DE60007999D1 - Elektrischer kontaktor, insbesondere ein waferkontaktor, unter verwendung des druckes von flüssigkeiten oder gasen - Google Patents

Elektrischer kontaktor, insbesondere ein waferkontaktor, unter verwendung des druckes von flüssigkeiten oder gasen

Info

Publication number
DE60007999D1
DE60007999D1 DE60007999T DE60007999T DE60007999D1 DE 60007999 D1 DE60007999 D1 DE 60007999D1 DE 60007999 T DE60007999 T DE 60007999T DE 60007999 T DE60007999 T DE 60007999T DE 60007999 D1 DE60007999 D1 DE 60007999D1
Authority
DE
Germany
Prior art keywords
contactor
liquids
gases
pressure
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60007999T
Other languages
English (en)
Other versions
DE60007999T2 (de
Inventor
Benjamin Eldridge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FormFactor Inc filed Critical FormFactor Inc
Application granted granted Critical
Publication of DE60007999D1 publication Critical patent/DE60007999D1/de
Publication of DE60007999T2 publication Critical patent/DE60007999T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316—Testing of analog circuits
DE60007999T 1999-08-17 2000-08-10 Elektrischer kontaktor, insbesondere ein waferkontaktor, unter verwendung des druckes von flüssigkeiten oder gasen Expired - Lifetime DE60007999T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US376759 1999-08-17
US09/376,759 US6468098B1 (en) 1999-08-17 1999-08-17 Electrical contactor especially wafer level contactor using fluid pressure
PCT/US2000/022146 WO2001013130A1 (en) 1999-08-17 2000-08-10 Electrical contactor, especially wafer level contactor, using fluid pressure

Publications (2)

Publication Number Publication Date
DE60007999D1 true DE60007999D1 (de) 2004-03-04
DE60007999T2 DE60007999T2 (de) 2004-12-16

Family

ID=23486361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60007999T Expired - Lifetime DE60007999T2 (de) 1999-08-17 2000-08-10 Elektrischer kontaktor, insbesondere ein waferkontaktor, unter verwendung des druckes von flüssigkeiten oder gasen

Country Status (8)

Country Link
US (5) US6468098B1 (de)
EP (2) EP1204872B1 (de)
JP (2) JP2003507882A (de)
KR (3) KR20070087695A (de)
AU (1) AU6903300A (de)
DE (1) DE60007999T2 (de)
TW (1) TW460918B (de)
WO (1) WO2001013130A1 (de)

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US20020197895A1 (en) 2002-12-26
US20090072848A1 (en) 2009-03-19
TW460918B (en) 2001-10-21
US20100297863A1 (en) 2010-11-25
US20070287304A1 (en) 2007-12-13
KR100776469B1 (ko) 2007-11-16
US6468098B1 (en) 2002-10-22
US7722371B2 (en) 2010-05-25
DE60007999T2 (de) 2004-12-16
EP1418436A3 (de) 2005-07-06
US7967621B2 (en) 2011-06-28
US7455540B2 (en) 2008-11-25
JP2011091412A (ja) 2011-05-06
EP1418436A2 (de) 2004-05-12
KR20020027552A (ko) 2002-04-13
KR20070002105A (ko) 2007-01-04
US7195503B2 (en) 2007-03-27
KR100915927B1 (ko) 2009-09-07
EP1204872A1 (de) 2002-05-15
WO2001013130A1 (en) 2001-02-22
EP1204872B1 (de) 2004-01-28
AU6903300A (en) 2001-03-13

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