DE59602003D1 - Ultraschallantriebselement - Google Patents

Ultraschallantriebselement

Info

Publication number
DE59602003D1
DE59602003D1 DE59602003T DE59602003T DE59602003D1 DE 59602003 D1 DE59602003 D1 DE 59602003D1 DE 59602003 T DE59602003 T DE 59602003T DE 59602003 T DE59602003 T DE 59602003T DE 59602003 D1 DE59602003 D1 DE 59602003D1
Authority
DE
Germany
Prior art keywords
drive element
ultrasonic drive
ultrasonic
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59602003T
Other languages
English (en)
Inventor
Gert Lindemann
Klaus-Peter Schmoll
Gerhard Keuper
Joerg Wallaschek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE59602003T priority Critical patent/DE59602003D1/de
Application granted granted Critical
Publication of DE59602003D1 publication Critical patent/DE59602003D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section in stacking direction, e.g. polygonal, trapezoidal
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
DE59602003T 1995-02-23 1996-02-23 Ultraschallantriebselement Expired - Fee Related DE59602003D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59602003T DE59602003D1 (de) 1995-02-23 1996-02-23 Ultraschallantriebselement

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19506203 1995-02-23
DE19605214A DE19605214A1 (de) 1995-02-23 1996-02-13 Ultraschallantriebselement
PCT/DE1996/000301 WO1996026551A1 (de) 1995-02-23 1996-02-23 Ultraschallantriebselement
DE59602003T DE59602003D1 (de) 1995-02-23 1996-02-23 Ultraschallantriebselement

Publications (1)

Publication Number Publication Date
DE59602003D1 true DE59602003D1 (de) 1999-07-01

Family

ID=26012709

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19605214A Withdrawn DE19605214A1 (de) 1995-02-23 1996-02-13 Ultraschallantriebselement
DE59602003T Expired - Fee Related DE59602003D1 (de) 1995-02-23 1996-02-23 Ultraschallantriebselement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19605214A Withdrawn DE19605214A1 (de) 1995-02-23 1996-02-13 Ultraschallantriebselement

Country Status (6)

Country Link
US (1) US6066911A (de)
EP (1) EP0811252B1 (de)
JP (1) JPH11500598A (de)
DE (2) DE19605214A1 (de)
ES (1) ES2134591T3 (de)
WO (1) WO1996026551A1 (de)

Families Citing this family (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997036365A1 (en) * 1996-03-26 1997-10-02 Stefan Johansson An actuator motor and a method for fabrication of such an actuator
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
DE19646511C1 (de) * 1996-11-12 1998-05-14 Marco Systemanalyse Entw Piezoaktuatorisches Antriebs- oder Verstellelement
DE19817802B4 (de) * 1996-11-12 2009-08-06 Marco Systemanalyse Und Entwicklung Gmbh Piezoaktuatorisches Antriebs- oder Verstellelement
JP3058143B2 (ja) 1998-02-12 2000-07-04 日本電気株式会社 圧電アクチュエータおよびその製造方法
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
JP4578596B2 (ja) * 1998-09-18 2010-11-10 セイコーインスツル株式会社 振動子、圧電アクチュエータおよびこれらを用いた電子機器
DE19860001C2 (de) * 1998-12-23 2001-10-04 Epcos Ag Piezoelektrisches Bauelement, Verfahren zu dessen Herstellung und Verwendung eines derartigen Bauelements
JP4376342B2 (ja) * 1999-03-02 2009-12-02 セイコーインスツル株式会社 電子時計
JP3348777B2 (ja) * 1999-05-24 2002-11-20 日本電気株式会社 差動型圧電アクチュエータ
US6492760B1 (en) * 1999-06-01 2002-12-10 Minolta Co., Ltd. Actuator
US6713943B1 (en) 1999-06-14 2004-03-30 Minolta Co., Ltd. Actuator and driving method thereof
JP3399415B2 (ja) * 1999-09-27 2003-04-21 株式会社村田製作所 センサアレイ、センサアレイの製造方法および超音波診断装置
JP2001136761A (ja) 1999-11-02 2001-05-18 Minolta Co Ltd アクチュエータ
DE19952946A1 (de) * 1999-11-03 2001-05-17 Siemens Ag Elektromechanischer Motor
FR2806225B1 (fr) * 2000-03-10 2006-12-29 Sagem Moteurs a vibrations
US6690101B2 (en) * 2000-03-23 2004-02-10 Elliptec Resonant Actuator Ag Vibratory motors and methods of making and using same
JP2001320102A (ja) * 2000-05-10 2001-11-16 Hitachi Metals Ltd 圧電アクチュエ−タ
US6337532B1 (en) * 2000-08-11 2002-01-08 Piezomotor Uppsala Ab Fine walking actuator
SE0002884D0 (sv) * 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Switched actuator control
SE0002885D0 (sv) 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Fine walking actuator
US6362557B1 (en) * 2000-08-28 2002-03-26 International Business Machines Corporation Ultrasonic method and actuator for inducing motion of an object
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6936951B1 (en) * 2000-11-27 2005-08-30 Grq Instruments, Inc. Smart sonic bearings and method for frictional force reduction and switching
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
US6864620B2 (en) * 2000-12-22 2005-03-08 Ngk Insulators, Ltd. Matrix type actuator
ES2232407T3 (es) 2000-12-28 2005-06-01 F. Hoffmann-La Roche Ag Metodo para el procesado de una muestra de acido nucleico mediante la oscilacion de un segmento de una pared de un cartucho, un sistema y un cartucho para realizar dicho metodo.
US6437487B1 (en) * 2001-02-28 2002-08-20 Acuson Corporation Transducer array using multi-layered elements and a method of manufacture thereof
US6429574B1 (en) * 2001-02-28 2002-08-06 Acuson Corporation Transducer array using multi-layered elements having an even number of elements and a method of manufacture thereof
US6664717B1 (en) * 2001-02-28 2003-12-16 Acuson Corporation Multi-dimensional transducer array and method with air separation
US20050127789A1 (en) * 2001-03-08 2005-06-16 Magnussen Bjoern B. Piezoelectric motors and methods for the production and operation thereof
US6388364B1 (en) * 2001-03-15 2002-05-14 Optovation (Canada) Corp. Piezoelectric rotator
DE10148267B4 (de) * 2001-06-08 2005-11-24 Physik Instrumente (Pi) Gmbh & Co. Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
GB2378573B (en) * 2001-06-20 2003-09-10 Polatis Ltd A piezoelectric actuator
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
JP3729103B2 (ja) * 2001-08-28 2005-12-21 株式会社村田製作所 圧電装置、ラダー型フィルタ及び圧電装置の製造方法
DE10146703A1 (de) * 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotor mit Führung
WO2003038495A2 (de) * 2001-10-22 2003-05-08 Siemens Aktiengesellschaft Verschiebevorrichtung für eine mehrzahl von objekten, verfahren zur herstellung der verschiebevorrichtung und vorrichtung zum spleissen einer mehrzahl von lichtwellenleitern
JP3445262B2 (ja) * 2001-11-22 2003-09-08 松下電器産業株式会社 圧電体の製造方法、圧電体、超音波探触子、超音波診断装置および非破壊検査装置
CA2472104C (en) * 2002-02-06 2008-12-30 Elliptec Resonant Actuator Aktiengesellschaft Piezoelectric motor control
US7368853B2 (en) * 2002-04-22 2008-05-06 Elliptec Resonant Actuator Aktiengesellschaft Piezoelectric motors and methods for the production and operation thereof
US6798117B2 (en) * 2002-07-10 2004-09-28 Piezomotor Uppsala Ab Fine control of electromechanical motors
DE10301818A1 (de) * 2003-01-20 2004-07-29 Carl Zeiss Smt Ag Piezo-Linearantrieb mit einer Gruppe von Piezostapelaktuatoren
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
JP2004356206A (ja) * 2003-05-27 2004-12-16 Fuji Photo Film Co Ltd 積層構造体及びその製造方法
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
KR20060126700A (ko) 2003-12-24 2006-12-08 캐스케이드 마이크로테크 인코포레이티드 능동 웨이퍼 프로브
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
JP4982031B2 (ja) * 2004-01-16 2012-07-25 株式会社日立製作所 コンテンツ送信装置、コンテンツ受信装置およびコンテンツ送信方法、コンテンツ受信方法
US7067958B2 (en) * 2004-02-17 2006-06-27 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US8084116B2 (en) 2005-09-30 2011-12-27 Alcatel Lucent Surfaces physically transformable by environmental changes
JP2007104808A (ja) * 2005-10-05 2007-04-19 Konica Minolta Opto Inc 駆動装置
KR101353273B1 (ko) * 2005-10-28 2014-01-22 피시비 모터 에이피에스 전자-기계적 파동 장치
JP2007185056A (ja) * 2006-01-10 2007-07-19 Sony Corp 弾性振動体の励振方法および振動型駆動装置
JP4610544B2 (ja) * 2006-01-13 2011-01-12 太陽誘電株式会社 圧電駆動装置
US7420321B2 (en) * 2006-03-03 2008-09-02 Piezomotor Uppsala Ab Heat efficient micromotor
JP4640649B2 (ja) * 2006-03-17 2011-03-02 セイコーエプソン株式会社 液滴吐出ヘッド、画像形成装置、および成膜装置
US7998431B2 (en) * 2006-04-10 2011-08-16 Alcatel Lucent Environmentally sensitive nanostructured surfaces
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7355325B2 (en) 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
US7764004B2 (en) * 2006-08-15 2010-07-27 Alcatel-Lucent Usa Inc. Large area induced assembly of nanostructures
DE102006039821A1 (de) 2006-08-25 2008-03-13 Carl Zeiss Smt Ag Optisches System, insbesondere ein Projektionsobjektiv oder ein Beleuchtungssystem
JP2008067539A (ja) * 2006-09-08 2008-03-21 Konica Minolta Opto Inc 超音波アクチュエータ、及びその振動体の製造方法
US7884530B2 (en) * 2006-09-14 2011-02-08 Alcatel-Lucent Usa Inc. Reversible actuation in arrays of nanostructures
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
DE102007037991B4 (de) 2007-08-10 2019-10-10 Thorlabs Elliptec Gmbh Verfahren zur Steuerung eines piezoelektrischen Antriebs und piezoelektrischer Antrieb
US8217553B2 (en) * 2008-08-18 2012-07-10 New Scale Technologies Reduced-voltage, linear motor systems and methods thereof
US8680749B2 (en) * 2008-09-03 2014-03-25 National Institute Of Aerospace Associates Piezoelectric multilayer-stacked hybrid actuation/transduction system
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
DE102009017637A1 (de) 2009-04-16 2010-10-28 Physik Instrumente (Pi) Gmbh & Co. Kg Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes
JP2012029478A (ja) * 2010-07-23 2012-02-09 Olympus Corp 振動体及び超音波モータ
DE112010005916B4 (de) 2010-09-29 2023-02-09 Piezomotor Uppsala Aktiebolag Elektromechanischer Aktuator
WO2012087193A1 (en) 2010-12-20 2012-06-28 Piezomotor Uppsala Ab Electromechanical motor
WO2012097868A1 (en) 2011-01-18 2012-07-26 Piezomotor Uppsala Ab Operation of electromechanical actuator devices
JP2012178947A (ja) * 2011-02-28 2012-09-13 Ngk Insulators Ltd 圧電アクチュエータ及び圧電アクチュエータアレイ
JP2012182951A (ja) * 2011-03-02 2012-09-20 Ngk Insulators Ltd 圧電アクチュエータ及び圧電アクチュエータアレイ
RU2616225C1 (ru) * 2015-12-07 2017-04-13 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") Самочувствительный многослойный пьезоэлектрический актюатор
JP2017184297A (ja) * 2016-03-28 2017-10-05 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ
US11635235B2 (en) 2018-03-23 2023-04-25 The Regents Of The University Of California Electrostatically actuated device
JP7205162B2 (ja) * 2018-10-30 2023-01-17 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
CN111969888B (zh) * 2020-08-07 2022-05-31 深圳市汇顶科技股份有限公司 压电电机和芯片的防抖装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4613782A (en) * 1984-03-23 1986-09-23 Hitachi, Ltd. Actuator
DE3412014C1 (de) * 1984-03-31 1985-10-17 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Piezokeramischer Stellantrieb zur Erzeugung von Translationsbewegungen
JPS62272575A (ja) * 1986-05-20 1987-11-26 Matsushita Electric Works Ltd 圧電アクチユエ−タ
JPS63316675A (ja) * 1987-06-19 1988-12-23 Mitsubishi Electric Corp 圧電リニアモ−タ
JPS63316676A (ja) * 1987-06-19 1988-12-23 Mitsubishi Electric Corp 圧電リニアモ−タ
JPS6429784A (en) * 1987-07-24 1989-01-31 Fujitsu Ltd Testing method for defect of magnetic disk medium
JP2723933B2 (ja) * 1987-11-12 1998-03-09 株式会社日立製作所 スクロール形流体機械
JPH022382A (ja) * 1988-02-26 1990-01-08 Oji Paper Co Ltd トロパン系アルカロイドの製造方法
JPH022381A (ja) * 1988-03-30 1990-01-08 Kanegafuchi Chem Ind Co Ltd リン脂質の製造方法
US5027028A (en) * 1989-08-29 1991-06-25 Skipper John D Piezoelectric motor
EP0424609A1 (de) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelektrischer Antrieb
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
CA2081094A1 (en) * 1992-02-18 1993-08-19 Gordon Walter Culp Walking toothed actuator
DE69315767T2 (de) * 1992-08-25 1998-05-07 Canon Kk Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor
JPH0741207B2 (ja) * 1993-02-18 1995-05-10 インターナショナル・ビジネス・マシーンズ・コーポレイション マイクロアクチュエータ
US5814919A (en) * 1995-04-28 1998-09-29 Canon Kabushiki Kaisha Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element

Also Published As

Publication number Publication date
ES2134591T3 (es) 1999-10-01
WO1996026551A1 (de) 1996-08-29
EP0811252A1 (de) 1997-12-10
US6066911A (en) 2000-05-23
EP0811252B1 (de) 1999-05-26
JPH11500598A (ja) 1999-01-12
DE19605214A1 (de) 1996-08-29

Similar Documents

Publication Publication Date Title
DE59602003D1 (de) Ultraschallantriebselement
DE69623827T2 (de) Antriebseinheit
DE69516055D1 (de) Ultraschallumwandler
DE69517232D1 (de) Ultraschallmotor
DE59509512D1 (de) Antriebseinheit
DE59509388D1 (de) Ultraschallwandler
DE59601195D1 (de) Ultraschallwandler
BR9606047A (pt) Dispositivo de acionamento
DE69603660D1 (de) Ultraschallmotor
KR960014717A (ko) 구동장치
DE69604281D1 (de) Linearer antrieb
DE59602646D1 (de) Antriebsvorrichtung
DE69830139D1 (de) Ultraschall lockenwickelgerät
FI970986A (fi) Ultraäänimuunnin
DE69308770D1 (de) Ultraschallantrieb
BR9608737A (pt) Dispositivo de acionamento
DE59505696D1 (de) Ultraschallmotor
DE69316315D1 (de) Ultraschalantrieb
DE59601022D1 (de) Antriebseinrichtung
DE69617416T2 (de) Antriebsvorrichtung
DE69613851D1 (de) Antriebsvorrichtung
DE29504620U1 (de) Antriebseinrichtung
DE29513664U1 (de) Antriebsverbindung
FR2730375B1 (fr) Transducteur ultrasonore
DE29503347U1 (de) Antriebsvorrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee