DE3687536D1 - Nichtzerstoerendes auslesen eines latenten elektrostatischen bildes welches auf isolierendem material gebildet wurde. - Google Patents

Nichtzerstoerendes auslesen eines latenten elektrostatischen bildes welches auf isolierendem material gebildet wurde.

Info

Publication number
DE3687536D1
DE3687536D1 DE8686301228T DE3687536T DE3687536D1 DE 3687536 D1 DE3687536 D1 DE 3687536D1 DE 8686301228 T DE8686301228 T DE 8686301228T DE 3687536 T DE3687536 T DE 3687536T DE 3687536 D1 DE3687536 D1 DE 3687536D1
Authority
DE
Germany
Prior art keywords
semiconductor material
insulating material
layer
electrostatic image
latent electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686301228T
Other languages
English (en)
Other versions
DE3687536T2 (de
Inventor
Emil Kamienicki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE3687536D1 publication Critical patent/DE3687536D1/de
Publication of DE3687536T2 publication Critical patent/DE3687536T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/28Measuring radiation intensity with secondary-emission detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24Arrangements for measuring quantities of charge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/265Contactless testing
    • G01R31/2656Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/24Measuring radiation intensity with semiconductor detectors
    • G01T1/246Measuring radiation intensity with semiconductor detectors utilizing latent read-out, e.g. charge stored and read-out later
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00Apparatus for electrographic processes using a charge pattern
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00Apparatus for electrographic processes using a charge pattern
    • G03G15/054Apparatus for electrographic processes using a charge pattern using X-rays, e.g. electroradiography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00Apparatus for electrographic processes using a charge pattern
    • G03G15/22Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20
    • G03G15/221Machines other than electrographic copiers, e.g. electrophotographic cameras, electrostatic typewriters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/30Transforming light or analogous information into electric information
DE8686301228T 1985-04-03 1986-02-20 Nichtzerstoerendes auslesen eines latenten elektrostatischen bildes welches auf isolierendem material gebildet wurde. Expired - Fee Related DE3687536T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/719,725 US4663526A (en) 1984-12-26 1985-04-03 Nondestructive readout of a latent electrostatic image formed on an insulating material

Publications (2)

Publication Number Publication Date
DE3687536D1 true DE3687536D1 (de) 1993-03-04
DE3687536T2 DE3687536T2 (de) 1993-05-13

Family

ID=24891110

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686301228T Expired - Fee Related DE3687536T2 (de) 1985-04-03 1986-02-20 Nichtzerstoerendes auslesen eines latenten elektrostatischen bildes welches auf isolierendem material gebildet wurde.

Country Status (9)

Country Link
US (3) US4663526A (de)
EP (1) EP0200300B1 (de)
JP (1) JPS61292069A (de)
CN (1) CN1007292B (de)
AT (1) ATE84880T1 (de)
AU (1) AU595180B2 (de)
CA (1) CA1251256A (de)
DE (1) DE3687536T2 (de)
MX (1) MX161936A (de)

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US4663526A (en) * 1984-12-26 1987-05-05 Emil Kamieniecki Nondestructive readout of a latent electrostatic image formed on an insulating material
US4833324A (en) * 1985-04-03 1989-05-23 Optical Diagnostic Systems, Inc. Nondestructive readout of a latent electrostatic image formed on an insulating material
CA1276320C (en) * 1987-12-01 1990-11-13 John Allan Rowlands System for measuring the charge distribution on a photoreceptor surface
US5091691A (en) * 1988-03-21 1992-02-25 Semitest, Inc. Apparatus for making surface photovoltage measurements of a semiconductor
US5172163A (en) * 1989-05-10 1992-12-15 Sanyo Electric Co., Ltd. Photovoltaic photo-receptor and electrophotographing apparatus
CZ283018B6 (cs) * 1991-02-01 1997-12-17 Merck Sharp And Dohme Limited Deriváty imidazolu, triazolu a tetrazolu a farmaceutické přípravky na jejich bázi
US5127038A (en) * 1991-06-28 1992-06-30 E. I. Du Pont De Nemours And Company Method for capturing and displaying a latent radiographic image
US5166524A (en) * 1991-06-28 1992-11-24 E. I. Du Pont De Nemours & Company Element, device and associated method for capturing a latent radiographic image
US5168160A (en) * 1991-06-28 1992-12-01 E. I. Du Pont De Nemours And Company Method and apparatus for acquiring an electrical signal representing a radiographic image
US5313066A (en) * 1992-05-20 1994-05-17 E. I. Du Pont De Nemours And Company Electronic method and apparatus for acquiring an X-ray image
US5331179A (en) * 1993-04-07 1994-07-19 E. I. Du Pont De Nemours And Company Method and apparatus for acquiring an X-ray image using a thin film transistor array
US5268569A (en) * 1992-07-22 1993-12-07 Minnesota Mining And Manufacturing Company Imaging system having optimized electrode geometry and processing
US5332893A (en) * 1992-07-22 1994-07-26 Minnesota Mining And Manufacturing Company Imaging system and device having a simplified electrode design
WO1994004963A1 (en) * 1992-08-14 1994-03-03 E.I. Du Pont De Nemours And Company Element, device and associated method for capturing a latent radiographic image
US5340975A (en) * 1993-01-29 1994-08-23 Minnesota Mining And Manufacturing Company Method and apparatus for reducing the effects of laser noise and for improving modulation transfer function in scanning a photoconductive surface
US5587453A (en) * 1994-02-25 1996-12-24 Mitsubishi Gas Chemical Company, Inc. Process for purifying methacrylate
EP0753232A1 (de) * 1994-03-31 1997-01-15 Imation Corp. Bildaufnahmesystem mit variabler geometrie der elektrode und verarbeitung
US5541402A (en) * 1994-10-17 1996-07-30 At&T Corp. Imaging active pixel device having a non-destructive read-out gate
US5661408A (en) * 1995-03-01 1997-08-26 Qc Solutions, Inc. Real-time in-line testing of semiconductor wafers
US5644223A (en) * 1995-05-12 1997-07-01 International Business Machines Corporation Uniform density charge deposit source
US5485091A (en) * 1995-05-12 1996-01-16 International Business Machines Corporation Contactless electrical thin oxide measurements
US5594247A (en) * 1995-07-07 1997-01-14 Keithley Instruments, Inc. Apparatus and method for depositing charge on a semiconductor wafer
US5767693A (en) * 1996-09-04 1998-06-16 Smithley Instruments, Inc. Method and apparatus for measurement of mobile charges with a corona screen gun
EP0898421A3 (de) * 1997-08-19 2001-12-05 Fuji Photo Film Co., Ltd. Elektrostatisches Aufnahmeelement, Aufnahme- und Auslesevorrichtung für latente elektrostatische Bilder
US6060709A (en) * 1997-12-31 2000-05-09 Verkuil; Roger L. Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
IL126018A0 (en) 1998-09-01 1999-05-09 Edge Medical Devices Ltd X-ray imaging system
US6388455B1 (en) 1999-01-13 2002-05-14 Qc Solutions, Inc. Method and apparatus for simulating a surface photo-voltage in a substrate
EP1022586A1 (de) * 1999-01-20 2000-07-26 Edge Medical Devices Ltd. Bilderzeugungssystem mittels Röntgenstrahlen
US7663385B2 (en) * 2002-12-13 2010-02-16 Nanometrics Incorporated Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor
US6911350B2 (en) * 2003-03-28 2005-06-28 Qc Solutions, Inc. Real-time in-line testing of semiconductor wafers
JP2007524802A (ja) * 2003-11-12 2007-08-30 インターナショナル・ビジネス・マシーンズ・コーポレーション 電気的検証のためのイオン化試験
US7119569B2 (en) * 2004-03-05 2006-10-10 Qc Solutions, Inc. Real-time in-line testing of semiconductor wafers
US20060257126A1 (en) * 2005-05-16 2006-11-16 Wen-Long Chyn Cooling/heating fan apparatus
US8314627B2 (en) * 2006-10-13 2012-11-20 Ricoh Company, Limited Latent-image measuring device and latent-image carrier
US7518376B2 (en) * 2007-02-16 2009-04-14 Xerox Corporation Electric field probe
US9423359B2 (en) * 2013-06-26 2016-08-23 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer charging electromagnetic inspection tool and method of using
CN103513119B (zh) * 2013-10-18 2016-08-17 河北大学 静电分选机转辊表面电荷密度分布的测量方法及测量装置
CN110927472B (zh) * 2019-11-04 2021-08-03 华中科技大学 一种不依赖测量的孤立导体电荷控制方法
CN116859201B (zh) * 2023-09-05 2023-11-17 武汉莱恩输变电设备股份有限公司 一种高压输变电绝缘子表面电荷量测量检测装置及其方法

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US3199086A (en) * 1960-11-25 1965-08-03 Rahn Corp Devices exhibiting internal polarization and apparatus for and methods of utilizing the same
DE1281573B (de) * 1964-12-08 1968-10-31 Kalle Ag Messsonde zur Bestimmung der oertlichen Ladungsverteilung auf Oberflaechen von Festkoerpern
NL6919560A (de) * 1969-01-31 1970-08-04
US3746867A (en) * 1971-04-19 1973-07-17 Massachusetts Inst Technology Radiation responsive signal storage device
US3859527A (en) * 1973-01-02 1975-01-07 Eastman Kodak Co Apparatus and method for producing images corresponding to patterns of high energy radiation
US4176275A (en) * 1977-08-22 1979-11-27 Minnesota Mining And Manufacturing Company Radiation imaging and readout system and method utilizing a multi-layered device having a photoconductive insulative layer
US4296478A (en) * 1979-10-12 1981-10-20 Rca Corporation Readout of electrostatically stored information
US4319284A (en) * 1979-10-12 1982-03-09 Rca Corporation Repetitive readout of electrostatically stored information
DE2948660A1 (de) * 1979-12-04 1981-06-11 Philips Patentverwaltung Gmbh, 2000 Hamburg Influenzsondenanordnung und verfahren zu ihrer herstellung
DE3135933A1 (de) * 1980-09-26 1982-05-19 Unisearch Ltd., Kensington, New South Wales Solarzelle und verfahren zu ihrer herstellung
JPS58199351A (ja) * 1982-05-17 1983-11-19 Konishiroku Photo Ind Co Ltd 画像情報記録媒体及び記録読出し方法
US4541017A (en) * 1982-08-02 1985-09-10 Siemens Aktiengesellschaft Apparatus for contact-free measurement of electrical charge images generated by electro-radiographic recording methods
DE3235076A1 (de) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Aufnahme- und auslesevorrichtung fuer roentgenstrahlen
US4663526A (en) * 1984-12-26 1987-05-05 Emil Kamieniecki Nondestructive readout of a latent electrostatic image formed on an insulating material
US4833324A (en) * 1985-04-03 1989-05-23 Optical Diagnostic Systems, Inc. Nondestructive readout of a latent electrostatic image formed on an insulating material

Also Published As

Publication number Publication date
ATE84880T1 (de) 1993-02-15
US4847496A (en) 1989-07-11
EP0200300B1 (de) 1993-01-20
US4873436A (en) 1989-10-10
DE3687536T2 (de) 1993-05-13
US4663526A (en) 1987-05-05
CN86102223A (zh) 1986-11-05
MX161936A (es) 1991-03-08
CA1251256A (en) 1989-03-14
JPS61292069A (ja) 1986-12-22
AU595180B2 (en) 1990-03-29
AU5321886A (en) 1986-10-16
EP0200300A1 (de) 1986-11-05
CN1007292B (zh) 1990-03-21

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee