DE3889473T2 - Vorrichtung zum Handhaben eines Wafers. - Google Patents

Vorrichtung zum Handhaben eines Wafers.

Info

Publication number
DE3889473T2
DE3889473T2 DE3889473T DE3889473T DE3889473T2 DE 3889473 T2 DE3889473 T2 DE 3889473T2 DE 3889473 T DE3889473 T DE 3889473T DE 3889473 T DE3889473 T DE 3889473T DE 3889473 T2 DE3889473 T2 DE 3889473T2
Authority
DE
Germany
Prior art keywords
wafer
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3889473T
Other languages
English (en)
Other versions
DE3889473D1 (de
Inventor
Orest Engelbrecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SVG Lithography Systems Inc
Original Assignee
SVG Lithography Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SVG Lithography Systems Inc filed Critical SVG Lithography Systems Inc
Publication of DE3889473D1 publication Critical patent/DE3889473D1/de
Application granted granted Critical
Publication of DE3889473T2 publication Critical patent/DE3889473T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138—Wafers positioned vertically within cassette
DE3889473T 1987-02-09 1988-02-08 Vorrichtung zum Handhaben eines Wafers. Expired - Lifetime DE3889473T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/012,538 US4846626A (en) 1987-02-09 1987-02-09 Wafer handling system

Publications (2)

Publication Number Publication Date
DE3889473D1 DE3889473D1 (de) 1994-06-16
DE3889473T2 true DE3889473T2 (de) 1994-08-25

Family

ID=21755440

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3889473T Expired - Lifetime DE3889473T2 (de) 1987-02-09 1988-02-08 Vorrichtung zum Handhaben eines Wafers.

Country Status (6)

Country Link
US (1) US4846626A (de)
EP (1) EP0278462B1 (de)
JP (1) JP2591776B2 (de)
KR (1) KR960010142B1 (de)
CA (2) CA1285335C (de)
DE (1) DE3889473T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2729297B2 (ja) * 1987-12-24 1998-03-18 株式会社ダイヘン 半導体ウエハのセンタ合せ装置
US5277539A (en) * 1988-09-30 1994-01-11 Canon Kabushiki Kaisha Substrate conveying apparatus
IT1228105B (it) * 1988-12-20 1991-05-28 Sgs Thomson Microelectronics Pinza per la movimentazione, vantaggiosamente robotizzata, di una o piu' fette di silicio e/o di un supporto di tali fette
JP2683933B2 (ja) * 1989-01-20 1997-12-03 信越半導体株式会社 半導体ウエーハの表裏および方位判定検査装置
US5238354A (en) * 1989-05-23 1993-08-24 Cybeq Systems, Inc. Semiconductor object pre-aligning apparatus
JP2642216B2 (ja) * 1989-05-23 1997-08-20 サイベック システムズ 半導体物品の予備位置決め方法及び装置
EP0452041B1 (de) * 1990-04-06 1996-11-27 Canon Kabushiki Kaisha Transportvorrichtung für Substrate und Verfahren zur Kontrolle
JP2683208B2 (ja) * 1993-01-28 1997-11-26 アプライド マテリアルズ インコーポレイテッド ロボット機構を用いた搬入および搬出のためのワークピース位置合わせ方法および装置
DE4304301A1 (de) * 1993-02-12 1994-08-18 Suess Kg Karl Transportsystem und -verfahren für zueinander auszurichtende Objekte
US5677758A (en) * 1995-02-09 1997-10-14 Mrs Technology, Inc. Lithography System using dual substrate stages
JPH08288355A (ja) * 1995-04-12 1996-11-01 Nikon Corp 基板搬送装置
US5700046A (en) * 1995-09-13 1997-12-23 Silicon Valley Group, Inc. Wafer gripper
US5789890A (en) * 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
JP3850951B2 (ja) * 1997-05-15 2006-11-29 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
JP3850952B2 (ja) * 1997-05-15 2006-11-29 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
US6489741B1 (en) 1998-08-25 2002-12-03 Genmark Automation, Inc. Robot motion compensation system
US6075334A (en) * 1999-03-15 2000-06-13 Berkeley Process Control, Inc Automatic calibration system for wafer transfer robot
US6275742B1 (en) 1999-04-16 2001-08-14 Berkeley Process Control, Inc. Wafer aligner system
JP2001308003A (ja) 2000-02-15 2001-11-02 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
US6556281B1 (en) 2000-05-23 2003-04-29 Asml Us, Inc. Flexible piezoelectric chuck and method of using the same
US6509952B1 (en) 2000-05-23 2003-01-21 Silicon Valley Group, Inc. Method and system for selective linewidth optimization during a lithographic process
US20050122509A1 (en) * 2002-07-18 2005-06-09 Leica Microsystems Semiconductor Gmbh Apparatus for wafer inspection
EP1622196B1 (de) * 2004-07-30 2006-08-30 Innolas GmbH Waferbearbeitungsvorrichtung und zugehöriges Verfahren
US7142940B2 (en) * 2005-03-14 2006-11-28 Umci Ltd. Method of processing semiconductor wafer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3284964A (en) * 1964-03-26 1966-11-15 Saito Norio Flexible beam structures
NO137351C (no) * 1976-01-30 1978-02-22 Trallfa Nils Underhaug As B¦yelig robotarm.
US4228886A (en) * 1978-12-26 1980-10-21 Ppg Industries, Inc. Position sensor
US4425075A (en) * 1981-04-20 1984-01-10 The Perkin-Elmer Corporation Wafer aligners
US4433953A (en) * 1982-03-22 1984-02-28 General Motors Corporation Industrial robot having a joint-free arm
US4457664A (en) * 1982-03-22 1984-07-03 Ade Corporation Wafer alignment station
DE3219502C2 (de) * 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum automatischen Transport scheibenförmiger Objekte
JPS6085536A (ja) * 1983-10-17 1985-05-15 Hitachi Ltd ウエハ位置決め装置
US4556362A (en) * 1983-12-21 1985-12-03 At&T Technologies, Inc. Methods of and apparatus for handling semiconductor devices
US4539695A (en) * 1984-01-06 1985-09-03 The Perkin-Elmer Corporation X-Ray lithography system
JPS60192345A (ja) * 1984-03-14 1985-09-30 Hitachi Ltd ウエハ位置決め装置
GB2156582A (en) * 1984-03-29 1985-10-09 Perkin Elmer Corp Small part transport system
US4566726A (en) * 1984-06-13 1986-01-28 At&T Technologies, Inc. Method and apparatus for handling semiconductor wafers
JPS61228644A (ja) * 1985-04-02 1986-10-11 Hitachi Electronics Eng Co Ltd ウエハのアライメント装置

Also Published As

Publication number Publication date
US4846626A (en) 1989-07-11
EP0278462A3 (en) 1990-08-16
EP0278462B1 (de) 1994-05-11
KR880010474A (ko) 1988-10-10
CA1285335C (en) 1991-06-25
DE3889473D1 (de) 1994-06-16
JP2591776B2 (ja) 1997-03-19
EP0278462A2 (de) 1988-08-17
CA1321661C (en) 1993-08-24
JPS63308339A (ja) 1988-12-15
KR960010142B1 (ko) 1996-07-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition