DE50313348D1 - Plasmaangeregtes chemisches gasphasenabscheide-verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid in einem mim-kondensator - Google Patents
Plasmaangeregtes chemisches gasphasenabscheide-verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid in einem mim-kondensatorInfo
- Publication number
- DE50313348D1 DE50313348D1 DE50313348T DE50313348T DE50313348D1 DE 50313348 D1 DE50313348 D1 DE 50313348D1 DE 50313348 T DE50313348 T DE 50313348T DE 50313348 T DE50313348 T DE 50313348T DE 50313348 D1 DE50313348 D1 DE 50313348D1
- Authority
- DE
- Germany
- Prior art keywords
- silicon
- separating
- inoxinitride
- mim
- condenser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title 1
- 239000000126 substance Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/0214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/318—Inorganic layers composed of nitrides
- H01L21/3185—Inorganic layers composed of nitrides of siliconnitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE50313348T DE50313348D1 (de) | 2002-05-29 | 2003-05-14 | Plasmaangeregtes chemisches gasphasenabscheide-verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid in einem mim-kondensator |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10223954A DE10223954A1 (de) | 2002-05-29 | 2002-05-29 | Plasmaangeregtes chemisches Gasphasenabscheide-Verfahren zum Abscheiden von Siliziumnitrid oder Siliziumoxinitrid, Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung |
DE50313348T DE50313348D1 (de) | 2002-05-29 | 2003-05-14 | Plasmaangeregtes chemisches gasphasenabscheide-verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid in einem mim-kondensator |
PCT/DE2003/001552 WO2003102264A2 (de) | 2002-05-29 | 2003-05-14 | Verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid sowie entsprechendes erzeugnis, |
Publications (1)
Publication Number | Publication Date |
---|---|
DE50313348D1 true DE50313348D1 (de) | 2011-02-03 |
Family
ID=29432440
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10223954A Withdrawn DE10223954A1 (de) | 2002-05-29 | 2002-05-29 | Plasmaangeregtes chemisches Gasphasenabscheide-Verfahren zum Abscheiden von Siliziumnitrid oder Siliziumoxinitrid, Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung |
DE50313348T Expired - Lifetime DE50313348D1 (de) | 2002-05-29 | 2003-05-14 | Plasmaangeregtes chemisches gasphasenabscheide-verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid in einem mim-kondensator |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10223954A Withdrawn DE10223954A1 (de) | 2002-05-29 | 2002-05-29 | Plasmaangeregtes chemisches Gasphasenabscheide-Verfahren zum Abscheiden von Siliziumnitrid oder Siliziumoxinitrid, Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung |
Country Status (6)
Country | Link |
---|---|
US (1) | US7294553B2 (de) |
EP (1) | EP1507888B1 (de) |
JP (1) | JP4825418B2 (de) |
DE (2) | DE10223954A1 (de) |
TW (1) | TWI312543B (de) |
WO (1) | WO2003102264A2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050073678A1 (en) * | 2003-09-26 | 2005-04-07 | Jamil Tahir-Kheli | Detection and reduction of dielectric breakdown in semiconductor devices |
DE102004003337A1 (de) * | 2004-01-22 | 2005-08-18 | Infineon Technologies Ag | Plasmaangeregtes chemisches Gasphasenabscheide-Verfahren, Silizium-Sauerstoff-Stickstoff-haltiges Material und Schicht-Anordnung |
US7097779B2 (en) * | 2004-07-06 | 2006-08-29 | Tokyo Electron Limited | Processing system and method for chemically treating a TERA layer |
DE102004050391B4 (de) | 2004-10-15 | 2007-02-08 | Infineon Technologies Ag | Verfahren zum Herstellen einer Schicht-Anordnung und Schicht-Anordnung |
US7268038B2 (en) * | 2004-11-23 | 2007-09-11 | Newport Fab, Llc | Method for fabricating a MIM capacitor having increased capacitance density and related structure |
JP5186776B2 (ja) * | 2007-02-22 | 2013-04-24 | 富士通株式会社 | 半導体装置及びその製造方法 |
US7606021B2 (en) * | 2007-02-26 | 2009-10-20 | United Microelectronics Corp. | Metal-insulator-metal capacitor and method for fabricating the same |
US20090071371A1 (en) * | 2007-09-18 | 2009-03-19 | College Of William And Mary | Silicon Oxynitride Coating Compositions |
US7678715B2 (en) * | 2007-12-21 | 2010-03-16 | Applied Materials, Inc. | Low wet etch rate silicon nitride film |
US7943527B2 (en) * | 2008-05-30 | 2011-05-17 | The Board Of Trustees Of The University Of Illinois | Surface preparation for thin film growth by enhanced nucleation |
KR101017763B1 (ko) * | 2008-10-16 | 2011-02-28 | 주식회사 동부하이텍 | Mim 커패시터 및 그 제조 방법 |
US8563095B2 (en) * | 2010-03-15 | 2013-10-22 | Applied Materials, Inc. | Silicon nitride passivation layer for covering high aspect ratio features |
JP5922352B2 (ja) * | 2011-08-11 | 2016-05-24 | Sppテクノロジーズ株式会社 | 窒化膜の製造装置及びその製造方法、並びにその製造プログラム |
CN103094076B (zh) * | 2011-11-02 | 2015-12-16 | 无锡华润上华半导体有限公司 | 用于提高0.18μm工艺MIM电容性能的方法 |
CN103060778B (zh) * | 2013-01-23 | 2015-03-11 | 深圳市劲拓自动化设备股份有限公司 | 平板式pecvd装置 |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
JP2015149404A (ja) * | 2014-02-06 | 2015-08-20 | 富士フイルム株式会社 | シリコンオキシナイトライド膜およびその製造方法、トランジスタ |
US10693062B2 (en) * | 2015-12-08 | 2020-06-23 | Crossbar, Inc. | Regulating interface layer formation for two-terminal memory |
GB201813467D0 (en) * | 2018-08-17 | 2018-10-03 | Spts Technologies Ltd | Method of depositing silicon nitride |
US11710631B2 (en) | 2020-10-23 | 2023-07-25 | Applied Materials, Inc. | Tensile nitride deposition systems and methods |
WO2023017780A1 (ja) * | 2021-08-11 | 2023-02-16 | 株式会社村田製作所 | 弾性波装置 |
KR102438504B1 (ko) * | 2021-11-24 | 2022-08-31 | 주식회사 아이에스티이 | SiCN 박막 형성 방법 |
CN115955913A (zh) * | 2023-02-13 | 2023-04-11 | 广州粤芯半导体技术有限公司 | 电容结构及其制备方法、半导体结构 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4618541A (en) * | 1984-12-21 | 1986-10-21 | Advanced Micro Devices, Inc. | Method of forming a silicon nitride film transparent to ultraviolet radiation and resulting article |
GB2186116B (en) * | 1986-02-03 | 1989-11-22 | Intel Corp | Plasma enhanced chemical vapor deposited vertical resistor |
US4786612A (en) * | 1986-02-03 | 1988-11-22 | Intel Corporation | Plasma enhanced chemical vapor deposited vertical silicon nitride resistor |
US5164339A (en) * | 1988-09-30 | 1992-11-17 | Siemens-Bendix Automotive Electronics L.P. | Fabrication of oxynitride frontside microstructures |
GB2231200A (en) * | 1989-04-28 | 1990-11-07 | Philips Electronic Associated | Mim devices, their method of fabrication and display devices incorporating such devices |
US5284789A (en) * | 1990-04-25 | 1994-02-08 | Casio Computer Co., Ltd. | Method of forming silicon-based thin film and method of manufacturing thin film transistor using silicon-based thin film |
GB9206086D0 (en) * | 1992-03-20 | 1992-05-06 | Philips Electronics Uk Ltd | Manufacturing electronic devices comprising,e.g.tfts and mims |
US6083852A (en) * | 1997-05-07 | 2000-07-04 | Applied Materials, Inc. | Method for applying films using reduced deposition rates |
US6316820B1 (en) * | 1997-07-25 | 2001-11-13 | Hughes Electronics Corporation | Passivation layer and process for semiconductor devices |
US6287951B1 (en) * | 1998-12-07 | 2001-09-11 | Motorola Inc. | Process for forming a combination hardmask and antireflective layer |
US6221794B1 (en) * | 1998-12-08 | 2001-04-24 | Advanced Micro Devices, Inc. | Method of reducing incidence of stress-induced voiding in semiconductor interconnect lines |
JP3575307B2 (ja) * | 1998-12-28 | 2004-10-13 | トヨタ自動車株式会社 | 排ガス浄化用触媒及びその製造方法 |
US6309932B1 (en) * | 1999-01-14 | 2001-10-30 | Agere Systems Guardian Corp | Process for forming a plasma nitride film suitable for gate dielectric application in sub-0.25 μm technologies |
US6171978B1 (en) * | 1999-05-27 | 2001-01-09 | Taiwan Semiconductor Manufacturing Company | Method of manufacturing capacitor dielectric |
US6242367B1 (en) * | 1999-07-13 | 2001-06-05 | Advanced Micro Devices, Inc. | Method of forming silicon nitride films |
TW478158B (en) * | 1999-12-13 | 2002-03-01 | Lg Philips Lcd Co Ltd | Silicon oxide film forming method and manufacturing method of thin-film transistor |
US6372668B2 (en) * | 2000-01-18 | 2002-04-16 | Advanced Micro Devices, Inc. | Method of forming silicon oxynitride films |
US6383874B1 (en) * | 2001-03-07 | 2002-05-07 | Advanced Micro Devices, Inc. | In-situ stack for high volume production of isolation regions |
-
2002
- 2002-05-29 DE DE10223954A patent/DE10223954A1/de not_active Withdrawn
-
2003
- 2003-05-14 WO PCT/DE2003/001552 patent/WO2003102264A2/de active Application Filing
- 2003-05-14 JP JP2004510496A patent/JP4825418B2/ja not_active Expired - Fee Related
- 2003-05-14 US US10/515,611 patent/US7294553B2/en not_active Expired - Fee Related
- 2003-05-14 DE DE50313348T patent/DE50313348D1/de not_active Expired - Lifetime
- 2003-05-14 EP EP03755893A patent/EP1507888B1/de not_active Expired - Fee Related
- 2003-05-21 TW TW092113777A patent/TWI312543B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200403762A (en) | 2004-03-01 |
JP2005530924A (ja) | 2005-10-13 |
DE10223954A1 (de) | 2003-12-11 |
WO2003102264A2 (de) | 2003-12-11 |
WO2003102264A3 (de) | 2004-04-08 |
TWI312543B (en) | 2009-07-21 |
EP1507888A2 (de) | 2005-02-23 |
US7294553B2 (en) | 2007-11-13 |
EP1507888B1 (de) | 2010-12-22 |
US20060084236A1 (en) | 2006-04-20 |
JP4825418B2 (ja) | 2011-11-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE50313348D1 (de) | Plasmaangeregtes chemisches gasphasenabscheide-verfahren zum abscheiden von siliziumnitrid oder siliziumoxinitrid in einem mim-kondensator | |
DE602004008683D1 (de) | Trennvorrichtung zum Entfernen von kleinen Partikeln | |
DE602004011321D1 (de) | Verfahren und Vorrichtung zum Entfernen von stehenden Flüssigkeiten von flachen, gekrümmten gewölbten, oder strukturierten Oberflächen | |
DE602004005324D1 (de) | Vorrichtung zum erweitern von bohrlöchern | |
DE112006004263A5 (de) | Verfahren und Vorrichtung zum Stapeln von DRAMS | |
NO20043943L (no) | Massespektometrisk metode for analysering av blandinger av substanser | |
ATE320983T1 (de) | Hermetische umhüllung für nahrungsmittel, entsprechendes verfahren und entsprechende vorrichtung | |
GB0400088D0 (en) | Bottom electrode of capacitor of semiconductor device and method of forming the same | |
DE60311075D1 (de) | Einstufenverfahren zum rotationsformen von uniformen streckmetall | |
IS7981A (is) | Aðferð til að framleiða örkerfi | |
DE10295629T1 (de) | Verfahren zum Detektieren von Chemikalien | |
DE102004008900A8 (de) | Vorrichtung und Verfahren zum Verarbeiten von Wafern | |
DE60320734D1 (de) | Verfahren zum Beschichten von mikro-elektromechanischen Vorrichtungen | |
DE60319370D1 (de) | Verfahren und vorrichtung für genaue phasendetektion | |
DK1691787T3 (da) | Fremgangsmåde til at danne småpartikler | |
DE50300434D1 (de) | Vorrichtung, System und Verfahren zum Absaugen von Flüssigkeiten aus Festphasenextraktionsplatten | |
DE60305740D1 (de) | Einrichtung und prozess zum beschaffen von dateien durch akkumulation von punkten | |
NO20030805D0 (no) | Fremgangsmåte for gassdeteksjon gjennom kapsling | |
DE60300341D1 (de) | Vorrichtung zur Behandlung von Abgas | |
DE602004029535D1 (de) | Vorrichtung und Methode zum Trennen von Flanschverbindungen | |
DE502004001011D1 (de) | Vorrichtung zum präzisen Anfahren von Mikroplatten-Wells | |
WO2005047885A3 (en) | Apparatus and method for removing gas prior to sample detection and/or analysis | |
DE50309994D1 (de) | Verdampferbrenner und Verfahren zum Abtragen von Ablagerungen an einem Verdampferbrenner | |
ATE487997T1 (de) | Vorrichtung zum vereinzeln von münzen | |
DE602004009749D1 (de) | Vorrichtung zum Stapeln von Signaturen |