DE3668882D1 - Gasreaktionsvorrichtung und mehrwandrohrtypbrenner dafuer. - Google Patents

Gasreaktionsvorrichtung und mehrwandrohrtypbrenner dafuer.

Info

Publication number
DE3668882D1
DE3668882D1 DE8686101513T DE3668882T DE3668882D1 DE 3668882 D1 DE3668882 D1 DE 3668882D1 DE 8686101513 T DE8686101513 T DE 8686101513T DE 3668882 T DE3668882 T DE 3668882T DE 3668882 D1 DE3668882 D1 DE 3668882D1
Authority
DE
Germany
Prior art keywords
dafuer
reaction device
tube type
gas reaction
wall tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686101513T
Other languages
English (en)
Inventor
Hiroaki C O Yokohama Takimoto
Ichiro C O Yokohama W Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1985014629U external-priority patent/JPS61133527U/ja
Priority claimed from JP2842585A external-priority patent/JPS61191533A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE3668882D1 publication Critical patent/DE3668882D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/81—Constructional details of the feed line, e.g. heating, insulation, material, manifolds, filters
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/87—Controlling the temperature
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • C03B2207/88—Controlling the pressure
DE8686101513T 1985-02-06 1986-02-06 Gasreaktionsvorrichtung und mehrwandrohrtypbrenner dafuer. Expired - Lifetime DE3668882D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1985014629U JPS61133527U (de) 1985-02-06 1985-02-06
JP2842585A JPS61191533A (ja) 1985-02-18 1985-02-18 ガス反応装置

Publications (1)

Publication Number Publication Date
DE3668882D1 true DE3668882D1 (de) 1990-03-15

Family

ID=26350610

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686101513T Expired - Lifetime DE3668882D1 (de) 1985-02-06 1986-02-06 Gasreaktionsvorrichtung und mehrwandrohrtypbrenner dafuer.

Country Status (4)

Country Link
US (1) US4661140A (de)
EP (1) EP0190748B1 (de)
AU (1) AU583588B2 (de)
DE (1) DE3668882D1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61254242A (ja) * 1985-05-01 1986-11-12 Sumitomo Electric Ind Ltd 原料供給装置
GB2210613B (en) * 1987-09-25 1991-08-14 Gen Electric Co Plc Manufacture of optical fibre preforms
JP3118822B2 (ja) * 1990-09-07 2000-12-18 住友電気工業株式会社 ガラス物品の製造方法
US6527865B1 (en) * 1997-09-11 2003-03-04 Applied Materials, Inc. Temperature controlled gas feedthrough
KR100346220B1 (ko) * 2000-09-05 2002-08-01 삼성전자 주식회사 광도파로 제조용 동축류 확산 화염 버너 장치
US7299659B2 (en) * 2000-12-19 2007-11-27 Prysmian Cavi E Sistemi Energia S.R.L. Method for manufacturing optical fiber preforms
US7441416B2 (en) * 2000-12-19 2008-10-28 Prysmian Cavi E Sistemi Energia S.R.L. Method for manufacturing optical fibre preforms
WO2002098805A1 (en) * 2001-05-30 2002-12-12 Pirelli & C. S.P.A. Method and burner for manufacturing a glass optical fibre preform by vapour deposition
JP2003226543A (ja) * 2002-02-01 2003-08-12 Fujikura Ltd 光ファイバ母材の製造方法およびこれを用いた光ファイバ母材製造用バーナ装置
DE60209718T2 (de) * 2002-05-03 2007-02-22 Prysmian Cavi E Sistemi Energia S.R.L. Brenneranordnung zur herstellung von vorformen aus glas und zugehöriges produktionsverfahren
DE60234393D1 (de) * 2002-12-20 2009-12-24 Prysmian Spa Brenner für die chemische gasphasenabscheidung von glas
JP2005194135A (ja) * 2004-01-07 2005-07-21 Shin Etsu Chem Co Ltd 光ファイバ用多孔質母材の製造方法及びガラス母材
US7112541B2 (en) * 2004-05-06 2006-09-26 Applied Materials, Inc. In-situ oxide capping after CVD low k deposition
US7273823B2 (en) * 2005-06-03 2007-09-25 Applied Materials, Inc. Situ oxide cap layer development
US8069690B2 (en) * 2005-12-16 2011-12-06 Ofs Fitel, Llc Apparatus and method for fabricating glass bodies using an aerosol delivery system
US8567214B2 (en) * 2010-06-28 2013-10-29 Asahi Glass Company, Limited Method for producing glass body and method for producing optical member for EUV lithography
JP5640920B2 (ja) * 2011-08-18 2014-12-17 信越化学工業株式会社 チタニアドープ石英ガラス及びその製造方法
JP6236866B2 (ja) * 2013-05-15 2017-11-29 住友電気工業株式会社 ガラス微粒子堆積体の製造方法およびガラス微粒子堆積体製造用バーナー
JP2017036172A (ja) * 2015-08-07 2017-02-16 株式会社フジクラ 光ファイバ母材の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52121341A (en) * 1976-04-06 1977-10-12 Nippon Telegr & Teleph Corp <Ntt> Production of optical fiber base materials and production apparatus fo r the same
US4042665A (en) * 1976-09-27 1977-08-16 Falconbridge Nickel Mines Limited Cobalt ion exchange process
JPS5927728B2 (ja) * 1977-08-11 1984-07-07 日本電信電話株式会社 煤状ガラスロッドの製造方法
JPS57100928A (en) * 1980-12-12 1982-06-23 Nippon Telegr & Teleph Corp <Ntt> Burner for preparing base material for optical fiber
AU545523B2 (en) * 1982-02-12 1985-07-18 Nippon Telegraph & Telephone Corporation Burner for optical fiber preform deposition
DE3417438A1 (de) * 1984-05-11 1985-11-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren und vorrichtung zur herstellung eines aerosolstromes
DE3420790A1 (de) * 1984-06-04 1985-12-05 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur herstellung einer vorform fuer lichtwellenleiter

Also Published As

Publication number Publication date
AU583588B2 (en) 1989-05-04
EP0190748B1 (de) 1990-02-07
US4661140A (en) 1987-04-28
AU5322386A (en) 1986-08-14
EP0190748A1 (de) 1986-08-13

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