DE4309056A1 - Method for determining the distance and intensity of scattering of the scattering points - Google Patents

Method for determining the distance and intensity of scattering of the scattering points

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Publication number
DE4309056A1
DE4309056A1 DE19934309056 DE4309056A DE4309056A1 DE 4309056 A1 DE4309056 A1 DE 4309056A1 DE 19934309056 DE19934309056 DE 19934309056 DE 4309056 A DE4309056 A DE 4309056A DE 4309056 A1 DE4309056 A1 DE 4309056A1
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distance
scattering
spectrum
interferometer
intensity
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DE19934309056
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DE4309056B4 (en
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Gerd Prof Dr Haeusler
Juergen Herrmann
Jochen Neumann
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Carl Zeiss Meditec AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0066—Optical coherence imaging

Abstract

Published without abstract.

Description

Gegenstand der Patentanmeldung ist ein optisches Verfahren, mit dem die Entfernung zu einem oder mehreren beleuchteten streuenden Objektpunkten mit hoher Genauigkeit bestimmt werden kann. Solche Verfahren sind wichtig für die automatisierte Vermessung von Objektoberflächen (Form-Messung). Das Verfahren kann aber auch eingesetzt werden, um Volumenstreuer zu vermessen, wenn Licht in das zu vermessende Objekt eindringen kann. Dies ist z. B. in der medizinischen Gewebediagnostik wichtig.The subject of the patent application is an optical method with which is the distance to one or more illuminated scattering Object points can be determined with high accuracy. Such Methods are important for the automated measurement of object surfaces (Shape measurement). The method can also be used to measure volume spreaders when light is in the object to be measured can penetrate. This is e.g. B. in medical Tissue diagnostics important.

Es sind in der Literatur viele Abstandssensoren beschrieben (z. B. zusammenfassend bei T. Strand, "Optics for Machine Vision", Proc, SPIE 456 (1984). Die meisten beruhen auf Triangulation mit strukturierter Beleuchtung entweder inkohärent oder kohärent. Diese Methoden haben den Nachteil, daß abgeschattete Bereiche auftreten, durch den Triangulationswinkel. Von kohärenten Verfahren ist bekannt, daß die Tiefengenauigkeit durch die Beobachtungsapertur begrenzt ist (G. Häusler, "Physical Limits of 3D-Sensing" Proc. SPIE 1822 (1992)). Es sind auch einige Verfahren bekannt, die diese Beschränkung nicht haben (A. Fercher, et al "Rough surface interferometry with a tow-wavelength heterodyne speckle interferometer" Appl. Opt. 24 (1985) p. 2181. T. Dresel, G. Häusler, "Three dimensional sensing of rough surfaces by coherence radar", Appl. Opt. 31 (1992) p. 919).Many distance sensors are described in the literature (e.g. in summary with T. Strand, "Optics for Machine Vision", Proc, SPIE 456 (1984). Most are based on triangulation with structured Illumination either incoherent or coherent. Have these methods the disadvantage that shaded areas occur, by the Triangulation angle. Coherent processes are known to Depth accuracy is limited by the observation aperture (G. Häusler, "Physical Limits of 3D Sensing" Proc. SPIE 1822 (1992)). It are also known some methods that do not have this limitation (A. Fercher, et al "Rough surface interferometry with a tow-wavelength heterodyne speckle interferometer "Appl. Opt. 24 (1985) p. 2181. T. Dresel, G. Häusler, "Three dimensional sensing of rough surfaces by coherence radar ", Appl. Opt. 31 (1992) p. 919).

Eine medizinische Anwendung zur Gewebediagnostik im Volumen wurde beschrieben von D. Huang et al. "Micron resolution ranging of cornea Anterieor chamber by optical reflectometry" Lasers in Surgery and medicine Vol 11. (1991) p. 419. Diese Methoden arbeiten nicht mit kohärentem Licht, erfordern aber komplizierte Heterodyn-Technologie oder mechanische Bewegung, um das Objekt in der Tiefe abzutasten.A medical application for tissue diagnostics in volume was described by D. Huang et al. "Micron resolution ranging of cornea Anterieor chamber by optical reflectometry "Lasers in Surgery and medicine Vol 11. (1991) p. 419. These methods work not with coherent light, but require complicated heterodyne technology or mechanical movement to the object in the Feel depth.

Gegenstand der Anmeldung ist ein Verfahren, das ohne mechanische Abtastung und ohne Heterodyn-Technologie auskommt. Es beruht auf der Weißlichtinterferometrie, wie in der Deutschen Patentschrift von G. Häusler "Verfahren und Einrichtung zur berührungslosen Erfassung der Oberflächengestalt von diffus streuenden Objekten" 4108994 (1991) beschrieben. Die Anordnung ist ein Interferometer. Zur Erklärung wird ein Michelson-Interferometer benutzt, aber auch andere Interferometer sind geeignet. Die Anordnung ist in Fig. 1 skizziert. The subject of the application is a method that does not require mechanical scanning and heterodyne technology. It is based on white light interferometry, as described in the German patent by G. Häusler "Method and device for contactless detection of the surface shape of diffusely scattering objects" 4108994 (1991). The arrangement is an interferometer. A Michelson interferometer is used for explanation, but other interferometers are also suitable. The arrangement is outlined in Fig. 1.

Das Objekt 1 steht in einem Interferometerarm. Es wird über den Teilerspiegel 2 und Linsen 7, 8 mit einer breitbandigen Lichtquelle 3, z. B. einer Glühlampe oder einer Superlumineszenzdiode beleuchtet. Gleichzeitig wird der Referenzarm 4 über den Teilerspiegel 2 beleuchtet. Über den Referenzspiegel 5 und den Teilerspiegel 2 kommt das Referenzlicht zurück und vereinigt sich mit dem vom Objekt 1 rückgestreuten Licht am Ausgang 6 des Interferometers. Dort wird das Licht mit Hilfe eines Spektralapparates 9, 10 in Farben zerlegt. Das Spektrum wird mit Hilfe eines ortsempfindlichen Photoempfängers 11, z. B. einer Photodiodenzeile aufgefangen und in einer Auswerteeinheit 12, z. B. einem Computer, ausgewertet.Object 1 is in an interferometer arm. It is on the divider mirror 2 and lenses 7 , 8 with a broadband light source 3 , z. B. an incandescent lamp or a superluminescent diode. Simultaneously, the reference arm 4 is illuminated via the splitter mirror. 2 The reference light comes back via the reference mirror 5 and the divider mirror 2 and combines with the light backscattered by the object 1 at the output 6 of the interferometer. There the light is broken down into colors with the aid of a spectral apparatus 9 , 10 . The spectrum is with the help of a location-sensitive photo receiver 11 , for. B. a photodiode array and in an evaluation unit 12 , z. B. a computer evaluated.

Aus dem Spektrum läßt sich nun die Entfernung eines oder mehrerer streuender Punkte ermitteln. Es läßt sich sogar die Intensitätsverteilung der Rückstreuung in einem Volumenstreuer ermitteln. Hierzu werden die sog. Müller'schen Streifen ausgewertet.The distance of one or more can now be removed from the spectrum determine scattering points. You can even get the intensity distribution determine the backscatter in a volume spreader. For this purpose, the so-called Müller strips are evaluated.

Zunächst wird die Auswertung für einen Objektpunkt, der in der Entfernung z gegenüber der Referenzebene 13 mit einerr Intensität i(z) streut, erklärt.First of all, the evaluation for an object point that differs in the distance z from the reference plane 13 with an intensity i (z) is explained.

Das Spektrum für diesen Punkt hat eine IntensitätsverteilungThe spectrum for this point has an intensity distribution

I(k,z) = 1+i(z)cos(2kz+ϕ).I (k, z) = 1 + i (z) cos (2kz + ϕ).

Dabei ist k die Wellenzahl im Spektrum, ϕ ist eine Zufallsphase, die darauf beruht, daß man Speckle beobachtet, ϕ hängt aber nur schwach von k ab und kann deshalb hier vernachlässigt werden.Here k is the wave number in the spectrum, ϕ is a random phase that is based on observing speckle, but ϕ just hangs weak from k and can therefore be neglected here.

Das Spektrum ist also mit der Ortsfrequenz "z" moduliert. Die entstehenden hellen und dunklen Streifen bezeichnet man als Müller'sche Streifen. Man braucht also nur die Ortsfrequenz zu bestimmen, um die Entfernung des streuenden Punktes zu bestimmen. Dies ist aber bei rauhen Objekten nur möglich, wenn bestimmte Bedingungen eingehalten werden, die in der Deutschen Patentschrift 4108944 von G. Häusler beschrieben werden: es handelt sich hier nicht um ein konventionelles Interferometer mit spiegelnden Oberflächen, sondern in einem Arm befindet sich ein diffus streuendes Objekt. Daraus folgt: die Lichtquelle muß räumlich so kohärent sein, daß im rückgestreuten Licht Speckle entstehen. Denn nur dann ist Interferenz möglich. Denn nur innerhalb eines Speckles ist die Phase annähernd konstant. Weiterhin darf jede Photodiode des Empfängerarrays nicht größer als der Speckledurchmesser sein, da sonst kein oder nur geringer Interferenzkontrast sichtbar ist.The spectrum is therefore modulated with the spatial frequency "z". The The resulting light and dark stripes are called Müllerian Stripes. So you only need to determine the spatial frequency, to determine the distance of the scattering point. This is only possible with rough objects if certain conditions are observed in the German patent specification 4108944 by G. Häusler: it's about here not a conventional interferometer with reflective surfaces, there is a diffusely scattering object in one arm. It follows: the light source must be spatially so coherent that speckle is created in the backscattered light. Because only then is Interference possible. Because the phase is only within a speckle almost constant. Furthermore, each photodiode of the receiver array may not be larger than the bacon diameter, otherwise none or only a slight interference contrast is visible.

Die Ermittlung der Frequenz "z" der Müller-Streifen erfolgt zweckmäßig durch Fourier-Transformation des Farbspektrums nach der Variablen k. Aber es ist auch eine direkte Bestimmung der Periodenlänge im Photodiodensignal möglich. Dies ist einfacher und schneller, wenn nur wenige Objektpunkte streuen.The frequency "z" of the Müller strips is expediently determined by Fourier transformation of the color spectrum after the Variables k. But it is also a direct determination of the period length possible in the photodiode signal. This is easier and faster, if only a few object points scatter.

Ein enormer Vorteil des Verfahrens ist, daß die Genauigkeit der Abstandsbestimmung unabhängig von der Beobachtungsapertur ist. Dies ist nicht der Fall bei rein kohärenten Methoden und bei fast allen kommerziellen Sensoren.An enormous advantage of the method is that the accuracy of the distance determination  is independent of the observation aperture. This is not the case with purely coherent methods and with almost all commercial sensors.

Das Verfahren kann auch die Entfernung vieler im Volumen liegender Punkte, in verschiedenen Abständen z, bestimmen, die jeweils mit der Intensität i(z) streuen. Auf der Photodiodenzeile in der Spektralebene überlagern sich die Signale aus der gesamten Tiefe. Deshalb sieht die Zeile das SignalThe procedure can also remove many in-volume Determine points, at different distances z, each with scatter the intensity i (z). On the photodiode line in the spectral plane the signals overlap from the entire depth. That's why the line sees the signal

I(k) = ∫ (1+i(z) cos(2kz)) dzI (k) = ∫ (1 + i (z) cos (2kz)) dz

Die "1" im Integranden belastet die Dynamik des Empfängers, ist jedoch für die Messung unwesentlich. Im wesentlichen ist das Spektrum I(k) die Fouriertransformierte von i(z). Durch Fourier-Rück-Transformation des Signals nach k läßt sich i(z) rückgewinnen. Damit ist diese Methode eine echte tomographische Methode.The "1" in the integrand stresses the dynamics of the receiver, but is insignificant for the measurement. The spectrum is essentially I (k) the Fourier transform of i (z). By Fourier re-transformation of the signal after k i (z) can be recovered. This makes this method a real tomographic method.

Das Signal-Rausch-Verhältnis ist günstig, weil das gesamte Signal der Photodiodenzeile nur nach einzelnen Frequenzen durchsucht wird, mit der Fourier-Transformation. Es sind keine mechanisch bewegten Teile nötig. Die Belichtungszeit kann kurz sein und damit biologische Aktivität oder Bewegung ausblenden.The signal-to-noise ratio is favorable because of the entire signal the photodiode array is only searched for individual frequencies with the Fourier transform. They are not mechanically moved Parts needed. The exposure time can be short and therefore Hide biological activity or movement.

Sie ist anwendbar auf industrielle Objekte, z. B. Blick in durchscheinende Keramik, ebenso wie für biologische Objekte, z. B. Untersuchung auf subkutane Hautveränderungen, Brusttumore, etc.It is applicable to industrial objects, e.g. B. Look in translucent Ceramics, as well as for biological objects, e.g. B. Investigation for subcutaneous skin changes, breast tumors, etc.

Das Verfahren ist auch erweiterbar, durch "Lichtquellen" in anderen Spektralbereichen, die das zu untersuchende Material durchdringen können. Zum Beispiel Röntgenquellen, UV-Quellen, Infrarotquellen, Ultraschallquellen.The process is also expandable by "light sources" in others Spectral ranges that penetrate the material to be examined can. For example X-ray sources, UV sources, infrared sources, ultrasound sources.

Das Verfahren läßt sich nicht nur entlang einer Achse 14 anwenden, sondern man kann auch einen Schnitt senkrecht zur Zeichenebene und der Achse 14 der Fig. 1 parallel vermessen. Dazu ist nur notwendig, nicht nur einen Punkt des Objektes zu beleuchten, sondern gleichzeitig eine Linie senkrecht zur Zeichenebene. Dann muß als Empfänger statt eines linienhaften Photodiodenarrays ein flächenhaftes Array verwendet werden.The method can not only be used along an axis 14 , but also a section perpendicular to the drawing plane and the axis 14 of FIG. 1 can be measured in parallel. It is only necessary to not only illuminate a point of the object, but at the same time a line perpendicular to the plane of the drawing. Then an areal array must be used as the receiver instead of a linear photodiode array.

Eine weitere Modifikation ist in Fig. 2 beschrieben. Die Fig. 2 ist ähnlich wie Fig. 1. Aber es ist zusätzlich in einem Interferometerarm (hier als Beispiel der Referenzarm) ein Dispersion einführendes Element, hier beispielsweise eine Planplatte 15, eingefügt. Diese Platte 15 bewirkt, daß das Spektrum am Ausgang des Interferometers eine charakteristische Intensitätsverteilung erhält, die vom Abstand z des Streupunktes abhängt. Die Auswertung der Intensitätsverteilung ergibt mit hoher Genauigkeit den Abstand.Another modification is described in FIG. 2. FIG. 2 is similar to FIG. 1. But an element introducing dispersion, here for example a flat plate 15 , is additionally inserted in an interferometer arm (here the reference arm as an example). This plate 15 has the effect that the spectrum at the output of the interferometer receives a characteristic intensity distribution which depends on the distance z of the scattering point. The evaluation of the intensity distribution gives the distance with high accuracy.

Die Dispersion bewirkt, daß das Interferometer nur für eine bestimmte Wellenzahl k₀ abgeglichen ist, nämlich für die Wellenzahl, bei der die optische Weglänge im Referenzarm und im Objektarm gleich ist. Das Spektrum I(k) hat folgenden Verlauf:The dispersion causes the interferometer only for a certain one  Wavenumber k₀ is adjusted, namely for the wavenumber, where the optical path length in the reference arm and in the object arm is equal to. The spectrum I (k) has the following course:

I(k,k₀) = 1+cos(2da(k²-k × k₀)).I (k, k₀) = 1 + cos (2da (k²-k × k₀)).

Der Verlauf des Spektrums I(k,k₀) ist in Fig. 3 wiedergegeben. Die Wellenzahl, zu der das Spektrum symmetrisch ist, hängt vom Abstand z des Streupunktes ab. Die Symmetrie kann auf einfache Weise, z. B. durch Korrelation mit der gespiegelten Funktion, ermittelt werden.The course of the spectrum I (k, k₀) is shown in Fig. 3. The wave number to which the spectrum is symmetrical depends on the distance z of the scattering point. The symmetry can be done in a simple manner, e.g. B. by correlation with the mirrored function.

Claims (4)

1. Interferometrisches Verfahren zur Ermittlung der Entfernung und der Streuintensität von streuenden Punkten, die von einer breitbandigen, räumlich partiell kohärenten Lichtquelle beleuchtet werden, und die sich in einem Arm eines Interferometers befinden, dadurch gekennzeichnet, daß am Ausgang des Interferometers das Licht in ein Spektrum zerlegt wird und aus der Helligkeitsverteilung im Spektrum die Information über die Entfernung und die Streuintensität ermittelt wird.1. Interferometric method for determining the distance and the scattering intensity of scattering points, which are illuminated by a broadband, spatially partially coherent light source, and which are located in an arm of an interferometer, characterized in that the light in a spectrum at the output of the interferometer is broken down and the information about the distance and the scattering intensity is determined from the brightness distribution in the spectrum. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die Ermittlung der Entfernung und der lokalen Streuintensität durch Fouriertransformation des Spektrums nach der Wellenlänge erfolgt.2. The method according to claim 1, characterized in that the determination the distance and the local scattering intensity by Fourier transformation of the spectrum is based on the wavelength. 3. Verfahren nach Anspruch 1 und 2, dadurch gekennzeichnet, daß in einem der beiden Interferometerarme zusätzlich ein Dispersion erzeugendes Element eingefügt ist.3. The method according to claim 1 and 2, characterized in that that in one of the two interferometer arms an additional dispersion generating element is inserted. 4. Verfahren nach Anspruch 1, 2 und 3, dadurch gekennzeichnet, daß die Ermittlung des Abstandes eines Streupunktes dadurch erfolgt, daß die Symmetrieachse des Spektrums bestimmt wird.4. The method according to claim 1, 2 and 3, characterized in that the distance of a scattering point is determined by that the symmetry axis of the spectrum is determined.
DE19934309056 1993-03-20 1993-03-20 Method and device for determining the distance and scattering intensity of scattering points Expired - Lifetime DE4309056B4 (en)

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