DE3669542D1 - Automatische flexible vorrichtung fuer die durchfuehrung schneller thermochemischer behandlungen. - Google Patents

Automatische flexible vorrichtung fuer die durchfuehrung schneller thermochemischer behandlungen.

Info

Publication number
DE3669542D1
DE3669542D1 DE8686402329T DE3669542T DE3669542D1 DE 3669542 D1 DE3669542 D1 DE 3669542D1 DE 8686402329 T DE8686402329 T DE 8686402329T DE 3669542 T DE3669542 T DE 3669542T DE 3669542 D1 DE3669542 D1 DE 3669542D1
Authority
DE
Germany
Prior art keywords
parts
carrying
lock
flexible device
out fast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686402329T
Other languages
English (en)
Inventor
Jean Bourel
Denis Lebeaupin
Olivier Schweibel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fives Stein SA
Original Assignee
Stein Heurtey SA
Fives Stein SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stein Heurtey SA, Fives Stein SA filed Critical Stein Heurtey SA
Application granted granted Critical
Publication of DE3669542D1 publication Critical patent/DE3669542D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
DE8686402329T 1986-02-12 1986-10-16 Automatische flexible vorrichtung fuer die durchfuehrung schneller thermochemischer behandlungen. Expired - Lifetime DE3669542D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8601913A FR2594102B1 (fr) 1986-02-12 1986-02-12 Installation flexible automatisee de traitement thermochimique rapide

Publications (1)

Publication Number Publication Date
DE3669542D1 true DE3669542D1 (de) 1990-04-19

Family

ID=9332061

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8686402329T Expired - Lifetime DE3669542D1 (de) 1986-02-12 1986-10-16 Automatische flexible vorrichtung fuer die durchfuehrung schneller thermochemischer behandlungen.
DE198686402329T Pending DE236639T1 (de) 1986-02-12 1986-10-16 Automatische flexible vorrichtung fuer die durchfuehrung schneller thermochemischer behandlungen.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE198686402329T Pending DE236639T1 (de) 1986-02-12 1986-10-16 Automatische flexible vorrichtung fuer die durchfuehrung schneller thermochemischer behandlungen.

Country Status (11)

Country Link
US (1) US4790750A (de)
EP (1) EP0236639B1 (de)
JP (1) JPS62186187A (de)
KR (1) KR870008037A (de)
CN (1) CN1010418B (de)
AT (1) ATE51038T1 (de)
CA (1) CA1289357C (de)
DE (2) DE3669542D1 (de)
ES (1) ES2001286A6 (de)
FR (1) FR2594102B1 (de)
SU (1) SU1500151A3 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872834A (en) * 1988-11-09 1989-10-10 Williams Jr John W Recovery boiler port cleaner
FR2640999A1 (de) * 1988-12-27 1990-06-29 Stein Heurtey
FR2644567A1 (fr) * 1989-03-17 1990-09-21 Etudes Const Mecaniques Dispositif pour l'execution de traitements thermiques enchaines en continu sous vide
US5110248A (en) * 1989-07-17 1992-05-05 Tokyo Electron Sagami Limited Vertical heat-treatment apparatus having a wafer transfer mechanism
US5000682A (en) * 1990-01-22 1991-03-19 Semitherm Vertical thermal processor for semiconductor wafers
KR0161417B1 (ko) * 1995-07-11 1999-02-01 김광호 가스흐름이 개선된 종형확산로
JP3895000B2 (ja) * 1996-06-06 2007-03-22 Ｄｏｗａホールディングス株式会社 浸炭焼入焼戻方法及び装置
DE19829825C2 (de) * 1997-07-07 2002-10-10 Ntn Toyo Bearing Co Ltd Karburierungs- und Abschreckungsvorrichtung und Verfahren zum Abschrecken dünner Plattenteile
FR2771754B1 (fr) * 1997-12-02 2000-02-11 Etudes Const Mecaniques Installation de traitement thermique sous vide modulaire
US6786935B1 (en) * 2000-03-10 2004-09-07 Applied Materials, Inc. Vacuum processing system for producing components
EP1523761A1 (de) * 2002-06-21 2005-04-20 Applied Materials, Inc. Übergabekammer für behandlungssystem unter vakuum
JP4516304B2 (ja) * 2003-11-20 2010-08-04 株式会社アルバック 巻取式真空蒸着方法及び巻取式真空蒸着装置
FR2863629B1 (fr) * 2003-12-12 2006-12-08 Etudes Const Mecaniques Procede et dispositif de traitement physicochimique a chaud de pieces mecaniques
US20060201074A1 (en) * 2004-06-02 2006-09-14 Shinichi Kurita Electronic device manufacturing chamber and methods of forming the same
US7784164B2 (en) * 2004-06-02 2010-08-31 Applied Materials, Inc. Electronic device manufacturing chamber method
KR100826269B1 (ko) * 2006-06-13 2008-04-29 삼성전기주식회사 복합 소성로 및 이에 채용되는 승하강 장치
WO2009149864A1 (en) * 2008-06-11 2009-12-17 Oerlikon Trading Ag, Trübbach Workpiece carrier
JP6493339B2 (ja) * 2016-08-26 2019-04-03 村田機械株式会社 搬送容器、及び収容物の移載方法
CN115354280B (zh) * 2022-09-19 2023-05-09 陕西理工大学 一种半导体芯片的镀膜治具

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1838015A (en) * 1925-12-01 1931-12-22 Bbc Brown Boveri & Cie Annealing apparatus
US3856654A (en) * 1971-08-26 1974-12-24 Western Electric Co Apparatus for feeding and coating masses of workpieces in a controlled atmosphere
FR2183557A1 (en) * 1972-05-10 1973-12-21 Cit Alcatel Cathodic sputtering appts - with number of chambers for simultaneous treatment of several substrates
DE2249194C3 (de) * 1972-10-05 1975-07-24 Jurid Werke Gmbh, 2056 Glinde Vorrichtung zum Drucksintern plattenförmiger Teile
US3836325A (en) * 1973-12-11 1974-09-17 Nippon Steel Corp Apparatus for charging materials into vertical heating furnace
US4033715A (en) * 1976-01-12 1977-07-05 Btu Engineering Corporation Heat processing system
US4210097A (en) * 1977-02-14 1980-07-01 Armco Inc. Means for maintaining a non-oxidizing atmosphere at positive pressure within the metallic strip preparation furnace of a metallic coating line during line stops
FR2403645A2 (fr) * 1977-09-14 1979-04-13 Vide & Traitement Sa Four pour le traitement thermochimique, en continu, de pieces metalliques, par bombardement ionique
US4170815A (en) * 1977-05-23 1979-10-16 Chugairo Kogyo Kaisha Ltd. Method of operating a reheating furnace in hot rolling line
JPS56274A (en) * 1979-06-18 1981-01-06 Hitachi Ltd Continuous vacuum deposition apparatus
US4405435A (en) * 1980-08-27 1983-09-20 Hitachi, Ltd. Apparatus for performing continuous treatment in vacuum
JPS58101478A (ja) * 1981-12-12 1983-06-16 Toshiba Corp 多結晶シリコン太陽電池の製造方法
US4412812A (en) * 1981-12-28 1983-11-01 Mostek Corporation Vertical semiconductor furnace
JPS58180227A (ja) * 1982-04-17 1983-10-21 Samuko Internatl Kenkyusho:Kk 複数の反応室を備えた能率的プラズマ処理装置
JPS58197262A (ja) * 1982-05-13 1983-11-16 Canon Inc 量産型真空成膜装置及び真空成膜法
JPS5941470A (ja) * 1982-08-31 1984-03-07 Shimadzu Corp 多室形薄膜作成装置
JPS59157281A (ja) * 1983-02-24 1984-09-06 Tokuda Seisakusho Ltd スパツタリング装置
GB8332394D0 (en) * 1983-12-05 1984-01-11 Pilkington Brothers Plc Coating apparatus
US4610628A (en) * 1983-12-28 1986-09-09 Denkoh Co., Ltd. Vertical furnace for heat-treating semiconductor
JPS60240121A (ja) * 1984-05-15 1985-11-29 Fujitsu Ltd 横型炉

Also Published As

Publication number Publication date
SU1500151A3 (ru) 1989-08-07
EP0236639B1 (de) 1990-03-14
FR2594102A1 (fr) 1987-08-14
FR2594102B1 (fr) 1991-04-19
ES2001286A6 (es) 1988-05-01
DE236639T1 (de) 1988-04-07
ATE51038T1 (de) 1990-03-15
CN1010418B (zh) 1990-11-14
CA1289357C (fr) 1991-09-24
EP0236639A1 (de) 1987-09-16
KR870008037A (ko) 1987-09-23
US4790750A (en) 1988-12-13
JPS62186187A (ja) 1987-08-14
CN87100626A (zh) 1987-08-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee