DE58907717D1 - Vorrichtung zur gleichzeitigen berührungslosen prüfung einer mehrzahl von stellen eines prüfguts sowie deren verwendung. - Google Patents

Vorrichtung zur gleichzeitigen berührungslosen prüfung einer mehrzahl von stellen eines prüfguts sowie deren verwendung.

Info

Publication number
DE58907717D1
DE58907717D1 DE58907717T DE58907717T DE58907717D1 DE 58907717 D1 DE58907717 D1 DE 58907717D1 DE 58907717 T DE58907717 T DE 58907717T DE 58907717 T DE58907717 T DE 58907717T DE 58907717 D1 DE58907717 D1 DE 58907717D1
Authority
DE
Germany
Prior art keywords
light
casing
channels
pct
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE58907717T
Other languages
English (en)
Inventor
Wilfried Schoeps
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE58907717D1 publication Critical patent/DE58907717D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G01N2021/4742—Details of optical heads therefor, e.g. using optical fibres comprising optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
DE58907717T 1988-10-31 1989-10-30 Vorrichtung zur gleichzeitigen berührungslosen prüfung einer mehrzahl von stellen eines prüfguts sowie deren verwendung. Expired - Fee Related DE58907717D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH405588 1988-10-31
CH405488 1988-10-31
PCT/CH1989/000187 WO1990005297A1 (de) 1988-10-31 1989-10-30 Vorrichtung zur gleichzeitigen berührungslosen prüfung einer mehrzahl von stellen eines prüfguts sowie deren verwendung

Publications (1)

Publication Number Publication Date
DE58907717D1 true DE58907717D1 (de) 1994-06-30

Family

ID=25694533

Family Applications (1)

Application Number Title Priority Date Filing Date
DE58907717T Expired - Fee Related DE58907717D1 (de) 1988-10-31 1989-10-30 Vorrichtung zur gleichzeitigen berührungslosen prüfung einer mehrzahl von stellen eines prüfguts sowie deren verwendung.

Country Status (7)

Country Link
US (1) US5268747A (de)
EP (1) EP0414829B1 (de)
JP (1) JP2741416B2 (de)
AT (1) ATE106143T1 (de)
CA (1) CA2001758A1 (de)
DE (1) DE58907717D1 (de)
WO (1) WO1990005297A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002014846A2 (en) * 2000-08-10 2002-02-21 Kla-Tencor Corporation Multiple beam inspection apparatus and method
US6636301B1 (en) 2000-08-10 2003-10-21 Kla-Tencor Corporation Multiple beam inspection apparatus and method
US6879390B1 (en) 2000-08-10 2005-04-12 Kla-Tencor Technologies Corporation Multiple beam inspection apparatus and method
FR2864338B1 (fr) * 2003-12-23 2006-03-10 Commissariat Energie Atomique Procede et dispositif d'inspection de defauts dans un film mince
FI117834B (fi) * 2004-04-28 2007-03-15 Abb Research Ltd Paperipinnan laadun testaus
JP4707632B2 (ja) * 2005-09-21 2011-06-22 旭化成エンジニアリング株式会社 欠陥検査装置
WO2017144619A1 (en) * 2016-02-26 2017-08-31 Single Technologies Ab Method and device for high throughput imaging

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8429211D0 (en) * 1984-11-19 1984-12-27 Mit Peritronic Ltd Reflectometer
EP0200301A1 (de) * 1985-03-01 1986-11-05 Therma-Wave Inc. Verfahren und Vorrichtung zum Auswerten von Eigenschaften der Oberfläche und des Inneren eines Halbleiters
DE3513475A1 (de) * 1985-04-15 1986-10-16 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Lumineszenztaster
CH669663A5 (de) * 1985-12-17 1989-03-31 Schweiz Eidgenossenschaft Sin
US4910402A (en) * 1987-04-10 1990-03-20 Mcmillan Norman Apparatus and method for measuring a property of a liquid

Also Published As

Publication number Publication date
CA2001758A1 (en) 1990-04-30
EP0414829A1 (de) 1991-03-06
ATE106143T1 (de) 1994-06-15
WO1990005297A1 (de) 1990-05-17
JPH03503571A (ja) 1991-08-08
JP2741416B2 (ja) 1998-04-15
US5268747A (en) 1993-12-07
EP0414829B1 (de) 1994-05-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee