DE3671679D1 - Dreielektrodenionenquelle mit einer einzigen hochfrequenzionisationskammer und mit multipolarer magnetischer umschliessung. - Google Patents

Dreielektrodenionenquelle mit einer einzigen hochfrequenzionisationskammer und mit multipolarer magnetischer umschliessung.

Info

Publication number
DE3671679D1
DE3671679D1 DE8686400931T DE3671679T DE3671679D1 DE 3671679 D1 DE3671679 D1 DE 3671679D1 DE 8686400931 T DE8686400931 T DE 8686400931T DE 3671679 T DE3671679 T DE 3671679T DE 3671679 D1 DE3671679 D1 DE 3671679D1
Authority
DE
Germany
Prior art keywords
electrodeion
source
single high
multipolar magnetic
frequency chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686400931T
Other languages
English (en)
Inventor
Claude Lejeune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of DE3671679D1 publication Critical patent/DE3671679D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
DE8686400931T 1985-04-29 1986-04-28 Dreielektrodenionenquelle mit einer einzigen hochfrequenzionisationskammer und mit multipolarer magnetischer umschliessung. Expired - Fee Related DE3671679D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8506492A FR2581244B1 (fr) 1985-04-29 1985-04-29 Source d'ions du type triode a une seule chambre d'ionisation a excitation haute frequence et a confinement magnetique du type multipolaire

Publications (1)

Publication Number Publication Date
DE3671679D1 true DE3671679D1 (de) 1990-07-05

Family

ID=9318780

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686400931T Expired - Fee Related DE3671679D1 (de) 1985-04-29 1986-04-28 Dreielektrodenionenquelle mit einer einzigen hochfrequenzionisationskammer und mit multipolarer magnetischer umschliessung.

Country Status (4)

Country Link
US (1) US4873445A (de)
EP (1) EP0200651B1 (de)
DE (1) DE3671679D1 (de)
FR (1) FR2581244B1 (de)

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US5089746A (en) * 1989-02-14 1992-02-18 Varian Associates, Inc. Production of ion beams by chemically enhanced sputtering of solids
GB8905073D0 (en) * 1989-03-06 1989-04-19 Nordiko Ltd Ion gun
SE9403988L (sv) * 1994-11-18 1996-04-01 Ladislav Bardos Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning
JP3123735B2 (ja) * 1995-04-28 2001-01-15 株式会社日立製作所 イオンビーム処理装置
US6271529B1 (en) * 1997-12-01 2001-08-07 Ebara Corporation Ion implantation with charge neutralization
US6184532B1 (en) 1997-12-01 2001-02-06 Ebara Corporation Ion source
US6515426B1 (en) * 1998-12-15 2003-02-04 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor
US6646223B2 (en) * 1999-12-28 2003-11-11 Texas Instruments Incorporated Method for improving ash rate uniformity in photoresist ashing process equipment
JP2001279455A (ja) * 2000-03-29 2001-10-10 Canon Inc 堆積膜形成方法及び堆積膜形成装置
KR100382720B1 (ko) * 2000-08-30 2003-05-09 삼성전자주식회사 반도체 식각 장치 및 이를 이용한 반도체 소자의 식각 방법
US20050026436A1 (en) * 2000-12-21 2005-02-03 Hogan Timothy J. Method for improving ash rate uniformity in photoresist ashing process equipment
DE10248055B4 (de) * 2002-10-11 2012-02-23 Spectro Analytical Instruments Gmbh & Co. Kg Methode zur Anregung optischer Atom-Emission und apparative Vorrichtung für die spektrochemische Analyse
ES2380699T3 (es) * 2004-06-08 2012-05-17 Dichroic Cell S.R.L. Sistema para la deposición química en fase de vapor asistida por plasma de baja energía
DE102005054605B4 (de) * 2005-11-16 2010-09-30 Bruker Daltonik Gmbh Automatische Reinigung von Ionenquellen
GB0604655D0 (en) * 2006-03-08 2006-04-19 Smith Alan A Plasma confinement
DE102009017647A1 (de) * 2009-04-16 2010-10-21 Siemens Aktiengesellschaft Ionenquelle zum Erzeugen eines Partikelstrahls, Elektrode für eine Ionenquelle sowie Verfahren zum Einleiten eines zu ionisierenden Gases in eine Ionenquelle
WO2011127394A1 (en) * 2010-04-09 2011-10-13 E.A. Fischione Instruments, Inc. Improved ion source
US8633452B2 (en) 2011-07-13 2014-01-21 Fei Company Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source
US8822912B2 (en) 2012-12-19 2014-09-02 Schlumberger Technology Corporation Ion source having increased electron path length
US8779351B2 (en) * 2012-12-19 2014-07-15 Schlumberger Technology Corporation Ion source employing secondary electron generation
US9837254B2 (en) 2014-08-12 2017-12-05 Lam Research Corporation Differentially pumped reactive gas injector
US9406535B2 (en) 2014-08-29 2016-08-02 Lam Research Corporation Ion injector and lens system for ion beam milling
US10825652B2 (en) * 2014-08-29 2020-11-03 Lam Research Corporation Ion beam etch without need for wafer tilt or rotation
US9536748B2 (en) 2014-10-21 2017-01-03 Lam Research Corporation Use of ion beam etching to generate gate-all-around structure
CN106324650B (zh) * 2015-06-30 2019-07-19 淄博矿业集团有限责任公司许厂煤矿 一种环境辐射剂量探测器
US9779955B2 (en) 2016-02-25 2017-10-03 Lam Research Corporation Ion beam etching utilizing cryogenic wafer temperatures
US20170352574A1 (en) * 2016-06-02 2017-12-07 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for treating wafer
KR20180065072A (ko) * 2016-12-06 2018-06-18 삼성전자주식회사 이온 빔 추출을 위한 슬릿 구조체를 포함하는 이온 빔 장비, 및 이를 이용한 식각 방법 및 자기기억소자의 제조방법
KR102374697B1 (ko) * 2017-09-07 2022-03-15 삼성전자주식회사 반도체 소자의 제조방법
US10847374B2 (en) 2017-10-31 2020-11-24 Lam Research Corporation Method for etching features in a stack
US10361092B1 (en) 2018-02-23 2019-07-23 Lam Research Corporation Etching features using metal passivation
US11841104B2 (en) * 2020-04-21 2023-12-12 Shanghai United Imaging Healthcare Co., Ltd. System and method for equalizing pressure in ionization chamber of radiation device
CN215771057U (zh) * 2021-09-15 2022-02-08 中山市博顿光电科技有限公司 射频离子源

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956666A (en) * 1975-01-27 1976-05-11 Ion Tech, Inc. Electron-bombardment ion sources
JPS5623745A (en) * 1979-08-01 1981-03-06 Hitachi Ltd Plasma etching device
DE3134337A1 (de) * 1981-08-31 1983-03-24 Technics GmbH Europa, 8011 Kirchheim Ionenstrahlkanone
US4481062A (en) * 1982-09-02 1984-11-06 Kaufman Harold R Electron bombardment ion sources
FR2550681B1 (fr) * 1983-08-12 1985-12-06 Centre Nat Rech Scient Source d'ions a au moins deux chambres d'ionisation, en particulier pour la formation de faisceaux d'ions chimiquement reactifs
US4559477A (en) * 1983-11-10 1985-12-17 The United States Of America As Represented By The United States Department Of Energy Three chamber negative ion source
JPS60130039A (ja) * 1983-12-16 1985-07-11 Jeol Ltd イオン源
JPS60177180A (ja) * 1984-02-23 1985-09-11 Ricoh Co Ltd プラズマｃｖｄ装置
US4642522A (en) * 1984-06-18 1987-02-10 Hughes Aircraft Company Wire-ion-plasma electron gun employing auxiliary grid
US4602161A (en) * 1985-03-04 1986-07-22 The United States Of America As Represented By The United States Department Of Energy Negative ion source with low temperature transverse divergence optical system

Also Published As

Publication number Publication date
US4873445A (en) 1989-10-10
FR2581244A1 (fr) 1986-10-31
EP0200651A1 (de) 1986-11-05
FR2581244B1 (fr) 1987-07-10
EP0200651B1 (de) 1990-05-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee