DE3377527D1 - Method and apparatus for inspecting plated through holes in printed circuit boards - Google Patents

Method and apparatus for inspecting plated through holes in printed circuit boards

Info

Publication number
DE3377527D1
DE3377527D1 DE8383307291T DE3377527T DE3377527D1 DE 3377527 D1 DE3377527 D1 DE 3377527D1 DE 8383307291 T DE8383307291 T DE 8383307291T DE 3377527 T DE3377527 T DE 3377527T DE 3377527 D1 DE3377527 D1 DE 3377527D1
Authority
DE
Germany
Prior art keywords
holes
printed circuit
circuit boards
inspecting
plated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383307291T
Other languages
English (en)
Inventor
Moritoshi Ando
Kikuo Mita
Yoshikazu Kakinoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP57210110A external-priority patent/JPS5999364A/ja
Priority claimed from JP22837682A external-priority patent/JPS59126235A/ja
Priority claimed from JP22837582A external-priority patent/JPS59126234A/ja
Priority claimed from JP22836982A external-priority patent/JPS59126233A/ja
Priority claimed from JP22867382A external-priority patent/JPS59125694A/ja
Priority claimed from JP22867282A external-priority patent/JPS59125693A/ja
Priority claimed from JP22867682A external-priority patent/JPS59125695A/ja
Priority claimed from JP1139683A external-priority patent/JPS59150329A/ja
Priority claimed from JP1139483A external-priority patent/JPS59150327A/ja
Priority claimed from JP1139583A external-priority patent/JPS59150328A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of DE3377527D1 publication Critical patent/DE3377527D1/de
Application granted granted Critical
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures
DE8383307291T 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards Expired DE3377527D1 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP57210110A JPS5999364A (ja) 1982-11-30 1982-11-30 スル−ホ−ル検査装置
JP22837582A JPS59126234A (ja) 1982-12-27 1982-12-27 プリント板のスル−ホ−ル検査装置
JP22836982A JPS59126233A (ja) 1982-12-27 1982-12-27 プリント板のスルーホール検査方法及びその装置
JP22837682A JPS59126235A (ja) 1982-12-27 1982-12-27 プリント板のスル−ホ−ル検査装置
JP22867382A JPS59125694A (ja) 1982-12-28 1982-12-28 プリント板のスル−ホ−ル検査装置
JP22867282A JPS59125693A (ja) 1982-12-28 1982-12-28 スルーホール検査法及びその検査装置
JP22867682A JPS59125695A (ja) 1982-12-28 1982-12-28 プリント板のスル−ホ−ル検査装置
JP1139683A JPS59150329A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置
JP1139483A JPS59150327A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置
JP1139583A JPS59150328A (ja) 1983-01-28 1983-01-28 スル−ホ−ル検査装置

Publications (1)

Publication Number Publication Date
DE3377527D1 true DE3377527D1 (en) 1988-09-01

Family

ID=27579612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383307291T Expired DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Country Status (3)

Country Link
US (1) US4560273A (de)
EP (1) EP0111404B1 (de)
DE (1) DE3377527D1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0195161B1 (de) * 1985-03-14 1993-09-15 Nikon Corporation Gerät und Verfahren zum selbsttätigen Inspizieren von Objekten und zum Identifizieren oder Erkennen bekannter und unbekannter Teile davon, einschliesslich Fehler und dergleichen
KR900007548B1 (ko) * 1985-10-04 1990-10-15 다이닛뽕스쿠링세이소오 가부시키가이샤 패턴 마스킹 방법 및 그 장치
JPH0785128B2 (ja) * 1986-01-14 1995-09-13 三晃技研工業株式会社 細孔内壁内視方法およびその装置
EP0254200A1 (de) * 1986-07-18 1988-01-27 Siemens Aktiengesellschaft Verfahren zum Prüfen auf fehlerhafte durchkontaktierte Bohrungen bei gedruckten Leiterplatten
FR2619927A1 (fr) * 1987-08-28 1989-03-03 Primat Didier Procede de verification des trous metallises d'une carte de circuit imprime multicouche et dispositif de mise en oeuvre
US4963752A (en) * 1988-12-30 1990-10-16 Honeywell Inc. Method for detecting missing circuit board components
JPH0612253B2 (ja) * 1989-03-01 1994-02-16 日本碍子株式会社 ハニカム成形用口金の検査方法
US5198878A (en) * 1990-11-30 1993-03-30 International Business Machines Corporation Substrate machining verifier
DE4110441A1 (de) * 1991-03-27 1992-10-01 Schneider Klaus Verfahren zur messung des gegenseitigen versatzes der lagen einer multilayer-anordnung und vorrichtung zur durchfuehrung dieses verfahrens
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination
FR2716260B1 (fr) * 1994-02-16 1996-04-05 Sochata Energy 1 Soc Procédé et dispositif de contrôle de nids d'abeilles à l'aide de fibres optiques.
US6122048A (en) * 1994-08-26 2000-09-19 Pressco Technology Inc. Integral field lens illumination for video inspection
US5592286A (en) * 1995-03-08 1997-01-07 Alltrista Corporation Container flange inspection system using an annular lens
US5699152A (en) * 1995-04-03 1997-12-16 Alltrista Corporation Electro-optical inspection system and method
IES20000356A2 (en) * 1999-05-14 2001-02-07 Mv Res Ltd A microvia inspection system
JP4507304B2 (ja) * 1999-08-24 2010-07-21 コニカミノルタホールディングス株式会社 変位測定装置
JP2001119006A (ja) * 1999-10-19 2001-04-27 Sony Corp 撮像デバイス及びその製造方法
AU2751101A (en) * 1999-11-05 2001-05-30 Midas Vision Sysems, Inc. Via inspection in optical inspection system
US6384911B1 (en) * 2000-09-19 2002-05-07 Machvision, Inc. Apparatus and method for detecting accuracy of drill holes on a printed circuit board
JP2003130799A (ja) * 2001-10-26 2003-05-08 Ccs Inc 検査用照明装置
DE20119887U1 (de) * 2001-12-07 2003-04-10 Bosch Gmbh Robert Vorrichtung zur optischen Vermessung von Bohrungen
JP3941609B2 (ja) * 2002-07-03 2007-07-04 株式会社デンソー 多層基板形成用素板の検査装置及び検査方法
US6963396B2 (en) * 2003-06-27 2005-11-08 Meyer Tool, Inc. Light hole inspection system for engine component
US7379185B2 (en) * 2004-11-01 2008-05-27 Applied Materials, Inc. Evaluation of openings in a dielectric layer
JP4391545B2 (ja) * 2007-03-30 2009-12-24 日立ビアメカニクス株式会社 ワーク加工機
IT1394190B1 (it) * 2009-05-15 2012-06-01 Gd Spa Metodo e dispositivo di controllo della integrità di un foglio di incarto multistrato in corrispondenza di una incisione parziale.
US8509272B2 (en) * 2009-06-10 2013-08-13 Lee Laser, Inc. Laser beam combining and power scaling device
US9201015B2 (en) 2011-07-14 2015-12-01 International Business Machines Corporation Plated through hole void detection in printed circuit boards by detecting a pH-sensitive component
TWI467125B (zh) * 2012-09-24 2015-01-01 Ind Tech Res Inst 量測系統與量測方法
CN106813815B (zh) * 2015-11-27 2019-03-01 苏州市亿利华电子有限公司 一种pcb板对位自动检测装置
TWI745645B (zh) * 2018-12-21 2021-11-11 由田新技股份有限公司 單側及雙側式檢測系統及成對反射鏡組裝置
US11112351B2 (en) 2019-09-16 2021-09-07 International Business Machines Corporation Partial submersion testing for plating defects
US11162889B2 (en) 2019-09-16 2021-11-02 International Business Machines Corporation Non-destructive testing for plating defects

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3698821A (en) * 1971-08-19 1972-10-17 Burroughs Corp Method and apparatus for inspecting plated-through printed circuit board holes
US4145714A (en) * 1978-02-27 1979-03-20 Robert W. MacDonald Television flaw detector for inspecting the wall surface of a hole through a circuit board
DE2808359C3 (de) * 1978-02-27 1980-09-04 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Suchgerät für Löcher in Bahnen
US4447152A (en) * 1981-12-24 1984-05-08 Ibm Corp. Method and apparatus for detecting defects in apertured plates

Also Published As

Publication number Publication date
EP0111404B1 (de) 1988-07-27
EP0111404A3 (en) 1985-01-16
US4560273A (en) 1985-12-24
EP0111404A2 (de) 1984-06-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee