DE59309253D1 - Photoresistmaterial auf Basis von Polystyrolen - Google Patents

Photoresistmaterial auf Basis von Polystyrolen

Info

Publication number
DE59309253D1
DE59309253D1 DE59309253T DE59309253T DE59309253D1 DE 59309253 D1 DE59309253 D1 DE 59309253D1 DE 59309253 T DE59309253 T DE 59309253T DE 59309253 T DE59309253 T DE 59309253T DE 59309253 D1 DE59309253 D1 DE 59309253D1
Authority
DE
Germany
Prior art keywords
polystyrenes
material based
photoresist material
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59309253T
Other languages
English (en)
Inventor
Alfred Dr Steinmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olin Microelectronic Chemicals Inc
Original Assignee
Olin Microelectronic Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olin Microelectronic Chemicals Inc filed Critical Olin Microelectronic Chemicals Inc
Application granted granted Critical
Publication of DE59309253D1 publication Critical patent/DE59309253D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00—Ethers; Compounds having groups, groups or groups
    • C07C43/02—Ethers
    • C07C43/20—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring
    • C07C43/215—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring having unsaturation outside the six-membered aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00—Ethers; Compounds having groups, groups or groups
    • C07C43/02—Ethers
    • C07C43/20—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring
    • C07C43/225—Ethers having an ether-oxygen atom bound to a carbon atom of a six-membered aromatic ring containing halogen
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/96—Esters of carbonic or haloformic acids
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D307/00—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom
    • C07D307/02—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings
    • C07D307/04—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having no double bonds between ring members or between ring members and non-ring members
    • C07D307/18—Heterocyclic compounds containing five-membered rings having one oxygen atom as the only ring hetero atom not condensed with other rings having no double bonds between ring members or between ring members and non-ring members with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
    • C07D307/20—Oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D309/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only ring hetero atom, not condensed with other rings
    • C07D309/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only ring hetero atom, not condensed with other rings having no double bonds between ring members or between ring members and non-ring members
    • C07D309/08—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only ring hetero atom, not condensed with other rings having no double bonds between ring members or between ring members and non-ring members with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
    • C07D309/10—Oxygen atoms
    • C07D309/12—Oxygen atoms only hydrogen atoms and one oxygen atom directly attached to ring carbon atoms, e.g. tetrahydropyranyl ethers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
    • C08F12/02—Monomers containing only one unsaturated aliphatic radical
    • C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
    • C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
    • C08F12/22—Oxygen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
DE59309253T 1992-04-29 1993-04-20 Photoresistmaterial auf Basis von Polystyrolen Expired - Fee Related DE59309253D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH137892 1992-04-29

Publications (1)

Publication Number Publication Date
DE59309253D1 true DE59309253D1 (de) 1999-02-11

Family

ID=4209027

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59309253T Expired - Fee Related DE59309253D1 (de) 1992-04-29 1993-04-20 Photoresistmaterial auf Basis von Polystyrolen

Country Status (6)

Country Link
US (1) US5324804A (de)
EP (1) EP0568496B1 (de)
JP (1) JPH06100488A (de)
KR (1) KR100282622B1 (de)
DE (1) DE59309253D1 (de)
TW (1) TW304235B (de)

Families Citing this family (39)

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DE59306590D1 (de) * 1992-12-04 1997-07-03 Ocg Microelectronic Materials Positiv-Photoresist mit verbesserten Prozesseigenschaften
JP2936956B2 (ja) * 1993-04-15 1999-08-23 信越化学工業株式会社 レジスト材料
KR100233367B1 (ko) * 1993-04-15 1999-12-01 카나가와 치히로 레지스트 재료
EP0709410A3 (de) * 1994-10-26 1997-03-26 Ocg Microelectronic Materials Polymere
KR100293130B1 (ko) * 1995-04-12 2001-09-17 카나가와 치히로 고분자화합물및화학증폭포지티브형레지스트재료
DE19538160A1 (de) 1995-10-13 1997-04-17 Hoechst Ag Formgebilde aus einem thermoplastischen Kunststoffschaum, Verfahren zu seiner Herstellung sowie seine Verwendung
KR0185319B1 (ko) * 1996-09-21 1999-05-15 김흥기 포지티브 포토레지스트 제조용 수지 및 이 수지를 함유하는 화학증폭형 포지티브 포토레지스트 조성물
US5962184A (en) * 1996-12-13 1999-10-05 International Business Machines Corporation Photoresist composition comprising a copolymer of a hydroxystyrene and a (meth)acrylate substituted with an alicyclic ester substituent
TW528932B (en) * 1997-01-24 2003-04-21 Shinetsu Chemical Co Polymers and chemically amplified positive resist compositions
TW530192B (en) * 1997-01-27 2003-05-01 Shinetsu Chemical Co Partially hydrogenated polymer compound and chemically sensitized positive resist material
TW574629B (en) * 1997-02-28 2004-02-01 Shinetsu Chemical Co Polystyrene derivative chemically amplified positive resist compositions, and patterning method
TW546543B (en) * 1997-10-08 2003-08-11 Shinetsu Chemical Co Resist material and patterning process
TW480370B (en) 1997-10-08 2002-03-21 Shinetsu Chemical Co Polystyrene-based polymer compound, chemical amplification positive type resist material and pattern formation
US6207353B1 (en) 1997-12-10 2001-03-27 International Business Machines Corporation Resist formulation which minimizes blistering during etching
KR100321080B1 (ko) 1997-12-29 2002-11-22 주식회사 하이닉스반도체 공중합체수지와이의제조방법및이수지를이용한포토레지스트
KR100252061B1 (ko) * 1998-04-20 2000-06-01 윤종용 포토레지스트용 중합체, 이를 포함하는 포토레지스트 조성물 및이의 제조방법
JP3587743B2 (ja) 1998-08-26 2004-11-10 株式会社ハイニックスセミコンダクター フォトレジスト単量体とその製造方法、フォトレジスト共重合体とその製造方法、フォトレジスト組成物、フォトレジストパターン形成方法、および、半導体素子。
US6569971B2 (en) * 1998-08-27 2003-05-27 Hyundai Electronics Industries Co., Ltd. Polymers for photoresist and photoresist compositions using the same
TW487828B (en) * 1998-10-29 2002-05-21 Shinetsu Chemical Co Positive resist composition
KR20000056355A (ko) * 1999-02-19 2000-09-15 김영환 고농도의 아민 존재하에서 우수한 특성을 갖는 포토레지스트 조성물
JP3299215B2 (ja) 1999-03-12 2002-07-08 松下電器産業株式会社 パターン形成方法
JP3755571B2 (ja) 1999-11-12 2006-03-15 信越化学工業株式会社 化学増幅ポジ型レジスト材料及びパターン形成方法
US6737214B2 (en) 2000-03-09 2004-05-18 Shin-Etsu Chemical Co., Ltd. Chemical amplification resist compositions
JP3712047B2 (ja) 2000-08-14 2005-11-02 信越化学工業株式会社 レジスト材料及びパターン形成方法
EP1204001B1 (de) 2000-11-01 2013-09-11 Shin-Etsu Chemical Co., Ltd. Resistzusammensetzung und Mustererzeugungsverfahren
JP3821217B2 (ja) 2001-10-30 2006-09-13 信越化学工業株式会社 レジスト材料及びパターン形成方法
JP3844069B2 (ja) 2002-07-04 2006-11-08 信越化学工業株式会社 レジスト材料及びパターン形成方法
JP4068006B2 (ja) * 2003-05-07 2008-03-26 信越化学工業株式会社 サーマルフロー工程を用いた微細なコンタクトホール形成方法
JP3981830B2 (ja) * 2003-05-26 2007-09-26 信越化学工業株式会社 レジスト材料及びパターン形成方法
US7586013B2 (en) * 2004-03-26 2009-09-08 E.I. Du Pont De Nemours And Company Method for preparing hydroxystyrenes and acetylated derivatives thereof
DE602004015513D1 (de) * 2004-05-27 2008-09-11 Think Labs Kk Positive lichtempfindliche zusammensetzung
JP4582331B2 (ja) * 2005-11-08 2010-11-17 信越化学工業株式会社 レジスト材料及びパターン形成方法
US7402713B2 (en) * 2006-03-07 2008-07-22 E.I. Du Pont De Nemours And Company Processes for conversion of tyrosine to p-hydroxystyrene and p-acetoxystyrene
US8759465B2 (en) * 2006-04-25 2014-06-24 Purdue Research Foundation Cross-linkable polymeric compositions
JP5183903B2 (ja) 2006-10-13 2013-04-17 信越化学工業株式会社 高分子化合物、レジスト材料及びこれを用いたパターン形成方法
WO2011002994A2 (en) * 2009-07-01 2011-01-06 Bridgestone Corporation Method of making hydroxyaryl-functionalized interpolymer by free radical initiated polymerization
JP5724150B2 (ja) * 2010-11-10 2015-05-27 エルジー・ケム・リミテッド 光学素子および光学素子を含む立体映像表示装置
WO2018087816A1 (ja) * 2016-11-08 2018-05-17 日立化成株式会社 感光性導電フィルム、導電パターンの形成方法及び導電パターン基材の製造方法
JP7226408B2 (ja) * 2020-07-30 2023-02-21 セイコーエプソン株式会社 電気光学装置および電子機器

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
JPS6030687B2 (ja) * 1980-08-30 1985-07-18 丸善石油株式会社 パラヒドロキシスチレン重合体の製法
JPS6030686B2 (ja) * 1980-08-30 1985-07-18 丸善石油株式会社 パラヒドロキシスチレン重合体の製造方法
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
JPS61163913A (ja) * 1985-01-12 1986-07-24 デソト，インコ−ポレ−テツド 光ファイバー用被覆材料
JPH0678409B2 (ja) * 1986-02-04 1994-10-05 松下電器産業株式会社 樹脂組成物の混合方法
JP2521477B2 (ja) * 1987-06-16 1996-08-07 日曹丸善ケミカル株式会社 反応性高分子化合物を含む組成物及びその製造方法
JP2548009B2 (ja) * 1987-06-16 1996-10-30 日曹丸善ケミカル株式会社 反応性高分子化合物の製造方法
JPH0832860B2 (ja) * 1987-06-29 1996-03-29 ニチバン株式会社 電離放射線硬化粘着剤組成物
DE3817012A1 (de) * 1988-05-19 1989-11-30 Basf Ag Positiv und negativ arbeitende strahlungsempfindliche gemische sowie verfahren zur herstellung von reliefmustern
DE3828064A1 (de) * 1988-08-18 1990-03-01 Hoechst Ag Polymerisate aus substituierten (2-haloalkoxy-1,1,2-trifluoraethoxy)-styrolen, verfahren zu ihrer herstellung und ihre verwendung
JP3057508B2 (ja) * 1990-06-21 2000-06-26 日本曹達株式会社 ｐ―アルケニルフェノール系重合体の製造方法
ES2088499T3 (es) * 1990-09-18 1996-08-16 Akzo Nobel Nv Procedimiento de copolimerizacion y copolimero optico producido a partir del mismo.
US5084490A (en) * 1990-12-10 1992-01-28 Loctite (Ireland) Limited Styryloxy compounds and polymers thereof
JP3154529B2 (ja) * 1991-10-14 2001-04-09 鐘淵化学工業株式会社 官能基を有するイソブチレン系重合体及びその製造法

Also Published As

Publication number Publication date
EP0568496B1 (de) 1998-12-30
EP0568496A3 (de) 1994-03-16
US5324804A (en) 1994-06-28
EP0568496A2 (de) 1993-11-03
JPH06100488A (ja) 1994-04-12
KR100282622B1 (ko) 2001-02-15
KR930021588A (ko) 1993-11-22
TW304235B (de) 1997-05-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee