygen containing chalogenides
    • Y10S65/16—Optical filament or fiber treatment with fluorine or incorporating fluorine in final product
DE8383105736T 1982-06-14 1983-06-11 Fabrication of preforms for optical fibers by chemical vapor deposition using a plasma torch Expired DE3367903D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/387,983 US4440558A (en) 1982-06-14 1982-06-14 Fabrication of optical preforms by axial chemical vapor deposition

Publications (1)

Publication Number Publication Date
DE3367903D1 true DE3367903D1 (en) 1987-01-15

Family

ID=23532129

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383105736T Expired DE3367903D1 (en) 1982-06-14 1983-06-11 Fabrication of preforms for optical fibers by chemical vapor deposition using a plasma torch

Country Status (7)

Country Link
US (1) US4440558A (de)
EP (1) EP0096878B1 (de)
JP (1) JPS593036A (de)
AT (1) ATE23848T1 (de)
DE (1) DE3367903D1 (de)
NO (1) NO154667C (de)
ZA (1) ZA833270B (de)

Families Citing this family (36)

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DE3326043A1 (de) * 1983-07-20 1985-02-07 Licentia Gmbh Verfahren zur herstellung eines aerosolstromes und dessen verwendung
US4554078A (en) * 1984-05-21 1985-11-19 At&T Technologies, Inc. Methods of and apparatus for effluent disposal
GB2162168B (en) * 1984-07-25 1988-06-29 Stc Plc Optical fibre manufacture
DE3427323A1 (de) * 1984-07-25 1986-03-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung eines aerosolstromes
DE3434674A1 (de) * 1984-09-21 1986-04-03 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung eines aerosolstromes
US4761170A (en) * 1985-06-20 1988-08-02 Polaroid Corporation Method for employing plasma in dehydration and consolidation of preforms
US4810674A (en) * 1987-02-24 1989-03-07 Hoechst Celanese Corp. Porous glass monoliths
JPH0741637Y2 (ja) * 1987-05-18 1995-09-27 日産自動車株式会社 ガ−ニッシュモ−ルデイング端末処理構造
FR2714371B1 (fr) * 1993-12-24 1996-02-16 Cabloptic Sa Procédé de recharge d'une préforme de fibre optique, dispositif pour la mise en Óoeuvre de ce procédé et fibre optique par ce procédé.
US5665424A (en) * 1994-03-11 1997-09-09 Sherman; Dan Method for making glass articles having a permanent protective coating
US5723172A (en) * 1994-03-11 1998-03-03 Dan Sherman Method for forming a protective coating on glass
GB2346683A (en) * 1999-02-05 2000-08-16 Univ Glasgow Flame hydrolysis deposition burner
FR2795715B1 (fr) * 1999-07-01 2002-03-15 Cit Alcatel Procede pour le glacage de la surface externe d'une preforme de fibre optique et installation de production de preformes mettant en oeuvre ce procede
DE10054270B4 (de) * 2000-11-02 2006-02-16 Schott Ag Verfahren zur Herstellung von Photomaskensubstraten
US7510664B2 (en) * 2001-01-30 2009-03-31 Rapt Industries, Inc. Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
US7591957B2 (en) * 2001-01-30 2009-09-22 Rapt Industries, Inc. Method for atmospheric pressure reactive atom plasma processing for surface modification
US8047023B2 (en) * 2001-04-27 2011-11-01 Corning Incorporated Method for producing titania-doped fused silica glass
US20020185331A1 (en) * 2001-06-12 2002-12-12 Deslauriers Richard J. Tunable stethoscope head assembly
US6807350B2 (en) * 2001-07-17 2004-10-19 Verrillon, Inc. Optical fiber with a radially varying index of refraction and related methods
US6660177B2 (en) * 2001-11-07 2003-12-09 Rapt Industries Inc. Apparatus and method for reactive atom plasma processing for material deposition
FR2834286B1 (fr) * 2002-01-03 2004-11-05 Cit Alcatel Dispositif pour la recharge de preforme pour fibre optique
US20040187525A1 (en) * 2003-03-31 2004-09-30 Coffey Calvin T. Method and apparatus for making soot
US20050022561A1 (en) * 2003-08-01 2005-02-03 Guskov Michael I. Ring plasma jet method and apparatus for making an optical fiber preform
US7793612B2 (en) * 2003-08-01 2010-09-14 Silica Tech, Llc Ring plasma jet method and apparatus for making an optical fiber preform
US7297892B2 (en) * 2003-08-14 2007-11-20 Rapt Industries, Inc. Systems and methods for laser-assisted plasma processing
US7304263B2 (en) * 2003-08-14 2007-12-04 Rapt Industries, Inc. Systems and methods utilizing an aperture with a reactive atom plasma torch
KR20060098740A (ko) * 2005-03-07 2006-09-19 삼성전자주식회사 플라즈마 장치와 그를 이용한 광섬유 모재 제작 장치
FR2895396B1 (fr) * 2005-12-23 2008-02-22 Draka Comteq France Procede de fabrication d'une preforme de fibre optique
WO2007079127A2 (en) * 2005-12-29 2007-07-12 Silica Tech, Llc Plasma torch for making synthetic silica
US20100189926A1 (en) * 2006-04-14 2010-07-29 Deluca Charles Plasma deposition apparatus and method for making high purity silicon
JP2010064915A (ja) * 2008-09-09 2010-03-25 Shin-Etsu Chemical Co Ltd 光ファイバ母材の製造方法
DE102008063299B4 (de) * 2008-12-29 2012-12-06 J-Fiber Gmbh Verfahren zur Herstellung eines kompakten synthetischen Quarzglases, ein Muffelofen zur Durchführung des Verfahrens, sowie das damit erhaltene Quarzglas
GB2478307A (en) * 2010-03-02 2011-09-07 Heraeus Quartz Uk Ltd Manufacture of silica glass
US9221709B2 (en) * 2011-03-31 2015-12-29 Raytheon Company Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same
US9193620B2 (en) 2011-03-31 2015-11-24 Raytheon Company Fused silica body with vitreous silica inner layer, and method for making same
CN105502897B (zh) * 2016-01-12 2018-08-24 中国建筑材料科学研究总院 超纯石英玻璃的制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
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US30883A (en) * 1860-12-11 Improvement in corn-planters
NL165134B (nl) * 1974-04-24 1980-10-15 Nippon Telegraph & Telephone Werkwijze voor de vervaardiging van een staaf als tussenprodukt voor de vervaardiging van een optische vezel en werkwijze voor de vervaardiging van een optische vezel uit zulk een tussenprodukt.
US4135901A (en) * 1974-12-18 1979-01-23 Sumitomo Electric Industries, Ltd. Method of manufacturing glass for optical waveguide
CH620181A5 (en) * 1975-08-16 1980-11-14 Heraeus Schott Quarzschmelze Process for the preparation of synthetic quartz glass, apparatus to carry out the process, and the use of the synthetic quartz glass
US3966446A (en) * 1975-10-23 1976-06-29 Bell Telephone Laboratories, Incorporated Axial fabrication of optical fibers
US4017288A (en) * 1975-12-15 1977-04-12 Bell Telephone Laboratories, Incorporated Method for making optical fibers with helical gradations in composition
JPS52121341A (en) * 1976-04-06 1977-10-12 Nippon Telegr & Teleph Corp <Ntt> Production of optical fiber base materials and production apparatus fo r the same
FR2351064A1 (fr) * 1976-05-12 1977-12-09 France Etat Procede et equipement d'elaboration de preformes pour fibres optiques
GB2002342B (en) * 1977-07-27 1982-06-30 Sumitomo Electric Industries Process for producing a glass member
JPS5927728B2 (ja) * 1977-08-11 1984-07-07 日本電信電話株式会社 煤状ガラスロッドの製造方法
JPS6034504B2 (ja) * 1977-10-19 1985-08-09 株式会社日立製作所 光フアイバの製造方法
JPS54151625A (en) * 1978-05-17 1979-11-29 Nippon Telegr & Teleph Corp <Ntt> Torch for synthesizing glass fine particles
US4230472A (en) * 1979-02-22 1980-10-28 Corning Glass Works Method of forming a substantially continuous optical waveguide
US4242118A (en) * 1979-04-27 1980-12-30 International Standard Electric Corporation Optical fiber manufacture

Also Published As

Publication number Publication date
EP0096878A1 (de) 1983-12-28
JPS593036A (ja) 1984-01-09
NO154667C (no) 1986-11-26
NO154667B (no) 1986-08-18
ATE23848T1 (de) 1986-12-15
US4440558A (en) 1984-04-03
EP0096878B1 (de) 1986-11-26
JPS6124339B2 (de) 1986-06-10
ZA833270B (en) 1984-01-25
NO832069L (no) 1983-12-15

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ALCATEL N.V., AMSTERDAM, NL

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee