DE3683053D1 - Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen. - Google Patents
Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen.Info
- Publication number
- DE3683053D1 DE3683053D1 DE8686114712T DE3683053T DE3683053D1 DE 3683053 D1 DE3683053 D1 DE 3683053D1 DE 8686114712 T DE8686114712 T DE 8686114712T DE 3683053 T DE3683053 T DE 3683053T DE 3683053 D1 DE3683053 D1 DE 3683053D1
- Authority
- DE
- Germany
- Prior art keywords
- pad
- pads
- tunnelling
- boards
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP86114712A EP0264482B1 (de) | 1986-10-23 | 1986-10-23 | Verfahren zur kontaktfreien Prüfung von Platinen für integrierte Schaltungen unter atmosphärischen Bedingungen |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3683053D1 true DE3683053D1 (de) | 1992-01-30 |
Family
ID=8195525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686114712T Expired - Fee Related DE3683053D1 (de) | 1986-10-23 | 1986-10-23 | Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen. |
Country Status (4)
Country | Link |
---|---|
US (2) | US4868492A (de) |
EP (1) | EP0264482B1 (de) |
JP (1) | JPH0614085B2 (de) |
DE (1) | DE3683053D1 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5272434A (en) * | 1987-06-20 | 1993-12-21 | Schlumberger Technologies, Inc. | Method and apparatus for electro-optically testing circuits |
EP0402499A1 (de) * | 1989-06-13 | 1990-12-19 | Siemens Aktiengesellschaft | Verfahren zur Prüfung einer Leiterplatte mit einer Teilchensonde |
US4970461A (en) * | 1989-06-26 | 1990-11-13 | Lepage Andrew J | Method and apparatus for non-contact opens/shorts testing of electrical circuits |
EP0405672A1 (de) * | 1989-06-30 | 1991-01-02 | Koninklijke Philips Electronics N.V. | Verfahren zur Messung einer Spannungsverteilung auf ein Leitermuster |
EP0429739B1 (de) * | 1989-11-28 | 1993-10-27 | International Business Machines Corporation | Verfahren zur Inspektion von Durchkontakt-Stiften in integrierten Schaltungspackungen mittels Photoemission |
US5270655A (en) * | 1989-12-22 | 1993-12-14 | Matsushita Electric Industrial Co., Ltd. | Semiconductor integrated circuit having light emitting devices |
US5157334A (en) * | 1990-01-22 | 1992-10-20 | Atlantic Richfield Company | Image intensifier monitoring of power line insulator leakage |
US5124635A (en) * | 1990-02-15 | 1992-06-23 | Photon Dynamics, Inc. | Voltage imaging system using electro-optics |
US5039938A (en) * | 1990-06-21 | 1991-08-13 | Hughes Aircraft Company | Phosphor glow testing of hybrid substrates |
US5208531A (en) * | 1990-08-13 | 1993-05-04 | Texas Instruments Incorporated | Apparatus and method for testing integrated circuits |
US5157327A (en) * | 1990-09-19 | 1992-10-20 | Photon Dynamics, Inc. | Method and apparatus for electro-optically measuring a voltage signal |
JPH04158238A (ja) * | 1990-10-22 | 1992-06-01 | Ezel Inc | 液晶パネルの検査方法 |
US5285150A (en) * | 1990-11-26 | 1994-02-08 | Photon Dynamics, Inc. | Method and apparatus for testing LCD panel array |
US5216359A (en) * | 1991-01-18 | 1993-06-01 | University Of North Carolina | Electro-optical method and apparatus for testing integrated circuits |
US5150043A (en) * | 1991-02-11 | 1992-09-22 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission |
US5170127A (en) * | 1991-02-19 | 1992-12-08 | Photon Dynamics, Inc. | Capacitance imaging system using electro-optics |
US5175504A (en) * | 1991-06-17 | 1992-12-29 | Photon Dynamics, Inc. | Method and apparatus for automatically inspecting and repairing a simple matrix circuit panel |
US5432461A (en) * | 1991-06-28 | 1995-07-11 | Photon Dynamics, Inc. | Method of testing active matrix liquid crystal display substrates |
US5465052A (en) * | 1991-09-10 | 1995-11-07 | Photon Dynamics, Inc. | Method of testing liquid crystal display substrates |
US5459409A (en) * | 1991-09-10 | 1995-10-17 | Photon Dynamics, Inc. | Testing device for liquid crystal display base plate |
US5444385A (en) * | 1991-09-10 | 1995-08-22 | Photon Dynamics, Inc. | Testing apparatus for liquid crystal display substrates |
US5504438A (en) * | 1991-09-10 | 1996-04-02 | Photon Dynamics, Inc. | Testing method for imaging defects in a liquid crystal display substrate |
US5543729A (en) * | 1991-09-10 | 1996-08-06 | Photon Dynamics, Inc. | Testing apparatus and connector for liquid crystal display substrates |
US5451863A (en) * | 1992-10-30 | 1995-09-19 | International Business Machines Corporation | Fiber optic probe with a magneto-optic film on an end surface for detecting a current in an integrated circuit |
US5301012A (en) * | 1992-10-30 | 1994-04-05 | International Business Machines Corporation | Optical technique for rapid inspection of via underetch and contamination |
US5459404A (en) * | 1994-03-28 | 1995-10-17 | Ulsi Technology, Inc. | Apparatus and method for detecting floating nodes |
JP3787185B2 (ja) * | 1995-04-28 | 2006-06-21 | アヴェンティス・リサーチ・ウント・テクノロジーズ・ゲーエムベーハー・ウント・コー・カーゲー | 配線基板の配線の欠陥を検出する装置 |
US5587664A (en) * | 1995-07-12 | 1996-12-24 | Exsight Ltd. | Laser-induced metallic plasma for non-contact inspection |
US5959459A (en) * | 1996-12-10 | 1999-09-28 | International Business Machines Corporation | Defect monitor and method for automated contactless inline wafer inspection |
US6118285A (en) * | 1998-01-28 | 2000-09-12 | Probot, Inc | Non-contact plasma probe for testing electrical continuity of printed wire boards |
US6512385B1 (en) * | 1999-07-26 | 2003-01-28 | Paul Pfaff | Method for testing a device under test including the interference of two beams |
US6528818B1 (en) * | 1999-12-14 | 2003-03-04 | Kla-Tencor | Test structures and methods for inspection of semiconductor integrated circuits |
US7655482B2 (en) * | 2000-04-18 | 2010-02-02 | Kla-Tencor | Chemical mechanical polishing test structures and methods for inspecting the same |
US7733499B2 (en) | 2001-12-06 | 2010-06-08 | Attofemto, Inc. | Method for optically testing semiconductor devices |
US8462350B2 (en) | 2001-12-06 | 2013-06-11 | Attofemto, Inc. | Optically enhanced holographic interferometric testing methods for the development and evaluation of semiconductor devices, materials, wafers, and for monitoring all phases of development and manufacture |
US7400411B2 (en) * | 2001-12-06 | 2008-07-15 | Attofemto, Inc. | Method for optically testing semiconductor devices |
US9952161B2 (en) | 2001-12-06 | 2018-04-24 | Attofemto, Inc. | Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials |
US7206078B2 (en) * | 2002-05-03 | 2007-04-17 | Attofemto, Inc. | Non-destructive testing system using a laser beam |
KR100436776B1 (ko) * | 2002-01-16 | 2004-06-23 | 한국전자통신연구원 | 전압 분포 감지 센서 |
US6894518B1 (en) * | 2002-03-29 | 2005-05-17 | Advanced Micro Devices, Inc. | Circuit analysis and manufacture using electric field-induced effects |
JP5013754B2 (ja) * | 2005-06-13 | 2012-08-29 | キヤノン株式会社 | 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法 |
KR101610821B1 (ko) * | 2008-05-21 | 2016-04-20 | 포톤 다이나믹스, 인코포레이티드 | 전면 조명을 이용한 디스플레이 패널상의 결함 검출의 향상 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3436651A (en) * | 1966-12-23 | 1969-04-01 | Texas Instruments Inc | Electronic method and apparatus utilizing photoemissive means for testing circuit board continuity |
DE2207546A1 (de) * | 1972-02-18 | 1973-08-23 | Ibm Deutschland | Verfahren zum pruefen des elektrischen durchganges |
JPS4823385A (de) * | 1971-07-28 | 1973-03-26 | ||
DD100564A1 (de) * | 1972-03-01 | 1973-09-20 | ||
DE2824308A1 (de) * | 1978-06-02 | 1979-12-13 | Siemens Ag | Verfahren zum einpraegen einer spannung mit einem elektronenstrahl |
US4415851A (en) * | 1981-05-26 | 1983-11-15 | International Business Machines Corporation | System for contactless testing of multi-layer ceramics |
US4417203A (en) * | 1981-05-26 | 1983-11-22 | International Business Machines Corporation | System for contactless electrical property testing of multi-layer ceramics |
US4507605A (en) * | 1982-05-17 | 1985-03-26 | Testamatic, Incorporated | Method and apparatus for electrical and optical inspection and testing of unpopulated printed circuit boards and other like items |
IL68568A0 (en) * | 1983-05-04 | 1983-09-30 | Optrotech Ltd | Apparatus and method for automatic inspection of printed circuitboards |
WO1984004819A1 (en) * | 1983-05-25 | 1984-12-06 | Battelle Memorial Institute | Method for inspecting and testing an electric device of the printed or integrated circuit type |
US4618819A (en) * | 1984-03-27 | 1986-10-21 | The University Of Rochester | Measurement of electrical signals with subpicosecond resolution |
JPS60206147A (ja) * | 1984-03-30 | 1985-10-17 | Toshiba Corp | 集積回路の動作試験方法 |
US4644264A (en) * | 1985-03-29 | 1987-02-17 | International Business Machines Corporation | Photon assisted tunneling testing of passivated integrated circuits |
US4703260A (en) * | 1985-09-23 | 1987-10-27 | International Business Machines Corporation | Full chip integrated circuit tester |
US4733174A (en) * | 1986-03-10 | 1988-03-22 | Textronix, Inc. | Circuit testing method and apparatus |
US4910458A (en) * | 1987-03-24 | 1990-03-20 | Princeton Applied Research Corp. | Electro-optic sampling system with dedicated electro-optic crystal and removable sample carrier |
JPH0830720B2 (ja) * | 1987-06-30 | 1996-03-27 | 浜松ホトニクス株式会社 | 電圧検出装置 |
-
1986
- 1986-10-23 EP EP86114712A patent/EP0264482B1/de not_active Expired
- 1986-10-23 DE DE8686114712T patent/DE3683053D1/de not_active Expired - Fee Related
-
1987
- 1987-09-18 JP JP62232756A patent/JPH0614085B2/ja not_active Expired - Lifetime
- 1987-10-09 US US07/107,441 patent/US4868492A/en not_active Expired - Fee Related
-
1989
- 1989-06-15 US US07/366,572 patent/US4999577A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0264482B1 (de) | 1991-12-18 |
JPH0614085B2 (ja) | 1994-02-23 |
EP0264482A1 (de) | 1988-04-27 |
US4868492A (en) | 1989-09-19 |
JPS63115072A (ja) | 1988-05-19 |
US4999577A (en) | 1991-03-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |