DE60019219D1 - Verfahren zur kalibrierung eines scan-systems - Google Patents
Verfahren zur kalibrierung eines scan-systemsInfo
- Publication number
- DE60019219D1 DE60019219D1 DE60019219T DE60019219T DE60019219D1 DE 60019219 D1 DE60019219 D1 DE 60019219D1 DE 60019219 T DE60019219 T DE 60019219T DE 60019219 T DE60019219 T DE 60019219T DE 60019219 D1 DE60019219 D1 DE 60019219D1
- Authority
- DE
- Germany
- Prior art keywords
- calibrating
- scan system
- scan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9907868.5A GB9907868D0 (en) | 1999-04-08 | 1999-04-08 | Method of calibrating a scanning system |
GB9907868 | 1999-04-08 | ||
PCT/GB2000/001315 WO2000062015A1 (en) | 1999-04-08 | 2000-04-07 | Method of calibrating a scanning system |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60019219D1 true DE60019219D1 (de) | 2005-05-12 |
DE60019219T2 DE60019219T2 (de) | 2005-09-22 |
Family
ID=10851041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60019219T Expired - Lifetime DE60019219T2 (de) | 1999-04-08 | 2000-04-07 | Verfahren zur kalibrierung eines scan-systems |
Country Status (6)
Country | Link |
---|---|
US (2) | US6434846B1 (de) |
EP (1) | EP1086356B1 (de) |
JP (1) | JP5042409B2 (de) |
DE (1) | DE60019219T2 (de) |
GB (1) | GB9907868D0 (de) |
WO (1) | WO2000062015A1 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9907868D0 (en) * | 1999-04-08 | 1999-06-02 | Renishaw Plc | Method of calibrating a scanning system |
US6810597B2 (en) * | 1999-04-08 | 2004-11-02 | Renishaw Plc | Use of surface measuring probes |
JP4660779B2 (ja) * | 2000-08-18 | 2011-03-30 | 学校法人 中央大学 | 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法 |
GB0106245D0 (en) * | 2001-03-14 | 2001-05-02 | Renishaw Plc | Calibration of an analogue probe |
GB0126232D0 (en) * | 2001-11-01 | 2002-01-02 | Renishaw Plc | Calibration of an analogue probe |
DE10207228A1 (de) * | 2002-02-21 | 2003-09-04 | Bosch Gmbh Robert | Verfahren zur Kalibrierung eines Sensors und Schaltungsanordnung zum Betreiben eines Sensors |
GB0205332D0 (en) * | 2002-03-06 | 2002-04-17 | Renishaw Plc | Dynamic artefact comparison |
GB0215478D0 (en) * | 2002-07-04 | 2002-08-14 | Renishaw Plc | Method of scanning a calibrating system |
US6895682B2 (en) * | 2002-11-08 | 2005-05-24 | North Carolina State University | Polar coordinate-based profilometer and methods |
GB0228371D0 (en) * | 2002-12-05 | 2003-01-08 | Leland E C E | Workpiece inspection method |
US6721675B1 (en) * | 2003-01-31 | 2004-04-13 | The Boeing Company | Machine capability verification and diagnostics (CAP/DIA) system, method and computer program product |
DE10327867A1 (de) * | 2003-05-28 | 2004-12-16 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zur Kalibrierung eines Tasters |
EP1627203B1 (de) * | 2003-05-28 | 2014-11-26 | Carl Zeiss Industrielle Messtechnik GmbH | Verfahren zur kalibrierung eines tasters |
GB0322115D0 (en) * | 2003-09-22 | 2003-10-22 | Renishaw Plc | Method of error compensation |
US6948254B2 (en) * | 2003-10-27 | 2005-09-27 | Micronic Laser Systems Ab | Method for calibration of a metrology stage |
US7543393B2 (en) | 2003-12-16 | 2009-06-09 | Renishaw Plc | Method of calibrating a scanning system |
GB0329098D0 (en) | 2003-12-16 | 2004-01-21 | Renishaw Plc | Method of calibrating a scanning system |
GB0417536D0 (en) * | 2004-08-06 | 2004-09-08 | Renishaw Plc | The use of surface measurement probes |
DE102006019382A1 (de) * | 2006-04-24 | 2007-10-25 | Carl Zeiss Industrielle Messtechnik Gmbh | Scanning einer Oberfläche mit einem Koordinatenmessgerät |
GB0608235D0 (en) * | 2006-04-26 | 2006-06-07 | Renishaw Plc | Differential calibration |
GB0611109D0 (en) * | 2006-06-06 | 2006-07-19 | Renishaw Plc | A method for measuring workpieces |
US7735234B2 (en) * | 2006-08-31 | 2010-06-15 | Faro Technologies, Inc. | Smart probe |
GB0703423D0 (en) * | 2007-02-22 | 2007-04-04 | Renishaw Plc | Calibration method and apparatus |
GB0707720D0 (en) * | 2007-04-23 | 2007-05-30 | Renishaw Plc | Apparatus and method for controlling or programming a measurement routine |
GB0707921D0 (en) | 2007-04-24 | 2007-05-30 | Renishaw Plc | Apparatus and method for surface measurement |
GB0716218D0 (en) | 2007-08-20 | 2007-09-26 | Renishaw Plc | Measurement path generation |
US7712224B2 (en) * | 2007-10-03 | 2010-05-11 | Hexagon Metrology Ab | Validating the error map of CMM using calibrated probe |
JP4653824B2 (ja) * | 2008-07-29 | 2011-03-16 | ファナック株式会社 | 機上計測装置にて計測対象物の形状を計測する工作機械システム |
DE102008049751A1 (de) * | 2008-10-01 | 2010-04-08 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren zum Vermessen eines Werkstücks, Kalibrierverfahren sowie Koordinatenmessgerät |
US9689655B2 (en) | 2008-10-29 | 2017-06-27 | Renishaw Plc | Measurement method |
GB0901040D0 (en) * | 2009-01-22 | 2009-03-11 | Renishaw Plc | Optical measuring method and system |
GB201003599D0 (en) * | 2010-03-04 | 2010-04-21 | Renishaw Plc | Measurement method and apparatus |
EP2492635B1 (de) * | 2011-02-22 | 2013-05-29 | Siemens Aktiengesellschaft | Kalibrierverfahren für einen kugelförmigen Messtaster |
GB201113715D0 (en) | 2011-08-09 | 2011-09-21 | Renishaw Plc | Method and apparatus for inspecting workpieces |
CN103175489A (zh) * | 2011-12-21 | 2013-06-26 | 鸿富锦精密工业(深圳)有限公司 | 探针回弹方向确定系统及方法 |
GB201204947D0 (en) * | 2012-03-21 | 2012-05-02 | Renishaw Plc | Method and apparatus for inspecting workpieces |
JP2014130091A (ja) * | 2012-12-28 | 2014-07-10 | Canon Inc | 測定装置および測定方法 |
US10955238B1 (en) * | 2013-03-15 | 2021-03-23 | Kerr Machine Co. | In-process automatic recalibration |
GB201308467D0 (en) | 2013-05-10 | 2013-06-19 | Renishaw Plc | Method and Apparatus for Inspecting Workpieces |
GB201311600D0 (en) * | 2013-06-28 | 2013-08-14 | Renishaw Plc | Calibration of a contact probe |
EP3051253B1 (de) * | 2015-02-02 | 2018-08-22 | Rolls-Royce North American Technologies, Inc. | Mehrachsiger kalibrierungskörper |
JP6484108B2 (ja) * | 2015-05-22 | 2019-03-13 | 株式会社ミツトヨ | 形状測定装置の制御方法 |
CN109964098B (zh) | 2016-11-16 | 2022-10-14 | 瑞尼斯豪公司 | 坐标定位设备以及操作方法 |
CN113188493B (zh) * | 2021-03-31 | 2022-04-08 | 成都飞机工业(集团)有限责任公司 | 一种确定在线测量点位的测量轨迹的方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3986007A (en) * | 1975-08-20 | 1976-10-12 | The Bendix Corporation | Method and apparatus for calibrating mechanical-visual part manipulating system |
US4523450A (en) * | 1981-11-07 | 1985-06-18 | Carl-Zeiss-Stiftung, Heidenheim/Brenz | Method of calibrating probe pins on multicoordinate measurement machines |
GB8713715D0 (en) | 1987-06-11 | 1987-07-15 | Renishaw Plc | Workpiece inspection method |
US4939678A (en) * | 1987-11-19 | 1990-07-03 | Brown & Sharpe Manufacturing Company | Method for calibration of coordinate measuring machine |
DE69211210T2 (de) * | 1991-04-12 | 1996-10-10 | Renishaw Transducer Syst | Kalibriervorrichtung für Maschine |
GB9224335D0 (en) * | 1992-11-20 | 1993-01-13 | Renishaw Metrology Ltd | A method of measuring workpieces using a surface contacting measuring probe |
DE4326551C2 (de) * | 1993-08-07 | 1997-04-17 | Heidenhain Gmbh Dr Johannes | Kalibrier-Verfahren zum Ermitteln und Kompensieren unterschiedlicher Antastkraft-Verhältnisse bei Mehrkoordinaten-Tastsystemen |
DE4436507A1 (de) | 1994-10-13 | 1996-04-18 | Zeiss Carl Fa | Verfahren zur Koordinatenmessung an Werkstücken |
US6161079A (en) * | 1997-08-18 | 2000-12-12 | Giddings & Lewis, Llc | Method and apparatus for determining tolerance and nominal measurement values for a coordinate measuring machine |
GB9907868D0 (en) * | 1999-04-08 | 1999-06-02 | Renishaw Plc | Method of calibrating a scanning system |
-
1999
- 1999-04-08 GB GBGB9907868.5A patent/GB9907868D0/en not_active Ceased
-
2000
- 2000-04-07 DE DE60019219T patent/DE60019219T2/de not_active Expired - Lifetime
- 2000-04-07 WO PCT/GB2000/001315 patent/WO2000062015A1/en active IP Right Grant
- 2000-04-07 JP JP2000611030A patent/JP5042409B2/ja not_active Expired - Lifetime
- 2000-04-07 US US09/701,735 patent/US6434846B1/en not_active Expired - Fee Related
- 2000-04-07 EP EP00919028A patent/EP1086356B1/de not_active Expired - Lifetime
-
2002
- 2002-07-10 US US10/191,460 patent/US6601311B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1086356B1 (de) | 2005-04-06 |
US20020174555A1 (en) | 2002-11-28 |
DE60019219T2 (de) | 2005-09-22 |
EP1086356A1 (de) | 2001-03-28 |
JP2002541469A (ja) | 2002-12-03 |
US6601311B2 (en) | 2003-08-05 |
JP5042409B2 (ja) | 2012-10-03 |
WO2000062015A1 (en) | 2000-10-19 |
GB9907868D0 (en) | 1999-06-02 |
US6434846B1 (en) | 2002-08-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |