DE3751546T2 - Differentielle Drucksensoren zur Druckerfassung und Herstellungsverfahren. - Google Patents

Differentielle Drucksensoren zur Druckerfassung und Herstellungsverfahren.

Info

Publication number
DE3751546T2
DE3751546T2 DE3751546T DE3751546T DE3751546T2 DE 3751546 T2 DE3751546 T2 DE 3751546T2 DE 3751546 T DE3751546 T DE 3751546T DE 3751546 T DE3751546 T DE 3751546T DE 3751546 T2 DE3751546 T2 DE 3751546T2
Authority
DE
Germany
Prior art keywords
manufacturing processes
differential pressure
pressure sensors
pressure detection
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3751546T
Other languages
English (en)
Other versions
DE3751546D1 (de
Inventor
Thomas A Knecht
Roger L Frick
Steven M Bruesehoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE3751546D1 publication Critical patent/DE3751546D1/de
Publication of DE3751546T2 publication Critical patent/DE3751546T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
DE3751546T 1986-06-30 1987-06-12 Differentielle Drucksensoren zur Druckerfassung und Herstellungsverfahren. Expired - Lifetime DE3751546T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/879,938 US4833920A (en) 1986-06-30 1986-06-30 Differential pressure sensor
PCT/US1987/001374 WO1988000335A1 (en) 1986-06-30 1987-06-12 Differential pressure sensor

Publications (2)

Publication Number Publication Date
DE3751546D1 DE3751546D1 (de) 1995-11-02
DE3751546T2 true DE3751546T2 (de) 1996-02-22

Family

ID=25375194

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3751546T Expired - Lifetime DE3751546T2 (de) 1986-06-30 1987-06-12 Differentielle Drucksensoren zur Druckerfassung und Herstellungsverfahren.

Country Status (24)

Country Link
US (1) US4833920A (de)
EP (1) EP0312532B1 (de)
JP (1) JP2750303B2 (de)
KR (1) KR950013298B1 (de)
CN (2) CN1013712B (de)
AR (1) AR241235A1 (de)
AT (1) ATE128548T1 (de)
AU (1) AU610070B2 (de)
BR (1) BR8707739A (de)
CA (1) CA1296917C (de)
DE (1) DE3751546T2 (de)
DK (1) DK172354B1 (de)
ES (1) ES2006189A6 (de)
FI (1) FI96991C (de)
HK (1) HK6396A (de)
HU (1) HU207160B (de)
IL (2) IL82960A0 (de)
IN (1) IN169797B (de)
MX (1) MX163905B (de)
NO (1) NO173074C (de)
RU (1) RU2069328C1 (de)
WO (1) WO1988000335A1 (de)
YU (1) YU126287A (de)
ZA (1) ZA874355B (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011006517A1 (de) * 2011-03-31 2012-10-04 Endress + Hauser Gmbh + Co. Kg Druckfest gekapselter Differenzdrucksensor
DE102014104831A1 (de) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
DE102014109491A1 (de) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
DE102017125333A1 (de) * 2017-10-27 2019-05-02 Samson Ag Drucksensoranordnung

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US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US5060520A (en) * 1989-06-15 1991-10-29 Texas Instruments Incorporated Hermetic pressure sensor
FI893874A (fi) * 1989-08-17 1991-02-18 Vaisala Oy Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen.
US5134887A (en) * 1989-09-22 1992-08-04 Bell Robert L Pressure sensors
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
US5829665A (en) * 1992-12-09 1998-11-03 Nippondenso Co., Ltd. Fluxless soldering process
DE19513007A1 (de) * 1994-04-14 1995-10-19 Merck Patent Gmbh Hexafluorpropylether und flüssigkristallines Medium
US5454270A (en) * 1994-06-06 1995-10-03 Motorola, Inc. Hermetically sealed pressure sensor and method thereof
JP3319912B2 (ja) * 1995-06-29 2002-09-03 株式会社デンソー 半導体センサ用台座およびその加工方法
EP0762088A3 (de) * 1995-09-11 1997-11-05 Georg Fischer Rohrleitungssysteme AG Verfahren und Vorrichtung zur Grenzstanderfassung von Flüssigkeiten und Schüttgütern
JP3147778B2 (ja) * 1996-07-01 2001-03-19 富士電機株式会社 静電容量式差圧検出器
DE69922727T2 (de) * 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
GB0015500D0 (en) 2000-06-23 2000-08-16 Randox Lab Ltd Production of silicon diaphragms by precision grinding
WO2002038490A2 (de) * 2000-11-07 2002-05-16 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Verfahren zum herstellen von glas-silizium-glas sandwichstrukturen
US6539790B2 (en) * 2000-12-04 2003-04-01 University Of Vermont And State Agricultural College Stiction-based chuck for bulge tester and method of bulge testing
JP3847281B2 (ja) * 2003-08-20 2006-11-22 株式会社山武 圧力センサ装置
US8026729B2 (en) 2003-09-16 2011-09-27 Cardiomems, Inc. System and apparatus for in-vivo assessment of relative position of an implant
EP1677852A4 (de) * 2003-09-16 2009-06-24 Cardiomems Inc Implantierbarer drahtloser sensor
AU2006262287A1 (en) * 2005-06-21 2007-01-04 Cardiomems, Inc. Method of manufacturing implantable wireless sensor for in vivo pressure measurement
JP4258504B2 (ja) * 2005-08-24 2009-04-30 セイコーエプソン株式会社 圧力センサ
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
DE102006058301B4 (de) * 2006-12-11 2016-12-29 Robert Bosch Gmbh Luftdrucksensor für eine Seitenaufprallerkennung
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
US8322225B2 (en) 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
DE102009046228A1 (de) * 2009-10-30 2011-05-19 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor und ein Verfahren zum Präparieren eines Membranbetts für einen solchen Sensor
DE102009046229A1 (de) * 2009-10-30 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor
DE102010028504A1 (de) * 2010-05-03 2011-11-03 Endress + Hauser Gmbh + Co. Kg Drucksensor
US8230743B2 (en) 2010-08-23 2012-07-31 Honeywell International Inc. Pressure sensor
EP2659249B1 (de) * 2010-12-27 2015-06-24 Epcos AG Drucksensor mit kompressiblem element
WO2012089625A2 (de) 2010-12-27 2012-07-05 Epcos Ag Drucksensor mit kompressiblem element
KR101203415B1 (ko) 2011-09-08 2012-11-21 두온 시스템 (주) 물결 형상 격리 다이어프램을 갖는 차압 센서의 제조 방법 및 그에 의해 제조된 차압 센서
DE102012113033A1 (de) * 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken
DE102014005399A1 (de) * 2013-04-24 2014-10-30 Marquardt Mechatronik Gmbh Anordnung zur Füllstandsmessung
DE102013113594A1 (de) 2013-12-06 2015-06-11 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
US9316552B2 (en) * 2014-02-28 2016-04-19 Measurement Specialties, Inc. Differential pressure sensing die
CN103868641A (zh) * 2014-03-21 2014-06-18 刘剑飚 一种微压差传感器
US10197462B2 (en) * 2016-05-25 2019-02-05 Honeywell International Inc. Differential pressure sensor full overpressure protection device
CA3099745A1 (en) 2018-05-17 2019-11-21 Rosemount Inc. Measuring element and measuring device comprising the same
DE102018215851B3 (de) 2018-09-18 2019-09-26 Siemens Aktiengesellschaft Druck- oder Durchflussmesszelle

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DE8572C (de) * C. A. ROSCHFR in Markersdorf bei Burgstädt in Sachsen, und J. KÖHLER in Limbach bei Chemnitz Vorrichtung an Kettelmaschinen zur Herstellung sehr langer Maschen
US3079576A (en) * 1961-02-01 1963-02-26 Rosemount Eng Co Ltd Integral strain transducer
GB1088723A (en) * 1964-03-18 1967-10-25 Ether Eng Ltd Improvements in and relating to transducers
BE666463A (de) * 1965-07-06 1965-11-03
US3566750A (en) * 1969-03-10 1971-03-02 Foxboro Co Differential pressure cell with keystone structure
US3618390A (en) * 1969-10-27 1971-11-09 Rosemount Eng Co Ltd Differential pressure transducer
US3800413A (en) * 1969-10-27 1974-04-02 Rosemount Inc Differential pressure transducer
US3650181A (en) * 1970-03-27 1972-03-21 Thompson Wendell L Controller responsive to variation in pressure in one source for varying pressure in another source
US3962921A (en) * 1972-02-04 1976-06-15 The Garrett Corporation Compensated pressure transducer
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
US4064549A (en) * 1976-08-31 1977-12-20 Metrolology General Corporation Cylindrical capacitive quartz transducer
JPS5697842A (en) * 1980-01-07 1981-08-06 Yokogawa Hokushin Electric Corp Differential pressure detector of single capacity type
JPS5730923A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Capacitor type pressure difference transmitter
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4442474A (en) * 1981-12-14 1984-04-10 Sperry Corporation Capacitive pressure transducer
JPS58180927A (ja) * 1982-04-16 1983-10-22 Toshiba Corp 半導体感圧素子の保護装置
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
US4572000A (en) * 1983-12-09 1986-02-25 Rosemount Inc. Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm
US4603371A (en) * 1984-10-12 1986-07-29 Rosemount Inc. Capacitive sensing cell made of brittle material
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011006517A1 (de) * 2011-03-31 2012-10-04 Endress + Hauser Gmbh + Co. Kg Druckfest gekapselter Differenzdrucksensor
US9054222B2 (en) 2011-03-31 2015-06-09 Endress + Hauser Gmbh + Co. Kg Pressure resistently encapsulated, pressure difference sensor
DE102014104831A1 (de) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
DE102014109491A1 (de) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
DE102017125333A1 (de) * 2017-10-27 2019-05-02 Samson Ag Drucksensoranordnung

Also Published As

Publication number Publication date
ATE128548T1 (de) 1995-10-15
CN87104418A (zh) 1988-02-24
NO173074B (no) 1993-07-12
DK106088A (da) 1988-02-29
EP0312532A1 (de) 1989-04-26
NO880675D0 (no) 1988-02-16
DK106088D0 (da) 1988-02-29
IL82960A0 (en) 1987-12-20
YU126287A (en) 1991-02-28
IN169797B (de) 1991-12-21
NO173074C (no) 1993-10-20
EP0312532A4 (en) 1990-09-26
AR241235A1 (es) 1992-02-28
FI885292A (fi) 1988-11-16
DK172354B1 (da) 1998-04-06
ES2006189A6 (es) 1989-04-16
HK6396A (en) 1996-01-19
JP2750303B2 (ja) 1998-05-13
CN1013712B (zh) 1991-08-28
KR880701372A (ko) 1988-07-26
BR8707739A (pt) 1989-08-15
AU610070B2 (en) 1991-05-16
HUT52243A (en) 1990-06-28
CN1018478B (zh) 1992-09-30
CA1296917C (en) 1992-03-10
ZA874355B (de) 1987-12-23
MX163905B (es) 1992-06-30
HU207160B (en) 1993-03-01
IL82960A (en) 1990-03-19
EP0312532B1 (de) 1995-09-27
WO1988000335A1 (en) 1988-01-14
AU7544587A (en) 1988-01-29
DE3751546D1 (de) 1995-11-02
US4833920A (en) 1989-05-30
RU2069328C1 (ru) 1996-11-20
JPH01503084A (ja) 1989-10-19
KR950013298B1 (ko) 1995-11-02
FI96991B (fi) 1996-06-14
CN1050440A (zh) 1991-04-03
FI885292A0 (fi) 1988-11-16
FI96991C (fi) 1996-09-25
NO880675L (no) 1988-02-16

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